JPS62108133A - Moisture sensor - Google Patents
Moisture sensorInfo
- Publication number
- JPS62108133A JPS62108133A JP24726285A JP24726285A JPS62108133A JP S62108133 A JPS62108133 A JP S62108133A JP 24726285 A JP24726285 A JP 24726285A JP 24726285 A JP24726285 A JP 24726285A JP S62108133 A JPS62108133 A JP S62108133A
- Authority
- JP
- Japan
- Prior art keywords
- wavelength
- moisture
- band
- pass filter
- humidity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/75—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated
- G01N21/77—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator
- G01N21/78—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator producing a change of colour
- G01N21/81—Indicating humidity
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Plasma & Fusion (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
Description
【発明の詳細な説明】
〔概 要〕
湿度センサであって、光学多層膜のバンドパスフィルタ
が湿度により波長シフトをおこして損失変化を生ずるの
を利用し、簡易な構成で湿度の測定を可能とする。[Detailed Description of the Invention] [Summary] This is a humidity sensor that can measure humidity with a simple configuration by utilizing the fact that a bandpass filter of an optical multilayer film causes a wavelength shift due to humidity and changes in loss. shall be.
本発明は、光学多層膜のバンドパスフィルタを利用した
湿度センサに関するものである。The present invention relates to a humidity sensor using an optical multilayer film bandpass filter.
従来、空気中の湿度を測定する計器としては、乾湿計、
露点計、毛髪湿度計などが用いられている。Traditionally, the instruments used to measure the humidity in the air are psychrometers,
Dew point meters, hair hygrometers, etc. are used.
これらの湿度計では大きさ及び精度の点で問題があり、
また１００℃以上の高温の環境中での湿度を測定するこ
とが困難であった。These hygrometers have problems in terms of size and accuracy.
Furthermore, it was difficult to measure humidity in a high temperature environment of 100° C. or higher.
本発明はこのような点に鑑みて創作されたもので、簡易
な構成で精度の高い測定ができる湿度センサを提供する
ことを目的としている。The present invention was created in view of these points, and an object of the present invention is to provide a humidity sensor that can perform highly accurate measurement with a simple configuration.
このため本発明においては、一定波長λ。の光を出力す
る光源ｌと、受光器２と、該光源１及び受光器２間の光
路に挿入された光学多層膜のバンドパスフィルタ３とよ
りなり、該ハンドパスフィルタの湿度に対する透過ピー
ク波長のシフトを利用して湿度を測定することを特徴と
している。Therefore, in the present invention, the constant wavelength λ is used. It consists of a light source 1 that outputs light of It is characterized by measuring humidity using the shift of
光学多層膜のバンドパスフィルタのキャビティ層として
用いられるＳｉ０２層が空孔を含む多孔性物質と考えら
れ、この空孔中に含む水分の変化が屈折率変化となり、
バンドパスフィルタの透過ピーク波長が高湿度で長波長
側ヘシフトし、低湿度で短波長側ヘシフトするので、一
定波長の光源により透過損失を検知すれば湿度の測定が
可能となる。The Si02 layer used as the cavity layer of the bandpass filter of the optical multilayer film is considered to be a porous material containing pores, and changes in the water content in these pores result in changes in the refractive index.
Since the transmission peak wavelength of a bandpass filter shifts toward longer wavelengths when humidity is high and shifts toward shorter wavelengths when humidity is low, humidity can be measured by detecting transmission loss with a light source of a constant wavelength.
第１図は本発明の実施例を示す図である。 FIG. 1 is a diagram showing an embodiment of the present invention.
本実施例は図に示すように、一定波長の光源ｌと、受光
器２と、光学多層膜のバンドパスフィルタ３と、光−ａ
ｌからの光をバンドパスフィルタ３に導り光ファイバ４
及びレンズ５と、バンドパスフィルタ３を通過した光を
受光器２に導くレンズ６及び光ファイバ７とセンサボッ
クス８とで構成されている。As shown in the figure, this embodiment includes a light source l having a constant wavelength, a light receiver 2, a bandpass filter 3 made of an optical multilayer film, and a light source l having a constant wavelength.
The light from l is guided to a bandpass filter 3 and connected to an optical fiber 4.
and a lens 5 , a lens 6 that guides the light that has passed through the bandpass filter 3 to the light receiver 2 , an optical fiber 7 , and a sensor box 8 .
第２図は前記のバンドパスフィルタ３の構成を示す図で
ある。このバンドパスフィルタ３は透明なガラス等の基
板９の上に形成された１１層の膜ｉｏ−、〜１０−．．
で構成されており、奇数層の１０−、。FIG. 2 is a diagram showing the configuration of the bandpass filter 3 described above. This bandpass filter 3 has 11 layers of films io-, 10-, . . . formed on a substrate 9 such as transparent glass. ．．
It consists of 10-, odd-numbered layers.
１０−３．ｔｏ−ｓ 、１０−７．１０−９．１０−、
、は高屈折率のＴｉＯ□が用いられ、偶数層の１０−ｚ
、 １０−４ 、１０−ｈ。10-3. to-s, 10-7.10-9.10-,
, high refractive index TiO□ is used, and even-numbered layers of 10-z
, 10-4, 10-h.
ｔｏ−ｅ 、ｔｏ−ｔｏは低屈折率のＳｉＯ□が用いら
れ、厚さは中心のｌｏ−ｈがλ。／２で他はλ。／４で
ある。SiO□ with a low refractive index is used for to-e and to-to, and the thickness of lo-h at the center is λ. /2 and the others are λ. /4.
（但しλ。は透過ピーク波長）
このように構成されたバンドパスフィルタは、第６層の
キャビティ層ｌＯ−、、として用いたＳｉＯ□が、内部
に空孔を含む多孔性物質と考えられ、この空孔中に含む
水分の変化が屈折率変化となり、透過ピーク波長λ。が
変化し第３図のように、高湿度では長波長側へ、低温度
では短波長側へシフトする。第４図はこのバンドパスフ
ィルタの湿度と波長シフトの関係を示す１例である。特
に湿度４０％以下でシフトが大きくなる。また第５図は
バンドパスフィルタにおける波長シフトと損失の変化を
示す図であり、波長シフｌｔの増加と共に損失も増加し
ている。従ってバンドパスフィルタの波長λ０の光源に
よる損失を測定すれば、波長シフトｆｆｉがわかり、さ
らにこの波長シフト量がら第４図を用いて湿度を知るこ
とができる。このようにして本実施例によれば簡易でか
つ精度の高い湿度の検知が可能である。(However, λ is the transmission peak wavelength.) In the bandpass filter configured in this way, the SiO□ used as the sixth cavity layer lO-, , is considered to be a porous material containing holes inside. This change in water contained in the pores causes a change in the refractive index, and the transmission peak wavelength λ. As shown in Figure 3, the wavelength shifts to the longer wavelength side at high humidity, and to the shorter wavelength side at low temperature. FIG. 4 is an example showing the relationship between humidity and wavelength shift of this bandpass filter. In particular, the shift becomes large when the humidity is below 40%. Further, FIG. 5 is a diagram showing changes in wavelength shift and loss in a bandpass filter, and as the wavelength shift lt increases, the loss also increases. Therefore, by measuring the loss due to the light source of wavelength λ0 of the bandpass filter, the wavelength shift ffi can be determined, and further, the humidity can be determined from this amount of wavelength shift using FIG. 4. In this way, according to this embodiment, humidity can be detected simply and with high accuracy.
以上述べてきたように本発明によれば、光学多層膜が湿
度により透過ピーク波長が変化するのを利用することに
より、簡易でかつ精度の高い湿度測定ができ、実用的に
は極めて有用である。As described above, according to the present invention, by utilizing the fact that the transmission peak wavelength of an optical multilayer film changes depending on humidity, humidity can be measured easily and with high precision, which is extremely useful in practice. .
第１図は本発明の実施例を示す図、
第２図は本発明の湿度センサに用いるバンドパスフィル
タの構成を示す図、
第３図は第２図のバンドパスフィルタの湿度による透過
ピーク波長のシフトを示す図、第４図はバンドパスフィ
ルタの湿度と波長シフトの関係を示す図、
第５図はバンドパスフィルタの波長シフトと損失の変化
を示す図である。
第１図において、
１は光源、
２は受光器、
３はバンドパスフィルタ、
４．７は光ファイバ、
５．６はレンズである。Fig. 1 is a diagram showing an embodiment of the present invention, Fig. 2 is a diagram showing the configuration of a bandpass filter used in the humidity sensor of the present invention, and Fig. 3 is a transmission peak wavelength depending on humidity of the bandpass filter in Fig. 2. FIG. 4 is a diagram showing the relationship between humidity and wavelength shift of a band-pass filter. FIG. 5 is a diagram showing changes in wavelength shift and loss of a band-pass filter. In FIG. 1, 1 is a light source, 2 is a light receiver, 3 is a bandpass filter, 4.7 is an optical fiber, and 5.6 is a lens.
Claims (1)
、受光器（２）と、該光源（１）及び受光器（２）間の
光路に挿入された光学多層膜のバンドパスフィルタ（３
）とよりなり、該バンドパスフィルタの湿度に対する透
過ピーク波長のシフトを利用して湿度を測定することを
特徴とする湿度センサ。1. A light source (1) that outputs light of a constant wavelength (λ_0), a light receiver (2), and an optical multilayer film bandpass filter (3) inserted in the optical path between the light source (1) and the light receiver (2).
), and measures humidity by utilizing a shift in the transmission peak wavelength of the bandpass filter relative to humidity.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24726285A JPS62108133A (en) | 1985-11-06 | 1985-11-06 | Moisture sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24726285A JPS62108133A (en) | 1985-11-06 | 1985-11-06 | Moisture sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62108133A true JPS62108133A (en) | 1987-05-19 |
Family
ID=17160861
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24726285A Pending JPS62108133A (en) | 1985-11-06 | 1985-11-06 | Moisture sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62108133A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1997021092A1 (en) * | 1995-12-06 | 1997-06-12 | Ultrakust Electronic Gmbh | Optical sensor |
| US20220268685A1 (en) * | 2019-07-26 | 2022-08-25 | 3M Innovative Properties Company | Porous Fluid Sensor |
-
1985
- 1985-11-06 JP JP24726285A patent/JPS62108133A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1997021092A1 (en) * | 1995-12-06 | 1997-06-12 | Ultrakust Electronic Gmbh | Optical sensor |
| US6007904A (en) * | 1995-12-06 | 1999-12-28 | Bartec Componenete Und Systeme Gmbh | Optical sensor element |
| US20220268685A1 (en) * | 2019-07-26 | 2022-08-25 | 3M Innovative Properties Company | Porous Fluid Sensor |
| US11768145B2 (en) * | 2019-07-26 | 2023-09-26 | 3M Innovative Properties Company | Porous fluid sensor |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2804073B2 (en) | Apparatus and method for measuring the refractive index of a substance | |
| EP3551963B1 (en) | Waveguide interferometer | |
| US9335263B2 (en) | Optical circuit for sensing a biological entity in a fluid and method of configuring the same | |
| CN106568466A (en) | Fine core microstructure optical fiber interferometer sensor and temperature and strain detection method therefor | |
| CN108195485A (en) | Temperature and the biparameter sensor of strain and preparation method thereof are measured based on LPFG and MZ cascades | |
| CN1945246A (en) | Thin film type optical fiber temperature sensor and its temperature sensing method | |
| US5394244A (en) | Ambient air refracture index measuring device | |
| US2795991A (en) | Indicator of the interferometer type for indicating the composition of gases | |
| JPS62108133A (en) | Moisture sensor | |
| US5309288A (en) | Prismatic device for use with process refractometers | |
| Vedam | Elastic and photoelastic properties of some optical glasses | |
| CN109668652B (en) | Optical fiber temperature measuring device filled with glass tube | |
| US20050162659A1 (en) | Optical interferometer | |
| SU1372223A1 (en) | Dew point hygrometer | |
| CN221350323U (en) | Temperature refractive index optical fiber sensor based on MZ/F-P principle | |
| JPS55155204A (en) | Measuring instrument for thickness of film | |
| JPS5918647B2 (en) | How do you know how to use light and light? | |
| SU826217A1 (en) | Interferometric gas analyzer | |
| JPH03185304A (en) | Standard device of brillouin frequency shift | |
| JPH01131435A (en) | Measuring instrument for property value of liquid | |
| SU1024862A1 (en) | Interferential light filter maximum of transmission band width and wave length determination method | |
| CN118424543A (en) | High-sensitivity optical fiber hydraulic sensor based on PDMS film and fiber bragg grating | |
| SU902583A1 (en) | Device for measuring temperature | |
| SU1111076A1 (en) | Method of thermometry of microobjects by environment near-the-wall layer | |
| SK272022A3 (en) | Sensor for measuring swelling kinetics of polymeric materials |