JPS6145762B2 - - Google Patents
Info
- Publication number
- JPS6145762B2 JPS6145762B2 JP3697178A JP3697178A JPS6145762B2 JP S6145762 B2 JPS6145762 B2 JP S6145762B2 JP 3697178 A JP3697178 A JP 3697178A JP 3697178 A JP3697178 A JP 3697178A JP S6145762 B2 JPS6145762 B2 JP S6145762B2
- Authority
- JP
- Japan
- Prior art keywords
- film thickness
- measured
- voltage
- magnetic core
- ammeter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 24
- 238000005259 measurement Methods 0.000 claims description 20
- 239000000523 sample Substances 0.000 claims description 14
- 239000011248 coating agent Substances 0.000 claims description 11
- 238000000576 coating method Methods 0.000 claims description 11
- 238000004804 winding Methods 0.000 claims description 11
- 230000000630 rising effect Effects 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims description 6
- 239000000696 magnetic material Substances 0.000 claims description 5
- 230000001939 inductive effect Effects 0.000 claims 1
- 239000010408 film Substances 0.000 description 39
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 22
- 239000000463 material Substances 0.000 description 13
- 229910052742 iron Inorganic materials 0.000 description 11
- 238000010586 diagram Methods 0.000 description 7
- 230000035945 sensitivity Effects 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- 230000035699 permeability Effects 0.000 description 4
- 239000003973 paint Substances 0.000 description 3
- 238000007747 plating Methods 0.000 description 3
- 238000004381 surface treatment Methods 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000011247 coating layer Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 239000002335 surface treatment layer Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3697178A JPS54128759A (en) | 1978-03-30 | 1978-03-30 | Electromagnetic film thickness meter circuit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3697178A JPS54128759A (en) | 1978-03-30 | 1978-03-30 | Electromagnetic film thickness meter circuit |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS54128759A JPS54128759A (en) | 1979-10-05 |
| JPS6145762B2 true JPS6145762B2 (ko) | 1986-10-09 |
Family
ID=12484621
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3697178A Granted JPS54128759A (en) | 1978-03-30 | 1978-03-30 | Electromagnetic film thickness meter circuit |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS54128759A (ko) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007036422A (ja) * | 2005-07-25 | 2007-02-08 | Nec Tokin Corp | 送信コイルアンテナシステム |
-
1978
- 1978-03-30 JP JP3697178A patent/JPS54128759A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS54128759A (en) | 1979-10-05 |
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