JPS6142245U - Grinding work holding device - Google Patents

Grinding work holding device

Info

Publication number
JPS6142245U
JPS6142245U JP1984125302U JP12530284U JPS6142245U JP S6142245 U JPS6142245 U JP S6142245U JP 1984125302 U JP1984125302 U JP 1984125302U JP 12530284 U JP12530284 U JP 12530284U JP S6142245 U JPS6142245 U JP S6142245U
Authority
JP
Japan
Prior art keywords
workpiece
holding shaft
holding device
work holding
polishing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1984125302U
Other languages
Japanese (ja)
Inventor
信明 大井
良和 井伊
Original Assignee
富士電気化学株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 富士電気化学株式会社 filed Critical 富士電気化学株式会社
Priority to JP1984125302U priority Critical patent/JPS6142245U/en
Publication of JPS6142245U publication Critical patent/JPS6142245U/en
Pending legal-status Critical Current

Links

Landscapes

  • Jigs For Machine Tools (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

図は本考案の一実施例を示す断面図である。 1・・・・・・研磨ホイル、2・・・・・・ワーク、3
・・・・・・保持軸、4・・・・・・ベアリング、5・
・・・・・筒体、6・・・・・・取付治具、7・・・・
・・凹部、8・・・・・・中空部、9・・・・・・ブッ
シュ、10・・・・・・連通孔、11・・・・・・0リ
ング、12・・・・・・空間部、13・・・・・・貫通
孔、14・・・・・・フレーム、15・・・・・・歯車
、16・・・・・・電動機、17・・・・・・原動歯車
The figure is a sectional view showing an embodiment of the present invention. 1... Polishing foil, 2... Workpiece, 3
...Holding shaft, 4...Bearing, 5.
...Cylinder, 6...Mounting jig, 7...
...Recessed portion, 8...Hollow part, 9...Bush, 10...Communication hole, 11...0 ring, 12... Space part, 13... Through hole, 14... Frame, 15... Gear, 16... Electric motor, 17... Drive gear.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 研磨液を供給しながら研磨ホイルにワークを当接して該
ワークを研磨する研磨ワークの保持装置において、該ワ
ークを先端部に嵌着して吸引空気によって保持する保持
軸と、該保持軸を収納して回転自在に支承する筒体とを
有し、該保持軸と該筒体の間隙部から該研磨ホイル側に
向けて圧縮エアを吐出するようにしてなることを特徴と
する研磨ワークの保持装置。
A holding device for polishing a workpiece that polishes the workpiece by contacting the workpiece with a polishing foil while supplying polishing liquid, includes a holding shaft that fits the workpiece at the tip and holds the workpiece by suction air, and a holding shaft that houses the holding shaft. and a cylindrical body rotatably supported by the holding shaft, and compressed air is discharged toward the polishing foil from a gap between the holding shaft and the cylindrical body. Device.
JP1984125302U 1984-08-20 1984-08-20 Grinding work holding device Pending JPS6142245U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984125302U JPS6142245U (en) 1984-08-20 1984-08-20 Grinding work holding device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984125302U JPS6142245U (en) 1984-08-20 1984-08-20 Grinding work holding device

Publications (1)

Publication Number Publication Date
JPS6142245U true JPS6142245U (en) 1986-03-18

Family

ID=30683991

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984125302U Pending JPS6142245U (en) 1984-08-20 1984-08-20 Grinding work holding device

Country Status (1)

Country Link
JP (1) JPS6142245U (en)

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