JPS6148568A - Tool coated with multilayered hard film - Google Patents
Tool coated with multilayered hard filmInfo
- Publication number
- JPS6148568A JPS6148568A JP16767684A JP16767684A JPS6148568A JP S6148568 A JPS6148568 A JP S6148568A JP 16767684 A JP16767684 A JP 16767684A JP 16767684 A JP16767684 A JP 16767684A JP S6148568 A JPS6148568 A JP S6148568A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- substrate
- cubic
- coated
- wear resistance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/34—Nitrides
- C23C16/342—Boron nitride
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、硬質合金、サーメット、セラミックスのうち
の少なくとも一つを基体とし、その表面に複数層からな
る被膜を形成した３００ ｒｒＶ／ｍｉｎを超える高速
切削に切削工具として使用可能な多層硬質膜被覆工具に
関する。Detailed Description of the Invention [Industrial Field of Application] The present invention is directed to a 300 rrV/min converter having at least one of a hard alloy, a cermet, and a ceramic as a base and having a coating formed of multiple layers on its surface. This invention relates to a multilayer hard film coated tool that can be used as a cutting tool for high-speed cutting.
超硬合金の表面に耐摩耗性の優れたＴｉＣ，ＴｉＮ １
ＡｔＯなどの硬質物質を１種又は２種以上の単層又は２
層以」二被覆した被覆超硬合金は既番こ実用化されてい
る。その中でもＡ１２ｏ゛３を外層とした二重被覆超硬
合金工具は、Ａｌ２Ｏ３のもつ耐熱性、耐酸化性等のた
め優れた耐摩耗性を示すことが知られている。切削工具
に要求される切削条件は年々過酷になってきており、切
削速度も３００ ｍ／ｍｉｎを超える場合も多くなって
おり、より耐摩耗性の高し）切削工具が要求されるよう
になっている。これらの要求に対して、Ａｔ２０３膜厚
を厚くする方向がある。TiC, TiN 1 with excellent wear resistance on the surface of cemented carbide
A single layer or two layers of one or more hard substances such as AtO
Two-layer coated cemented carbide has already been put into practical use. Among these, double-coated cemented carbide tools having an outer layer of A12O3 are known to exhibit excellent wear resistance due to the heat resistance, oxidation resistance, etc. of Al2O3. The cutting conditions required of cutting tools are becoming more severe year by year, and cutting speeds are often exceeding 300 m/min, leading to demand for cutting tools with higher wear resistance. ing. In order to meet these requirements, there is a direction to increase the thickness of the At203 film.
しかしながら、ＡＡ Ｏ自体は脆性材料のため、厚膜化
することは靭性低下につながり、耐摩耗性と靭性を兼ね
そなえる汎用工具としては、靭性面で不満足のものであ
る。However, since AAO itself is a brittle material, increasing the thickness leads to a decrease in toughness, and as a general-purpose tool that has both wear resistance and toughness, it is unsatisfactory in terms of toughness.
本発明は上述した従来のものよりも耐摩耗性と靭性に優
れた多層硬質膜被覆工具を提供することを目的とする。An object of the present invention is to provide a multilayer hard film coated tool that has superior wear resistance and toughness than the conventional tools mentioned above.
本発明はこの目的を達するために、硬質合金、サーメッ
ト、セラミックスのうちの少なくとも一つからなる基体
と、Ｉｖａ、■ａ 、 ＶＩａ族の炭化物、窒化物、酸
化物、Ａ４０．ＢＮのうちの少なくとも一つ、これらの
固溶体、混合物からなる第１層、第１層に接して形成さ
れ■ａ 、 ＶＩＬ 、 ■ａ族の窒化物、ＢＮの一方
又は両方からなる第２層、第２層に接して形成され立方
晶ＢＮからなるか立方晶ＢＮを含む層からなる第３層を
一組とし第１層を基体側にして基体表面に形成された二
〜六組の被膜を有し、この被膜の厚さが２〜２０μｍで
あり、第３層の膜厚が０．５〜５μｍであることを特徴
とする多層硬質膜被覆工具を構成したことにある。In order to achieve this object, the present invention includes a substrate made of at least one of hard alloys, cermets, and ceramics, and carbides, nitrides, oxides, A40. A first layer made of at least one of BN, a solid solution or a mixture thereof, a second layer formed in contact with the first layer and made of one or both of a group a nitride, BN, Two to six sets of coatings are formed on the surface of the substrate, with the third layer formed in contact with the second layer and made of cubic BN or containing cubic BN as one set, and the first layer facing the substrate. The present invention provides a multilayer hard film coated tool characterized in that the coating has a thickness of 2 to 20 μm, and the third layer has a thickness of 0.5 to 5 μm.
本発明被覆工具の被膜は例えば次のようにして形成でき
る。The coating of the coated tool of the present invention can be formed, for example, as follows.
第１層の炭化物、窒化物、酸化物はＯ’ＶＤ法で、第２
層の窒化物と又はＢＮは、ＣＶＤ法あるいはプラズマＯ
’ＶＤ法でコーティングし、第３層のＯＢＮは、Ｂを含
む水素化合物とＮを含む化合物でプラズマＯＶＤ法で合
成させる。この工程を繰り返して多重層を得る。又、本
発明においてＴｉＯ，、Ｔ工Ｎ・Ａ７０など生成過程で
プラズマＯＶＤ法とＣＶＤ法を交互に、いわゆる間欠プ
ラズマＣｖＤ法によって被覆した場合これら膜中に非晶
質部分があっても効果がある。The first layer of carbides, nitrides, and oxides are removed using the O'VD method.
The nitride and BN layers are prepared by CVD or plasma O
'Coating is performed using a VD method, and the third layer of OBN is synthesized using a hydrogen compound containing B and a compound containing N using a plasma OVD method. This process is repeated to obtain multiple layers. In addition, in the present invention, when coating TiO, T-N/A70, etc. by alternating plasma OVD and CVD methods, so-called intermittent plasma CVD methods, even if there are amorphous parts in these films, there is no effect. be.
本発明に用いられる基板は、超硬合金に限らず、耐摩耗
性を若干おとした高靭性サーメット、セラミックスを用
いることができる。The substrate used in the present invention is not limited to cemented carbide, but may also be made of high-toughness cermet or ceramics with slightly lower wear resistance.
基体に最近接する第１層は、密着性の点で■ａ −ＩＶ
ａ 、 ■ａ族の炭化物、窒化物、酸化物及びＡｌ２Ｏ
３から選ばれる。超硬合金、サーメットを基体とする場
合は、炭化物、窒化物が、セラミックスでは酸化物、Ａ
ｔ Ｏが好ましい。第２層はＩＶａ Ｘｖａ’。The first layer closest to the substrate has a -IV in terms of adhesion.
a, ■A group carbides, nitrides, oxides and Al2O
Choose from 3. When the base is made of cemented carbide or cermet, carbides and nitrides are used; for ceramics, oxides and A
t O is preferred. The second layer is IVa Xva'.
ＶＩａ族の窒化物と又はＢＮ層が選ばれ、これらの物質
は、第１層との接着性もよく、又は第３層であるＯＢＮ
とも密着性が良いことから選ばれる。第８層はＯＢＮで
あるが、このＯＥＭは全部、又は一部がＯＢＮであって
、残部はアモルファス状もしくは六方晶の混合相であっ
てもよく、若干耐摩耗性は劣るが、密着性の点では少量
のアモルファスもしくは大方晶が存在するのが好ましい
。Group VIa nitride and or BN layers are chosen, these materials also have good adhesion to the first layer, or the third layer OBN.
Both are selected for their good adhesion. The 8th layer is OBN, but in this OEM, all or part of it may be OBN, and the remainder may be an amorphous or hexagonal mixed phase, which has slightly inferior wear resistance but has good adhesion. Preferably, a small amount of amorphous or macrogonal crystals are present.
これら３層を一組として二組以上、六組以下となる構造
をとる。このような多重層をとることで、膜表面又は膜
内部より発生した亀裂伝搬阻止又は進展速度を減じる効
果がある。しかし、六組以上の多層となると、各構成膜
間の応力が無視できず膜軸離の原因となり、又耐摩耗性
への効果も少ないため、二〜四組が好ましい。A structure is adopted in which these three layers constitute one set and there are two or more sets and six or less sets. Such multiple layers have the effect of inhibiting the propagation of cracks generated from the film surface or inside the film, or reducing the growth rate. However, if there are six or more sets of multilayers, the stress between the constituent films cannot be ignored, causing film axis separation, and the effect on wear resistance is also small, so two to four sets are preferable.
これらの膜厚は２〜２０μｍであって、２μｍ以下では
耐摩耗性に効果なく、２０μｍを超えると靭性低下して
好ましくない。又、該被膜中のＯＥＭを含む層の膜厚は
０．５μｍ以上、３μｍ以下である。０．５μｍ未満で
は、耐摩耗性に効果なく、５μｍを超えると耐摩耗性に
優れるも靭性低下が著しく大きくなり１本発明の目的を
逸脱する。The thickness of these films is 2 to 20 μm, and if it is less than 2 μm, it has no effect on wear resistance, and if it exceeds 20 μm, the toughness decreases, which is not preferable. Further, the thickness of the layer containing OEM in the film is 0.5 μm or more and 3 μm or less. If the thickness is less than 0.5 μm, there is no effect on wear resistance, and if it exceeds 5 μm, although the wear resistance is excellent, the decrease in toughness becomes significant, which deviates from the object of the present invention.
以下実施例について説明する。 Examples will be described below.
実施例１）
ＷＯ−１０重量％ｃｏ合金に、Ｔ１０１ 、 ＯＨＸＨ
の混合ガス中、１０００ ＣにてＣＶＤ法でＴｉ０８
Ａｍ被覆した後、Ｔｉ０１％ Ｎ ＸＨ中でＴｉＮ １
μｍを被覆した。Example 1) WO-10 wt% co alloy, T101, OHXH
Ti08 by CVD method at 1000 C in a mixed gas of
After Am coating, TiN1 in Ti01%N
μm was coated.
しかるのち、プラズマＯＶＤ法で１００ｃＩ”、 ０．
１容量％Ｂ２Ｈ６と１容量％ＮＨ３と残Ｈ２中、２．４
５ ＧＨｚ 。After that, the plasma OVD method was applied to 100cI'', 0.
1 volume% B2H6, 1 volume% NH3 and remaining H2, 2.4
5GHz.
２００Ｗ下でＯＢＮを２μｍコーティングした。さらに
、ＣＶＤ法でＴｉＮ 、プラズマＣｖＤ法でＢＮ、最後
にＯＢＮを被覆した。（合計１２μｍ）
比較のために５μｍＡｌ０／３μｍＴｉ０のコーティン
グチツブを作って下記の切削条件で切削テストを行なっ
た。−
切削条件
被削材 ＳＯＭ ＋３５ （Ｈ３００）切削速度
Φ００ ｒｒＶｍｉｎ送 リ
０，３０ 霞シ’ｒｅｖ切込み
１．５ｍｍ
切削時間 １ｏ分
本発明品はにげ面摩耗ｏ、ａｏｍｍであったが、比較品
は５分後、０．５０ｍｍを超え・切削不能であった。OBN was coated to a thickness of 2 μm under 200W. Further, TiN was coated by CVD, BN was coated by plasma CVD, and finally OBN was coated. (Total 12 μm) For comparison, a coating chip of 5 μm Al0/3 μm Ti0 was prepared and a cutting test was conducted under the following cutting conditions. - Cutting conditions Work material SOM +35 (H300) Cutting speed Φ00 rrVmin feed
0.30 Haze Rev depth of cut: 1.5 mm Cutting time: 1 minute The product of the present invention had burnt surface wear of o and aomm, but the comparative product exceeded 0.50 mm and was uncuttable after 5 minutes.
実施例２）
１０容量％の結合相（ａＯｌＮｉ）で硬質相が６０重量
％ＴｉＯ、８重量％ＴｉＮ ％ ２重量％ＭＯＯ％残Ｗ
Ｏの組成からなるサーメット、及び７０重量％Ａ７０
ｚ ３０重量％ＴＩＣのセラミックを基体としてサー
メットには、Ｉ Ａｍ ＴｉＮ ｚ １ μｍ ＢＮ
Ｓ４μｍ ＯＥＭ ％を第１組、次いで３ μｍ ＡＩ
Ｏ、］μｍＴｉＮ５２μｍ０ＢＮを第２組の層として
コーティングした。（Ａ）又、セラミック上には、２μ
ｍＡ４０ 、］μｍ ＴｉＮ１２μｍ ＯＢＮを第１
組とし、Ｉ Ｉ’ｍ ＢＮ ％ １μｍのＢＮとＴｉＮ
の混合物、２μｍ０ＢＮを第２組の層としてコーティン
グした。（Ｂ）
比較のために、サーメットに３μｍＴｉＮ５５μｍＡｌ
０ をコーティングしたもの（ａ）及びセラミックに１
μｍ’Ｉ’１ｏｓ５μｒｒ＋Ａｌｏコーティングしタモ
ノ（Ｄ）１ を作９て実施例“０切削条件７切削
した・本発明品ＴＡ） 、（Ｂ）はにげ面摩耗が０．１
８閣、０．１５ｔｎｍのところ、（ａ）は８分切削で０
．５０ ｆｎｓ 、 Ｑ））はｏ、＋ｓｍｍであった。Example 2) 10% by volume of binder phase (aOlNi) with hard phase of 60% by weight TiO, 8% by weight TiN%, 2% by weight MOO% balance W
Cermet consisting of O and 70% by weight A70
I Am TiN z 1 μm BN
S4μm OEM% first set, then 3μm AI
O,] μm TiN52 μm 0BN was coated as a second set of layers. (A) Also, on the ceramic, 2μ
mA40,]μm TiN12μm OBN first
I'm BN % 1 μm BN and TiN
A mixture of 2 μm 0BN was coated as a second set of layers. (B) For comparison, 3μmTiN55μmAl was used on the cermet.
0 coated (a) and ceramic coated with 1
μm'I'1os5μrr+Alo coated tread (D)1 was prepared in Example 9 and was cut under 0 cutting conditions 7. Inventive product TA), (B) has a wear on the exposed surface of 0.1
At 8 kaku, 0.15 tnm, (a) is 0 after 8 minute cutting.
．． 50 fns, Q)) was o, +smm.
本発明の多層硬質膜被覆工具によれば、表面被覆の優れ
た耐摩耗性によって、基体の耐摩耗性が補なわれるので
、高靭性、高耐摩耗性に優れ、高速切削用工具材料とし
て使用可能で、従来品よりも著しく使用寿命を延長する
ことができる。According to the multilayer hard film coated tool of the present invention, the excellent wear resistance of the surface coating compensates for the wear resistance of the base body, so it has excellent toughness and high wear resistance, and can be used as a tool material for high-speed cutting. It is possible to significantly extend the service life compared to conventional products.
Claims (1)
なくとも一つからなる基体と、IVａ、Ｖａ、VIａ族の炭
化物、窒化物、酸化物、Ａｌ＿２Ｏ＿３、ＢＮのうちの
少なくとも一つ、これらの固溶体、混合物からなる第１
層、第１層に接して形成されIVａ、Ｖａ、VIａ族の窒化
物、ＢＮの一方又は両方からなる第２層、第２層に接し
て形成され立方晶ＢＮからなるか立方晶ＢＮを含む層か
らなる第３層を一組とし第１層を基体側にして基体表面
に形成された二〜六組の被膜を有し、この被膜の厚さが
２〜２０μｍであり、第３層の膜厚が０．５〜５μｍで
あることを特徴とする多層硬質膜被覆工具。(1) A substrate made of at least one of hard alloys, cermets, and ceramics, at least one of group IVa, Va, and VIa carbides, nitrides, oxides, Al_2O_3, and BN, and solid solutions and mixtures thereof. The first consisting of
a second layer formed in contact with the first layer and made of one or both of group IVa, Va, and VIa nitrides and BN; a second layer formed in contact with the second layer and made of cubic BN or containing cubic BN; The third layer consists of two to six sets of coatings formed on the surface of the substrate with the first layer facing the substrate, and the thickness of this coating is 2 to 20 μm. A multilayer hard film coated tool, characterized in that the film thickness is 0.5 to 5 μm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16767684A JPS6148568A (en) | 1984-08-09 | 1984-08-09 | Tool coated with multilayered hard film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16767684A JPS6148568A (en) | 1984-08-09 | 1984-08-09 | Tool coated with multilayered hard film |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6148568A true JPS6148568A (en) | 1986-03-10 |
| JPH0515786B2 JPH0515786B2 (en) | 1993-03-02 |
Family
ID=15854151
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16767684A Granted JPS6148568A (en) | 1984-08-09 | 1984-08-09 | Tool coated with multilayered hard film |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6148568A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0209137A2 (en) * | 1985-07-17 | 1987-01-21 | Toshiba Tungaloy Co. Ltd. | Cubic boron nitride coated material and producing method of the same |
| EP0701982A1 (en) * | 1994-09-16 | 1996-03-20 | Sumitomo Electric Industries, Limited | Layered film made of ultrafine particles and a hard composite material for tools possessing the film |
| JP2007169743A (en) * | 2005-12-26 | 2007-07-05 | Hitachi Tool Engineering Ltd | Coated member |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH074385U (en) * | 1993-06-28 | 1995-01-24 | 公雄 服部 | Retort food container material |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52110209A (en) * | 1976-03-15 | 1977-09-16 | Mitsubishi Metal Corp | Coated hard alloy tool |
| JPS56208A (en) * | 1979-06-18 | 1981-01-06 | Mitsubishi Metal Corp | Composite sintered part for cutting tool and its manufacture |
| JPS57174453A (en) * | 1981-04-17 | 1982-10-27 | Sumitomo Electric Ind Ltd | Coated superhard alloy tool |
-
1984
- 1984-08-09 JP JP16767684A patent/JPS6148568A/en active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52110209A (en) * | 1976-03-15 | 1977-09-16 | Mitsubishi Metal Corp | Coated hard alloy tool |
| JPS56208A (en) * | 1979-06-18 | 1981-01-06 | Mitsubishi Metal Corp | Composite sintered part for cutting tool and its manufacture |
| JPS57174453A (en) * | 1981-04-17 | 1982-10-27 | Sumitomo Electric Ind Ltd | Coated superhard alloy tool |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0209137A2 (en) * | 1985-07-17 | 1987-01-21 | Toshiba Tungaloy Co. Ltd. | Cubic boron nitride coated material and producing method of the same |
| EP0701982A1 (en) * | 1994-09-16 | 1996-03-20 | Sumitomo Electric Industries, Limited | Layered film made of ultrafine particles and a hard composite material for tools possessing the film |
| JP2007169743A (en) * | 2005-12-26 | 2007-07-05 | Hitachi Tool Engineering Ltd | Coated member |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0515786B2 (en) | 1993-03-02 |
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