JPS6143298A - Gas purge device for molecular pump - Google Patents
Gas purge device for molecular pumpInfo
- Publication number
- JPS6143298A JPS6143298A JP59164592A JP16459284A JPS6143298A JP S6143298 A JPS6143298 A JP S6143298A JP 59164592 A JP59164592 A JP 59164592A JP 16459284 A JP16459284 A JP 16459284A JP S6143298 A JPS6143298 A JP S6143298A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- inner housing
- discharge hole
- housing
- rotor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Abstract
Description
【発明の詳細な説明】
（イ）産業上の利用分野
本発明は核物理研究用の粒子加速器、核融合研究実験装
置、電子顕微鏡、表面分析装置、半導体製造装置として
のイオン注入装置やスパッタリング装置等積々の装置に
おいて、高真空を得るために用いられるターボ分子ポン
プのガスパージ機構に関する。Detailed Description of the Invention (a) Industrial Application Fields The present invention is applicable to particle accelerators for nuclear physics research, nuclear fusion research experimental equipment, electron microscopes, surface analysis equipment, ion implantation equipment and sputtering equipment as semiconductor manufacturing equipment. This invention relates to a gas purge mechanism for a turbomolecular pump used to obtain high vacuum in an equal volume device.
（ロ）従来の技術
ターボ分子ポンプにより吸引排気するガスが、腐食性ガ
スやダスト等を含む有毒ガスである場合、このような有
毒ガスにより、モータ等の駆動装置やその配線等が腐食
すると、ポンプの寿命が著しく短かくなる。(b) Conventional technology If the gas sucked and exhausted by a turbo-molecular pump is a toxic gas containing corrosive gas or dust, etc., such toxic gas corrodes drive devices such as motors and their wiring, etc. The life of the pump will be significantly shortened.
そこで従来は、第２図及び第３図に示す如く外周面に動
翼（ａ）を形成したキャップ状のロータ（ｂ）内に嵌入
するように内部ハウジング（Ｃ）を形成し、該内部ハウ
ジング（Ｃ）上端部又は該内部ハウジング（Ｃ）内に開
口するように形成したガス吐出孔（ｄ）又は（ｄ′）か
ら不活性ガスを吐出して該吐出孔（ｄ）又は（ｄ′）の
開口の周辺を陽圧にすると共に、該内部ハウジング（Ｃ
）の外周面に、前記ロータ（ｂ）の回転方向と同回転方
向のねじ溝（ｅ）よりなるいわゆるネジパツキンを形成
し、前記ガス吐出孔（ｄ）又は（ｄ′）から吐出した不
活性ガスを前記ロータ（ｂ）の回転により前記ねじ溝（
ｅ）内で圧縮し、上方から下方即ち矢印Ｆ又はＦ′の方
向に圧送して、有害ガスが前記内部ハウジング（Ｃ）内
に侵入するのを防止していた。Therefore, conventionally, as shown in FIGS. 2 and 3, an internal housing (C) is formed so as to fit into a cap-shaped rotor (b) having rotor blades (a) formed on its outer peripheral surface. (C) Inert gas is discharged from the gas discharge hole (d) or (d') formed to open at the upper end or inside the inner housing (C), and the discharge hole (d) or (d') While applying positive pressure around the opening of the inner housing (C
) is formed with a so-called threaded gasket consisting of a threaded groove (e) in the same rotational direction as the rotational direction of the rotor (b), and the inert gas discharged from the gas discharge hole (d) or (d'). The rotation of the rotor (b) causes the thread groove (
e) and pumped from above downwards, i.e. in the direction of arrow F or F', to prevent harmful gases from entering said inner housing (C).
（ハ）発明が解訣しようとする問題点
上記の従来の技術によれば、第２図示の如くガス吐出孔
（ｄ）の開口を内部ハウジング（ｃ）上端に形成したも
のの場合は、誤操作等により有毒ガスが内部ハウジング
内に侵入した場合、これを除去することが不可能で、モ
ータ等の駆動装置やその配線寿命を著しく短かくする欠
点があり、又第３図示の如くガス吐出孔（ｄ′）の開口
を内部ハウジング（Ｃ）内に形成したものの場合には、
内部ハウジング（ｃ）内の潤滑油の蒸気が不活性ガスに
同伴されて、内部ハウジング（Ｃ）外へ流出し、潤滑油
から分別される炭化水素が高真空室内へ侵入して、各種
実験において著しく不都合を生ずる欠点があった。(c) Problems to be Solved by the Invention According to the above-mentioned conventional technology, in the case where the opening of the gas discharge hole (d) is formed at the upper end of the inner housing (c) as shown in the second figure, there are problems such as erroneous operation, etc. If poisonous gas enters the internal housing, it is impossible to remove it, which significantly shortens the life of drive devices such as motors and their wiring. In the case where the opening d') is formed in the inner housing (C),
The lubricating oil vapor in the inner housing (c) is accompanied by an inert gas and flows out of the inner housing (C), and the hydrocarbons separated from the lubricating oil enter the high vacuum chamber, resulting in various experiments. There were drawbacks that caused significant inconvenience.
本発明はこのような従来技術の欠点を解消し、モータ等
の駆動装置やその配線がターボ分子ポンプにより吸引排
気される有毒ガスによる悪影響を受けず、しかも内部ハ
ウジング内から油蒸気が流出しないガスパージ機構を提
供することを目的とする。The present invention eliminates the drawbacks of the prior art, and provides a gas purge system in which driving devices such as motors and their wiring are not adversely affected by the toxic gas sucked and exhausted by a turbo molecular pump, and furthermore, oil vapor does not leak out from inside the internal housing. The purpose is to provide a mechanism.
（ニ）発明の構成
上記目的を達成するため本発明のターボ分子ポンプのガ
スパージ機構は前記内部ハウジングに、該内部ハウジン
グ内に開口する第１ガス吐出孔を設けると共に該内部ハ
ウジングの前記ロータ内への嵌入部の外周面に開口する
第２ガス吐出孔を設け、該内部ハウジングの外周面で該
第２ガス吐出孔の開口の下方部と上方部には互に逆ねじ
のねじ溝を形成し、前記ロータの回転によれば前記第２
ガス吐出孔からのガスが前記下方部では下方に前記上方
部では上方に圧縮するようにしたことを特徴とする。(d) Structure of the Invention In order to achieve the above object, the gas purge mechanism of the turbomolecular pump of the present invention is provided with a first gas discharge hole opening into the inner housing, and a first gas discharge hole opening into the inner housing, and a first gas discharge hole opening into the rotor of the inner housing. A second gas discharge hole is provided on the outer circumferential surface of the fitting portion of the inner housing, and thread grooves with opposite threads are formed in the lower and upper portions of the opening of the second gas discharge hole on the outer circumferential surface of the inner housing. , according to the rotation of the rotor, the second
It is characterized in that the gas from the gas discharge hole is compressed downward in the lower part and upward in the upper part.
（ホ）作用
ロータ回転時には、内部ハウジング外周面に設けた第２
ガス吐出孔から吐出したパージガスが、吐出孔の開口の
下方部に形成したねじ溝内で下方に圧送され、有毒ガス
が内部ハウジング内へ侵入するのを防止すると共に。(E) When the working rotor rotates, the second
The purge gas discharged from the gas discharge hole is forced downward within the threaded groove formed at the lower part of the opening of the discharge hole, thereby preventing toxic gas from entering into the internal housing.
前記第２ガス吐出孔の開口の上方部に形成したねじ溝内
ではパージガスが上方向に圧縮され、内部ハウジング内
に形成した第１ガス吐出孔から吐出したパージガスの圧
力とつりあってパージガスの流れを止め、内部ハウジン
グ内から油蒸気が流出するのを防止する。The purge gas is compressed upward in the threaded groove formed above the opening of the second gas discharge hole, and the pressure of the purge gas discharged from the first gas discharge hole formed in the inner housing is balanced to control the flow of the purge gas. to prevent oil vapor from escaping from inside the internal housing.
又、ロータ停止時には前記ねじ溝によるガスの圧縮作用
が生じないので、前記内部ハウジング内に設けた第１ガ
ス吐出孔から吐出するパージガスの吐出量が増大し、内
部ハウジング内への有毒ガスの侵入を防止し、さらに誤
操作等、によって有毒ガスが内部ハウジング内に侵入し
た場合にも、これを容易に排出することができる。Furthermore, when the rotor is stopped, the gas compression action by the thread grooves does not occur, so the amount of purge gas discharged from the first gas discharge hole provided in the internal housing increases, preventing toxic gas from entering the internal housing. Furthermore, even if toxic gas enters the internal housing due to erroneous operation, it can be easily discharged.
（へ）実施例 本発明の１実施例を第１図に従って説 明する。(f) Example An embodiment of the present invention will be described with reference to FIG. I will clarify.
（１）は静：ｔ （２）を内周面に形成した筒状の外部
ハウジングを示し、該外部ハウジング（１）内には動翼
（３）を外周面に形成したキャップ状のロータ（４）を
回転自在に配設した。(1) shows a cylindrical external housing with static: t (2) formed on the inner circumferential surface, and inside the external housing (1) is a cap-shaped rotor (2) with rotor blades (3) formed on the outer circumferential surface. 4) is arranged rotatably.
（５）は前記外部ハウジング（１）の下端部に固着した
内部ハウジングを示し、該内部ハウジング（５）は前記
ロータ（４）の凹部にその下方から嵌入すると共に、そ
の内部に電動モータ（６）を配設し、該電動モータ（６
）と前記ロータ（４）とを回転軸（７）により連結した
。（６ａ）はモータステータ、（６ｂ）はモータロータ
を示す。(5) indicates an internal housing fixed to the lower end of the external housing (1), and the internal housing (5) fits into the recess of the rotor (4) from below, and the electric motor (6) is installed inside the internal housing (5). ), and the electric motor (6
) and the rotor (4) were connected by a rotating shaft (7). (6a) shows a motor stator, and (6b) shows a motor rotor.
（８）は前記内部ハウジング（５）内の下部に設けた油
槽を示し、該油槽（８）内に貯留した潤滑油（９）によ
って、前記回転軸（７）を支える軸受（１０５Ｌ）（１
０ｂ）７）潤滑をするようにした。（１１）は前記潤滑
油（９）を上方の前記軸受（１０ａ）の近傍に輸送する
為に前記回転軸（７）内に形成した給油孔、（ｌｌａ）
はその潤滑油吐出孔を示す。(8) indicates an oil tank provided at the lower part of the internal housing (5), and the bearing (105L) (1) supports the rotating shaft (7) by lubricating oil (9) stored in the oil tank (8).
0b)7) Lubricated. (11) is an oil supply hole (lla) formed in the rotating shaft (7) in order to transport the lubricating oil (9) upward to the vicinity of the bearing (10a);
indicates the lubricating oil discharge hole.
（１２）は前記内部ハウジング（５）内に開口する第１
ガス吐出孔、（１３）は前記ロータ（４）内に嵌入した
位置の該内部ハウジング（５）の外周面に開口する第２
ガス吐出孔を示し、これらガス吐出孔（１２） （１
３）は共に前記内部ハウジング下部に設けたガス供給、
孔（１４）に連通させ、該供給孔 ′（１４）にガ
ス供給管（１５）を接続して外部から不活性ガスを供給
するようにした。(12) is a first opening into the inner housing (5);
A gas discharge hole (13) is a second gas discharge hole that opens on the outer peripheral surface of the inner housing (5) at a position fitted into the rotor (4).
Gas discharge holes are shown, and these gas discharge holes (12) (1
3) is a gas supply provided at the bottom of the inner housing;
A gas supply pipe (15) was connected to the supply hole ′ (14) to supply inert gas from the outside.
（１６）は前記内部ハウジング（５）の外周面に形成し
たねじ溝を示し、該ねじ構（１６）は、前記ガス吐出孔
（４３）の開口の下方部分（１６ａ）と上方部分（１６
ｂ）を互に逆ねじに形成し、前記ロータ（４）の回転に
よれば前記第２ガス吐出孔（１３）から吐出した不活性
ガスが、前記下方部分（１６ａ）では矢印Ａの如く下方
向に前記上方部分（１６ｂ）では矢印Ｂの如く上方向に
各々圧縮されるようにした。(16) indicates a thread groove formed on the outer peripheral surface of the inner housing (5), and the thread structure (16) is comprised of a lower part (16a) and an upper part (16a) of the opening of the gas discharge hole (43).
b) are formed with opposite threads to each other, and as the rotor (4) rotates, the inert gas discharged from the second gas discharge hole (13) flows downward as indicated by arrow A in the lower part (16a). The upper portions (16b) are each compressed upward as indicated by arrow B.
（１７）は吸気口、（１８）は排気口 を示す。(17) is the intake port, (18) is the exhaust port shows.
次に上記実施例の動作について説・・明する。Next, the operation of the above embodiment will be explained.
電動モータ（６）によりロータ（４）を回転させると、
静翼（２）と動翼（３）の圧縮作用によって吸気口（１
７）から気体が吸引され排気口（１８）へ排出されると
共に１回転軸（７）に設けた潤滑油吐出孔（ｌｌａ）か
ら、遠心力により潤滑油（９）が吐出し。When the rotor (4) is rotated by the electric motor (6),
The air intake port (1) is compressed by the stator blade (2) and moving blade (3).
Gas is sucked in from 7) and discharged to the exhaust port (18), and lubricating oil (9) is discharged by centrifugal force from the lubricating oil discharge hole (lla) provided in the one-rotation shaft (7).
軸受（１０ａ）の潤滑を行ない、これと同時に、ガス供
給孔（１４）に不活性ガスを供給し、ガス吐出孔（１２
）（１３）から不活性ガスを吐出させる。The bearing (10a) is lubricated, and at the same time, inert gas is supplied to the gas supply hole (14) and the gas discharge hole (12
) Discharge inert gas from (13).
内部ハウジング（５）外周面に設けた第２ガス吐出孔（
１３）から吐出した不活性ガスは、ロータ（４）の回転
によりねじ溝
（１６ａ）（１６ｂ）内で前記第２吐出孔（１３）の上
下方向すなわち第１図矢印Ａ及びＢの方向に圧縮され、
下方すなわち矢印Ａ方向に圧縮された不活性ガスはその
方向に流出して前記吸引される気体中の有毒ガスが内部
ハウジング（５）内に侵入するのを防止すると共に、上
方すなわち矢印Ｂ方向に圧縮された不活性ガスは内部ハ
ウジング（５）内の第１吐出孔（１２）から吐出した不
活性ガスの圧力とつりあってほぼ停止し、内部ハウジン
グ（５）内から油蒸気が流出するのを防止する。尚、上
側のねじ１ｌｌ（１６ｂ）は、内部ハウジング（５）内
の不活性ガスがわずかに流出する程度、すなわち矢印Ｂ
と反対方向にわずかに流れが生ずる程度に形成するのが
有毒ガスの流入防止にとって最も好ましい。A second gas discharge hole (
The inert gas discharged from 13) is compressed in the thread grooves (16a) and (16b) by the rotation of the rotor (4) in the vertical direction of the second discharge hole (13), that is, in the direction of arrows A and B in Figure 1. is,
The inert gas compressed downwards, i.e. in the direction of arrow A, flows out in that direction to prevent toxic gases in the sucked gas from entering the inner housing (5), and upwards, i.e. in the direction of arrow B. The compressed inert gas almost stops as it balances the pressure of the inert gas discharged from the first discharge hole (12) in the inner housing (5), preventing oil vapor from flowing out from inside the inner housing (5). To prevent. In addition, the upper screw 1ll (16b) is set to such an extent that the inert gas in the inner housing (5) slightly flows out, that is, arrow B.
In order to prevent the inflow of toxic gases, it is most preferable to form the tube so that a slight flow occurs in the opposite direction.
次に電動モータ（６）を停止した場合には、内部ハウジ
ング（５）の外周において上記の圧縮作用が生じないの
で、内部ハウジング（５）内の第１ガス吐出孔（１２）
から吐出する不活性ガスの吐出量が増大して、該不活性
ガスが内部ハウジング（５）の外周を下方に向けて即ち
矢印Ｃの方向に流れ、有毒ガスの内部ハウジング内への
流入を防止する。Next, when the electric motor (6) is stopped, the above-mentioned compression action does not occur on the outer periphery of the inner housing (5), so the first gas discharge hole (12) in the inner housing (5)
The amount of inert gas discharged from the inner housing (5) increases, and the inert gas flows downward around the outer periphery of the inner housing (5), that is, in the direction of arrow C, thereby preventing toxic gases from flowing into the inner housing. do.
尚、電動モータ（６）停止時には潤滑油吐出孔（ｌｌａ
）に遠心力が作用せず、潤滑油の吐出がないので、油蒸
気が不活性ガスの流れに混入して排出されることはない
。Furthermore, when the electric motor (6) is stopped, the lubricating oil discharge hole (lla
) and no lubricating oil is discharged, so no oil vapor is mixed into the inert gas flow and discharged.
（ト）発明の効果
このように本発明によると、内部ハウジングの前記ロー
タ内への嵌入部の外周面に開口する第２ガス吐出孔を設
け、該内部ハウジングの外周面で該第２ガス吐出孔の開
口の下方部と上方部には互に逆ねじ・のねじ溝を形成し
、前記ロータの回転によれば前記第２ガス吐出口からの
ガスが前記下方部では下方に前記上方部では上方に圧縮
するようにしたので、ロータ回転時に、吸引排気ガスに
含まれる有毒ガスの内部ハウジング内への侵入、及び内
部ハウジング内からの油蒸気の流出を防止し、されに内
部ハウジング内に第１ガス吐出孔を設けたので、ロータ
停止時においても内部ハウジング内への有毒ガスの侵入
を防止すると共に、有毒ガスが誤って侵入した場合にも
これを容易に排出することができ、かくて、モータ等の
駆動装置やその配線が長期の寿命を得ることができると
共に、油蒸気による悪影響が生じないで各種実験や製造
を行なうことができる効果がある。(g) Effects of the Invention According to the present invention, a second gas discharge hole is provided that opens on the outer circumferential surface of the portion of the inner housing that fits into the rotor, and the second gas discharge hole is provided on the outer circumferential surface of the inner housing. Thread grooves with opposite threads are formed in the lower and upper parts of the opening of the hole, and as the rotor rotates, the gas from the second gas discharge port flows downward in the lower part and in the upper part. Since it is compressed upward, when the rotor rotates, it prevents toxic gas contained in the suction exhaust gas from entering the internal housing, and prevents oil vapor from flowing out from the internal housing. 1 Gas discharge holes are provided to prevent toxic gas from entering the internal housing even when the rotor is stopped, and even if toxic gas accidentally enters, it can be easily discharged. This has the advantage that driving devices such as motors and their wiring can have a long service life, and various experiments and manufacturing can be carried out without the adverse effects of oil vapor.
第１図は本発明の１実施例の縦断面図、第２図及び第３
図は各々従来例の縦断面図である。
（１）・・・外部ハウジング、
（２）・・・静翼、 （３）・・・動翼、（４）・・
・ロータ、（５）・・・内部ハウジング、（６）・・・
モータ、（７）・・・回転軸、（１２）・・・第１ガス
吐出孔、
（１３）・・・第２ガス吐出孔、
（１１３ａ） （１ｓ ｂ） 、、、ねじ溝特許出願
人 株式会社大阪真空機器製作所第１図FIG. 1 is a longitudinal cross-sectional view of one embodiment of the present invention, FIG.
Each figure is a longitudinal sectional view of a conventional example. (1)... External housing, (2)... Stationary blade, (3)... Moving blade, (4)...
・Rotor, (5)...Inner housing, (6)...
Motor, (7)...Rotating shaft, (12)...First gas discharge hole, (13)...Second gas discharge hole, (113a) (1s b), Thread groove patent applicant Osaka Vacuum Equipment Manufacturing Co., Ltd. Figure 1
Claims (1)
状のロータと、前記外部ハウジングの下端部に固着され
前記ロータ内に嵌入するように形成した内部ハウジング
と、該内部ハウジング内に配量され回転軸を介して前記
ロータを駆動するモータより成るターボ分子ポンプにお
いて、前記内部ハウジングに、該内部ハウジング内に開
口する第１ガス吐出孔を設けると共に該内部ハウジング
の前記ロータ内への嵌入部の外周面に開口する第２ガス
吐出孔を設け、該内部ハウジングの外周面で該第２ガス
吐出孔の開口の下方部と上方部には互に逆ねじのねじ溝
を形成し、前記ロータの回転によれば前記第２ガス吐出
孔からのガスが前記下方部では下方に前記上方部では上
方に圧縮するようにしたことを特徴とするガスパージ機
構。[Scope of Claims] A cap-shaped rotor that is rotatably disposed within an outer housing that has stator vanes formed on its inner circumferential surface and that has rotor blades formed on its outer circumferential surface; A turbomolecular pump comprising an internal housing formed to fit into the internal housing, and a motor disposed within the internal housing and driving the rotor via a rotating shaft, the internal housing having an opening into the internal housing. A first gas discharge hole is provided, and a second gas discharge hole is provided that opens on the outer peripheral surface of a portion of the inner housing that fits into the rotor, and a second gas discharge hole is provided below the opening of the second gas discharge hole on the outer peripheral surface of the inner housing. Thread grooves with opposite threads are formed in the lower part and the upper part so that as the rotor rotates, the gas from the second gas discharge hole is compressed downward in the lower part and upward in the upper part. A gas purge mechanism characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59164592A JPS6143298A (en) | 1984-08-06 | 1984-08-06 | Gas purge device for molecular pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59164592A JPS6143298A (en) | 1984-08-06 | 1984-08-06 | Gas purge device for molecular pump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6143298A true JPS6143298A (en) | 1986-03-01 |
| JPH0457879B2 JPH0457879B2 (en) | 1992-09-14 |
Family
ID=15796108
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59164592A Granted JPS6143298A (en) | 1984-08-06 | 1984-08-06 | Gas purge device for molecular pump |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6143298A (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01174595U (en) * | 1988-05-27 | 1989-12-12 | ||
| US5374160A (en) * | 1992-04-29 | 1994-12-20 | Varian Associates, Inc. | High performance turbomolecular vacuum pumps |
| JPH0815839A (en) * | 1994-06-24 | 1996-01-19 | Molnar Sa | Photograph processing device |
| US5916832A (en) * | 1997-10-14 | 1999-06-29 | Asahi Glass Company Ltd. | Hermetic sealing composition |
| WO2005085643A1 (en) * | 2004-03-02 | 2005-09-15 | Tadahiro Ohmi | Vacuum pump |
| WO2021172144A1 (en) * | 2020-02-26 | 2021-09-02 | エドワーズ株式会社 | Vacuum pump and vacuum pump constituent component |
| EP3910200A4 (en) * | 2019-01-10 | 2022-09-28 | Edwards Japan Limited | Vacuum pump |
| EP4123181A4 (en) * | 2020-03-19 | 2024-04-17 | Edwards Japan Limited | Vacuum pump and vacuum pump component |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3071384A (en) * | 1960-04-07 | 1963-01-01 | Alsacienne Constr Meca | Sealing structure for rotary mechanism |
| DE2408256A1 (en) * | 1974-02-21 | 1975-09-04 | Leybold Heraeus Gmbh & Co Kg | Turbo molecular vacuum pump with first stage auxiliary pump - has gas supply for scavenging rotor bearing chamber |
| DE2526164A1 (en) * | 1975-06-12 | 1976-12-30 | Leybold Heraeus Gmbh & Co Kg | Turbo molecular vacuum pump - has means for gas inlet to ring shaped channel between stator and bell shaped rotor inner surface |
-
1984
- 1984-08-06 JP JP59164592A patent/JPS6143298A/en active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3071384A (en) * | 1960-04-07 | 1963-01-01 | Alsacienne Constr Meca | Sealing structure for rotary mechanism |
| DE2408256A1 (en) * | 1974-02-21 | 1975-09-04 | Leybold Heraeus Gmbh & Co Kg | Turbo molecular vacuum pump with first stage auxiliary pump - has gas supply for scavenging rotor bearing chamber |
| DE2526164A1 (en) * | 1975-06-12 | 1976-12-30 | Leybold Heraeus Gmbh & Co Kg | Turbo molecular vacuum pump - has means for gas inlet to ring shaped channel between stator and bell shaped rotor inner surface |
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01174595U (en) * | 1988-05-27 | 1989-12-12 | ||
| US5374160A (en) * | 1992-04-29 | 1994-12-20 | Varian Associates, Inc. | High performance turbomolecular vacuum pumps |
| JPH0815839A (en) * | 1994-06-24 | 1996-01-19 | Molnar Sa | Photograph processing device |
| US5916832A (en) * | 1997-10-14 | 1999-06-29 | Asahi Glass Company Ltd. | Hermetic sealing composition |
| WO2005085643A1 (en) * | 2004-03-02 | 2005-09-15 | Tadahiro Ohmi | Vacuum pump |
| JP2005248741A (en) * | 2004-03-02 | 2005-09-15 | Tadahiro Omi | Vacuum pump |
| US7686600B2 (en) | 2004-03-02 | 2010-03-30 | Foundation For Advancement Of International Science | Vaccum pump having shaft seal to prevent corrosion and to ensure smooth operation |
| JP4558349B2 (en) * | 2004-03-02 | 2010-10-06 | 財団法人国際科学振興財団 | Vacuum pump |
| EP3910200A4 (en) * | 2019-01-10 | 2022-09-28 | Edwards Japan Limited | Vacuum pump |
| WO2021172144A1 (en) * | 2020-02-26 | 2021-09-02 | エドワーズ株式会社 | Vacuum pump and vacuum pump constituent component |
| JP2021134697A (en) * | 2020-02-26 | 2021-09-13 | エドワーズ株式会社 | Vacuum pump and vacuum pump component |
| EP4123181A4 (en) * | 2020-03-19 | 2024-04-17 | Edwards Japan Limited | Vacuum pump and vacuum pump component |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0457879B2 (en) | 1992-09-14 |
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