JPS6158286A - Control for piezo-electric vibrator - Google Patents
Control for piezo-electric vibratorInfo
- Publication number
- JPS6158286A JPS6158286A JP59180204A JP18020484A JPS6158286A JP S6158286 A JPS6158286 A JP S6158286A JP 59180204 A JP59180204 A JP 59180204A JP 18020484 A JP18020484 A JP 18020484A JP S6158286 A JPS6158286 A JP S6158286A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric vibrator
- displacement
- piezo
- vibrator
- voltage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006073 displacement reaction Methods 0.000 claims abstract description 15
- 238000000034 method Methods 0.000 claims abstract description 15
- 239000012530 fluid Substances 0.000 abstract description 7
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 12
- 238000007796 conventional method Methods 0.000 description 4
- 229910000906 Bronze Inorganic materials 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 239000010974 bronze Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/802—Circuitry or processes for operating piezoelectric or electrostrictive devices not otherwise provided for, e.g. drive circuits
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明はポンプ、ファン等の駆動体として使用できる圧
電振動子に係り、特にその制御方法に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a piezoelectric vibrator that can be used as a driving body for pumps, fans, etc., and particularly to a control method thereof.
従来、圧電振動子は主として印加周波数を変化させるこ
とにより振動数を変化させ、その振動数の変化を利用し
た素子、例えば発音体として使用されてきたが、近年、
２枚の圧電素子を貼り合わせたバイモルフ型圧電振動子
を用い、これを数Ｈｚ〜１００ Ｈｚ程度の比較的低周
波域の電圧を印加して振動させ、その振動を利用して流
体を吸込み、吸込んだ流体を吐出するポンプやその振動
を利用して気体を圧送するファン等が開発されている。Conventionally, piezoelectric vibrators have been used as elements that change the frequency of vibration by changing the applied frequency, such as sounding bodies, for example, but in recent years,
A bimorph piezoelectric vibrator made by bonding two piezoelectric elements is applied to vibrate it by applying a voltage in a relatively low frequency range of several Hz to 100 Hz, and the vibration is used to suck in fluid. BACKGROUND ART Pumps that discharge sucked fluid and fans that use vibration to pump gas have been developed.
この圧電振動子を用いて構成したポンプ、ファン等の出
力（圧力、流ｆｆ１）も印加周波数を変化させて振動数
を変化させることにより調節していた。The output (pressure, flow ff1) of a pump, fan, etc. configured using this piezoelectric vibrator was also adjusted by changing the applied frequency to change the vibration frequency.
第６図は従来方法の一例を示す説明図で、１は端部を支
持した圧電振動子、２ａ、 ２ｂは圧電振動子１の電極
、３は圧電振動子１をその電極２ａ、 ２ｂ間に周波数
出力を印加して振動させるための可変周波数変換機、４
は電源を示す。FIG. 6 is an explanatory diagram showing an example of a conventional method, in which 1 is a piezoelectric vibrator whose end is supported, 2a and 2b are electrodes of the piezoelectric vibrator 1, and 3 is a piezoelectric vibrator 1 connected between the electrodes 2a and 2b. variable frequency converter for applying frequency output to vibrate, 4
indicates power supply.
従来方法は圧電振動子ｌの運動量を印加周波数を変化さ
せることにより変化させていたため、可変周波数変換機
３を必要とし電源装置が複雑、高価になる欠点があった
。In the conventional method, the momentum of the piezoelectric vibrator 1 is changed by changing the applied frequency, which has the disadvantage of requiring a variable frequency converter 3 and making the power supply device complicated and expensive.
本発明はかかる従来の欠点を解決しようとするもので、
電源装置を簡単に安価にできる実施容易な圧電振動子の
制御方法を提供することを口約とするものである。The present invention aims to solve such conventional drawbacks,
The purpose of this invention is to provide an easy-to-implement piezoelectric vibrator control method that makes the power supply device simple and inexpensive.
本発明方法は上記の目的を達成するため、圧電振動子を
制御する手段について検討した結果、変位量が印加電圧
に略比例することに気付き完成したもので、第１図〜第
３図示のように圧電振動子ｌの変位ｌｄを印加電圧ｅを
変えることにより制御するようにしたものである。In order to achieve the above object, the method of the present invention was completed after studying the means for controlling the piezoelectric vibrator and realizing that the amount of displacement is approximately proportional to the applied voltage. The displacement ld of the piezoelectric vibrator l is controlled by changing the applied voltage e.
圧電振動子１としては圧電素子の両面に電極を形成した
ユニモルフ型のものでもよいが、２枚の圧電素子を貼り
合わせ、その貼り合わせ面と両面に電極２ａ、 ２ｂを
形成した第１図〜第３図示のバイモルフ型のものが大き
な振動を得ることができるので好ましい。特に貼り合わ
せ面の電極２ａにリン青銅等のシムを装着したものがよ
い。The piezoelectric vibrator 1 may be of a unimorph type in which electrodes are formed on both sides of the piezoelectric element, but the piezoelectric vibrator 1 shown in FIGS. The bimorph type shown in FIG. 3 is preferable because it can produce large vibrations. In particular, it is preferable to attach a shim made of phosphor bronze or the like to the electrode 2a on the bonding surface.
使用する電源は一定周波数の交流電源、通常は商用電源
５ａ （第１．第２図参照）でも直流電源５ｂ（第３図
参照）でもよい。The power source used may be a constant frequency AC power source, usually a commercial power source 5a (see Figures 1 and 2) or a DC power source 5b (see Figure 3).
印加電圧ｅを変える手段としては可変トランス６（第１
図参照）、可変抵抗７（第２．第３図参照）等の電圧調
整手段を用いることができる。A variable transformer 6 (first
(see Figure), variable resistor 7 (see Figures 2 and 3), and other voltage adjusting means can be used.
本発明方法は第１図示のようにケーシング８の内周部に
圧電振動子ｌの外周部を支持すると共に、ケーシング８
の２箇所にそれぞれ吸込用、吐出用チェックバルブ９ａ
、 ９ｂを設け、圧電振動子１に交流電源を印加して
圧電振動子１の振動により流体を吸込用チェックバルブ
９ａを通して吸込み、吸込んだ流体を吐出用チェ’７ク
バルブ９ｂを通して吐出させるポンプとして、第２図示
のように圧電振動子１の端部を支持し、その振動により
ウチヮの原理で流体を圧送するファンとして使用する場
合も適用することができる。As shown in the first figure, the method of the present invention supports the outer circumference of the piezoelectric vibrator l on the inner circumference of the casing 8, and
There are check valves 9a for suction and discharge at two locations, respectively.
. As shown in the second figure, the end portion of the piezoelectric vibrator 1 is supported, and the piezoelectric vibrator 1 can be used as a fan that uses the vibration to pump fluid according to the same principle.
また、本発明は、圧電振動子１の変位量を制御すること
ができるから、第３図示のように直流電位を印加して圧
電振動子１の先端部変位量を制御することによって、圧
電振動子１の先端部を電空変換装置、コントロールバル
ブの作ｅ子としテ用いることができる。Furthermore, since the displacement amount of the piezoelectric vibrator 1 can be controlled, the present invention can generate piezoelectric vibrations by applying a DC potential and controlling the displacement amount of the tip of the piezoelectric vibrator 1 as shown in the third figure. The tip of the element 1 can be used as an element for an electro-pneumatic conversion device or a control valve.
第１図は本発明方法の第１実施例を示す説明図で、この
第１実施方法は商用電源５ａの電圧を可変トランス６に
より変化させて、ポンプを構成する圧電振動子１の電極
２ａ、 ２ｂ間に印加し、その変位ｆｉｄを制御する場
合である。１０は空気出入孔である。FIG. 1 is an explanatory diagram showing a first embodiment of the method of the present invention. In this first implementation method, the voltage of a commercial power source 5a is changed by a variable transformer 6, and electrodes 2a of a piezoelectric vibrator 1 constituting a pump, This is a case where the displacement fid is controlled by applying it between the two b. 10 is an air inlet/outlet hole.
この場合、圧電振動子１の振動により吸込用チェックバ
ルブ９ａを通して流体を吸込み、吸込んだ流体を吐出用
チェックバルブ９ｂを通して吐出することができ、その
出力は変位ｌｄの制御により変えることができる。In this case, fluid can be sucked through the suction check valve 9a by the vibration of the piezoelectric vibrator 1, and the sucked fluid can be discharged through the discharge check valve 9b, and the output can be changed by controlling the displacement ld.
第４図は第１図示の圧電振動子ポンプについてその圧電
振動子の印加電圧を変化させたときのポンプ吐出圧力Ｐ
−流量Ｆの特性曲線図である。これはポンプを構成する
圧電振動子として貼り合わせ面の電極にシムを装着した
バイモルフ型のものを用い、６０８２の商用電源を用い
たときのグラフである。Figure 4 shows the pump discharge pressure P when the voltage applied to the piezoelectric vibrator is changed for the piezoelectric vibrator pump shown in Figure 1.
- is a characteristic curve diagram of the flow rate F; This is a graph when a bimorph type piezoelectric vibrator with a shim attached to the electrode on the bonded surface is used as the piezoelectric vibrator constituting the pump, and a 6082 commercial power source is used.
° 第２図は本発明方法の第２実施例を示す説明図で
、この第２実施方法は商用電源５ａの電圧を可変抵抗７
により変化させて片持ちの圧電振動子１の電極２ａ、
２ｂ間に印加し、その変位量ｄを制御する場合である。° FIG. 2 is an explanatory diagram showing a second embodiment of the method of the present invention, in which the voltage of the commercial power supply 5a is
The electrode 2a of the cantilevered piezoelectric vibrator 1 is changed by
2b, and the displacement amount d is controlled.
この場合、圧電振動子１はその振動により気体を圧送す
るファンとして動作し、その送風圧は変位量ｄの制御に
より変えることができる。In this case, the piezoelectric vibrator 1 operates as a fan that pumps gas by its vibration, and the blowing pressure can be changed by controlling the displacement d.
第５図は第２図示の圧電振動子の印加電圧−変位量特性
曲線図である。FIG. 5 is an applied voltage-displacement characteristic curve diagram of the piezoelectric vibrator shown in FIG.
第３図は本発明方法の第３実施例を示す説明図で、この
第３実施方法は直流電源５ｂを用い圧電振動子１の先端
部の変位量を制御することにより、コントロールバルブ
等の作動子として用いるものである。FIG. 3 is an explanatory diagram showing a third embodiment of the method of the present invention. This third implementation method operates a control valve, etc. by controlling the amount of displacement of the tip of the piezoelectric vibrator 1 using a DC power source 5b. It is used as a child.
上述のように本発明によれば、圧電振動子１の変位ｆｉ
ｄを印加電圧ｅを変えることにより制御する方法である
から、従来方法に比べて電ａ装置を簡単に安価にできる
。As described above, according to the present invention, the displacement fi of the piezoelectric vibrator 1
Since this is a method of controlling d by changing the applied voltage e, the electric device can be made more easily and inexpensively than the conventional method.
また圧電振動子１を用いてポンプ、ファン等を構成した
ときは、圧電振動子１の印加電圧ｅを変えることにより
出力（圧力、流量）を容易に調節することができる。Furthermore, when a pump, a fan, etc. is constructed using the piezoelectric vibrator 1, the output (pressure, flow rate) can be easily adjusted by changing the applied voltage e of the piezoelectric vibrator 1.
第１図は本発明方法の第１実施例を示す説明図、第２図
は本発明方法の第２実施例を示す説明図、第３図は本発
明方法の第３実施例を示す説明図、第４図は第１図示の
圧電振動子ポンプについてその圧電振動子の印加電圧を
変化させたときのポンプ吐出圧力Ｐ−流量Ｆの特性曲線
図、第５図は第２図示の圧電振動子の印加電圧−変位量
特性曲線図、第６図は従来方法の一例を示す説明図であ
る。
ｌ・・・・・・圧電振動子、２ａ、 ２ｂ・・・・・・
電極、５ａ・・・・・・商用電源、５ｂ・・・・・・直
流電源、６・・・・・・可変トランス、７・・・・・・
可変抵抗、８・・・・・・ケーシング、９ａ 、 ９ｂ
・・・・・・吸込用、吐出用チェックバルブ。FIG. 1 is an explanatory diagram showing the first embodiment of the method of the present invention, FIG. 2 is an explanatory diagram showing the second embodiment of the method of the present invention, and FIG. 3 is an explanatory diagram showing the third embodiment of the method of the present invention. , FIG. 4 is a characteristic curve diagram of pump discharge pressure P vs. flow rate F when the voltage applied to the piezoelectric vibrator is changed for the piezoelectric vibrator pump shown in FIG. 1, and FIG. 5 is a characteristic curve diagram of the piezoelectric vibrator shown in FIG. 2. FIG. 6 is an explanatory diagram showing an example of the conventional method. l...Piezoelectric vibrator, 2a, 2b...
Electrode, 5a... Commercial power supply, 5b... DC power supply, 6... Variable transformer, 7...
Variable resistance, 8...Casing, 9a, 9b
・・・・・・Check valve for suction and discharge.
Claims (1)
することを特徴とする圧電振動子の制御方法。A method for controlling a piezoelectric vibrator, characterized in that the amount of displacement of the piezoelectric vibrator is controlled by changing an applied voltage.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59180204A JPS6158286A (en) | 1984-08-28 | 1984-08-28 | Control for piezo-electric vibrator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59180204A JPS6158286A (en) | 1984-08-28 | 1984-08-28 | Control for piezo-electric vibrator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6158286A true JPS6158286A (en) | 1986-03-25 |
Family
ID=16079216
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59180204A Pending JPS6158286A (en) | 1984-08-28 | 1984-08-28 | Control for piezo-electric vibrator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6158286A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6379663U (en) * | 1986-11-13 | 1988-05-26 | ||
| US5087850A (en) * | 1989-04-19 | 1992-02-11 | Olympus Optical Co., Ltd. | Ultrasonic transducer apparatus |
| US5198713A (en) * | 1989-04-19 | 1993-03-30 | Olympus Optical Co., Ltd. | Ultrasonic transducer apparatus |
| FR2929450A1 (en) * | 2008-03-28 | 2009-10-02 | Seb Sa | HOUSEHOLD APPLIANCE COMPRISING A PIEZO-ELECTRIC PUMP PROVIDED WITH A SIMPLIFIED ELECTRIC POWER SUPPLY CIRCUIT |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5435079A (en) * | 1977-08-12 | 1979-03-14 | Shin Nippon Jitsugiyou Kk | Apparatus for fixing small animal |
| JPS5478993A (en) * | 1977-12-06 | 1979-06-23 | Sony Corp | Electric mechanical conversion element |
| JPS5492084A (en) * | 1977-12-29 | 1979-07-20 | Sony Corp | Driving circuit of electrostrictive converter |
-
1984
- 1984-08-28 JP JP59180204A patent/JPS6158286A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5435079A (en) * | 1977-08-12 | 1979-03-14 | Shin Nippon Jitsugiyou Kk | Apparatus for fixing small animal |
| JPS5478993A (en) * | 1977-12-06 | 1979-06-23 | Sony Corp | Electric mechanical conversion element |
| JPS5492084A (en) * | 1977-12-29 | 1979-07-20 | Sony Corp | Driving circuit of electrostrictive converter |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6379663U (en) * | 1986-11-13 | 1988-05-26 | ||
| US5087850A (en) * | 1989-04-19 | 1992-02-11 | Olympus Optical Co., Ltd. | Ultrasonic transducer apparatus |
| US5198713A (en) * | 1989-04-19 | 1993-03-30 | Olympus Optical Co., Ltd. | Ultrasonic transducer apparatus |
| FR2929450A1 (en) * | 2008-03-28 | 2009-10-02 | Seb Sa | HOUSEHOLD APPLIANCE COMPRISING A PIEZO-ELECTRIC PUMP PROVIDED WITH A SIMPLIFIED ELECTRIC POWER SUPPLY CIRCUIT |
| WO2009130407A1 (en) * | 2008-03-28 | 2009-10-29 | Seb S.A. | Domestic appliance comprising a piezoelectric pump provided with a simplified power supply circuit |
| CN101981717A (en) * | 2008-03-28 | 2011-02-23 | Seb公司 | Domestic appliance comprising a piezoelectric pump provided with a simplified power supply circuit |
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