JPS6166128A - Two-dimensional pyroelectric type image sensor - Google Patents
Two-dimensional pyroelectric type image sensorInfo
- Publication number
- JPS6166128A JPS6166128A JP18848584A JP18848584A JPS6166128A JP S6166128 A JPS6166128 A JP S6166128A JP 18848584 A JP18848584 A JP 18848584A JP 18848584 A JP18848584 A JP 18848584A JP S6166128 A JPS6166128 A JP S6166128A
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- Japan
- Prior art keywords
- pyroelectric
- electrode
- image sensor
- dimensional
- straight line
- Prior art date
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- Granted
Links
- 238000001514 detection method Methods 0.000 claims description 28
- 230000035945 sensitivity Effects 0.000 abstract description 4
- 238000000034 method Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229910052573 porcelain Inorganic materials 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910018487 Ni—Cr Inorganic materials 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- NKZSPGSOXYXWQA-UHFFFAOYSA-N dioxido(oxo)titanium;lead(2+) Chemical compound [Pb+2].[O-][Ti]([O-])=O NKZSPGSOXYXWQA-UHFFFAOYSA-N 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- 238000010329 laser etching Methods 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14665—Imagers using a photoconductor layer
- H01L27/14669—Infrared imagers
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Radiation Pyrometers (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、画像処理装置などに適用するための二次元焦
電型イメージセンサに関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a two-dimensional pyroelectric image sensor for application to image processing devices and the like.
焦電型イメージセンサとしては、スリットによって所定
方向に焦電素子を並列形成した焦電素子群を支持基板に
接続固定し、焦電素子からの出力を電極により時系列信
号としてｊ４Ｖ、出すものがある（例えば、特開昭５８
−１２０８３０号公報）。A pyroelectric image sensor has a group of pyroelectric elements formed in parallel in a predetermined direction using slits, which is connected and fixed to a support substrate, and the output from the pyroelectric elements is output as a time series signal by electrodes at 4V. (For example, Japanese Patent Application Laid-Open No. 1983
-120830).
しかしながら、上記センサは一次元の信号を取出すもの
であり、二次元の信号を取出せるようにしようとすれば
、支持基板の多数を、焦電素子の並列方向と直交する方
向に並置し、例えば、焦電素子の並列方向をＸ方向に、
−そして、支持基板の並置方向をＹ方向にといったよう
にして信号を取出さざるを得ない。However, the above-mentioned sensor extracts a one-dimensional signal, and in order to be able to extract a two-dimensional signal, a large number of supporting substrates are arranged in parallel in a direction perpendicular to the parallel direction of the pyroelectric elements, for example. , the parallel direction of the pyroelectric elements is in the X direction,
-Then, the signal must be extracted by arranging the supporting substrates in the Y direction.
ところが、焦電素子の並設ピッチかＸ方向とＹ方向とで
異なり、画像処理を行うためには種々の補正を加えなけ
ればならず、実用上問題かある。However, the pitch at which the pyroelectric elements are arranged in parallel differs between the X direction and the Y direction, and various corrections must be made in order to perform image processing, which poses a practical problem.
本発明は、上記の点に鑑み、単体としての二次元焦電型
イメージセンサを、解像度高くして提供しようとするも
のである。In view of the above points, the present invention aims to provide a two-dimensional pyroelectric image sensor as a single unit with high resolution.
本発明の二次元焦電型イメージセンサは、上記問題点を
解決するために、焦電体板に、縦横に所定間隔をへだて
てその表裏面を貫通する空間を形成し、縦横の一方にお
いて、隣り合う前記空間に挾まれたすべてあるいは所定
の箇所を検出部とし、縦横の一方で所定間隔をへだてた
第１仮想直線上に夫々位置する前記検出部のすべてと、
前記焦電体板の表側に設けた第１の電極とを接続し、か
つ、縦横の他方で所定間隔をへだてた第２仮想直線上に
夫々位置する前記検出部のすべてと、前記焦電体板の裏
側に設けた第２の電極とを接続して構成するという手段
を採用する。In order to solve the above-mentioned problems, the two-dimensional pyroelectric image sensor of the present invention forms a space in the pyroelectric plate that penetrates the front and back surfaces of the pyroelectric plate at a predetermined interval in the vertical and horizontal directions, and in one of the vertical and horizontal directions, All or a predetermined location sandwiched between the adjacent spaces are used as detection portions, and all of the detection portions are respectively located on a first imaginary straight line separated by a predetermined interval in either the vertical or horizontal directions;
All of the detection units connected to the first electrode provided on the front side of the pyroelectric plate and located respectively on second imaginary straight lines separated by a predetermined distance in the other vertical and horizontal directions, and the pyroelectric body A method is adopted in which the electrode is connected to a second electrode provided on the back side of the plate.
つまり、例えば、多数並んだ第１の電極をＹ方向成分と
し、他方の多数並んだ第２の電極をＸ方向成分とし、空
間によって互いに分離された検出部からの信号に基き、
Ｘ方向とＹ方向、即ち、二次元方向での位置を検出し、
例えば、画像処理などに有効に利用するのである。That is, for example, a first electrode arranged in large numbers is used as a Y-direction component, and a large number of arranged second electrodes are used as an X-direction component, and based on signals from detection units separated from each other by space,
Detects the position in the X direction and Y direction, that is, the two-dimensional direction,
For example, it is effectively used for image processing.
次に、本発明の実施例を図面に基いて説明する。 Next, embodiments of the present invention will be described based on the drawings.
第１図は本発明に係る二次元焦電型イメージセンサの第
］実施例を示し、第１図の（ａ）は平面図、第１図の（
ｂ）は第１１図（ａ）のＸ−Ｘ線断面図である。FIG. 1 shows a second embodiment of a two-dimensional pyroelectric image sensor according to the present invention, and FIG. 1(a) is a plan view, and FIG.
b) is a sectional view taken along the line X--X of FIG. 11(a).
１は、例えば、チタン酸ジルコン酸鉛系磁器、チタン酸
鉛系磁器、ＬユＴａＯ３、ＰＶＦ２７どを材料として、
通常公知の方法によって得られる５０μｍ以下の厚みの
焦電体板である。四角形状の焦電体板１には、縦横夫々
に所定間隔をへだてて、その表裏面を貫通する矩形状の
空間２・・が形成されている。空間２・・夫々の長辺部
分２ａ・が隣り合う箇所夫々には焦電体板１の表裏面に
電極が形成され、表面側の電極の上には熱吸収膜が形成
されて検出部３が構成されている。前記空間２・・ば、
Ｃ０２レーザ、ＹＡＧレーザなどによってカットすると
か、化学エソナングやプラズマエツナング、あるいは、
化学エンチングとレーザエツチングとを併用してカット
するなど各種の手段が採用可能である。また、検出部３
の一部を構成する熱吸収膜としては、Ｎｉ−Ｃｒ、白金
黒、カーボン系塗料・金属悪材料など各種材料を用いて
形成できる。1 is made of, for example, lead zirconate titanate porcelain, lead titanate porcelain, L-TaO3, PVF27, etc.
This is a pyroelectric plate having a thickness of 50 μm or less and obtained by a commonly known method. A rectangular pyroelectric plate 1 has rectangular spaces 2 extending through its front and back surfaces at predetermined intervals vertically and horizontally. Electrodes are formed on the front and back surfaces of the pyroelectric plate 1 at the locations where the long side portions 2a of the spaces 2 are adjacent to each other, and a heat absorbing film is formed on the electrodes on the front surface side. is configured. The space 2...
Cutting with C02 laser, YAG laser, etc., chemical etsonization, plasma etsonization, or
Various methods can be employed, such as cutting using a combination of chemical etching and laser etching. In addition, the detection unit 3
The heat absorbing film constituting a part of the heat absorbing film can be formed using various materials such as Ni-Cr, platinum black, carbon-based paint, and metal-poor materials.
前記検出部３・・は、所定間隔をへだでて、横方向即ち
空間２の短辺部分２ｂをつなぐ直線と平行外方向に向か
った第１仮想直線Ｌ１・・上に夫々並置されるとともに
、その第１仮想直線り、・・に直交する状態の、所定間
隔をへだでた縦方向の第２仮想直線Ｌ２・上に夫々並置
されている。The detection units 3 are arranged side by side on a first imaginary straight line L1 extending outward by a predetermined distance and parallel to the straight line connecting the short side portions 2b of the space 2. , the first virtual straight line, .
前記第１仮想直線Ｌ１・・と平行に空間２，２の隣り合
う短辺部分２ｂ、２ｂ間夫々を通る状態で、焦電体板１
の表側に第１の電極４・が設けられ、その第１の電極４
・・夫々において、図面上で上側に位置する第１仮想直
線Ｌ１上に配置された検出部３・・の表面側の電極すべ
てが接続されている。また、前記第２仮想直線Ｌ２・・
と平行で、かつ、検出部３・・の裏側を通る状態で、焦
電体板１の裏側に第２の電極５・・が設けられ、その第
２の電極５・・夫々において、表側に対応位置する第２
仮想直線Ｌ２上に配置された検出部３・・の裏面側の電
極すべてが接続されている。The pyroelectric plate 1 passes through the adjacent short side portions 2b, 2b of the spaces 2, 2 in parallel with the first imaginary straight line L1...
A first electrode 4 is provided on the front side of the
. . , all electrodes on the surface side of the detection unit 3 . Further, the second virtual straight line L2...
A second electrode 5 is provided on the back side of the pyroelectric plate 1 in parallel with and passing through the back side of the detection unit 3. 2nd corresponding position
All the electrodes on the back side of the detection unit 3 arranged on the virtual straight line L2 are connected.
前記第１および第２の電極４・・、５・・夫々は、フォ
トリソグラフィー技術によって形成されるものである。The first and second electrodes 4, 5, . . . are formed by photolithography.
前記焦電体板１の裏側の周部所定箇所に、前記検出部３
・・から離れて支持台６が設けられ、検出部３・・を熱
的に良好に分離し、その感度を高めるように構成されて
いる。The detection unit 3 is installed at a predetermined location on the periphery of the back side of the pyroelectric plate 1.
A support stand 6 is provided apart from the detecting sections 3..., and is configured to thermally isolate the detecting sections 3... to improve their sensitivity.
なお、図示しないが、第１の電極４・・ならびに第２の
電極５・・夫々の端部にリード線がボンディングなどに
より接続される。Although not shown, lead wires are connected to the ends of the first electrodes 4 and the second electrodes 5 by bonding or the like.
第２図は、本発明の第２実施例を示し、横方向に所定間
隔をへだてて形成された空間２・・の長手方向一端側ど
うしを更に別の空間７によってつなげ、かつ、切込みに
より、焦電体板１と検出部３の連結部の横断面積を小さ
くしており、焦電体板１に対して片持支持状態で検出部
３・・が構成されている。第１仮想直線Ｌ１・・夫々上
に配置された検出部３・・の表側の電極のすべてが、図
面上で左側に位置する第１の電極４に接続され、また、
第２仮想直線Ｌ２ 夫々に配置された検出部３・・の
裏側の電極のすべてが、図面」二で上側に位置する第２
の電極５に接続されている。FIG. 2 shows a second embodiment of the present invention, in which one longitudinal end of a space 2 formed at a predetermined distance in the lateral direction is connected by another space 7, and by a cut, The cross-sectional area of the connecting portion between the pyroelectric plate 1 and the detection section 3 is made small, and the detection sections 3 are configured in a cantilevered state with respect to the pyroelectric plate 1. All the electrodes on the front side of the detection unit 3 disposed on the first virtual straight line L1 are connected to the first electrode 4 located on the left side in the drawing, and
Second imaginary straight line L2 All of the electrodes on the back side of the detection units 3 arranged respectively are connected to the second virtual straight line L2 located on the upper side in the drawing.
is connected to the electrode 5 of.
この第２実施例によれば、検出部３・・夫々からの熱拡
散を良好に防止でき、解像度をより一層高められる利点
がある。According to this second embodiment, there is an advantage that heat diffusion from each of the detection sections 3 can be effectively prevented, and resolution can be further improved.
第３図は本発明の第３実施例を示し、前記空間２・・夫
々がアングル状で、検出部３・・が縦方向で両持ちであ
りながら、その連結部の横断面積の総和を極力小にし、
機械的強度を極力低下させずに検出部３・・からの熱拡
散を良好に防止するように構成されている。FIG. 3 shows a third embodiment of the present invention, in which the spaces 2 are each shaped like an angle, and the detection portion 3 is supported on both sides in the vertical direction, but the total cross-sectional area of the connecting portions is minimized as much as possible. Make it smaller;
It is configured to satisfactorily prevent heat diffusion from the detection section 3 without reducing mechanical strength as much as possible.
第４図は、上記二次元焦電型イメージセンサの適用例を
模式的に示したものである。前記の第１の電極４の各々
が、インピーダンス変換用ＦＫＴのゲート電極Ｇに接続
され、他方前記の第２の電極５が、スイッチングＦＥＴ
を通して接地されている。FIG. 4 schematically shows an application example of the two-dimensional pyroelectric image sensor. Each of the first electrodes 4 is connected to the gate electrode G of the FKT for impedance conversion, while the second electrode 5 is connected to the gate electrode G of the FKT for impedance conversion.
is grounded through.
熱（赤外線）を感知した検出部３が焦電効果により電荷
を発生し、Ｘ方向の走査に伴ない検出部３夫々に対応す
るＹ方向の位置信号をそれぞれのソースＳから並列信号
として取り出して画像処理を行なうように回路が構成さ
れている。The detection unit 3 that senses heat (infrared rays) generates a charge due to the pyroelectric effect, and as the detection unit 3 scans in the X direction, position signals in the Y direction corresponding to each detection unit 3 are extracted as parallel signals from each source S. A circuit is configured to perform image processing.
図中格子模様の実線が第１および第２の電極４゜５を示
し、その交点が検出部３を示す。In the figure, solid lines in a lattice pattern indicate the first and second electrodes 4°5, and their intersections indicate the detection section 3.
駆動回路について詳述すればＹ；＋５向の出方端子８が
、第１の電極４の夫々に対応させて、ＦＫＴのゲート電
極０に接線されていて、Ｘ方向の出力端子９が第２の電
極５の夫々に対応させてスイッチングＦＥＴ （ｘＩ・
・ｘｎ）を介して接地されている。To explain the drive circuit in detail, output terminals 8 in the Y; A switching FET (xI・
・xn).
第５図は駆動回路の他の例を示し、イメージセンサを時
系列に駆動させるものである。第１の電極４が、スイッ
チＳｙ、、Ｓｙ２・・Ｓ Ｙｎを介して接地され、第２
の電極５がスイッチＳ Ｘ、・・ＥＩ Ｘｎを介して、
ＦＫＴのゲート電極Ｇに接続されている。ＦＫＴ［は、
ドレイン電極りがら直流電圧が印加されており、検出部
３で発生した電荷により抵抗Ｒｇに電流が流れて電圧が
発生する。電荷の読み出し方法を第６図にもとづいて説
明すると以下の様になる。スイッチＳｙ、、Ｓｙ２・・
Ｓ Ｙｎは、順次に一定期間だけ閉となり、その期間中
にＳＸ、、ＳＸ２・・ＳＸｎがｊＩＩ＠次に閉となるこ
とにより、ＳＹが閉となっている電極４とＳＸが閉表な
っている電極５の交点における信号が、順次読み出され
ていく。ＦＥＴのゲートに発生した電圧は、ＦＥＴのソ
ース・フォロワ回路によりインピーダンス変換され、時
系列に発生した電圧Ｒｓの両端の電圧変化として、直流
バイアス電圧に重畳して交流信号がソース電極Ｓより順
次取出される。したがって、この駆動回路によって、イ
メージセンサ全域で熱（赤外線）を受ければ出力信号が
現われ、またイメージセンサの一部で熱（赤外線）を受
ければ、対応した出力信号が現われる。もし、赤外線を
放射する物体が静止物体であれば、焦電体板１０表側、
つまり、第１の電極８・・に対向する位置に温度変化を
発生させるためのチョッパを設ける必要力ある。FIG. 5 shows another example of the drive circuit, which drives the image sensor in time series. The first electrode 4 is grounded via switches Sy, Sy2...SYn, and the second
The electrodes 5 of
It is connected to the gate electrode G of FKT. FKT [is,
A DC voltage is applied across the drain electrode, and the charge generated in the detection section 3 causes a current to flow through the resistor Rg, generating a voltage. The method of reading out charges will be explained below based on FIG. Switch Sy,, Sy2...
SYn is sequentially closed for a certain period of time, and during that period, SX, SX2...SXn are closed next, so that electrode 4 and SX, where SY is closed, become closed. The signals at the intersections of the electrodes 5 are sequentially read out. The voltage generated at the gate of the FET is impedance-converted by the source follower circuit of the FET, and an AC signal is sequentially extracted from the source electrode S by being superimposed on the DC bias voltage as a voltage change across the voltage Rs generated in time series. be done. Therefore, with this drive circuit, if the entire image sensor receives heat (infrared rays), an output signal will appear, and if a part of the image sensor receives heat (infrared rays), a corresponding output signal will appear. If the object that emits infrared rays is a stationary object, the front side of the pyroelectric plate 10,
In other words, it is necessary to provide a chopper for generating a temperature change at a position facing the first electrodes 8 .
この場合、スイッチＳ Ｙ、・・Ｓ Ｙｎ＋ ｓ ｘ
、・・Ｓ Ｘｎを開閉する周期、即ち、走査速度はチョ
ッパによるチョッピングより数倍速く作動させることが
好ましい。赤外線を放射する物体が移動するものあるい
は熱変化するものであれば、対象物体の移動速度あるい
は熱変化速度よりも走査速度を数倍速くすることか好ま
しい。In this case, switches S Y,...S Yn+s x
,...S It is preferable that the opening/closing cycle of Xn, that is, the scanning speed, be operated several times faster than chopping by a chopper. If the object that emits infrared rays is moving or thermally changing, it is preferable to make the scanning speed several times faster than the moving speed or thermal changing speed of the target object.
第７図は本発明の二次元焦電型イメージセンサの適用例
の変形例を模式的に示し、前記空間２・・で挾まれた箇
所のうちの適当な数箇所（図面中黒丸で示す）Ｋは熱吸
収膜を形成せずに非感熱部１１・・を構成し、その非感
熱部１１・・から振動信号のみを取出すように構成され
ている。そして、この非感熱部１１・・からの振動信号
に基いてセンザ全体の振動信号を演算処理し、検１−Ｈ
部３・から取出される信号中に雑音として混じっている
振動信号を補正し、感度および解像度をより一層高める
ことができるように構成されている。FIG. 7 schematically shows a modification of the application example of the two-dimensional pyroelectric image sensor of the present invention, in which several appropriate locations (indicated by black circles in the drawing) among the locations sandwiched by the space 2. K constitutes a non-heat-sensitive portion 11 without forming a heat-absorbing film, and is configured to extract only vibration signals from the non-heat-sensitive portion 11. Then, the vibration signal of the entire sensor is processed based on the vibration signal from the non-thermal part 11...
It is configured to correct the vibration signal mixed as noise in the signal taken out from the section 3, thereby further increasing the sensitivity and resolution.
以上説明したように、本発明の二次元焦電型イメージセ
ンサによれば、単体でありなから二次元方向での位置を
検出でき、画像の検知などをも良好に行える新規な焦電
型イメージセンサを提供できた。しかも、隣り合う検出
部か、空間により互いに熱的に分離されており、熱に・
よる相互干渉、いわゆるクロストークを抑制できて解像
度ならび 、に感度のいずれをも高められるようにな
った。As explained above, the two-dimensional pyroelectric image sensor of the present invention is a novel pyroelectric image sensor that can detect the position in two-dimensional directions even though it is a single unit, and can also perform image detection well. We were able to provide the sensor. Moreover, adjacent detection parts are thermally separated from each other by a space, so they are not susceptible to heat.
It has become possible to suppress mutual interference, so-called crosstalk, and increase both resolution and sensitivity.
第１図は本発明の第１実施例を示し、第］−図（ａ）は
平面図、第１図（ｂ）は第１図（ａ）のＸ−Ｘ線断面図
、第２図は本発明の第２実施例の平面図、第３図は本発
明の第３実施例の平面図、第４図は本発明を適用した画
像処理装置を示し、駆動回路と共に示した模式図である
。第５図は駆動回路の他の例を示す回路図、第６図は電
荷の読み出し方法を説明する図、第７図は変形例を示す
模式図である。
１・・焦電体板、２・・空間、３・・検出部、４・・第
１の電極、５・・第２の電極、Ｌｌ・・第１仮想直線、
Ｔ、・・第２仮想直線。
出 願 人 株式会社村田製作所
代 理 人 弁理士岡田和秀FIG. 1 shows a first embodiment of the present invention, where FIG. 1A is a plan view, FIG. FIG. 3 is a plan view of a second embodiment of the present invention, FIG. 3 is a plan view of a third embodiment of the present invention, and FIG. 4 is a schematic diagram showing an image processing device to which the present invention is applied, together with a drive circuit. . FIG. 5 is a circuit diagram showing another example of the drive circuit, FIG. 6 is a diagram explaining a charge reading method, and FIG. 7 is a schematic diagram showing a modification. 1... Pyroelectric plate, 2... Space, 3... Detection unit, 4... First electrode, 5... Second electrode, Ll... First virtual straight line,
T,...second virtual straight line. Applicant: Murata Manufacturing Co., Ltd. Agent: Kazuhide Okada, patent attorney
Claims (1)
面を貫通する空間を形成し、縦横の一方において、隣り
合う前記空間に挾まれたすべてあるいは所定の箇所を検
出部とし、縦横の一方で所定間隔をへだてた第１仮想直
線上に夫々に位置する前記検出部のすべてと、前記焦電
体板の表側に設けた第１の電極とを接続し、かつ、縦横
の他方で所定間隔をへだてた第２仮想直線上に夫々位置
する前記検出部のすべてと、前記焦電体板の裏側に設け
た第２の電極とを接続してなる二次元焦電型イメージセ
ンサ。(1) A space is formed in the pyroelectric plate at a predetermined interval vertically and horizontally and passes through the front and back surfaces thereof, and in one of the vertical and horizontal directions, all or a predetermined location sandwiched between the adjacent spaces is used as a detection part, Connecting all of the detection units located respectively on a first imaginary straight line separated by a predetermined interval on one of the vertical and horizontal directions and the first electrode provided on the front side of the pyroelectric plate, and connecting the first electrode on the other side of the vertical and horizontal direction. A two-dimensional pyroelectric image sensor in which all of the detection parts located on second virtual straight lines separated by a predetermined interval are connected to a second electrode provided on the back side of the pyroelectric plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18848584A JPS6166128A (en) | 1984-09-07 | 1984-09-07 | Two-dimensional pyroelectric type image sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18848584A JPS6166128A (en) | 1984-09-07 | 1984-09-07 | Two-dimensional pyroelectric type image sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6166128A true JPS6166128A (en) | 1986-04-04 |
| JPH0548404B2 JPH0548404B2 (en) | 1993-07-21 |
Family
ID=16224554
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18848584A Granted JPS6166128A (en) | 1984-09-07 | 1984-09-07 | Two-dimensional pyroelectric type image sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6166128A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002081990A (en) * | 2000-09-08 | 2002-03-22 | Matsushita Electric Works Ltd | Pyroelectric infrared sensor |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57120830A (en) * | 1981-01-20 | 1982-07-28 | Matsushita Electric Ind Co Ltd | Detecting element for pyroelectric type linear array infrared ray and its preparation |
-
1984
- 1984-09-07 JP JP18848584A patent/JPS6166128A/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57120830A (en) * | 1981-01-20 | 1982-07-28 | Matsushita Electric Ind Co Ltd | Detecting element for pyroelectric type linear array infrared ray and its preparation |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002081990A (en) * | 2000-09-08 | 2002-03-22 | Matsushita Electric Works Ltd | Pyroelectric infrared sensor |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0548404B2 (en) | 1993-07-21 |
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| EXPY | Cancellation because of completion of term |