JPS62106236U - - Google Patents
Info
- Publication number
- JPS62106236U JPS62106236U JP1985198791U JP19879185U JPS62106236U JP S62106236 U JPS62106236 U JP S62106236U JP 1985198791 U JP1985198791 U JP 1985198791U JP 19879185 U JP19879185 U JP 19879185U JP S62106236 U JPS62106236 U JP S62106236U
- Authority
- JP
- Japan
- Prior art keywords
- conductive film
- glass plate
- thickness
- top surface
- transparent conductive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011521 glass Substances 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 1
- 229910052782 aluminium Inorganic materials 0.000 claims 1
Description
第１図は本考案の一実施例の断面図、第２図は
従来のフオトマスクの一例の断面図である。
１……ガラス板、２……透光性導電膜、３……
パターン。
FIG. 1 is a sectional view of an embodiment of the present invention, and FIG. 2 is a sectional view of an example of a conventional photomask. 1...Glass plate, 2...Transparent conductive film, 3...
pattern.
Claims (1)
膜厚０．０３〜０．５μｍの透光性導電膜と、該
透光性導電膜の上面に設けた厚さ１〜５μｍのア
ルミニウム層のパターンとを含むことを特徴とす
るフオトマスク。 A transparent glass plate, a transparent conductive film with a thickness of 0.03 to 0.5 μm provided on the top surface of the glass plate, and an aluminum layer with a thickness of 1 to 5 μm provided on the top surface of the transparent conductive film. A photomask comprising a pattern of.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985198791U JPS62106236U (en) | 1985-12-23 | 1985-12-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985198791U JPS62106236U (en) | 1985-12-23 | 1985-12-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62106236U true JPS62106236U (en) | 1987-07-07 |
Family
ID=31159806
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985198791U Pending JPS62106236U (en) | 1985-12-23 | 1985-12-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62106236U (en) |
-
1985
- 1985-12-23 JP JP1985198791U patent/JPS62106236U/ja active Pending