JPS6170937U - - Google Patents
Info
- Publication number
- JPS6170937U JPS6170937U JP15655384U JP15655384U JPS6170937U JP S6170937 U JPS6170937 U JP S6170937U JP 15655384 U JP15655384 U JP 15655384U JP 15655384 U JP15655384 U JP 15655384U JP S6170937 U JPS6170937 U JP S6170937U
- Authority
- JP
- Japan
- Prior art keywords
- storage
- semiconductor wafers
- storage container
- semiconductor
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 4
- 239000004065 semiconductor Substances 0.000 claims 3
Landscapes
- Packaging Frangible Articles (AREA)
- Warehouses Or Storage Devices (AREA)
Description
第１図は本発明の実施例を示す斜視図である。 １…収納容器本体、２…溝。 FIG. 1 is a perspective view showing an embodiment of the present invention. 1...Storage container body, 2...Groove.
Claims (1)
エハーの収納ピツチを統一規格化するとともに、
該本体内に、ウエハーサイズに応じて大きさの異
なる半導体ウエハー収納用溝を設けたことを特徴
とする半導体ウエハーの収納容器。 In addition to standardizing at least the external shape of the storage container body and the storage pitch of semiconductor wafers,
A storage container for semiconductor wafers, characterized in that the main body is provided with semiconductor wafer storage grooves of different sizes depending on the wafer size.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15655384U JPS6170937U (en) | 1984-10-17 | 1984-10-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15655384U JPS6170937U (en) | 1984-10-17 | 1984-10-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6170937U true JPS6170937U (en) | 1986-05-15 |
Family
ID=30714558
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15655384U Pending JPS6170937U (en) | 1984-10-17 | 1984-10-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6170937U (en) |
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1984
- 1984-10-17 JP JP15655384U patent/JPS6170937U/ja active Pending