JPS619440A - Plasma treating equipment - Google Patents

Plasma treating equipment

Info

Publication number
JPS619440A
JPS619440A JP59130622A JP13062284A JPS619440A JP S619440 A JPS619440 A JP S619440A JP 59130622 A JP59130622 A JP 59130622A JP 13062284 A JP13062284 A JP 13062284A JP S619440 A JPS619440 A JP S619440A
Authority
JP
Japan
Prior art keywords
plasma
discharge
sensor
light
plasma generator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP59130622A
Other languages
Japanese (ja)
Inventor
Yasuhiko Ogisu
康彦 荻巣
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyoda Gosei Co Ltd
Original Assignee
Toyoda Gosei Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyoda Gosei Co Ltd filed Critical Toyoda Gosei Co Ltd
Priority to JP59130622A priority Critical patent/JPS619440A/en
Priority to CA000483614A priority patent/CA1249926A/en
Priority to KR1019850004094A priority patent/KR870001171B1/en
Priority to DE19853520924 priority patent/DE3520924A1/en
Priority to AU43492/85A priority patent/AU565026B2/en
Priority to US06/744,061 priority patent/US4668479A/en
Publication of JPS619440A publication Critical patent/JPS619440A/en
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
    • B05B7/16—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas incorporating means for heating or cooling the material to be sprayed
    • B05B7/22—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas incorporating means for heating or cooling the material to be sprayed electrically, magnetically or electromagnetically, e.g. by arc
    • B05B7/222—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas incorporating means for heating or cooling the material to be sprayed electrically, magnetically or electromagnetically, e.g. by arc using an arc
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B13/00—Machines or plants for applying liquids or other fluent materials to surfaces of objects or other work by spraying, not covered by groups B05B1/00 - B05B11/00
    • B05B13/02—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work
    • B05B13/0221—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work characterised by the means for moving or conveying the objects or other work, e.g. conveyor belts
    • B05B13/0242—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work characterised by the means for moving or conveying the objects or other work, e.g. conveyor belts the objects being individually presented to the spray heads by a rotating element, e.g. turntable
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/14—Surface shaping of articles, e.g. embossing; Apparatus therefor by plasma treatment
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/12—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
    • C23C4/134—Plasma spraying
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/12—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
    • C23C4/137—Spraying in vacuum or in an inert atmosphere
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
    • B29L2031/00—Other particular articles
    • B29L2031/30—Vehicles, e.g. ships or aircraft, or body parts thereof
    • B29L2031/3044—Bumpers

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electromagnetism (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)

Abstract

PURPOSE:To enable visual confirmation of occurrence of plasma discharge without getting near the plasma generator, by setting a dischage sensor connected with a display at a place where light, heat, and ozone are produced with the generation of plasma. CONSTITUTION:Oxygen for the generation of plasma is fed by way of a fluororubber connector 14 into a plasma generator tube 9. A voltage is applied on Tesla coil 13 ro cause to spark, and at the same time, a high-frquency wave is transmitted into a waveguide 11 to generate plasma in the plasma generator tube 9. A discharge sensor 12 which is provided inside the plasma generator will sense the generated light and transmit into a detecting circuit an electric signal varying with a changes in resistance depending upon the amount of sensed light. A display 16 measures the electric signal transmitted from the discharge sensor 12 for a prescribed period of time and, when confirming non-occurrence of the plasma discharge, it will actuate a warning buzzer 19 and a warning lamp 20, thus warning the operator as well as cutting off the voltage of Tesla coil 13.

Description

【発明の詳細な説明】 （産業上の利用分野） この発明は合成樹脂製品の表面にプラズマ処理を施すた
めのプラズマ処理装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a plasma treatment apparatus for subjecting the surface of a synthetic resin product to plasma treatment.

（従来の技術） ポリプロピレン等の非極性高分子材料は塗料の付着性が
悪いという属性があるが、その表面をプラズマガス処理
することによって付着性が向上することが知られている
。(Prior Art) Non-polar polymeric materials such as polypropylene have the attribute of poor paint adhesion, but it is known that the adhesion can be improved by treating the surface with plasma gas.

従来、このプラズマガス処理を行なうための装置として
は、処理容器の外部にテスラコイルを併用するプラズマ
ガス発生装置を取付け、発生したプラズマガスを噴射す
る噴射管を処理容器内に設けたものがあった。Conventionally, devices for performing this plasma gas treatment have included a plasma gas generator that uses a Tesla coil attached to the outside of the processing container, and an injection tube that injects the generated plasma gas inside the processing container. .

ところが、上記装置のプラズマ発生装置の始動時に、例
えば、テスラコイルがはずれて放電が開始しないと、プ
ラズマ化しない酸素ガスが収納室内に流れるだけで全く
プラズマガス処理されないという問題点があった。However, when the plasma generator of the above-mentioned apparatus is started, for example, if the Tesla coil is disconnected and discharge does not start, there is a problem that oxygen gas that is not turned into plasma flows into the storage chamber and no plasma gas treatment is performed at all.

このため、始動のたびに同装置まで近づき、プラズマ放
電の発生を視覚で確認する必要があった。For this reason, it was necessary to approach the equipment each time it was started and visually confirm the occurrence of plasma discharge.

又、同発生装置の取付位置及び組付法によっては簡単に
プラズマ放電を確認することができないこともあった。Furthermore, depending on the mounting position and assembly method of the generator, it may not be possible to easily confirm plasma discharge.

（発明が解決しようとする問題点） この発明は上述したようにプラズマ発生装置の始動時の
たびに、プラズマ発生装置まで近づき、プラズマ発生管
等を直視することによってプラズマ放電発生の有無を確
認しなければならないという従来の問題点を解決しよう
とするものである。(Problems to be Solved by the Invention) As described above, this invention approaches the plasma generator each time the plasma generator is started and checks whether or not plasma discharge is occurring by directly looking into the plasma generator tube, etc. This is an attempt to solve the conventional problem of having to do so.

発明の構成 （問題点を解決するための手段） この発明は上述した問題点を解決するためにプラズマ発
生装置の、プラズマ発生に伴ない、光、熱、又はオゾン
が生ずる箇所に放電センサを設け、同センサに表示装置
を接続した構成を採用している。Structure of the Invention (Means for Solving the Problems) In order to solve the above-mentioned problems, the present invention provides a discharge sensor in a plasma generating device at a location where light, heat, or ozone is generated due to plasma generation. , a configuration in which a display device is connected to the same sensor is adopted.

（作用） 上記の構成において、プラズマ発生装置の始動時に、放
電センサがプラズマ放電を感知しないと、警告ブザー、
警告灯等の表示装置を作動させる。(Function) In the above configuration, if the discharge sensor does not detect plasma discharge when starting the plasma generator, a warning buzzer will sound.
Activate display devices such as warning lights.

（実施例） 以下、この発明を具体化した一実施例を第１゜２図に従
って説明する。プラズマ発生装置の気密状の収容室を構
成する本体１は中空円筒状に形成され、その左側壁には
収容室を開閉し得る扉（図示しない）が設けられている
とともに、右側壁上部にはプラズマ排出口２が形成され
ている。又、収納室内には自転及び公転する製品収納台
３が収納されている。(Embodiment) An embodiment embodying the present invention will be described below with reference to FIGS. 1-2. The main body 1 constituting the airtight storage chamber of the plasma generator is formed into a hollow cylindrical shape, and the left side wall thereof is provided with a door (not shown) that can open and close the storage chamber, and the upper right side wall is provided with a door (not shown) that can open and close the storage chamber. A plasma outlet 2 is formed. Further, a product storage table 3 that rotates and revolves is stored in the storage chamber.

第１図に示すように、本体１内の斜め下部には酸素等の
プラズマガスを噴射するための１本のステンレス製噴射
管４が収納されている。噴射管４の略中央部には導入管
５が接続され、同導入管５の他端部は本体１外のプラズ
マ発生装置６に接続される。又、噴射管４の外周には多
数の噴射ロアが形成されている。As shown in FIG. 1, a stainless steel injection tube 4 for injecting plasma gas such as oxygen is housed in the diagonally lower part of the main body 1. An introduction pipe 5 is connected to a substantially central portion of the injection pipe 4, and the other end of the introduction pipe 5 is connected to a plasma generator 6 outside the main body 1. Further, a large number of injection lowers are formed on the outer periphery of the injection pipe 4.

第２図に示すように、本体１外に突出された前記導入管
５には芯管がガラス管からなるジヨイント８が接続され
、同ジヨイント８を介してプラズマ発生装置６の先端部
が接続されている。As shown in FIG. 2, a joint 8 whose core tube is made of a glass tube is connected to the introduction tube 5 that protrudes outside the main body 1, and the tip of the plasma generator 6 is connected through the joint 8. ing.

同装置６は本体１（導入管５）側から、プラズマ発生管
９、プラズマ発生炉１０、導波管１１、放電センサ１２
、テスラコイル１３及び７０ロコネクタ１４から構成さ
れており、ホルダー１５によって本体１に支持されてい
る。The device 6 includes, from the main body 1 (introduction tube 5) side, a plasma generation tube 9, a plasma generation furnace 10, a waveguide 11, and a discharge sensor 12.
, a Tesla coil 13 and a 70° connector 14, and is supported by the main body 1 by a holder 15.

前記ジヨイント８の細端側、に接続された細長の７１英
管からなるプラズマ発生管９は後述するフロロコネクタ
１４を介して酸素ガスを供給される。A plasma generating tube 9 made of an elongated 71mm tube connected to the narrow end of the joint 8 is supplied with oxygen gas via a fluorocarbon connector 14, which will be described later.

又、向弁くト管９は一部に冷却部１６を有している。Further, the valve facing pipe 9 has a cooling section 16 in a part thereof.

前記プラズマ発生管９を挿入した円筒状をなすプラズマ
発生炉１０は前記プラズマ発生管９の外周を取り囲むよ
うに、冷却部１７を有し、プラズマ放電に伴なう熱を冷
却している。又、同プラズマ発生炉１０の略中央部には
軸心方向と直角をなした導波管１１が取着されている。A cylindrical plasma generating furnace 10 into which the plasma generating tube 9 is inserted has a cooling section 17 surrounding the outer periphery of the plasma generating tube 9 to cool the heat accompanying plasma discharge. Further, a waveguide 11 is attached to a substantially central portion of the plasma generating furnace 10, which is perpendicular to the axial direction.

この導波管１１によって導かれた高周波か′向弁主炉１
０中のプラズマ発生管９内の酸素原子を励起させてプラ
ズマ放電を行なう。The high frequency wave guided by this waveguide 11
Oxygen atoms in the plasma generating tube 9 are excited to generate plasma discharge.

放電センサ１２は外光の影響を受すないようにプラズマ
発生炉１０内側かつプラズマ発生管９外側に取着されて
いる。本実施例では光を感知するカドミウムレル（以下
ＣｄＳという）が用いられている。放電センサ１２には
プラズマ放電光を受光すると、その受光量に応じて抵抗
値が変化し、これを利用して次に述べる表示装置へ電気
信号を送るようになっている。The discharge sensor 12 is attached inside the plasma generation furnace 10 and outside the plasma generation tube 9 so as not to be affected by external light. In this embodiment, cadmium rel (hereinafter referred to as CdS) that senses light is used. When the discharge sensor 12 receives plasma discharge light, its resistance value changes depending on the amount of light received, and this is used to send an electric signal to the display device described below.

表示装置１８にはプラズマ放電の有無を捉えるために検
知回路（図示しない）が設けられているとともに、警告
ブザー１９及び警告灯２０が接続されている。The display device 18 is provided with a detection circuit (not shown) to detect the presence or absence of plasma discharge, and is also connected to a warning buzzer 19 and a warning light 20.

前記プラズマ発生管９後部の細管外周に取着されたテス
ラコイル１３をスパークさせることによって、放電を誘
発させプラズマ発生管９内においてプラズマを発生しや
すくする。By sparking the Tesla coil 13 attached to the outer periphery of the thin tube at the rear of the plasma generating tube 9, discharge is induced and plasma is easily generated within the plasma generating tube 9.

上記の構成において、プラズマ発生装置６の始動時にお
けるプラズマ放電発生を説明する。In the above configuration, generation of plasma discharge at the time of starting the plasma generator 6 will be explained.

まず、７０ロコネクタ１４を介してプラズマ発生管９に
プラズマ発生用の酸素を供給する。First, oxygen for plasma generation is supplied to the plasma generation tube 9 via the 70° connector 14.

次に、テスラコイル１３に電圧を加えスパークさせると
ともに、導波管１１に高周波を送る。すると、プラズマ
発生管９内にプラズマが発生す゛る。Next, a voltage is applied to the Tesla coil 13 to cause a spark, and a high frequency wave is sent to the waveguide 11. Then, plasma is generated within the plasma generation tube 9.

プラズマ発生炉１０内側に取着された放電センサ１２が
発生したプラズマ光を感知し、その受光量に応じて抵抗
値が変化して検知回路内に電気信号を送る。A discharge sensor 12 attached to the inside of the plasma generating furnace 10 senses the generated plasma light, changes its resistance value depending on the amount of light received, and sends an electric signal to a detection circuit.

表示装置１６は放電センサ１２から送られた電気信号を
所定の時間内計測した後、プラズマ放電されていないこ
とを判断すると、同表示装置１６に接続されている警告
ブザー１９、警告灯２０を作動さゼて作業者に警告を促
すとともに、テスラコイル１３に加わっている電圧をス
トップさせる。After measuring the electric signal sent from the discharge sensor 12 within a predetermined time, the display device 16 activates a warning buzzer 19 and a warning light 20 connected to the display device 16 when determining that plasma discharge is not occurring. This will alert the worker and stop the voltage being applied to the Tesla coil 13.

従って、始動時のつどプラズマ発生装置６まで出向き、
プラズマ放電発生の有無を確認する必要がなくなる。Therefore, each time when starting up, go to the plasma generator 6,
There is no need to check whether plasma discharge is occurring.

なお、本発明は前記実施例に限定されるものでなく、下
記のように具体化してもよい。It should be noted that the present invention is not limited to the above embodiments, but may be embodied as follows.

プラズマが放電されると、それに伴なって光ばかりで゛
なく、熱、オゾン等が発生する。これらを利用してプラ
ズマ放電を検知することもできる。When plasma is discharged, not only light but also heat, ozone, etc. are generated. Plasma discharge can also be detected using these.

（１）前記実施例では光を感知する放電センサ１２とし
てＣｄＳを用いたがこの他に光センサ２１としてフォト
トランジスタ、フォトダイオード、シリコンプリューセ
ル（ＳＢＣ）などの素子を用いてもよい。(1) In the embodiment described above, CdS was used as the discharge sensor 12 that senses light, but other elements such as a phototransistor, a photodiode, a silicon Plucell (SBC), etc. may be used as the optical sensor 21.

（２）熱を感知する放電センサ１２として、熱雷対、サ
ーモスタット等を第３図に示すようにプラズマ発生管９
に取付けてもよい。(2) As a discharge sensor 12 that detects heat, a thermal lightning pair, a thermostat, etc. are used as a plasma generating tube 9 as shown in FIG.
It may be installed on.

（３）オゾンセンサ２３として例えばセラミックス半導
体を用いてもよく、これを発生したオゾンに触れるよう
に例えば第４図に示すようにジヨイント８内側に取着し
てもよい。(3) For example, a ceramic semiconductor may be used as the ozone sensor 23, and it may be attached to the inside of the joint 8, as shown in FIG. 4, so as to be in contact with the generated ozone.

（効果） 以上、詳述したようにこの発明はプラズマ発生装置の始
動時のたびに、プラズマ発生装置まで近づきプラズマ発
生管等を直視することなく、プラズマ放電発生の有無を
検知するとともに、無放電時には作業者等に警告を促す
ことができるという効果を奏し、実用上好ましい発明で
ある。(Effects) As described in detail above, this invention detects the presence or absence of plasma discharge and detects the presence or absence of plasma discharge without approaching the plasma generation device and directly looking into the plasma generation tube etc. each time the plasma generation device is started. This invention has the effect of sometimes prompting workers etc. with a warning, and is a preferred invention from a practical standpoint.

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本実施例を具体化したプラズマ処理装置の要部
斜視図、第２図は同じく放電センサを取着しｌｃブラス
マ発生装回の取ｆ４正面図、第３図は同じく熱レンサを
取着したプラズマ発生装置の取付正面図、第４図は同じ
くオゾンセンサーを取着したプラズマ処理装置正面図で
ある。 プラズマ発生管９、プラズマ発生炉１０．放電センサ１
２、光センサ２１、熱センサ２２、オゾンセンサ２３゜ 特　許　出　願　人　　豊田合成　株式会社代　理　人
　　　　弁理士　　恩１）博宣第１図 第３図 第４図Fig. 1 is a perspective view of the main parts of a plasma processing apparatus embodying this embodiment, Fig. 2 is a front view of the LC plasma generator equipped with a discharge sensor, and Fig. 3 is a front view of the LC plasma generator equipped with a heat sensor. FIG. 4 is a front view of the attached plasma generator, and FIG. 4 is a front view of the plasma processing apparatus with an ozone sensor attached. Plasma generation tube 9, plasma generation furnace 10. Discharge sensor 1
2. Optical sensor 21, heat sensor 22, ozone sensor 23° Patent applicant Toyoda Gosei Co., Ltd. Representative Patent attorney On 1) Hironobu Figure 1 Figure 3 Figure 4

Claims (1)

【特許請求の範囲】 １、プラズマ発生装置（６）の、プラズマ発生に伴ない
、光、熱、又はオゾンが生ずる箇所に放電センサ（１２
）を設け、同センサ（１２）に表示装置（１８）を接続
したことを特徴とするプラズマ処理装置。 ２、放電センサ（１２）は光の強弱を検知する光センサ
（２１）であることを特徴とする特許請求の範囲第１項
記載のプラズマ処理装置。 ３、放電センサ（１２）は熱の上昇を検知する熱センサ
（２２）であることを特徴とする特許請求の範囲第１項
記載のプラズマ処理装置。 ４、放電センサ（１２）はオゾンの発生を検知するオゾ
ンセンサ（２３）であることを特徴とする特許請求の範
囲第１項記載のプラズマ処理装置。[Claims] 1. A discharge sensor (12
), and a display device (18) is connected to the sensor (12). 2. The plasma processing apparatus according to claim 1, wherein the discharge sensor (12) is a light sensor (21) that detects the intensity of light. 3. The plasma processing apparatus according to claim 1, wherein the discharge sensor (12) is a thermal sensor (22) that detects a rise in heat. 4. The plasma processing apparatus according to claim 1, wherein the discharge sensor (12) is an ozone sensor (23) that detects the generation of ozone.
JP59130622A 1984-06-12 1984-06-25 Plasma treating equipment Pending JPS619440A (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP59130622A JPS619440A (en) 1984-06-25 1984-06-25 Plasma treating equipment
CA000483614A CA1249926A (en) 1984-06-12 1985-06-11 Plasma processing apparatus
KR1019850004094A KR870001171B1 (en) 1984-06-12 1985-06-11 Plasma treatment apparatus
DE19853520924 DE3520924A1 (en) 1984-06-12 1985-06-11 PLASMA PROCESSING SYSTEM
AU43492/85A AU565026B2 (en) 1984-06-12 1985-06-12 Plasma processing
US06/744,061 US4668479A (en) 1984-06-12 1985-06-12 Plasma processing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59130622A JPS619440A (en) 1984-06-25 1984-06-25 Plasma treating equipment

Publications (1)

Publication Number Publication Date
JPS619440A true JPS619440A (en) 1986-01-17

Family

ID=15038631

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59130622A Pending JPS619440A (en) 1984-06-12 1984-06-25 Plasma treating equipment

Country Status (1)

Country Link
JP (1) JPS619440A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11420070B2 (en) 2014-06-03 2022-08-23 Advanced Biotechnologies, Llc System and method of generating high voltage variable frequency electromagnetic radiation

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11420070B2 (en) 2014-06-03 2022-08-23 Advanced Biotechnologies, Llc System and method of generating high voltage variable frequency electromagnetic radiation

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