JPS6166943U - - Google Patents
Info
- Publication number
- JPS6166943U JPS6166943U JP15172884U JP15172884U JPS6166943U JP S6166943 U JPS6166943 U JP S6166943U JP 15172884 U JP15172884 U JP 15172884U JP 15172884 U JP15172884 U JP 15172884U JP S6166943 U JPS6166943 U JP S6166943U
- Authority
- JP
- Japan
- Prior art keywords
- silicon wafer
- lid
- tip side
- protruding
- brought
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 4
- 229910052710 silicon Inorganic materials 0.000 claims description 4
- 239000010703 silicon Substances 0.000 claims description 4
- 229920003002 synthetic resin Polymers 0.000 claims 1
- 239000000057 synthetic resin Substances 0.000 claims 1
- 230000037431 insertion Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
Landscapes
- Packaging Frangible Articles (AREA)
Description
図面において、第１図は本案容器の断面図、第
２図は容器主体の一部省略した平面図、第３図は
蓋の一部斜面図、第４図は抑え片の先端辺とシリ
コンウエハ周縁との接触を示す要部の側面図であ
る。
〔符号の説明〕１…容器主体、２，３…挿着リ
ブ、４…突縁、５…蓋、６…嵌合溝、７，８…抑
え片、９…窓孔、１０…先端辺、１１…シリコン
ウエハ。
In the drawings, Fig. 1 is a cross-sectional view of the proposed container, Fig. 2 is a partially omitted plan view of the main body of the container, Fig. 3 is a partial oblique view of the lid, and Fig. 4 shows the tip of the holding piece and the silicon wafer. FIG. 3 is a side view of a main part showing contact with a peripheral edge. [Explanation of symbols] 1... Container main body, 2, 3... Insertion rib, 4... Projection, 5... Lid, 6... Fitting groove, 7, 8... Holding piece, 9... Window hole, 10... Tip side, 11...Silicon wafer.
Claims (1)
した二枚平行の抑え片７，８に窓孔９の並設で先
端辺１０を形成し、この先端辺１０を容器主体１
内に装着したシリコンウエハ１１の各々の周縁に
接触せしめることを特徴とするシリコンウエハ収
納容器。 A tip side 10 is formed by arranging window holes 9 in two parallel holding pieces 7 and 8 protruding in the axial direction on the inner surface of the lid 5 made of synthetic resin.
A silicon wafer storage container that is brought into contact with the periphery of each silicon wafer 11 mounted therein.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15172884U JPS6166943U (en) | 1984-10-09 | 1984-10-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15172884U JPS6166943U (en) | 1984-10-09 | 1984-10-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6166943U true JPS6166943U (en) | 1986-05-08 |
Family
ID=30709826
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15172884U Pending JPS6166943U (en) | 1984-10-09 | 1984-10-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6166943U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8858986B2 (en) | 2008-06-12 | 2014-10-14 | 3M Innovative Properties Company | Biocompatible hydrophilic compositions |
| US9194065B2 (en) | 2009-12-17 | 2015-11-24 | 3M Innovative Properties Company | Dimensionally stable nonwoven fibrous webs and methods of making and using the same |
| US9416485B2 (en) | 2009-12-17 | 2016-08-16 | 3M Innovative Properties Company | Process of making dimensionally stable nonwoven fibrous webs |
| US9487893B2 (en) | 2009-03-31 | 2016-11-08 | 3M Innovative Properties Company | Dimensionally stable nonwoven fibrous webs and methods of making and using the same |
-
1984
- 1984-10-09 JP JP15172884U patent/JPS6166943U/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8858986B2 (en) | 2008-06-12 | 2014-10-14 | 3M Innovative Properties Company | Biocompatible hydrophilic compositions |
| US9487893B2 (en) | 2009-03-31 | 2016-11-08 | 3M Innovative Properties Company | Dimensionally stable nonwoven fibrous webs and methods of making and using the same |
| US9194065B2 (en) | 2009-12-17 | 2015-11-24 | 3M Innovative Properties Company | Dimensionally stable nonwoven fibrous webs and methods of making and using the same |
| US9416485B2 (en) | 2009-12-17 | 2016-08-16 | 3M Innovative Properties Company | Process of making dimensionally stable nonwoven fibrous webs |