JPS62134037U - - Google Patents
Info
- Publication number
- JPS62134037U JPS62134037U JP2268686U JP2268686U JPS62134037U JP S62134037 U JPS62134037 U JP S62134037U JP 2268686 U JP2268686 U JP 2268686U JP 2268686 U JP2268686 U JP 2268686U JP S62134037 U JPS62134037 U JP S62134037U
- Authority
- JP
- Japan
- Prior art keywords
- vibration sensor
- sensor according
- laminated piezoelectric
- thin plate
- fixed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000919 ceramic Substances 0.000 claims description 6
- 239000002184 metal Substances 0.000 claims description 6
- 238000005452 bending Methods 0.000 claims 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
Description
第１図ａ〜ｄは、それぞれ本考案の振動センサ
に用いる積層圧電素子の各種積層構造を示す厚さ
方向模式断面図；第２図ａおよびｂならびに第３
図ａおよびｂは本考案の実施例にかかる振動セン
サの側面図および平面図；第４図および第７図は
それぞれ本考案の振動センサの他の実施例を示す
平面図；第５図および第８図はそれぞれ本考案の
他の実施例を示す断面図；第６図は連結部を有す
る積層圧電素子の一例の平面図である。
１……圧電素子（１ａ……圧電性セラミツク薄
板）、２，２ａ……金属薄板、３……電極膜、４
ａ，４ｂ……リード線、５……固定治具、６……
押え具、１０……積層圧電素子（１０１，１０２
，１０３，１０４……自由振動端）。
FIGS. 1 a to d are schematic cross-sectional views in the thickness direction showing various laminated structures of laminated piezoelectric elements used in the vibration sensor of the present invention; FIGS. 2 a and b, and 3
Figures a and b are a side view and a plan view of a vibration sensor according to an embodiment of the present invention; Figures 4 and 7 are plan views showing other embodiments of the vibration sensor of the present invention; Figures 5 and 7 are respectively 8 is a sectional view showing another embodiment of the present invention; FIG. 6 is a plan view of an example of a laminated piezoelectric element having a connecting portion. 1... Piezoelectric element (1a... Piezoelectric ceramic thin plate), 2, 2a... Metal thin plate, 3... Electrode film, 4
a, 4b... Lead wire, 5... Fixing jig, 6...
Holder, 10... laminated piezoelectric element (101, 102
, 103, 104...free vibration end).
Claims (1)
ぼ全面に曲げ弾性を有する金属薄板を貼付し且つ
前記圧電性セラミツク薄板の両面からの電気出力
を取出可能とした積層圧電素子の延長方向の少な
くとも１個所を固定し、異なる長さの複数の自由
振動端を形成してなることを特徴とする振動セン
サ。 ２ 前記積層圧電素子の延長方向の中間部の少な
くとも１個所を固定し、固定部の両側に自由振動
端を形成してなる実用新案登録請求の範囲第１項
に記載の振動センサ。 ３ 前記固定部の両側の自由振動端長さが異なる
実用新案登録請求の範囲第２項に記載の振動セン
サ。 ４ 複数の積層圧電素子を並列して治具に固定し
てなる実用新案登録請求の範囲第１〜３項に記載
の振動センサ。 ５ 前記複数の積層圧電素子をほぼ同一面上で並
列して固定してなる実用新案登録請求の範囲第４
項に記載の振動センサ。 ６ 前記複数の積層圧電素子を互いの面がほぼ平
行となるように並列して固定してなる実用新案登
録請求の範囲第４項に記載の振動センサ。 ７ 前記複数の積層圧電素子の長さが異なる実用
新案登録請求の範囲第４〜６項のいずれかに記載
の振動センサ。 ８ 前記複数の積層圧電素子の厚さが異なる実用
新案登録請求の範囲第４〜７項のいずれかに記載
の振動センサ。 ９ 複数の積層圧電素子において、金属薄板の厚
さが異なる実用新案登録請求の範囲第８項に記載
の振動センサ。 １０ 前記積層圧電素子が概ね短冊形状を有する
実用新案登録請求の範囲第１〜９項のいずれかに
記載の振動センサ。 １１ 前記積層圧電素子が概ね三角形をなす実用
新案登録請求の範囲第１〜９項のいずれかに記載
の振動センサ。 １２ 積層圧電素子が圧電性セラミツク薄板の一
面に金属薄板を貼付し、その逆側の面に電極膜を
設けてなる実用新案登録請求の範囲第１〜１１項
のいずれかに記載の振動センサ。 １３ 積層圧電素子が圧電性セラミツク薄板の両
面に金属薄板を貼付してなる実用新案登録請求の
範囲第１〜１１項のいずれかに記載の振動センサ
。 １４ 金属薄板が電極膜を介して、圧電性セラミ
ツク薄板上に設けられてなる実用新案登録請求の
範囲第１〜１３項のいずれかに記載の振動センサ
。[Claims for Utility Model Registration] 1. A laminated piezoelectric element in which a metal thin plate having bending elasticity is attached to almost the entire surface of at least one side of a piezoelectric ceramic thin plate, and electrical output can be extracted from both sides of the piezoelectric ceramic thin plate. A vibration sensor characterized in that at least one point in the extension direction is fixed, and a plurality of free vibration ends having different lengths are formed. 2. The vibration sensor according to claim 1, wherein at least one intermediate portion of the laminated piezoelectric element in the extending direction is fixed, and free vibration ends are formed on both sides of the fixed portion. 3. The vibration sensor according to claim 2, wherein the free vibration end lengths on both sides of the fixed part are different. 4. The vibration sensor according to claims 1 to 3, which is a utility model registration, in which a plurality of laminated piezoelectric elements are arranged in parallel and fixed to a jig. 5 Utility model registration claim 4, in which the plurality of laminated piezoelectric elements are fixed in parallel on substantially the same plane.
Vibration sensor described in section. 6. The vibration sensor according to claim 4, wherein the plurality of laminated piezoelectric elements are fixed in parallel so that their surfaces are substantially parallel to each other. 7. The vibration sensor according to any one of claims 4 to 6, wherein the plurality of laminated piezoelectric elements have different lengths. 8. The vibration sensor according to any one of claims 4 to 7, wherein the plurality of laminated piezoelectric elements have different thicknesses. 9. The vibration sensor according to claim 8, wherein the plurality of laminated piezoelectric elements have different thicknesses of thin metal plates. 10. The vibration sensor according to any one of claims 1 to 9, wherein the laminated piezoelectric element has a generally rectangular shape. 11. The vibration sensor according to any one of claims 1 to 9, wherein the laminated piezoelectric element has a substantially triangular shape. 12. The vibration sensor according to any one of claims 1 to 11, wherein the laminated piezoelectric element is formed by pasting a metal thin plate on one side of a piezoelectric ceramic thin plate and providing an electrode film on the opposite side. 13. The vibration sensor according to any one of claims 1 to 11, in which the laminated piezoelectric element is formed by pasting metal thin plates on both sides of a piezoelectric ceramic thin plate. 14. The vibration sensor according to any one of claims 1 to 13, wherein a metal thin plate is provided on a piezoelectric ceramic thin plate via an electrode film.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2268686U JPS62134037U (en) | 1986-02-19 | 1986-02-19 | |
| EP19870301006 EP0233057A2 (en) | 1986-02-06 | 1987-02-05 | Vibration sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2268686U JPS62134037U (en) | 1986-02-19 | 1986-02-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62134037U true JPS62134037U (en) | 1987-08-24 |
Family
ID=30820304
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2268686U Pending JPS62134037U (en) | 1986-02-06 | 1986-02-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62134037U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2014123144A1 (en) * | 2013-02-06 | 2014-08-14 | 日本電気株式会社 | Vibration detection device |
-
1986
- 1986-02-19 JP JP2268686U patent/JPS62134037U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2014123144A1 (en) * | 2013-02-06 | 2014-08-14 | 日本電気株式会社 | Vibration detection device |
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