JPS6140021U - surface acoustic wave oscillator - Google Patents
surface acoustic wave oscillatorInfo
- Publication number
- JPS6140021U JPS6140021U JP12429384U JP12429384U JPS6140021U JP S6140021 U JPS6140021 U JP S6140021U JP 12429384 U JP12429384 U JP 12429384U JP 12429384 U JP12429384 U JP 12429384U JP S6140021 U JPS6140021 U JP S6140021U
- Authority
- JP
- Japan
- Prior art keywords
- acoustic wave
- surface acoustic
- wave oscillator
- piezoelectric
- oscillator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Oscillators With Electromechanical Resonators (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第1図は従来の弾性表面波発振器のブロック構成図、第
2図は本考案の一実施例にかかる弾性表面波発振器の構
成を示す斜視図である。
11・・・圧電基板、12・・・基準発振器用入出力す
だれ状電極、13・・・温度測定用発振器の入出力すだ
れ状電極、14及び15・・・増幅器、16・・・Si
O薄膜。FIG. 1 is a block diagram of a conventional surface acoustic wave oscillator, and FIG. 2 is a perspective view showing the configuration of a surface acoustic wave oscillator according to an embodiment of the present invention. DESCRIPTION OF SYMBOLS 11... Piezoelectric substrate, 12... Input/output interdigitated electrode for reference oscillator, 13... Input/output interdigitated electrode for temperature measurement oscillator, 14 and 15... Amplifier, 16... Si
O thin film.
Claims (1)
O2等の非圧電性もしくは、圧電性の膜を付着した層状
構造弾性表面波素子を遅延素子に利用する弾性表面波発
振器において、その遅延時間温度係数が層状弾性表面波
素子の表面層の膜厚に依存することを利用して、膜厚の
異なる少くとも2つの層状構造弾性表面波素子を同一基
板上に設定し、基準用有び温度測定用の各発振器となる
よう構成してなる弾性表面波発振器。Interdigital electrodes are arranged facing the piezoelectric body, and Si is placed on the surface of the piezoelectric body.
In a surface acoustic wave oscillator that uses a layered surface acoustic wave element to which a non-piezoelectric or piezoelectric film such as O2 is attached as a delay element, the delay time temperature coefficient is determined by the thickness of the surface layer of the layered surface acoustic wave element. By utilizing the dependence of wave oscillator.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12429384U JPS6140021U (en) | 1984-08-14 | 1984-08-14 | surface acoustic wave oscillator |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12429384U JPS6140021U (en) | 1984-08-14 | 1984-08-14 | surface acoustic wave oscillator |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6140021U true JPS6140021U (en) | 1986-03-13 |
JPH026654Y2 JPH026654Y2 (en) | 1990-02-19 |
Family
ID=30683020
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12429384U Granted JPS6140021U (en) | 1984-08-14 | 1984-08-14 | surface acoustic wave oscillator |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6140021U (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2011142380A1 (en) * | 2010-05-13 | 2011-11-17 | 株式会社村田製作所 | Temperature sensor |
JP2013009173A (en) * | 2011-06-24 | 2013-01-10 | Denso Corp | Surface acoustic wave device |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55112043A (en) * | 1979-02-22 | 1980-08-29 | Seiko Instr & Electronics Ltd | Standard signal generator |
-
1984
- 1984-08-14 JP JP12429384U patent/JPS6140021U/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55112043A (en) * | 1979-02-22 | 1980-08-29 | Seiko Instr & Electronics Ltd | Standard signal generator |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2011142380A1 (en) * | 2010-05-13 | 2011-11-17 | 株式会社村田製作所 | Temperature sensor |
JP2013009173A (en) * | 2011-06-24 | 2013-01-10 | Denso Corp | Surface acoustic wave device |
Also Published As
Publication number | Publication date |
---|---|
JPH026654Y2 (en) | 1990-02-19 |
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