JPS618850U - Valve leak detection device - Google Patents

Valve leak detection device

Info

Publication number
JPS618850U
JPS618850U JP9314484U JP9314484U JPS618850U JP S618850 U JPS618850 U JP S618850U JP 9314484 U JP9314484 U JP 9314484U JP 9314484 U JP9314484 U JP 9314484U JP S618850 U JPS618850 U JP S618850U
Authority
JP
Japan
Prior art keywords
detection device
leak detection
storage device
vibration
spectrum distribution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9314484U
Other languages
Japanese (ja)
Inventor
敏男 井上
Original Assignee
石川島播磨重工業株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 石川島播磨重工業株式会社 filed Critical 石川島播磨重工業株式会社
Priority to JP9314484U priority Critical patent/JPS618850U/en
Publication of JPS618850U publication Critical patent/JPS618850U/en
Pending legal-status Critical Current

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Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案の一実施例の系統図、第２図は弁の断面
図、第３図は振動スペクトル分布のグラフである。 １は弁ボデイ、４は弁シート部、６は振動ピックアップ
、１２は振動スペクトル分布、１３は比較・判断ロジッ
ク、１４は記憶装置、１５は弁正常時振動スペクトル分
布を示す。FIG. 1 is a system diagram of an embodiment of the present invention, FIG. 2 is a sectional view of the valve, and FIG. 3 is a graph of vibration spectrum distribution. 1 is a valve body, 4 is a valve seat portion, 6 is a vibration pickup, 12 is a vibration spectrum distribution, 13 is a comparison/judgment logic, 14 is a storage device, and 15 is a vibration spectrum distribution when the valve is normal.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 弁シート部の流体漏洩によって発生する振動を検出する
ための弁ボデイに取付けた振動ピックアップと、弁シー
ト部における流体の漏洩がない状態の振動スペクトル分
布を記録した記憶装置と、前記振動ピックアップで検出
した振動スペクトル分布と前記記憶装置に記録した振動
スペクトル分布とを比較する回路と、を備えたことを特
徴とする弁の漏洩検出装置。A vibration pickup attached to the valve body for detecting vibrations caused by fluid leakage in the valve seat, a storage device that records the vibration spectrum distribution in a state where there is no fluid leakage in the valve seat, and detection by the vibration pickup. A valve leakage detection device comprising: a circuit for comparing the vibration spectrum distribution recorded in the storage device with the vibration spectrum distribution recorded in the storage device.
JP9314484U 1984-06-21 1984-06-21 Valve leak detection device Pending JPS618850U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9314484U JPS618850U (en) 1984-06-21 1984-06-21 Valve leak detection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9314484U JPS618850U (en) 1984-06-21 1984-06-21 Valve leak detection device

Publications (1)

Publication Number Publication Date
JPS618850U true JPS618850U (en) 1986-01-20

Family

ID=30650557

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9314484U Pending JPS618850U (en) 1984-06-21 1984-06-21 Valve leak detection device

Country Status (1)

Country Link
JP (1) JPS618850U (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008032619A (en) * 2006-07-31 2008-02-14 Tsurumi Seiki:Kk Water leakage determination device, and water leakage determination method
KR20150013878A (en) 2012-07-23 2015-02-05 가부시키가이샤 후지킨 Leak detection device, and fluid controller having same
CN112629769A (en) * 2019-10-08 2021-04-09 东京毅力科创株式会社 Leak measurement system, semiconductor manufacturing system, and leak measurement method

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008032619A (en) * 2006-07-31 2008-02-14 Tsurumi Seiki:Kk Water leakage determination device, and water leakage determination method
KR20150013878A (en) 2012-07-23 2015-02-05 가부시키가이샤 후지킨 Leak detection device, and fluid controller having same
US9702781B2 (en) 2012-07-23 2017-07-11 Fujikin Incorporated Leakage detection device and fluid controller including same
CN112629769A (en) * 2019-10-08 2021-04-09 东京毅力科创株式会社 Leak measurement system, semiconductor manufacturing system, and leak measurement method
JP2021060322A (en) * 2019-10-08 2021-04-15 東京エレクトロン株式会社 Leakage measuring system, semiconductor manufacturing system, and method for measuring leakage
US12014942B2 (en) 2019-10-08 2024-06-18 Tokyo Electron Limited Leak measurement system, semiconductor manufacturing system, and leak measurement method

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