JPS6153195A - Molecular beam epitaxial device - Google Patents
Molecular beam epitaxial deviceInfo
- Publication number
- JPS6153195A JPS6153195A JP17493084A JP17493084A JPS6153195A JP S6153195 A JPS6153195 A JP S6153195A JP 17493084 A JP17493084 A JP 17493084A JP 17493084 A JP17493084 A JP 17493084A JP S6153195 A JPS6153195 A JP S6153195A
- Authority
- JP
- Japan
- Prior art keywords
- specimen
- sample
- transporter
- under reduced
- reduced pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Abstract
Description
【発明の詳細な説明】
〔発明の利用分野〕
本発明は、分子線エピタキシー装ｒＩＩＣ以下、ＭＢＥ
装置と略）に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to molecular beam epitaxy equipment rIIC and below, MBE
(abbreviated as “device”).
ＭＢＥ装置としては、例えば、電子材料、ＰＰ８２〜８
７（１９８２年別冊）に記載のような装置が知られてい
る。As the MBE device, for example, electronic materials, PP82-8
7 (1982 supplement) is known.
このような装置においては、試料な各真空槽間で搬送す
る手段として、試料を脱着する戟講を先端に有するロブ
ドを真空槽内外からマグネットで移動させるマグネブト
カップリング式の試料搬送手段や試料を載せる台を回転
導入器とラブクピニオンとで移動させるラックピニオン
式の試料搬送手段等が採用されている。In such an apparatus, as a means for transporting a sample between each vacuum chamber, a magnetic coupling type sample transport means or a sample transport means is used, which uses a magnet to move a robed rod at the tip of the sample from inside and outside the vacuum chamber to attach and detach the sample. A rack and pinion type sample transport means, in which the table on which the sample is placed is moved using a rotary introducer and a rack and pinion, is used.
ＭＢＦ！装置では、試料の受は渡しを確実に行うため、
真空槽の内で試料搬送槽内を移動させる試料載せ台（以
下、トランスポータと略）を真空槽である、例えば、準
備・分析室、成長室の前で精 ′度良く停止させる
必要がある。しかしながら、上記した従来のＭＢＥ装置
では、ビューポイントを介して間接的にトランスポータ
の位置決めを実施しているため、その位置決め制御が不
確実になり試料の確実な受は渡しが困難である。また、
トランスポータは外部からの運動導入手段により試料搬
送槽内を移動させられるが、外部からの運動導入手段は
長期的な使用に対して耐久性が充分でなく、そのメンテ
ナンスに多くの時間と費用を必要とするといった問題を
有している。MBF! In order to ensure that the sample is received and handed over to the device,
The sample platform (hereinafter referred to as transporter) that moves within the sample transport tank within the vacuum chamber must be accurately stopped in front of the vacuum chamber, such as the preparation/analysis room or growth chamber. . However, in the above-mentioned conventional MBE apparatus, the positioning of the transporter is performed indirectly through the view point, so the positioning control becomes uncertain and it is difficult to reliably receive and transfer the sample. Also,
The transporter can be moved within the sample transport tank by an external motion introducing means, but the external motion introducing means is not durable enough for long-term use, and its maintenance requires a lot of time and money. There is a problem that it is necessary.
本発明の目的は、試料位置決め制御をビューポイントを
介さずに確実に行えるようにすることで、試料の確実な
受は渡しを容易に行うことができると共に、外部からの
運動導入手段を不用にすることで、メンテナンスに要す
る時間、費用を削減できるＭＢＥ装置を提供することに
ある。An object of the present invention is to enable sample positioning control to be performed reliably without using a viewpoint, thereby making it possible to easily receive and transfer a sample reliably, and eliminating the need for external movement introducing means. The object of the present invention is to provide an MBE device that can reduce the time and cost required for maintenance.
本発明は、減圧排気される試料搬送槽に試料位置決め制
御可能な試料搬送手段を内設したことを特徴とするもの
で、試料位置決め制御をビューポイントを介さずに確実
に行えるようにすると共に、外部からの運動導入手段を
不用にしたものである。The present invention is characterized in that a sample transporting means capable of controlling sample positioning is installed in a sample transporting tank that is evacuated under reduced pressure. This eliminates the need for external exercise introduction means.
本発明の一実施例を■１図、第２図により説明する。 An embodiment of the present invention will be explained with reference to Fig. 1 and Fig. 2.
第１図、ｆｆ１２図で、減圧排気される試料搬送槽１０
には、試料位置決め制御可能な試料搬送手段美が内設さ
れている。試料搬送手段筒は、この場合、ボールネジ４
とサドルｎと駆動モータｎと歯車２４゜５とフォトセン
サ、円コーダ等の回転度数検出器あとで構成されている
。駆動モータｎは、試料搬送槽１０内の一端側（茅１図
では、左端側）に設置されている。駆動モータ２には、
歯車冴が直結されている。ボールネジ２１は、試料搬送
槽１０の長手方向軸心と略平行に軸受保持部ｎを介し支
持板あで両端を軸受されている。支持板舘は、試料搬送
槽１０内壁に設けられている。ボールネジ２１の一端側
（茅１図では、左端側）には、歯車冴と噛合して歯車５
が設けられている。ボールネジ２１の途中には、ボール
ネジ２１に噛合してサドルｎが設けられている。サドル
ｎには、試料載せ面をボールネジ２１の軸心と略直角に
してトランスポータＪが設けられている。また、歯車５
に対応して回転度数検出器部が設けられている。In Figure 1 and Figure ff12, the sample transport tank 10 is evacuated under reduced pressure.
is equipped with a sample transport means that can control sample positioning. In this case, the sample transport means cylinder is a ball screw 4.
, a saddle n, a drive motor n, a gear 24.5, and a rotation degree detector such as a photo sensor and a circular coder. The drive motor n is installed at one end of the sample transport tank 10 (the left end in Figure 1). The drive motor 2 has
Gear Sae is directly connected. The ball screw 21 is substantially parallel to the longitudinal axis of the sample transport tank 10 and is supported at both ends by a support plate via a bearing holding portion n. The support plate is provided on the inner wall of the sample transport tank 10. One end of the ball screw 21 (the left end in Figure 1) meshes with the gear 5.
is provided. A saddle n is provided in the middle of the ball screw 21 so as to mesh with the ball screw 21. A transporter J is provided on the saddle n with its sample mounting surface substantially perpendicular to the axis of the ball screw 21. Also, gear 5
A rotation frequency detector section is provided correspondingly.
第１図、！ｇ２図で、ｗ１動モータ田を作動させ歯車冴
、２５を介してボールネジ２１を回動させることで、ト
ランスポータ刃は、サドルｎを介して試料搬送１ｖＪ１
０内を第１図では、左右方向に移動させられる。このよ
うなトランスポータカの移ＴｉｖＪ量は、ボールネジム
の回転度数、即ち、歯車乙の回転度数に正確に対応して
おり、歯車５の回転度数を回転度数検出器部で検出し、
駆動モータフを作動。Figure 1! In figure g2, by operating the w1 motor and rotating the ball screw 21 via the gear 25, the transporter blade moves the sample to 1vJ1 via the saddle n.
0 in the left and right direction in FIG. The amount of transport TivJ accurately corresponds to the rotational frequency of the ball screw, that is, the rotational frequency of the gear 5, and the rotational frequency of the gear 5 is detected by the rotational frequency detector,
Activate the drive motor.
停止させることで精度良く制御できる。例えば、ｖＸ、
料（図示省略）を受は取ったトランスポータカを、試ｘ
；１搬送槽１０にゲートバルブ（図示省略）を介して設
けられた真空槽である。１例えば、準備・分析室（図示
省略）又は成長室（図示省略）に対応する位置、即ち、
それぞれのゲートバルブに対応する位置に移動させ、そ
の位置で精度良く停止させることができる。例えば、こ
のような位置での停ｊヒ精度としては、例えば、トラン
スポータカより試料を受は取りゲートバルブを介して準
備・分析室又は成長室に搬入する公知の他の試料搬送手
段（図示省略）のホルダ（図示省略）の機構上、０、２
〜０．５正以内が要求されるが、ボールネジガの採用に
より、この場合、この停止精度を充分満足することがで
きる。また、試料搬送手段筒の摺動部の摩擦、摩耗対策
としては、例えば、ボールネジ２１を銀イオンブレーテ
ィング処理し、歯ホＭ。By stopping it, you can control it accurately. For example, vX,
The transport hawker who received the fee (not shown) was tested.
1 is a vacuum tank provided in the transport tank 10 via a gate valve (not shown). 1. For example, a position corresponding to a preparation/analysis chamber (not shown) or a growth chamber (not shown), that is,
It can be moved to a position corresponding to each gate valve and stopped at that position with high precision. For example, the accuracy of stopping at such a position may be determined by other known sample transport means (not shown in the figure), such as receiving a sample from a transporter and transporting it to the preparation/analysis chamber or growth chamber via a gate valve. Due to the mechanism of the holder (not shown), 0, 2
~0.5 positive or less is required, but by employing a ball screw, this stopping accuracy can be fully satisfied in this case. In addition, as a countermeasure against friction and wear on the sliding portion of the sample conveying means cylinder, for example, the ball screw 21 may be subjected to silver ion brating treatment, and the teeth may be treated with M.
５の噛合面をＴｉＮ処理するようにする。The meshing surface of No. 5 is treated with TiN.
本実施例では、次のような効果を得ることができる。In this embodiment, the following effects can be obtained.
（１）試料位置決め制御をビューポイントを介さずにボ
ールネジの回転度数制御により確実に行えるので、試料
の確実な受は渡しを容易に行うことができると共に、外
部からの運動導入手段が不用であるので、メンテナンス
に要する時間。(1) Sample positioning can be reliably controlled by controlling the rotation degree of the ball screw without using the viewpoint, so the sample can be received and transferred easily and there is no need for external motion introduction means. So the time required for maintenance.
費用を削減できる。Costs can be reduced.
（２）試料位置決め制御を確実に行えるので、ＭＢＥ装
置における試料搬送を容易蕃こ自動化できる。(2) Since sample positioning can be controlled reliably, sample transportation in the MBE apparatus can be easily automated.
（３）ベーキング処理時に、試料搬送手段のＬ’を成部
品の取り外しが不要であるので、ベーキング作業を容易
に実施することができる。(3) During the baking process, it is not necessary to remove the component L' of the sample transport means, so the baking process can be easily performed.
（４） 試料搬送手段の構成部品点数が少な（なるの
で、試料搬送手段の組立、調整作業が容易になる。(4) Since the number of component parts of the sample transport means is small, the assembly and adjustment work of the sample transport means is facilitated.
本発明は、以上説明したように、減圧排気される試料搬
送槽に試料位置決め制御可能な試料搬送手段を内設した
ことで、試料位置決め制御をビューポイントを介さずに
確実に行えるので、試料の確実な受は渡しを容易に行う
ことができると共に、外部からの運′Ｍ導入手段が不用
であるので、メンテナンスに要する時間、費用を削減で
きるという効果がある。As explained above, the present invention includes a sample transport means capable of controlling sample positioning in a sample transport tank that is evacuated under reduced pressure, so that sample positioning can be reliably controlled without using a viewpoint. Reliable delivery can be easily carried out, and since there is no need for means for introducing transport from the outside, there is an effect that the time and cost required for maintenance can be reduced.
第１図は、本発明によるＭＢＥ装置の一実施例を示す試
料搬送槽内の試料搬送手段の正面図、第２図は、第１図
の試料搬送手段の側面図である。
′１′１図
才２１FIG. 1 is a front view of a sample transport means in a sample transport tank showing an embodiment of the MBE apparatus according to the present invention, and FIG. 2 is a side view of the sample transport means of FIG. 1. '1'1 illustration 21
Claims (1)
子線エピタキシー装置において、前記試料搬送槽に試料
位置決め制御可能な試料搬送手段を内設したことを特徴
とする分子線エピタキシー装置。1. A molecular beam epitaxy apparatus comprising at least a sample transport tank that is evacuated under reduced pressure, characterized in that the sample transport tank is provided with a sample transport means capable of controlling sample positioning.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17493084A JPS6153195A (en) | 1984-08-24 | 1984-08-24 | Molecular beam epitaxial device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17493084A JPS6153195A (en) | 1984-08-24 | 1984-08-24 | Molecular beam epitaxial device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6153195A true JPS6153195A (en) | 1986-03-17 |
Family
ID=15987204
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17493084A Pending JPS6153195A (en) | 1984-08-24 | 1984-08-24 | Molecular beam epitaxial device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6153195A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4996650A (en) * | 1988-09-12 | 1991-02-26 | Hitachi Ltd. | Print control system |
-
1984
- 1984-08-24 JP JP17493084A patent/JPS6153195A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4996650A (en) * | 1988-09-12 | 1991-02-26 | Hitachi Ltd. | Print control system |
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