JPS6191554A - Manufacture of humidity sensor - Google Patents
Manufacture of humidity sensorInfo
- Publication number
- JPS6191554A JPS6191554A JP59213227A JP21322784A JPS6191554A JP S6191554 A JPS6191554 A JP S6191554A JP 59213227 A JP59213227 A JP 59213227A JP 21322784 A JP21322784 A JP 21322784A JP S6191554 A JPS6191554 A JP S6191554A
- Authority
- JP
- Japan
- Prior art keywords
- resin
- ion exchange
- perfluorocarbon
- electrode
- moisture
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/121—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid for determining moisture content, e.g. humidity, of the fluid
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Non-Adjustable Resistors (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は湿度センサーの製造法に関するものである。さ
らに詳しくは、本発明は、高分子電解質膜を感湿膜とし
、この感湿膜への吸湿■を電気抵抗として検知するタイ
プの湿度センサーの製）寄法に関するものである。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a method for manufacturing a humidity sensor. More specifically, the present invention relates to a method for manufacturing a humidity sensor of a type in which a polymer electrolyte membrane is used as a moisture-sensitive membrane and moisture absorption into the moisture-sensitive membrane is detected as electrical resistance.
従来の技術
況曵センυ−の感）９材１’３＋および検知方法とじて
は、従来多種多様のものが捉案されている。それらの中
でポリスチレンスルフォン酸あるいはその１３など、炭
化水素系の高分子電解７１膜を感湿材第１とし、水蒸気
の吸脱着に伴なう抵抗変化を検出するタイプの湿度セン
サー（例えば、大吉、陣田。Conventional Technical Status A wide variety of materials and detection methods have been proposed in the past. Among them, a type of humidity sensor that uses a hydrocarbon-based polymer electrolyte 71 membrane such as polystyrene sulfonic acid or 13 as the first moisture-sensitive material and detects resistance changes due to adsorption and desorption of water vapor (for example, Daikichi , Jinda.
杉原、 ４１１ Ｊｌｌ 、シャープ技報、２２巻く昭
５７））はひとつの代表例である。この型のセンサーは
、アルミナなどの基板表面に、櫛型の金電極を焼きつけ
によって被覆し、さらにその上に高分子電解質を塗着し
て薄膜を形成するという方法により製造される。Sugihara, 411 Jll, Sharp Technical Report, vol. 22, 1984) is one representative example. This type of sensor is manufactured by coating the surface of a substrate such as alumina with a comb-shaped gold electrode by baking, and then coating the top with a polymer electrolyte to form a thin film.
発明が解決しようとする問題点
抵抗変化を検出するタイプの湿度センサーの感湿材どし
て、従来のように炭化水素系の高分子電解質を用いた場
合には、一般に耐熱温度が低く、雰囲気１３度が６０°
Ｃ以上になると１史用できないという問題かある。Problems to be Solved by the Invention When conventional hydrocarbon-based polymer electrolytes are used as moisture-sensitive materials in humidity sensors that detect resistance changes, they generally have low heat resistance and 13 degrees is 60 degrees
There is a problem that if it becomes C or above, it cannot be used for 1 history.
問題点を解決づるための手段
本発明は電極を被覆した基板の電極が被覆された側に、
パーフルオロカーボン樹脂を１．１本とするイオン交換
樹脂の＠改暦媒溶液もしくは、有機溶媒と水との混合溶
媒溶液を塗着せしめ、溶媒を揮散せしめることによって
、耐熱温度の高い感湿材としてのパーフルオロカーボン
樹脂を基体とするイオン交換樹脂の薄膜層を形成せしめ
ることによって、上述の如き問題を解決せ／υとするも
のである。Means for Solving the Problems The present invention provides a substrate coated with electrodes, on the side coated with the electrodes.
By applying a solution of an ion exchange resin containing 1.1 perfluorocarbon resin or a mixed solvent solution of an organic solvent and water and volatilizing the solvent, it can be used as a moisture-sensitive material with high heat resistance. The above-mentioned problems are solved by forming a thin layer of ion exchange resin based on perfluorocarbon resin.
作用
パーフルオロカーボン樹脂を基体とするイオン交換樹脂
は、すぐれた感湿性を示し、その耐熱温度は約１００℃
であり、従来の炭化水素系の高分子電解質に比較してよ
り高い。Ion exchange resin based on perfluorocarbon resin exhibits excellent moisture sensitivity and has a heat resistance temperature of approximately 100°C.
This is higher than that of conventional hydrocarbon-based polymer electrolytes.
パーフルオロカーボン樹脂を基体とするイオン交換樹脂
のイオン交換基としては、スルフォン酸基、カルボン酸
基、あるいはこれらの塩の形にしてもよい。The ion exchange group of the ion exchange resin based on perfluorocarbon resin may be in the form of a sulfonic acid group, a carboxylic acid group, or a salt thereof.
パーフルオロカーボン樹脂を基体どするイオン交換樹脂
の代表例はパーフルオロカーボンスルフオン酸樹脂であ
る。パーフルオロカーボンスルフ４ン酸樹脂は、そのイ
オン交換容量が大きい場合には、田性の強い右１幾溶媒
に溶（）ることが知られている。パーフルオロカーボン
スルフォンの溶液どしては、例えば米国のアルドリッチ
ケミカフ１社（ＡｌｄｒｆＣｌＩ ０１１０ｍ４Ｃａ
ｌ ＣＯｍｐａｎｙ）からり−フイオン溶’ａ （ＮＡ
Ｆ Ｉ ＯＮ Ｓｏｌｕｔｉｏｎ ）という名称で
市販されている。ナフィオン溶液は米国デュポン社（
ＤＬＩ Ｐｏｎｔ ） 製のナフィオン（ＮＡＦＩＯＮ
＞という低級脂肪族アルコール（１０％の水を含む）溶
液である。A typical example of an ion exchange resin based on a perfluorocarbon resin is a perfluorocarbon sulfonic acid resin. It is known that perfluorocarbon sulfuric acid resins, if they have a large ion exchange capacity, can be dissolved in very harsh solvents. Perfluorocarbon sulfone solutions are available, for example, from Aldrich Chemikaf 1 (AldrfClI 0110m4Ca) of the United States.
l Company) Karari-Fion Solu'a (NA
It is commercially available under the name FION Solution. Nafion solution is manufactured by DuPont (USA)
NAFION manufactured by DLI Pont
> lower aliphatic alcohol (containing 10% water) solution.
パーフルオロカーボン樹脂を風体とするイオン交換樹脂
の溶液を電極を形成し１．：基板に塗着し、溶媒を揮散
さけるとイオン交換樹脂の薄膜が形成される。1. Forming an electrode using a solution of ion exchange resin containing perfluorocarbon resin as gas. : When applied to a substrate and evaporating the solvent, a thin film of ion exchange resin is formed.
イオン交換基に関していえば、水素イオン型で薄膜を形
成させたのちに、カリウムイオン型、あるいはナトリウ
ムイオン型に置換してもよい。Regarding the ion exchange group, after forming a thin film with hydrogen ion type, it may be substituted with potassium ion type or sodium ion type.
パーフルオロカーボン樹脂を基体とするイオン交換膜を
形成したのち、保護膜としてフッ素樹脂あるいはシリコ
ン樹脂を積層することも効果的なことがある。It may also be effective to form an ion exchange membrane based on perfluorocarbon resin and then laminate a fluororesin or silicone resin as a protective membrane.
実施例
厚さが０．５ｍｍのアルミナ基板の片面に、スクリーン
印刷により一対の櫛歯状金電極を形成した。Example A pair of comb-shaped gold electrodes were formed on one side of an alumina substrate having a thickness of 0.5 mm by screen printing.
次に金電極の側に、５％のナフィオン溶液（パーフルオ
ロカーボンスルフオン酸樹脂の低級脂肪族アルコールと
水との混合層媒溶′ａ）を塗布し、１００℃で真空乾燥
することにより、溶媒を揮散させ、厚さが４μのパーフ
ルオロカーボンスルフオン酸樹脂の感湿膜を形成した。Next, a 5% Nafion solution (a mixed layer solvent of lower aliphatic alcohol and water of perfluorocarbon sulfonic acid resin) was applied to the gold electrode side, and the solvent was dried at 100°C under vacuum. was vaporized to form a moisture-sensitive film of perfluorocarbon sulfonic acid resin having a thickness of 4 μm.
発明の効果
上）ホの実施例で（’１られた湿度センサーを△とし、
従来の第４級アンモニウム塩ポリマーを感湿膜としＩＣ
湿度センナ−をＢとし、それぞれを９０℃の温度．６０
％の相対湿度の雰囲気下においた場合の電気抵抗の経時
変化を調べたところ、への場合には５００時間経ても何
ら変化がなかったのに対し、Ｂの場合には初期には８×
１０３Ωの抵抗であったものが、５００時間後には６ｘ
１０’ｌΩと大幅に変化してしまった。In the embodiment of E) (for the effect of the invention), the humidity sensor that is set as '1 is △,
IC using conventional quaternary ammonium salt polymer as a moisture-sensitive film
The humidity sensor is B, and each temperature is 90℃. 60
When we investigated the change in electrical resistance over time when placed in an atmosphere with a relative humidity of
What used to be a resistance of 103 ohms becomes 6x after 500 hours.
It has changed significantly to 10'lΩ.
これは本発明の感湿膜は充分耐熱１１が良好であるのに
対し、従来品は９０℃での耐熱性に乏しいからである。This is because the moisture sensitive film of the present invention has a sufficiently good heat resistance of 11, whereas the conventional product has poor heat resistance at 90°C.
以上詳述Ｖる如く、本発明は高分子電解質型湿度センサ
ーの耐熱性を改良するものであり、その工業的ｌ１１１
ｉ１直極めて大である。As described in detail above, the present invention improves the heat resistance of a polymer electrolyte type humidity sensor, and its industrial use.
i1 is extremely large.
Claims (1)
ーフルオロカーボン樹脂を基体とするイオン交換樹脂の
有機溶媒溶液もしくは有機溶媒と水との混合溶媒溶液を
塗着せしめ、溶媒を揮散せしめることによって、パーフ
ルオロカーボン樹脂を基体とするイオン交換樹脂の薄膜
層を形成せしめてなることを特徴とする湿度センサーの
製造法。1. By applying an organic solvent solution of an ion exchange resin based on perfluorocarbon resin or a mixed solvent solution of an organic solvent and water to the electrode-covered side of the electrode-covered substrate, and evaporating the solvent, A method for producing a humidity sensor, which comprises forming a thin film layer of ion exchange resin based on perfluorocarbon resin.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59213227A JPS6191554A (en) | 1984-10-11 | 1984-10-11 | Manufacture of humidity sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59213227A JPS6191554A (en) | 1984-10-11 | 1984-10-11 | Manufacture of humidity sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6191554A true JPS6191554A (en) | 1986-05-09 |
Family
ID=16635639
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59213227A Pending JPS6191554A (en) | 1984-10-11 | 1984-10-11 | Manufacture of humidity sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6191554A (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5426911A (en) * | 1977-08-02 | 1979-02-28 | Nippon Furnace Kogyo Kaisha Ltd | Method and apparatud for combustion in soaking pit |
| JPS554531A (en) * | 1978-06-27 | 1980-01-14 | Asahi Glass Co Ltd | Humidity sensitive element |
| JPS561579A (en) * | 1979-06-18 | 1981-01-09 | Shunpei Yamazaki | Semiconductor device |
| JPS5855744A (en) * | 1981-09-30 | 1983-04-02 | Hitachi Ltd | Electric resistance type humidity sensor |
| JPS60177254A (en) * | 1984-02-22 | 1985-09-11 | Shinei Kk | Moisture sensitive element |
-
1984
- 1984-10-11 JP JP59213227A patent/JPS6191554A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5426911A (en) * | 1977-08-02 | 1979-02-28 | Nippon Furnace Kogyo Kaisha Ltd | Method and apparatud for combustion in soaking pit |
| JPS554531A (en) * | 1978-06-27 | 1980-01-14 | Asahi Glass Co Ltd | Humidity sensitive element |
| JPS561579A (en) * | 1979-06-18 | 1981-01-09 | Shunpei Yamazaki | Semiconductor device |
| JPS5855744A (en) * | 1981-09-30 | 1983-04-02 | Hitachi Ltd | Electric resistance type humidity sensor |
| JPS60177254A (en) * | 1984-02-22 | 1985-09-11 | Shinei Kk | Moisture sensitive element |
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