JPS6140071A - Flexible piezoelectric element - Google Patents

Flexible piezoelectric element

Info

Publication number
JPS6140071A
JPS6140071A JP16267084A JP16267084A JPS6140071A JP S6140071 A JPS6140071 A JP S6140071A JP 16267084 A JP16267084 A JP 16267084A JP 16267084 A JP16267084 A JP 16267084A JP S6140071 A JPS6140071 A JP S6140071A
Authority
JP
Japan
Prior art keywords
electrode
thin film
film
lead
polymer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16267084A
Other languages
Japanese (ja)
Other versions
JPH0412634B2 (en
Inventor
Tomonobu Tomita
富田　知伸
Hiroshi Takami
高見　浩
Atsushi Tanaka
篤志 田中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Petrochemical Co Ltd
Original Assignee
Mitsubishi Petrochemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Petrochemical Co Ltd filed Critical Mitsubishi Petrochemical Co Ltd
Priority to JP16267084A priority Critical patent/JPS6140071A/en
Publication of JPS6140071A publication Critical patent/JPS6140071A/en
Publication of JPH0412634B2 publication Critical patent/JPH0412634B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/875—Further connection or lead arrangements, e.g. flexible wiring boards, terminal pins
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H10N30/2042—Cantilevers, i.e. having one fixed end

Landscapes

  • Transducers For Ultrasonic Waves (AREA)
  • Piezo-Electric Transducers For Audible Bands (AREA)

Abstract

PURPOSE:To obtain a piezoelectric element which has a reduced overall thickness, excellent flexibility and mechanical strength and appropriate rigidity and can deliver a large signal output, by composing a flexible piezoelectric element of thin components including a high-polymer piezoelectric member, a flexible electrode sheet, a connecting conductor and a protection film. CONSTITUTION:A high-polymer piezoelectric member 1 has thin-film electrodes 11a, 11b. A flexible electrode sheet 9 includes a high-polymer film 14, a thin-film lead part 13a connected to the electrode 11a, and an electrode 11 having a lead part 13b connected to the electrode 11b, the lead part 13a and the electrode 11 being formed on one surface of the film 14 in such a manner that the lead parts 13a, 13b are disposed at one end of the film 14 adjacent to and in parallel with each other in the width direction of the film 14. The electrode 11b of the piezoelectric member 1 is bonded to the electrode 11 of the sheet 9 by an electrically conductive adhesive, and the electrode 11a and the lead part 13a are connected together by bonding an electrically conductive adhesive- backed copper foil 12 between them. A protection sheet 10 defined by a high-polymer film is bonded to the surface of the copper foil 12 and the exposed surface of the electrode 11a by an adhesive. Thus, it is possible to obtain a piezoelectric element which has a reduced thickness, excellent flexibility and mechanical strength and appropriate rigidity and can deliver a large signal output.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は変位発生素子、焦電素子、あるいは振動子とし
て使用できる柔軟性に優れた圧電素子に係り、特に高分
子圧電体と可撓性電極シートと保護膜よりなり、信号取
り出しや電圧印加のためのリード線を直接ハンダ付けす
ることが可能な可撓性圧電素子に関する。[Detailed Description of the Invention] [Field of Industrial Application] The present invention relates to a piezoelectric element with excellent flexibility that can be used as a displacement generating element, a pyroelectric element, or a vibrator, and particularly relates to a piezoelectric element with excellent flexibility that can be used as a displacement generating element, a pyroelectric element, or a vibrator. The present invention relates to a flexible piezoelectric element that is composed of an electrode sheet and a protective film, and to which lead wires for signal extraction and voltage application can be directly soldered.

〔従来の技術〕[Conventional technology]

高分子圧電体は薄膜形成が容易で、且つ可撓性を有する
ので、省スペースで取り付けることができ、特に屈曲部
への取り付けが容易であり、大きな変形を与えることが
できる等の優れた性質を有している。Polymer piezoelectric materials are easy to form into thin films and are flexible, so they can be installed in a small space, and they have excellent properties such as being especially easy to install on bends and being able to give large deformations. have.

高分子圧電体の表面から電極を通して電気信号を取り出
したり、あるいは電極に電圧を印加して変位を生じせし
めるために、両電極に信号取り出しや電圧印加のための
リード線を接続する場合がある。In order to extract electrical signals from the surface of the polymer piezoelectric material through the electrodes, or to apply voltage to the electrodes to cause displacement, lead wires for signal extraction and voltage application may be connected to both electrodes.

しかし高分子圧電体は低い軟化温度を有しているので、
高温度に耐える無機圧電体のようにその両電極にリード
線を直接ハンダ付けすることができない欠点を有してい
る。また、ソケットに高分子圧電体を直接挿入してその
電極よりソケ７）を通して信号を取り出そうとしても、
高分子圧電体の種類にもよるが、柔らか過ぎて挿入でき
ないか、あるいは硬いが脆くて繰り返しの挿入・抜き出
しに耐えられない等の欠点を有している。However, since polymer piezoelectric materials have a low softening temperature,
Unlike inorganic piezoelectric materials that can withstand high temperatures, lead wires cannot be directly soldered to both electrodes. Also, even if you insert a polymer piezoelectric material directly into the socket and try to extract the signal from the electrode through the socket 7),
Depending on the type of polymer piezoelectric material, they have drawbacks such as being too soft to insert, or being hard but brittle and unable to withstand repeated insertion and removal.

従来は高分子圧電体の両電極にリード線を接続するため
第５図（Ａ）〜（Ｃ）に示すような手段が用いられてい
る。Conventionally, means as shown in FIGS. 5A to 5C have been used to connect lead wires to both electrodes of a polymer piezoelectric material.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

第５図（八）の例は高分子圧電体゛１の両電極２ａ。 The example shown in FIG. 5 (8) is both electrodes 2a of a polymer piezoelectric material 1.

２ｂにリード線３ａ、　３ｂを導電性接着剤４によって
接着した場合である。導電性接着剤４は高分子圧電体１
の可撓性を損なわないようにその一部にのみ塗布される
ので、リード線３ａ、　３ｂと電極２ａ、　２ｂとの接
着強度は弱く、特に振動子として用いるにはその接着強
度が不足し耐久性に欠ける欠点がある。This is a case where lead wires 3a and 3b are bonded to 2b using a conductive adhesive 4. The conductive adhesive 4 is the polymer piezoelectric material 1
Since it is applied only to a portion of the lead wires 3a, 3b and the electrodes 2a, 2b so as not to impair their flexibility, the adhesive strength between the lead wires 3a, 3b and the electrodes 2a, 2b is weak, and the adhesive strength is insufficient especially for use as a vibrator, resulting in poor durability. It has a flaw in its lack of sex.

また、曲げ変形時に圧電体１の両面に発生する電荷量が
ほぼ等しくなるため小さな出力信号ｔか得られないとい
う致命的な欠点がある。Furthermore, since the amount of charge generated on both sides of the piezoelectric body 1 during bending deformation is approximately equal, there is a fatal drawback in that only a small output signal t cannot be obtained.

第５図（Ｂ）の例は高分子圧電体ｌの両面に電極を兼ね
た導電性ゴムシート５ａ　、　５ｂを圧着させ、この導
電性ゴムシート５ａ、５ｂと高分子圧電体１との間にそ
れぞれ部分的に金属片６ａ、　６ｂを挿入し、この各金
属片６ａ、　６ｂにリード線３ａ、　３ｂをハンダ付け
する場合である。低い導体抵抗を実現゛するため導電性
ゴムシート５ａ、５ｂは、例えば両面合わせて１龍以上
の厚さになってしまい、大きな変位を生じせしめること
が困難になり、省スペースで取り付けることができなく
なる欠点がある。また、曲げ変形時の信号を大きくする
には相対する導電性ゴムシート５ａ、５ｂの厚さに大差
をつけなければならないなど構造上の欠点を有している
。In the example shown in FIG. 5(B), conductive rubber sheets 5a and 5b, which also serve as electrodes, are crimped onto both sides of the polymer piezoelectric material 1, and between the conductive rubber sheets 5a and 5b and the polymer piezoelectric material 1, This is a case where metal pieces 6a, 6b are partially inserted into each metal piece, and lead wires 3a, 3b are soldered to each metal piece 6a, 6b. In order to achieve low conductor resistance, the conductive rubber sheets 5a and 5b have a thickness of, for example, one layer or more on both sides, making it difficult to cause large displacement and making it difficult to install them in a space-saving manner. There are drawbacks that go away. Furthermore, in order to increase the signal at the time of bending deformation, it is necessary to make a large difference in the thickness of the opposing conductive rubber sheets 5a and 5b, which has structural disadvantages.

第５図（Ｃ）の例は高分子圧電体１の両面にリード線接
続部７ａ　、　７ｂを有する金属箔よりなる薄い電極８
ａ、’８ｂを添着し、その各リード接続部？ａ　、　７
ｂにリード線３ａ、　３ｂをハンダ付けする場合である
。これでは素子全体が硬くなってしまい、大きな曲げ変
位を必要とする素子には不適当である。素子に柔軟性を
もたせるため電極８ａ　、　８ｂを薄＜シ過ぎると、リ
ード接続部７ａ　、　７ｂの強度が低下し使用に耐えな
い欠点を生じる。The example shown in FIG. 5(C) is a thin electrode 8 made of metal foil having lead wire connection parts 7a and 7b on both sides of the polymer piezoelectric material 1.
Attach a and '8b and connect each lead? a, 7
This is a case where lead wires 3a and 3b are soldered to b. This makes the entire element hard, making it unsuitable for elements that require large bending displacements. If the electrodes 8a, 8b are made too thin in order to provide flexibility to the device, the strength of the lead connecting portions 7a, 7b will be reduced, resulting in a disadvantage that they are unusable.

本発明はかかる従来例の欠点に鑑みてなされたものであ
って、その目的とするところは、厚さが薄く可撓性と機
械的強度に優れ適度の剛性を有し、省スペースで取り付
けることができると共に大きな変位を生じせしめたり、
大きな曲げ変位を与えたりすることができ、大吉な信号
出力を得ることができることは勿論、リード線を十分な
強度で取り付けることができ、かつリード部のソケット
への挿入・抜き出しも容易に行える可撓性圧電素子を提
供することである。The present invention has been made in view of the drawbacks of the conventional examples, and its purpose is to provide a device that is thin, has excellent flexibility and mechanical strength, has appropriate rigidity, and can be installed in a space-saving manner. can cause large displacements,
Not only can a large bending displacement be applied and a good signal output can be obtained, but the lead wire can be attached with sufficient strength, and the lead part can be easily inserted and extracted from the socket. An object of the present invention is to provide a flexible piezoelectric element.

〔問題点を解決するための手段〕[Means for solving problems]

本発明素子は上記の目的を達成するため、第１図及び第
２図示のように一方の面に薄膜電極１１ａを有する高分
子圧電体１と、この高分子圧電体１の一方の面の薄膜電
極１１ａに接続される薄膜リード部１３ａと、高分子圧
電体１の他方の面に接合するリード部１３ｔｌを存する
薄膜電極１１とを備えた可視性電極シート９と、高分子
圧電体１の一方の面の薄膜電極１１ａ　、！：薄薄膜リ
ド１部１３ａ跨がって接合された接続用導電体１２と、
この接続用導電体１２の表面と高分子圧電体１の一方の
面の薄膜電極１１ａ露出面に接合された保護膜１０とよ
りなる構成としたもので、薄形部品の使用により素子全
体の厚さを薄く可撓性と機械的強度に優れ適度°の剛性
を有するものとすることができると共に、両リード部１
３ａ、１３ｂにリード線を接続したり、ソケットに両リ
ード部１３ａ　　、　１３ｂを挿入し、これより抜き出
したりすることができるようにしたものである。In order to achieve the above object, the device of the present invention includes a polymer piezoelectric material 1 having a thin film electrode 11a on one surface as shown in FIGS. 1 and 2, and a thin film on one surface of the polymer piezoelectric material 1. A visible electrode sheet 9 comprising a thin film lead portion 13a connected to an electrode 11a and a thin film electrode 11 having a lead portion 13tl bonded to the other surface of the polymer piezoelectric material 1; and one side of the polymer piezoelectric material 1. Thin film electrode 11a on the surface of ,! : A connecting conductor 12 joined across the thin film lid 1 part 13a,
The structure consists of a protective film 10 bonded to the surface of the connecting conductor 12 and the exposed surface of the thin film electrode 11a on one surface of the polymer piezoelectric material 1. In addition to being thin and having excellent flexibility and mechanical strength, it is possible to have a moderate degree of rigidity.
3a and 13b, and both lead parts 13a and 13b can be inserted into a socket and pulled out from there.

高分子圧電体１としては、例えばポリアセクール樹脂と
アクリロニトリル・ブタジェンラバーの混合物等のプラ
スチックにチタン酸・ジルコン酸鉛やチタン酸鉛もしく
はチタン酸バリウム等の強誘電性セラミックスの微粉末
を分散させ、これを高電圧下で分極処理して得られた圧
電体、あるいはポリ弗化ビニリデン樹脂やポリ　（シア
ン化ビニリデン・酢酸ビニル）共重合体樹脂のキャスト
フィルムもしくは加熱成形フィルムを延伸した配向フィ
ルム等を高電圧下で分極処理して得られた圧電体を用い
ることができるが、延伸工程を経ることにより得られた
配向性を有する圧電体をユニモ・ルフ型素子として用い
る場合には、配向と直角方向には小さな圧電性しか得ら
れないので、その延伸方向が素子の屈曲方向と同一方向
となるように構成する必要がある。また本発明の構成に
よる素子を可撓性を有する焦電素子として屈曲部に貼付
して用いる場合には方向に留意する必要がないことは記
す迄もない。The polymeric piezoelectric material 1 is made by dispersing fine powder of ferroelectric ceramics such as lead titanate/lead zirconate, lead titanate, or barium titanate in a plastic such as a mixture of polyacecool resin and acrylonitrile/butadiene rubber. A piezoelectric material obtained by polarizing this material under high voltage, or an oriented film made by stretching a cast film or thermoformed film of polyvinylidene fluoride resin or poly(vinylidene cyanide/vinyl acetate) copolymer resin, etc. A piezoelectric material obtained by polarization treatment under high voltage can be used, but when using a piezoelectric material with orientation obtained through a stretching process as a Unimo Ruff type element, it is necessary to Since only small piezoelectricity can be obtained in this direction, it is necessary to construct the device so that its stretching direction is the same as the bending direction of the element. Further, it goes without saying that when the element according to the present invention is used as a flexible pyroelectric element by being attached to a bent part, there is no need to pay attention to the direction.

高分子圧電体１の一方の面には薄膜電極１１ａを必要と
するが、他方の面には設けなくてもよい。Although the thin film electrode 11a is required on one surface of the polymer piezoelectric material 1, it is not necessary to provide it on the other surface.

この場合、可撓性電極シート９の薄膜電極１１が高分子
圧電体Ｉの他方の薄膜電極を兼ねることになるが、高分
子圧電体１との接触を良好にするため、高分子圧電体１
の他方の面にも図示のように薄膜電極１１ｂを設けるこ
とが望ましい。薄膜電極１１ａ、、１１ｂは蒸着やスパ
ッタリング等の公知の方法によって高分子圧電体１の面
に設けられる。In this case, the thin film electrode 11 of the flexible electrode sheet 9 will also serve as the other thin film electrode of the polymer piezoelectric material I, but in order to make good contact with the polymer piezoelectric material 1,
It is desirable to provide a thin film electrode 11b on the other surface of the substrate as shown in the figure. The thin film electrodes 11a, 11b are provided on the surface of the piezoelectric polymer 1 by a known method such as vapor deposition or sputtering.

可撓性電極シート９はフレキシブル・プリント・サーキ
ット（ＦＰＣ）と呼ばれているもので、高分子圧電体１
を保持すると共に、信号取り出しや電圧印加のための役
目を果たし、高分子フィルム１４上に薄膜リード部１３
ａと、リード部１３ｂを有する薄膜電極１１が形成され
てなるものである。The flexible electrode sheet 9 is called a flexible printed circuit (FPC), and the polymer piezoelectric material 1
A thin film lead portion 13 is formed on the polymer film 14, and serves for signal extraction and voltage application.
a, and a thin film electrode 11 having a lead portion 13b.

薄膜リード部１３ａと薄膜電極１１は、高分子フィルム
１４に金属箔を接着し、この金属箔をエツチングするこ
とにより所要パターンに形成することができる。The thin film lead portion 13a and the thin film electrode 11 can be formed into a desired pattern by adhering a metal foil to the polymer film 14 and etching this metal foil.

高分子フィルムとしては厚さ２５〜５０μｍのポリイミ
ドや厚さ５０〜２５０μｍのポリエステルあるいはナイ
ロンなどの耐薬品性、耐熱性に優れ、また剛性が高く機
械的強度の大きなプラスチックフィルムが用いられ、金
属箔としては厚さ３５μｍ程度の銅箔等が用いられる。As polymer films, plastic films with excellent chemical and heat resistance, such as polyimide with a thickness of 25 to 50 μm, polyester or nylon with a thickness of 50 to 250 μm, and high rigidity and mechanical strength are used, and metal foils are used. As the material, a copper foil or the like having a thickness of about 35 μm is used.

リード部１３ａ、１３ｂはフィルム１４の端部に形成さ
れるが、第１図示のように同一面上に隣接して並設して
も、また第３．第４図示のようにスルーホールなどの公
知技術により一方のリード部１３ｂを他方のリード部１
３ａ側とは反対の面に相対向して並設してもよい。Although the lead parts 13a and 13b are formed at the ends of the film 14, they may be arranged adjacently on the same plane as shown in the first figure, or they may be arranged in parallel on the same plane as shown in the first figure. As shown in FIG.
They may be arranged side by side facing each other on the opposite side to the side 3a.

接続用導電体１２としては銅箔導電塗料等が用いられ、
保護膜１０としては可撓性電極シート９と共に内部を保
護するもので、可撓性を有し、高分子圧電体１よりも弾
性率の小さいものが圧電素子の特性を損なわないので好
ましく、上記高分子フィルム１４と同様のものあるいは
シリコンゴムなどの可撓性シートや各種のコーティング
剤を用いることができる。Copper foil conductive paint or the like is used as the connection conductor 12,
The protective film 10 protects the inside together with the flexible electrode sheet 9, and is preferably flexible and has a lower modulus of elasticity than the polymer piezoelectric material 1 because it does not impair the characteristics of the piezoelectric element. A material similar to the polymer film 14, a flexible sheet such as silicone rubber, or various coating agents can be used.

高分子圧電体ｌ、可撓性電極シート９及び接続用導電体
１２の相互の導電部間は可撓性を有し圧電特性を低下さ
せない公知の各種導電性粘着剤や接着剤によって接着さ
れるが、高分子圧電体ｌに生じた表面電荷を有効にシー
ト９上のリード部１３ａ、１３ｂに集め、またリード線
あるいはソケットを通じて該シート９上のリード部１３
ａ、１３ｂに供給された電気信号を有効に高分子圧電体
ｌに印加するため、粘着剤や接着剤の厚さは電気信号を
伝えるに充分な厚さにすることが好ましい。絶縁性粘着
剤や接着剤を用いることもできるが、この場合は部分的
に接着し、導通状態を確保し信号の取り出しや電圧印加
ができるようにすることは勿論である。The conductive parts of the polymer piezoelectric material 1, the flexible electrode sheet 9, and the connecting conductor 12 are bonded together using various known conductive adhesives or adhesives that are flexible and do not reduce piezoelectric properties. However, the surface charge generated on the polymer piezoelectric material l is effectively collected on the lead portions 13a and 13b on the sheet 9, and is also transferred to the lead portion 13 on the sheet 9 through the lead wire or socket.
In order to effectively apply the electrical signals supplied to a and 13b to the polymeric piezoelectric material 1, it is preferable that the adhesive or adhesive has a thickness sufficient to transmit the electrical signal. It is also possible to use an insulating adhesive or an adhesive, but in this case, it goes without saying that it should be partially adhered to ensure conduction so that signals can be taken out and voltage can be applied.

接続用導電体１２として金属箔を用いた場合の接着には
導電性粘着剤あるいは接着剤付きのものを用いると、金
属箔が補強され施工性が増大するので好ましい。金属箔
１２の接着によってリード部１３ａ、１３ｂが導通する
場合には、第１図示のようにリード部１３ｂの当該部分
に絶縁塗料１５を塗布すればよい。When a metal foil is used as the connection conductor 12, it is preferable to use a conductive adhesive or adhesive for adhesion because the metal foil is reinforced and workability is increased. When the lead portions 13a and 13b are electrically connected by adhesion of the metal foil 12, an insulating paint 15 may be applied to the corresponding portion of the lead portion 13b as shown in the first figure.

保護膜１０としてシートを用いる場合の接着には公知の
各種粘着剤や接着剤を用いることができ、また、シート
に代えて゛リード部１３ａ、１３ｂの端部を除く素子全
体に絶縁塗料を塗布することにより保護膜を形成するこ
ともできる。When a sheet is used as the protective film 10, various known pressure-sensitive adhesives or adhesives can be used for adhesion.Alternatively, instead of the sheet, an insulating paint may be applied to the entire element except for the ends of the lead parts 13a and 13b. A protective film can also be formed by this.

本発明によって構成された可撓性圧電素子は、例えば素
子に曲げ変形あるいは振動を与えると高分子圧電体１の
相対する面に異なった力学的歪を与えることができ、リ
ード部１３ａ、１３ｂより大きな信号出力を得ることが
でき葛。また、リード部１３ａ、１３ｂ間に交流電圧を
印加すると、交流電圧が高分子圧電体１の両面に加わり
、その周波数に同期して素子を振動させることができる
。The flexible piezoelectric element constructed according to the present invention can apply different mechanical strains to the opposing surfaces of the polymer piezoelectric body 1 when the element is subjected to bending deformation or vibration, for example, and the lead portions 13a and 13b Kudzu can get bigger signal output. Furthermore, when an alternating current voltage is applied between the lead parts 13a and 13b, the alternating voltage is applied to both sides of the polymer piezoelectric body 1, and the element can be vibrated in synchronization with the frequency.

信号の取り出しや電圧印加のためリード線を接続する場
合は、リード部１３ａ、１３ｂにリード線をハンダ付け
により接続し、またソケットを用いる場合にはリード部
１３ａ、１３ｂをソケットに挿入すればよい。この場合
、素子は柔軟性と適度の剛性を有しているので、リード
部１３ａ　、　１３ｂのソケットへの挿入・抜き出しも
容易に行えるものである。When connecting lead wires for extracting signals or applying voltage, connect the lead wires to the lead parts 13a and 13b by soldering, and when using a socket, insert the lead parts 13a and 13b into the socket. . In this case, since the element has flexibility and appropriate rigidity, the lead parts 13a and 13b can be easily inserted into and removed from the socket.

〔実施例〕〔Example〕

第１図は本発明素子の第１実施例を示す部分分解斜視図
、第２図はその断面図である。FIG. 1 is a partially exploded perspective view showing a first embodiment of the device of the present invention, and FIG. 2 is a sectional view thereof.

第１．第２図において１は高分子圧電体、ｌｌａ、１１
ｂはその薄膜電極である。９は可撓性電極シートで、高
分子フィルム１４の一面に、一方の薄膜電極１１ａに接
続される薄膜リード部１３ａと、他方の薄膜電極１１ｂ
に接着される。リード部１３ｂを有する薄膜電極１１と
を、両リード部１３ａ　、　１３ｂが一端部に幅方向に
隣接して並設されるよう形成してなるものである。1st. In FIG. 2, 1 is a polymer piezoelectric material, lla, 11
b is the thin film electrode. 9 is a flexible electrode sheet, which has a thin film lead portion 13a connected to one thin film electrode 11a on one side of the polymer film 14, and a thin film electrode 11b on the other side.
is glued to. A thin film electrode 11 having a lead portion 13b is formed such that both lead portions 13a and 13b are arranged side by side adjacent to each other in the width direction at one end.

１２は導電性粘着剤付き銅箔、１０は高分子フィルムよ
りなる保護シートである。12 is a copper foil with a conductive adhesive, and 10 is a protective sheet made of a polymer film.

そして可撓性電極シート９の薄膜電極１１に高分子圧電
体１の他方の薄膜電極１１ｂを導電性接着剤によって接
着し、その一方の薄膜電極１１ａと薄膜リード部１３ａ
を両者に跨がって導電性粘着剤付き銅箔１２を接着して
接続すると共に、この銅箔１２の表面と一方の薄膜電極
１１ａの露出面に保護シート１０を接着剤によって接着
せしめる。１５は絶縁塗料である。Then, the other thin film electrode 11b of the polymer piezoelectric material 1 is adhered to the thin film electrode 11 of the flexible electrode sheet 9 with a conductive adhesive, and the one thin film electrode 11a and the thin film lead portion 13a are bonded to the thin film electrode 11 of the flexible electrode sheet 9.
A conductive adhesive-coated copper foil 12 is bonded across both to connect them, and a protective sheet 10 is bonded to the surface of this copper foil 12 and the exposed surface of one of the thin film electrodes 11a using an adhesive. 15 is an insulating paint.

第３図は第２実施例を示す部分分解斜視図、第４図はそ
の断面図である。FIG. 3 is a partially exploded perspective view showing the second embodiment, and FIG. 4 is a sectional view thereof.

この第２実施例では高分子フィルム１４の一面に、一方
の薄膜電極１１ａに接続される薄膜リード部１３ａと、
他方の薄膜電極１１ｂに接着される薄膜電極１１とを長
さ方向に隣接するよう形成し、高分子フィルム１４の他
面において一面の薄膜電極１１とスルーホールで連通す
るリード部１３ｂをリード部１３ａと相対向して形成し
てなる可撓性電極シート９を用いる以外、第１実施例と
同様に構成されている。In this second embodiment, a thin film lead portion 13a connected to one thin film electrode 11a is provided on one surface of the polymer film 14,
The thin film electrode 11 bonded to the other thin film electrode 11b is formed so as to be adjacent to each other in the length direction, and the lead portion 13b communicating with the thin film electrode 11 on one surface through a through hole on the other surface of the polymer film 14 is connected to the lead portion 13a. The structure is the same as that of the first embodiment except that the flexible electrode sheet 9 formed to face each other is used.

上記のような構成あ第１．第２実施例による可撓性圧電
素子は、信号取り出しや電圧印加のため、リード部１３
ａ、１３ｂにリード線を接続し、あるいはリード部１３
ａ、１３ｂをソケットに差し込むことにより外部電気回
路と接続することができる。The configuration above is the first. The flexible piezoelectric element according to the second embodiment has a lead portion 13 for signal extraction and voltage application.
Connect the lead wire to a, 13b, or connect the lead part 13
A and 13b can be connected to an external electric circuit by inserting them into sockets.

具体例を示すと、高分子圧電体ｌとしてポリアセクール
樹脂とアクリロニトリル・ブタジェンラバーの混合物に
チタン酸・ジルコン酸鉛やチタン酸鉛・チタン酸バリウ
ム等の強誘電性セラミックスの微粉末を分散させ、これ
を高電圧下で分極処理して得られた厚さ１００　ａｍ　
、幅１００．長さ３０鶴の大きさを有し圧電定数ｄ＋＋
＝１７Ｐｃ／　Ｎである圧電体の両面に蒸着法によりア
ルミ薄膜電極１１ａ　、−１１ｂを形成したものを用い
、可撓性電極シート９として厚さ１５０μｍ、幅１０削
、長さ５０ｍの大きさのポリエステルフィルム１４の一
面に、ｍｆｊｌ膜リードす１３ａと薄膜電極１１とを３
５μｍの厚さに長さ方向に隣接するよう形成し、該フィ
ルム１４の他面に薄膜電極１１とスルーホールで連通ず
るリード部１３ｂをリード部１３ａと相対向して形成し
たものを用い、接続用金属箔１２として厚さ３５μｍ、
縦１０龍、横１０鰭の大きさの銅箔を用い、保護シート
１０として厚さ１０８ｍ９幅１０ｆｉ、長さ４０＋ｎの
大きさのポリエステルフィルムを用いて本発明素子を構
成し、素子先端に１１劇Ｐ−Ｐの変位を与えたところ、
０．２５ＶＰ−Ｐの電圧が得られた。To give a specific example, fine powder of ferroelectric ceramics such as titanate/lead zirconate, lead titanate, barium titanate, etc. is dispersed in a mixture of polyacecool resin and acrylonitrile/butadiene rubber as the polymer piezoelectric material l. This was polarized under high voltage to obtain a thickness of 100 am.
, width 100. It has a length of 30 cranes and a piezoelectric constant d++
= 17Pc/N, aluminum thin film electrodes 11a and -11b were formed on both sides of the piezoelectric body by vapor deposition, and the flexible electrode sheet 9 was 150 μm thick, 10 mm wide, and 50 m long. Three mfjl membrane leads 13a and thin film electrodes 11 are arranged on one side of the polyester film 14.
The film 14 is formed to have a thickness of 5 μm so as to be adjacent to each other in the length direction, and a lead portion 13b that communicates with the thin film electrode 11 through a through hole is formed on the other side of the film 14 facing the lead portion 13a. The metal foil 12 has a thickness of 35 μm,
The device of the present invention is constructed by using a copper foil with a size of 10 dragons in length and 10 fins in width, and a polyester film with a thickness of 108 m, a width of 10 fi, and a length of 40 + n as the protective sheet 10. When a displacement of P-P is given,
A voltage of 0.25 VP-P was obtained.

〔発明の効果〕〔Effect of the invention〕

上述のように本発明素子によれば、高分子圧電体ｌ、可
撓性電極シート９、接続用導電体１２及び保護膜ＩＯ等
の薄形部分で構成されているので、素子全体の厚さを薄
く可撓性と機械的強度に優れ、適度の剛性を有するもの
とすることができるため、省スペースで取り付けること
ができると共に、大きな変位を生じせしめたり、大きな
曲げ変位を与えたりすることができ、大きな信号出力を
得ることができることは勿論、リード部１３ａ、１３ｂ
にリード線をハンダ付は等により十分な強度で取り付け
ることができ、かつリード部１３ａ　　、　１３ｂのソ
ケットへの挿入・抜き出しも容易に行えるという効果を
奏する。As described above, the device of the present invention is composed of thin parts such as the polymer piezoelectric material 1, the flexible electrode sheet 9, the connecting conductor 12, and the protective film IO, so that the overall thickness of the device is small. It can be made thin and has excellent flexibility and mechanical strength, as well as moderate rigidity, so it can be installed in a small space and can not be subjected to large displacements or large bending displacements. Of course, it is possible to obtain a large signal output, and the lead portions 13a and 13b
The lead wires can be attached with sufficient strength by soldering or the like, and the lead parts 13a and 13b can be easily inserted into and extracted from the sockets.

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本発明素子の第１実施例を示す部分分解斜視図
、第２図はその断面図、第３図は第２実施例を示す部分
分解斜視図、第４図はその断面図、第５図（＾）〜（Ｃ
）は従来素子の各側を示す斜視図である。 １・・・・・・高分子圧電体、９・・・・・・可撓性電
極シート、１０・・・・・・保護膜、ｌｌａ　、　ｌｌ
ｂ　、　１１・・・・・・薄膜電極、１２・・・・・・
接続用導電体、１３ａ・・・・・・薄膜リード部、１３
ｂ・・・・・・リード部。 箋１目 答２− 箋３目 算ｑ頂 俸５目 〔Ａ〕 ）〕 〔Ｃ〕FIG. 1 is a partially exploded perspective view showing a first embodiment of the device of the present invention, FIG. 2 is a sectional view thereof, FIG. 3 is a partially exploded perspective view showing the second embodiment, and FIG. 4 is a sectional view thereof. Figure 5 (^) ~ (C
) is a perspective view showing each side of a conventional device. DESCRIPTION OF SYMBOLS 1... Polymer piezoelectric material, 9... Flexible electrode sheet, 10... Protective film, lla, ll
b, 11... Thin film electrode, 12...
Connection conductor, 13a...Thin film lead part, 13
b...Lead part. Notebook 1 Answer 2 - Notebook 3 Calculation q Top Salary 5th [A] )] [C]

Claims (1)

【特許請求の範囲】[Claims] 　一方の面に薄膜電極１１ａを有する高分子圧電体１と
、この高分子圧電体１の一方の面の薄膜電極１１ａに接
続される薄膜リード部１３ａと、高分子圧電体１の他方
の面に接合するリード部１３ｂを有する薄膜電極１１と
を備えた可撓性電極シート９と、高分子圧電体１の一方
の面の薄膜電極１１ａと薄膜リード部１３ａに跨がって
接合された接続用導電体１２と、この接続用導電体１２
の表面と高分子圧電体１の一方の面の薄膜電極１１ａ露
出面に接合された保護膜１０とよりなる可撓性圧電素子
。A polymer piezoelectric material 1 having a thin film electrode 11a on one surface, a thin film lead portion 13a connected to the thin film electrode 11a on one surface of the polymer piezoelectric material 1, and a thin film lead portion 13a connected to the thin film electrode 11a on one surface of the polymer piezoelectric material 1; A flexible electrode sheet 9 equipped with a thin film electrode 11 having a lead portion 13b to be joined, and a thin film electrode 11a on one side of the polymer piezoelectric material 1 and a connection sheet that is joined across the thin film electrode 11a and the thin film lead portion 13a. Conductor 12 and this connecting conductor 12
A flexible piezoelectric element comprising a protective film 10 bonded to the exposed surface of a thin film electrode 11a on one surface of a polymer piezoelectric material 1.
JP16267084A 1984-07-31 1984-07-31 Flexible piezoelectric element Granted JPS6140071A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16267084A JPS6140071A (en) 1984-07-31 1984-07-31 Flexible piezoelectric element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16267084A JPS6140071A (en) 1984-07-31 1984-07-31 Flexible piezoelectric element

Publications (2)

Publication Number Publication Date
JPS6140071A true JPS6140071A (en) 1986-02-26
JPH0412634B2 JPH0412634B2 (en) 1992-03-05

Family

ID=15759049

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16267084A Granted JPS6140071A (en) 1984-07-31 1984-07-31 Flexible piezoelectric element

Country Status (1)

Country Link
JP (1) JPS6140071A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1473782A3 (en) * 2003-04-30 2005-10-12 VIBRATION-X di Bianchini Emanuele e C. Sas Piezoelectric device and method to manufacture a piezoelectric device
WO2017013224A1 (en) 2015-07-21 2017-01-26 Koninklijke Philips N.V. Transducer laminate

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1473782A3 (en) * 2003-04-30 2005-10-12 VIBRATION-X di Bianchini Emanuele e C. Sas Piezoelectric device and method to manufacture a piezoelectric device
US7105988B2 (en) 2003-04-30 2006-09-12 Vibration-X Di Bianchini Emanulee E C. Sas Piezoelectric device and method to manufacture a piezoelectric device
WO2017013224A1 (en) 2015-07-21 2017-01-26 Koninklijke Philips N.V. Transducer laminate
CN108028308A (en) * 2015-07-21 2018-05-11 皇家飞利浦有限公司 Transducer layer pressing plate
RU2657114C1 (en) * 2015-07-21 2018-06-08 Конинклейке Филипс Н.В. Laminates with converter
JP2018528604A (en) * 2015-07-21 2018-09-27 コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． Transducer laminate
US10413940B2 (en) 2015-07-21 2019-09-17 Koninklijke Philips N.V. Transducer laminate

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