JPS6157473B2 - - Google Patents
Info
- Publication number
- JPS6157473B2 JPS6157473B2 JP21204181A JP21204181A JPS6157473B2 JP S6157473 B2 JPS6157473 B2 JP S6157473B2 JP 21204181 A JP21204181 A JP 21204181A JP 21204181 A JP21204181 A JP 21204181A JP S6157473 B2 JPS6157473 B2 JP S6157473B2
- Authority
- JP
- Japan
- Prior art keywords
- pump
- vacuum chamber
- pumps
- cryopump
- bulk
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000007789 gas Substances 0.000 description 8
- 238000005086 pumping Methods 0.000 description 6
- 230000007423 decrease Effects 0.000 description 3
- 229910000838 Al alloy Inorganic materials 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 229910000986 non-evaporable getter Inorganic materials 0.000 description 2
- 230000007420 reactivation Effects 0.000 description 2
- 230000008929 regeneration Effects 0.000 description 2
- 238000011069 regeneration method Methods 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- 230000004913 activation Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
- F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21204181A JPS58117372A (ja) | 1981-12-30 | 1981-12-30 | クライオポンプとバルグゲッタポンプを組合わせた超高真空ポンプ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21204181A JPS58117372A (ja) | 1981-12-30 | 1981-12-30 | クライオポンプとバルグゲッタポンプを組合わせた超高真空ポンプ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS58117372A JPS58117372A (ja) | 1983-07-12 |
JPS6157473B2 true JPS6157473B2 (ru) | 1986-12-06 |
Family
ID=16615883
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP21204181A Granted JPS58117372A (ja) | 1981-12-30 | 1981-12-30 | クライオポンプとバルグゲッタポンプを組合わせた超高真空ポンプ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS58117372A (ru) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS627986A (ja) * | 1985-07-03 | 1987-01-14 | Tokuda Seisakusho Ltd | 真空排気装置 |
DE69510132T2 (de) * | 1994-07-20 | 2000-01-05 | Applied Materials, Inc. | Vakuumkammer für Ultrahochvakuumbehandlung bei hoher Temperatur |
US6361618B1 (en) | 1994-07-20 | 2002-03-26 | Applied Materials, Inc. | Methods and apparatus for forming and maintaining high vacuum environments |
US5972183A (en) * | 1994-10-31 | 1999-10-26 | Saes Getter S.P.A | Getter pump module and system |
US6142742A (en) * | 1994-10-31 | 2000-11-07 | Saes Pure Gas, Inc. | Getter pump module and system |
US5911560A (en) * | 1994-10-31 | 1999-06-15 | Saes Pure Gas, Inc. | Getter pump module and system |
US6109880A (en) * | 1994-10-31 | 2000-08-29 | Saes Pure Gas, Inc. | Getter pump module and system including focus shields |
US5685963A (en) * | 1994-10-31 | 1997-11-11 | Saes Pure Gas, Inc. | In situ getter pump system and method |
US5935395A (en) * | 1995-11-08 | 1999-08-10 | Mitel Corporation | Substrate processing apparatus with non-evaporable getter pump |
EP0895484A4 (en) * | 1996-03-26 | 2000-12-06 | Saes Pure Gas Inc | COMBINATION OF CRYOPUMP AND GETTER PUMP AND METHOD FOR REGENERATING IT |
US6077404A (en) | 1998-02-17 | 2000-06-20 | Applied Material, Inc. | Reflow chamber and process |
-
1981
- 1981-12-30 JP JP21204181A patent/JPS58117372A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS58117372A (ja) | 1983-07-12 |
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