JPS6188235U - - Google Patents
Info
- Publication number
- JPS6188235U JPS6188235U JP17244384U JP17244384U JPS6188235U JP S6188235 U JPS6188235 U JP S6188235U JP 17244384 U JP17244384 U JP 17244384U JP 17244384 U JP17244384 U JP 17244384U JP S6188235 U JPS6188235 U JP S6188235U
- Authority
- JP
- Japan
- Prior art keywords
- container
- cleaned
- holder
- pair
- registration request
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 2
- 238000005507 spraying Methods 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Description
第1図はこの考案のマスク洗浄装置の一実施例
の平面図、第2図は第1図のA−A′線の断面図
である。
1……マスク基板、2……マスクホルダ、4…
…モータ、5……ベルト、6……上部アーム、7
……下部アーム、8……上部ノズル、9……下部
ノズル、10〜13……排水口、20……容器。
FIG. 1 is a plan view of an embodiment of the mask cleaning apparatus of this invention, and FIG. 2 is a sectional view taken along line A-A' in FIG. 1...mask substrate, 2...mask holder, 4...
...Motor, 5...Belt, 6...Upper arm, 7
... lower arm, 8 ... upper nozzle, 9 ... lower nozzle, 10 to 13 ... drain port, 20 ... container.
Claims (1)
付けるホルダと、上記容器内において上記ホルダ
の表裏面側に配設され同時に高圧水を上記被洗浄
物に噴射する一対のノズルとよりなるマスク洗浄
装置。 A mask cleaning device comprising: a holder rotatably provided in a container to which an object to be cleaned is attached; and a pair of nozzles arranged on the front and back sides of the holder in the container and simultaneously spraying high-pressure water onto the object to be cleaned. Device.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17244384U JPS6188235U (en) | 1984-11-15 | 1984-11-15 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17244384U JPS6188235U (en) | 1984-11-15 | 1984-11-15 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6188235U true JPS6188235U (en) | 1986-06-09 |
Family
ID=30730109
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17244384U Pending JPS6188235U (en) | 1984-11-15 | 1984-11-15 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6188235U (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63177034U (en) * | 1987-05-06 | 1988-11-16 | ||
JPS63177031U (en) * | 1987-05-06 | 1988-11-16 |
-
1984
- 1984-11-15 JP JP17244384U patent/JPS6188235U/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63177034U (en) * | 1987-05-06 | 1988-11-16 | ||
JPS63177031U (en) * | 1987-05-06 | 1988-11-16 |