JPS6196654U - - Google Patents
Info
- Publication number
- JPS6196654U JPS6196654U JP17971484U JP17971484U JPS6196654U JP S6196654 U JPS6196654 U JP S6196654U JP 17971484 U JP17971484 U JP 17971484U JP 17971484 U JP17971484 U JP 17971484U JP S6196654 U JPS6196654 U JP S6196654U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- grindstone
- grinding device
- holder
- rotates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910003460 diamond Inorganic materials 0.000 claims 1
- 239000010432 diamond Substances 0.000 claims 1
- 239000000843 powder Substances 0.000 claims 1
- 239000011347 resin Substances 0.000 claims 1
- 229920005989 resin Polymers 0.000 claims 1
Landscapes
- Grinding Of Cylindrical And Plane Surfaces (AREA)
Description
図面はこの考案の一実施例を示し、第１図はウ
エハ研削時を示し、第１図ａは第１の砥石による
研削時における研削装置の要部の断面図、第１図
ｂは、第２の砥石による研削時における同要部の
断面図、第１図ｃは第３の砥石による研削時にお
ける同要部の断面図、第２図は研削途中を示す同
要部の斜視図、第３図は研削途中を示すウエハの
斜視図である。
１：研削装置、２：ウエハ、３：テーブル、４
ａ・４ｂ・４ｃ：ホルダ、５ａ・５ｂ・５ｃ：枢
軸、６ａ・６ｂ・６ｃ：砥石。
The drawings show one embodiment of this invention, FIG. 1 shows the wafer during grinding, FIG. Fig. 1c is a sectional view of the same essential part during grinding with the second grindstone, Fig. 1c is a sectional view of the same essential part during grinding with the third grindstone, Fig. 2 is a perspective view of the same essential part during grinding, Fig. FIG. 3 is a perspective view of the wafer during grinding. 1: Grinding device, 2: Wafer, 3: Table, 4
a, 4b, 4c: holder, 5a, 5b, 5c: pivot, 6a, 6b, 6c: whetstone.
Claims (1)
砥石ホルダを備えたウエハ用研削装置において、
前記砥石ホルダにダイヤモンド粉末をレジンボン
ドで結合保持した砥石を固着したことを特徴とす
るウエハ用研削装置。 In a wafer grinding device equipped with a grinding wheel holder that rotates while facing a fixedly supported wafer,
A wafer grinding device characterized in that a grindstone having diamond powder bonded and held by resin bond is fixed to the grindstone holder.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17971484U JPS6196654U (en) | 1984-11-26 | 1984-11-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17971484U JPS6196654U (en) | 1984-11-26 | 1984-11-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6196654U true JPS6196654U (en) | 1986-06-21 |
Family
ID=30737283
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17971484U Pending JPS6196654U (en) | 1984-11-26 | 1984-11-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6196654U (en) |
-
1984
- 1984-11-26 JP JP17971484U patent/JPS6196654U/ja active Pending