JPS62108843U - - Google Patents
Info
- Publication number
- JPS62108843U JPS62108843U JP19940785U JP19940785U JPS62108843U JP S62108843 U JPS62108843 U JP S62108843U JP 19940785 U JP19940785 U JP 19940785U JP 19940785 U JP19940785 U JP 19940785U JP S62108843 U JPS62108843 U JP S62108843U
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- value
- leak
- target value
- pressure vessel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims description 2
- 238000005259 measurement Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Examining Or Testing Airtightness (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19940785U JPS62108843U (de) | 1985-12-27 | 1985-12-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19940785U JPS62108843U (de) | 1985-12-27 | 1985-12-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62108843U true JPS62108843U (de) | 1987-07-11 |
Family
ID=31161002
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19940785U Pending JPS62108843U (de) | 1985-12-27 | 1985-12-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62108843U (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10679874B2 (en) | 2017-08-30 | 2020-06-09 | SCREEN Holdings Co., Ltd. | Light irradiation type heat treatment apparatus and heat treatment method |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5149991U (de) * | 1974-10-12 | 1976-04-15 | ||
| JPS51129284A (en) * | 1975-04-18 | 1976-11-10 | Lyssy Georges H | Method of and device for measuring permeability of gas to wall of threeedimensional vessel and*or closed body |
| JPS54140585A (en) * | 1978-04-24 | 1979-10-31 | Diesel Kiki Co | Fluid circuit leakage detector |
-
1985
- 1985-12-27 JP JP19940785U patent/JPS62108843U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5149991U (de) * | 1974-10-12 | 1976-04-15 | ||
| JPS51129284A (en) * | 1975-04-18 | 1976-11-10 | Lyssy Georges H | Method of and device for measuring permeability of gas to wall of threeedimensional vessel and*or closed body |
| JPS54140585A (en) * | 1978-04-24 | 1979-10-31 | Diesel Kiki Co | Fluid circuit leakage detector |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10679874B2 (en) | 2017-08-30 | 2020-06-09 | SCREEN Holdings Co., Ltd. | Light irradiation type heat treatment apparatus and heat treatment method |
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