JPS6160609B2 - - Google Patents

Info

Publication number
JPS6160609B2
JPS6160609B2 JP50108488A JP10848875A JPS6160609B2 JP S6160609 B2 JPS6160609 B2 JP S6160609B2 JP 50108488 A JP50108488 A JP 50108488A JP 10848875 A JP10848875 A JP 10848875A JP S6160609 B2 JPS6160609 B2 JP S6160609B2
Authority
JP
Japan
Prior art keywords
frequency
face
adjustment
amount
torsional
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP50108488A
Other languages
Japanese (ja)
Other versions
JPS5232651A (en
Inventor
Yoshihiro Masuyama
Yoshihiko Kasai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP10848875A priority Critical patent/JPS5232651A/en
Publication of JPS5232651A publication Critical patent/JPS5232651A/en
Publication of JPS6160609B2 publication Critical patent/JPS6160609B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H03H3/04Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Description

【発明の詳細な説明】 本発明はメカニカルフイルタにおいて使用する
捩りモード振動子の共振周波数調整方法に関する
ものである。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for adjusting the resonance frequency of a torsional mode oscillator used in a mechanical filter.

メカニカルフイルタは機械振動子の安定な高選
択度共振特性を利用して非常に急峻な選択度特性
を有する帯域波器を構成せしめたものであつ
て、インダクタとコンデンサとからなる波器に
比べて小形で堅牢でありさらに安定であつてしか
も高性能のものが得られるという特長をもつてい
る。
A mechanical filter utilizes the stable, high-selectivity resonance characteristics of a mechanical oscillator to construct a bandpass filter with very steep selectivity characteristics, and compared to a waveform filter made of an inductor and a capacitor. It has the characteristics of being small, robust, stable, and high-performance.

近年通信技術の発展にともなつて装置の小形
化、高性能化が要求されておりメカニカルフイル
タもその例外でなく小形化高性能化が要求されて
いる。メカニカルフイルタにおいて高性能特性を
実現するためには構成部品の定数をいかに計算値
と備差を少くして組立てるかが必要であつて特に
機械振動子の調整が必要となる。
In recent years, with the development of communication technology, devices have been required to be smaller and have higher performance, and mechanical filters are no exception to this, and are required to be smaller and have higher performance. In order to achieve high performance characteristics in a mechanical filter, it is necessary to calculate the constants of the component parts and how to assemble them with little difference, and in particular, it is necessary to adjust the mechanical oscillator.

周波数が100KHz以上のメカニカルフイルタに
おいては縦振動子、捩り振動子が広く用いられて
いるが捩り振動子の方が小形化でき且つ空気圧に
よる振動損失の影響がほとんどないことから有利
であつて一般に広く使用されている。この捩りモ
ード振動子を使用したメカニカルフイルタにおい
てその波特性(共振周波数)を調整するにあた
つて従来捩りモード振動子の長さを削り目的の周
波数に特性を合せたものを使用していた。
For mechanical filters with a frequency of 100 KHz or higher, longitudinal oscillators and torsional oscillators are widely used, but torsional oscillators are more advantageous and widely used because they can be made smaller and have almost no effect of vibration loss due to air pressure. It is used. In order to adjust the wave characteristics (resonant frequency) of a mechanical filter using this torsional mode oscillator, conventionally the length of the torsional mode oscillator was reduced to match the characteristics to the desired frequency. .

しかしながら捩りモード振動子の長さを変えて
周波数を調整する従来の捩りモード振動子の共振
周波数調整方法は周波数を大幅に変化させる場合
には都合がよいが高性能メカニカルフイルタを実
現するために要求される1〜10Hz程度の周波数精
度に調整することは加工量が少くなるために非常
に困難である。たとえば共振周波数を100KHzに
おいて10Hz変化させる場合長さの変動量は約1.5
μmであるから捩りモード振動子の周波数を高精
度に効率よく合せることは困難である。
However, the conventional method of adjusting the resonant frequency of a torsional mode oscillator, in which the frequency is adjusted by changing the length of the torsional mode oscillator, is convenient when changing the frequency significantly, but is required to realize a high-performance mechanical filter. It is extremely difficult to adjust the frequency accuracy to about 1 to 10 Hz, as the amount of processing required is small. For example, when changing the resonance frequency by 10Hz at 100KHz, the amount of change in length is approximately 1.5
μm, it is difficult to efficiently match the frequency of the torsional mode oscillator with high precision.

本発明の目的は周波数を高精度に効率よく調整
して前記の欠点を解消した捩りモード振動子の共
振周波数調整方法を提供することにある。
SUMMARY OF THE INVENTION An object of the present invention is to provide a method for adjusting the resonance frequency of a torsional mode vibrator, which eliminates the above-mentioned drawbacks by efficiently adjusting the frequency with high precision.

本発明によれば捩りモード振動子端面からほゞ
同一の質量を複数個所局部的に削り取る加工を行
ない、共振周波数を調整する捩りモード振動子の
共振周波数調整方法において、前記加工による共
振周波数の変化量が、捩りモード振動子端面中央
からの距離のほゞ二乗に比例することを利用し、
調整の順序をまず端面の外周近くの位置を加工し
て1回あたりの周波数変化量を大きくとつて調整
速度を上げ、目標周波数に近づくにつれて加工位
置を変え端面中央位置に近い点で加工を行ない調
整精度を高めることを特徴とする捩りモード振動
子の共振周波数調整方法が提案される。
According to the present invention, in a method for adjusting the resonant frequency of a torsional mode vibrator in which the resonant frequency is adjusted by performing a process of locally scraping substantially the same mass at a plurality of locations from the end face of the torsional mode vibrator, the change in the resonant frequency due to the process is performed. Utilizing the fact that the amount is approximately proportional to the square of the distance from the center of the torsional mode oscillator end face,
The order of adjustment is to first process a position near the outer periphery of the end face to increase the amount of frequency change per cycle to increase the adjustment speed, and as the target frequency approaches, change the processing position and perform processing at a point close to the center position of the end face. A method for adjusting the resonant frequency of a torsion mode oscillator is proposed, which is characterized by increasing adjustment accuracy.

以下本発明にかかる捩りモード振動子の共振周
波数調整方法の実施例について図面により詳細に
説明する。
Embodiments of the method for adjusting the resonance frequency of a torsion mode vibrator according to the present invention will be described in detail below with reference to the drawings.

捩り振動子1は第1図に示すように振動してお
り端面において中心0からの距離xにより捩れ変
位が異なるために振動子端面を局部的に削つた場
合中心0からの距離により周波数変化量が異な
る。
The torsional vibrator 1 vibrates as shown in Figure 1, and the torsional displacement at the end face varies depending on the distance x from the center 0. Therefore, when the end face of the vibrator is locally shaved, the amount of frequency change changes depending on the distance from the center 0. are different.

一般に機械振動子の等価質量をm、等価スチフ
ネスをSにて表わすとその振動子の共振周波数
は次のごとくなる。
Generally, when the equivalent mass of a mechanical vibrator is expressed by m and the equivalent stiffness is expressed by S, the resonant frequency of the vibrator is as follows.

いま第1図に示す捩り振動子の全質量をMとし
且つ捩り振動子の直径をdとすれば、捩り振動子
の端面の中心0からxなる距離における点の等価
質量mxは次のごとくなる。
Now, if the total mass of the torsional oscillator shown in Figure 1 is M and the diameter of the torsional oscillator is d, then the equivalent mass mx of a point at a distance x from the center 0 of the end face of the torsional oscillator is as follows. .

mx=1/x M/16d2 そこで端面において中心0からxなる距離にお
ける等価スチフネスをSx、またその点における
等価質量をmx、またその点において局部的に振
動子を削り取つた量をΔmとすれば、その振動子
の共振周波数の変化Δは となり同一質量Δを削り取つた場合でも位置によ
りmxの値が変るため周波数の変化量が異なるこ
とがわかる。第2図は振り振動子の端面において
同一質量を削り取つた場合のその削り取つた位置
と共振周波数変化量の関係を示す図であつて、横
軸xが中心からの距離、縦軸Δは周波数変化量
を示し、xの値が大きいほど共振周波数変化量が
大であることを示している。
mx=1/x 5 M/16d 2Then , at the end face, the equivalent stiffness at a distance x from the center 0 is Sx, the equivalent mass at that point is mx, and the amount by which the vibrator is locally shaved off at that point is Δm. Then, the change Δ in the resonant frequency of the vibrator is Therefore, even if the same mass Δ is removed, the value of mx changes depending on the position, so it can be seen that the amount of change in frequency differs. Figure 2 is a diagram showing the relationship between the scraped position and the amount of change in resonance frequency when the same mass is scraped off from the end face of a swing vibrator, where the horizontal axis x is the distance from the center, and the vertical axis Δ is It shows the amount of change in frequency, and the larger the value of x, the larger the amount of change in resonance frequency.

本発明は上述の捩り振動子の性質を利用して捩
り振動子の共振周波数の調整したもので、メカニ
カルフイルタに使用する捩り振動子を目的の周波
数に調整する際調整量に応じて端面において削り
取る中心からの位置を変えて周波数を調整するも
のであつて、同一加工量であつても加工位置を変
えることによつて周波数調整量が可変でき生産性
が向上し且つ調整精度も高められ工業的に有利な
ものとなる。なお端面の一部分を削ることはレー
ザビーム、電子ビーム発生器を備えたビームスク
ライバー装置あるいは放電加工機などにより容易
である。
The present invention utilizes the properties of the torsional oscillator described above to adjust the resonance frequency of the torsional oscillator. When adjusting the torsional oscillator used in a mechanical filter to the desired frequency, the end face is shaved off according to the amount of adjustment. The frequency is adjusted by changing the position from the center, and even if the amount of processing is the same, the amount of frequency adjustment can be varied by changing the processing position, improving productivity and adjustment accuracy, making it an industrial method. It will be advantageous to Incidentally, a portion of the end face can be easily scraped using a beam scriber device equipped with a laser beam or an electron beam generator, an electrical discharge machine, or the like.

以下実施例により詳細を説明する。 Details will be explained below using examples.

第3図は捩り振動子の周波数調整を2段階にわ
けて実施する場合の例であつて、同図は捩り振動
子の端面の調整面2を示している。調整量の多い
場合は先づ円周4上の加工位置3で調整し1回あ
たりの周波数変化量を大きくとり調整速度を上
げ、目標周波数に近づいた時点で加工径を変え円
周5上にて調整して調整精度を高めることができ
る。なお調整量が多いときには同心円状にさらに
いくつかの調整円を採用することができる。
FIG. 3 is an example in which the frequency adjustment of the torsional oscillator is carried out in two stages, and this figure shows the adjustment surface 2 of the end face of the torsional oscillator. If the amount of adjustment is large, first make the adjustment at machining position 3 on circumference 4, increase the amount of frequency change per time, increase the adjustment speed, and when the target frequency approaches, change the machining diameter and move to machining position 3 on circumference 5. You can increase the accuracy of the adjustment by adjusting the Note that when the amount of adjustment is large, several more adjustment circles can be used concentrically.

第4図は調整のつど中心0からの距離を連続的
に変化させて加工の軌跡が渦巻状6になるように
した場合の実施例であつて調整の初期には調整速
度を上げ調整が進行して目的の周波数に近づくに
つれて徐々に調整精度を高めることができるもの
である。
Figure 4 shows an example in which the distance from the center 0 is continuously changed during each adjustment so that the machining trajectory becomes a spiral 6. At the beginning of the adjustment, the adjustment speed is increased and the adjustment progresses. The adjustment accuracy can be gradually increased as the target frequency is approached.

第5図および第6図は調整量があまり大きくな
い場合の本発明にかかる捩り振動子の共振周波数
調整方法の他の実施例を示したものである。
FIGS. 5 and 6 show another embodiment of the method for adjusting the resonance frequency of a torsional vibrator according to the present invention, in which the amount of adjustment is not very large.

以上の実施例においては加工量が一定で加工位
置を変えた場合の調整例を示しているが加工量と
加工位置の組合せによつて効率のよい調整がで
き、また以上の実施例においては円形断面を有す
る捩りモード振動子について述べたが本発明は他
の断面の捩りモード振動子についても適用される
ことは勿論である。
In the above embodiment, an example of adjustment is shown where the machining amount is constant and the machining position is changed, but efficient adjustment can be made by combining the machining amount and the machining position. Although the torsional mode vibrator having a cross section has been described, the present invention is of course applicable to torsional mode vibrators having other cross sections.

以上実施例に示すごとく本発明にかかる捩りモ
ード振動子の共振周波数調整方法は周波数調整が
短時間に高精度をもつて行われ生産性の向上がは
かれ、本発明の工業的価値は非常に大きいものが
ある。
As shown in the examples above, the method for adjusting the resonant frequency of a torsion mode vibrator according to the present invention allows frequency adjustment to be performed with high precision in a short time, improving productivity, and the industrial value of the present invention is extremely high. There is something big.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は捩りモード振動子、第2図は第1図の
捩りモード振動子の端面の加工位置と周波数変化
量との関係を示す線図、第3図ないし第6図は本
発明にかかる捩り振動子の端面の加工位置を示す
図である。 図において1が捩りモード振動子、2が端面、
3が加工位置である。
FIG. 1 is a torsional mode vibrator, FIG. 2 is a diagram showing the relationship between the machining position of the end face of the torsional mode vibrator in FIG. 1 and the amount of frequency change, and FIGS. 3 to 6 are related to the present invention. It is a figure which shows the processing position of the end surface of a torsional vibrator. In the figure, 1 is a torsion mode oscillator, 2 is an end face,
3 is the processing position.

Claims (1)

【特許請求の範囲】[Claims] 1 捩りモード振動子端面からほゞ同一の質量を
複数個所局部的に削り取る加工を行ない共振周波
数を調整する捩りモード振動子の共振周波数調整
方法において、前記加工による共振周波数の変化
量が、捩りモード振動子端面中央からの距離の
ほゞ二乗に比例することを利用し、調整の順序を
まず端面の外周近くの位置を加工して1回あたり
の周波数変化量を大きくとつて調整速度を上げ、
目標周波数に近づくにつれて加工位置を変え端面
中央位置に近い点で加工を行ない調整精度を高め
ることを特徴とする捩りモード振動子の共振周波
数調整方法。
1. In a method for adjusting the resonant frequency of a torsional mode oscillator, in which the resonant frequency is adjusted by locally cutting off substantially the same mass at multiple locations from the end face of the torsional mode oscillator, the amount of change in the resonant frequency due to the processing is Taking advantage of the fact that the distance from the center of the vibrator end face is approximately proportional to the square of the square, the order of adjustment is first processed near the outer periphery of the end face to increase the amount of frequency change per time and increase the adjustment speed.
A method for adjusting the resonance frequency of a torsion mode vibrator, characterized in that the processing position is changed as the target frequency approaches, and processing is performed at a point close to the center position of the end face to increase adjustment accuracy.
JP10848875A 1975-09-09 1975-09-09 Twist motor oscillator Granted JPS5232651A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10848875A JPS5232651A (en) 1975-09-09 1975-09-09 Twist motor oscillator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10848875A JPS5232651A (en) 1975-09-09 1975-09-09 Twist motor oscillator

Publications (2)

Publication Number Publication Date
JPS5232651A JPS5232651A (en) 1977-03-12
JPS6160609B2 true JPS6160609B2 (en) 1986-12-22

Family

ID=14486021

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10848875A Granted JPS5232651A (en) 1975-09-09 1975-09-09 Twist motor oscillator

Country Status (1)

Country Link
JP (1) JPS5232651A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62175822U (en) * 1986-04-30 1987-11-09

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4638205A (en) * 1980-05-06 1987-01-20 Tdk Electronics Co., Ltd. Piezo-electric transducer
US4455500A (en) * 1983-07-28 1984-06-19 Western Geophysical Company Of America Sensitivity and capacitance adjustment method for piezoelectric accelerometers
US4642505A (en) * 1984-03-05 1987-02-10 Motorola, Inc. Laser trimming monolithic crystal filters to frequency
JP2616345B2 (en) * 1992-05-29 1997-06-04 東亞合成株式会社 Adhesive composition

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5045593A (en) * 1973-08-27 1975-04-23

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5045593A (en) * 1973-08-27 1975-04-23

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62175822U (en) * 1986-04-30 1987-11-09

Also Published As

Publication number Publication date
JPS5232651A (en) 1977-03-12

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