JPS6138855A - Cutting amount regulation in rotary grinding machine - Google Patents

Abstract

PURPOSE:To perform highly accurate surface grinding without causing miss grinding by calculating the cutting regulation value for each section of work on the basis of the measurement of grinding error then synchronizing the rotation of table and regulating the cutting amount. CONSTITUTION:The miss grinding amount at each section of work is previously provided as the grinding error measured through perliminary grindint into cutting amount operating circuit 24. A synchronous circuit 26 will detect the rotary amount of table 1 through the output signal from a drive circuit 25 for controlling the operation of drive source 3 to calculate the relative position in feeding direction of a work 2 against a grinding wheel 12 on the basis of said rotary amount thus to produce a regulation signal corresponding with said position synchronously. The regulation signal is fed to a fluid pressure converter 22 to regulate the pressure of working fluid to be fed into a static pressure pocket 8. The table 1 is moved up and down through the differential pressure between said static pressure and the static pressure in static pressure pocket 7 to regulate the cutting amount thus to eliminate miss grinding.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は静圧案内支持された工作物配置用テーブルが研
削工具に対して相対的に回転移動して研削加工をなすロ
ータリー研削盤における切込み量調整方法に関する。[Detailed Description of the Invention] [Field of Industrial Application] The present invention is applicable to a rotary grinding machine in which a workpiece placement table supported by static pressure guide rotates relative to a grinding tool to perform grinding. Regarding the amount adjustment method.

〔従来技術と問題点〕[Conventional technology and problems]

第３図は上述の如きロータリー研削盤の概略構成例を示
すものである。図中１はウェハ等の工作物２を配置する
ためのテーブルであり、駆動源６からの動力により回転
する。このテーブル１は次の如き構成の静圧案内手段に
より本体４に静圧案れた案内部６が形成されている。上
記案内部６の上面には複数の第１静圧ポケツト７・・・
・・・が円周方向に整列して設けられており、また下面
にも上記上面の第１静圧ポケツト７・・・・・・と対称
に複数の第２静圧ポケツト８・・・・・・が設げられて
いる。これら第１静圧ポケツト７・・・・・・及び第２
静圧ポケツト８・・・・・・は配管９・・・・・・を介
して作動流体供給源に連通しており、当該作動流体供給
源からの流体圧により内部に所定の静圧力を生じさせ、
テーブル１を静圧案内支持する。FIG. 3 shows an example of a schematic configuration of a rotary grinding machine as described above. In the figure, reference numeral 1 denotes a table on which a workpiece 2 such as a wafer is placed, and is rotated by power from a drive source 6. In this table 1, a static pressure guiding portion 6 is formed in the main body 4 by static pressure guiding means having the following structure. A plurality of first static pressure pockets 7 are provided on the upper surface of the guide portion 6.
... are arranged in the circumferential direction, and a plurality of second static pressure pockets 8 are provided on the lower surface in symmetry with the first static pressure pockets 7 on the upper surface. ... is provided. These first static pressure pockets 7...and the second
The static pressure pocket 8 communicates with the working fluid supply source via the piping 9, and a predetermined static pressure is generated inside by the fluid pressure from the working fluid supply source. let me,
The table 1 is supported by static pressure guidance.

図中１０は本体４に基端部な固定されたコラムであり、
砥石ヘッド１１を介して研削工具としてのカップ砥石１
２が取付けられている。このカップ砥石１２はテーブル
１の上面の工作物回転軌道」二に対向する如く位置決め
がなされている。尚、上記砥石ヘッド１１は上下方向に
移動する。In the figure, 10 is a column fixed to the base end of the main body 4,
Cup grindstone 1 as a grinding tool via grindstone head 11
2 is installed. This cup grindstone 12 is positioned so as to face the workpiece rotation orbit 2 on the upper surface of the table 1. Note that the grindstone head 11 moves in the vertical direction.

上述の構成のロータリー研削盤は砥石ヘッド１１と伴に
カップ砥石１２を上下動させることに物２に対する研削
面積が第４図（ａ＋に示す如く送り方向両端°と中央付
近とで相異し、これに伴い研削抵抗が変化するため、加
工後の工作物２は同図（ｂｌに示す如く研削抵抗の大き
な中央付近を最大として削り残しｌ］、、ｈ、、・・・
・・・が生じ、その結果、平面加工精度が悪いという欠
点があった。The rotary grinding machine having the above-mentioned structure moves the cup grindstone 12 up and down together with the grindstone head 11, so that the grinding area for the object 2 is different at both ends in the feed direction and near the center as shown in FIG. 4 (a+). As the grinding resistance changes accordingly, the workpiece 2 after machining is as shown in the figure (as shown in bl, the area with the largest amount of uncut material is around the center where the grinding resistance is large), h, . . .
... occurred, and as a result, there was a drawback that the plane processing accuracy was poor.

尚、第４図（１〕）は工作物２の加工表面の削り残し量
を便宜上拡大して示してあり、現実には上記平面加工精
度はミクロンオーダーのものである。Incidentally, FIG. 4 (1) shows the amount of uncut material on the machined surface of the workpiece 2 enlarged for convenience, and in reality, the above-mentioned plane processing accuracy is on the order of microns.

〔発明の目的〕 本発明は」二連した事情に基づいてなされたものであり
、その目的は削り残しがな（高い平面加工精度にて所要
の切込み量の研削加工をなし得るロータリー研削盤にお
ける切込み量調整方法を提供することである。[Object of the Invention] The present invention was made based on two consecutive circumstances, and its purpose is to provide a rotary grinding machine that can perform grinding with a required depth of cut with high plane processing accuracy without leaving any uncut parts. An object of the present invention is to provide a method for adjusting the depth of cut.

〔発明の構成〕[Structure of the invention]

本発明は上記目的を達成するために次の如く構成したこ
とを特徴とする。In order to achieve the above object, the present invention is characterized by the following configuration.

すなわち、駆動源からの動力により回転するテーブルが
、作動流体供給源からの流体圧により内部に所定の静圧
力を生じさせる静圧ポケットを有する静圧案内手段によ
り案内支持されたロータリー研削盤における切込み量調
整方法であり、あらかじめ研削誤差を測定し、この測定
値により工作物各部の切込み量調整値を算出し、前記テ
ーブルの回転と上記切込み量調整値にもとづ（調整信号
とを同期させ、当該調整信号により前記作動流体供給源
火制御して前記静圧ポケット内の静圧力を調整し、これ
により前記テーブルを上下動させて切込量調整を行なう
構成である。That is, cutting in a rotary grinding machine in which a table rotated by power from a drive source is guided and supported by a static pressure guide means having a static pressure pocket that generates a predetermined static pressure inside by fluid pressure from a working fluid supply source. This method measures the grinding error in advance, calculates the depth of cut adjustment value for each part of the workpiece from this measured value, and synchronizes the rotation of the table and the depth of cut adjustment value (with the adjustment signal). The working fluid supply source is controlled by the adjustment signal to adjust the static pressure in the static pressure pocket, thereby moving the table up and down to adjust the depth of cut.

〔発明の実施例〕[Embodiments of the invention]

以下、本発明の実施例を図面に基づいて説明する。 Embodiments of the present invention will be described below based on the drawings.

第１図は第１の実施例の切込み量調整方法に使用する装
置の構成図である。尚、第１図においてテ２先に示した
第３図と同一部分には同一符号を付し、体供給源が構成
されている。すなわち、第１静圧ポケツト７・・・・・
・には流体圧供給ユニット２１から直接に空気、オイル
等の作動流体が供給され、一方、第２静圧ポケツト８・
・・・・・ｆは流体圧供給ユニット２１から流体圧変換
器２２ケ介して送出された作動流体が供給されろ。FIG. 1 is a block diagram of a device used in the cutting depth adjusting method of the first embodiment. In FIG. 1, the same parts as in FIG. 3 shown earlier are given the same reference numerals and constitute a body supply source. That is, the first static pressure pocket 7...
Working fluid such as air and oil is directly supplied from the fluid pressure supply unit 21 to the second static pressure pocket 8.
. . . The working fluid sent out from the fluid pressure supply unit 21 through 22 fluid pressure transducers is supplied to f.

上記流体圧変換器２２は送出する作動流体の圧力が次に
述べる制御系２３により調整されている。The pressure of the working fluid sent out from the fluid pressure converter 22 is adjusted by a control system 23, which will be described below.

すなわち、図中２４は切込み量演算回路である。That is, 24 in the figure is a cutting amount calculation circuit.

この切込み量演算回路２４は試し研削により測定した研
削誤差としての工作物各部の削り残し量が各々あらかじ
め入力されており、かかる入力値にもとすき工作物各部
の切込み量調整値を算出し調整信号として出力する。ま
た、図中２５は駆動源乙の動作制御をなす駆動回路、図
中２６は上記調、ニー 路２５からの出力信号にもとづきテーブル１の回共に、
当該位置に対応する調整信号な同期させて出力するもの
である。かかる同期回路２６から出力された調整信号が
流体圧変換器２２に送出され、当該調整信号により第２
静圧ポケツト８・・・・・・へ供給する作動流体の圧力
が調整される。This depth of cut calculation circuit 24 is inputted in advance with the amount of uncut parts of each part of the workpiece as a grinding error measured by trial grinding, and based on these input values, the depth of cut adjustment value of each part of the workpiece is calculated and adjusted. Output as a signal. In addition, 25 in the figure is a drive circuit that controls the operation of drive source B, 26 in the figure is the above-mentioned key, and based on the output signal from the knee path 25, the rotation of table 1 is
Adjustment signals corresponding to the relevant positions are output in synchronization. The adjustment signal output from the synchronization circuit 26 is sent to the fluid pressure transducer 22, and the adjustment signal causes the second
The pressure of the working fluid supplied to the static pressure pockets 8 is adjusted.

かくして、第２静圧ポケツト８内の静圧力が調整されて
当該第２靜圧ポケツト８内の静圧力と第１静圧ポケツト
７内の静圧力との差圧によりテーブル１が上下動し工作
物各部の切込み量が調整される。例えば、削り残しがあ
る部位は当初設定切込み量に当該削り残し量を加えただ
けの切込み量に調整され、その結果、削り残しがなく当
初設定切込み量の平面研削が高精度にて行ない得る。In this way, the static pressure in the second static pressure pocket 8 is adjusted, and the table 1 moves up and down due to the differential pressure between the static pressure in the second static pressure pocket 8 and the static pressure in the first static pressure pocket 7. The depth of cut for each part of the object is adjusted. For example, in a portion where there is uncut portion, the depth of cut is adjusted to be just the amount of uncut portion added to the initially set depth of cut, and as a result, surface grinding with the initially set depth of cut can be performed with high precision without leaving any uncut portion.

第２図は本発明の第２の実施例を説明するためのもので
あり、テーブル１の上面を示す図である。FIG. 2 is for explaining a second embodiment of the present invention, and is a diagram showing the top surface of the table 1. As shown in FIG.

、前記第１の実施例においては切込み量演算回路に適用
されるロータリー研削盤は粗研削用のカップ砥石３１と
精密仕上げ用のカップ砥石６２とが配設されたいわゆる
２軸型ロータリー研削盤とする。In the first embodiment, the rotary grinding machine applied to the depth of cut calculation circuit is a so-called two-axis rotary grinding machine equipped with a cup grindstone 31 for rough grinding and a cup grindstone 62 for precision finishing. do.

尚、当該研削盤の他の構成は前記第１の実施例のものと
同様である。かかる研削盤において、粗研削が終了１−
精密仕上げ研削に移行する工作物２０回転軌道上に向け
て、研削誤差としての工作物各部の削り残し量を測定す
る削り残し量測定器６６を配設し、当該測定器６６から
の測定値を切込み量演算回路２４に入力し、しかるのち
は前記第１の実施例と同様な動作にて精密仕上げ研削段
階で切込み量調整を行なう。Note that the other configuration of the grinding machine is the same as that of the first embodiment. In such a grinding machine, rough grinding is completed 1-
An uncut amount measuring device 66 for measuring the amount of uncut parts of each part of the workpiece as a grinding error is installed toward the 20-rotation orbit of the workpiece to be transferred to precision finish grinding, and the measured value from the measuring device 66 is The cutting amount is input to the cutting depth calculation circuit 24, and then the cutting depth is adjusted in the precision finish grinding stage in the same manner as in the first embodiment.

尚、本発明は上述した実施例に限定されるものではなく
、本発明の要旨を逸脱しない範囲で種々変形実施可能で
あることは勿論である。例えば、１静圧ポグソト７・・
・・・・内の静圧力を調整してテーブル１を上下動させ
る構成であってもよい。It should be noted that the present invention is not limited to the embodiments described above, and it goes without saying that various modifications can be made without departing from the gist of the present invention. For example, 1 static pressure 7...
. . . The table 1 may be moved up and down by adjusting the static pressure within.

〔発明の効果〕〔Effect of the invention〕

持されたロータリー研削盤に対し、研削誤差を測定し、
この測定値により工作物各部の切込み量調整値を算出し
、テーブルの回転と上記切込み量調整値にもとづ（調整
信号とを同期させ、当該調整信号により静圧ポケット内
への作動流体供給源を制御して静圧ポケット内の静圧力
を調整し、これによりテーブルを上下動させて切込み量
調整を行なうので、上船ロータリー研削盤により削り残
しがなく高い平面加工精度にて所要の切込み量の研削加
工を行ない得るという効果を奏する。Measure the grinding error for the rotary grinder held
Based on this measured value, the depth of cut adjustment value for each part of the workpiece is calculated, and based on the table rotation and the above depth of cut adjustment value (the adjustment signal is synchronized, the adjustment signal is used to supply working fluid to the static pressure pocket. The static pressure inside the static pressure pocket is adjusted by controlling the static pressure source, and the table is moved up and down to adjust the depth of cut. Therefore, the rotary grinder can achieve the required depth of cut with high surface machining accuracy without leaving any uncut parts. This has the effect of allowing a large amount of grinding to be performed.

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本発明の第１の実施例に使用される装置の構成
図、第２図は第２の実施例を説明するた研削盤における
従来の問題点を説明する図である。 １・・・・・・テーブル、６・・・・・・駆動源、４・
・・・・・本体、７・・・・・・第１静圧ポケツト、８
・・・・・・第２静圧ポケツト、９・・・・・・配管、
１２・・・・・・カップ砥石、２１・・・・・・流体圧
供給ユニット、２２・・・・・・流体圧変換器、２４・
・・・・・切込み量演算回路、２５・・・・・・駆動回
路、２６・・・・・・同期回路。 特許出願人　シチズン時計株式会社 第１図FIG. 1 is a block diagram of a device used in a first embodiment of the present invention, and FIG. 2 is a diagram illustrating the conventional problems in a grinding machine for explaining the second embodiment. 1...Table, 6...Drive source, 4.
...Main body, 7...First static pressure pocket, 8
...Second static pressure pocket, 9...Piping,
12...Cup grindstone, 21...Fluid pressure supply unit, 22...Fluid pressure converter, 24...
... Depth of cut calculation circuit, 25 ... Drive circuit, 26 ... Synchronization circuit. Patent applicant Citizen Watch Co., Ltd. Figure 1

Claims (1)

【特許請求の範囲】[Claims] 駆動源からの動力により回転するテーブルが、作動流体
供給源からの流体圧により内部に所定の静圧力を生じさ
せる静圧ポケットを有する静圧案内手段により案内支持
されたロータリー研削盤における切込み量調整方法であ
り、研削誤差を測定し、この測定値により工作物各部の
切込み量調整値を算出し、前記テーブルの回転と上記切
込み量調整値にもとづく調整信号とを同期させ、当該調
整信号により前記作動流体供給源を制御して前記静圧ポ
ケット内の静圧力を調整し、これにより前記テーブルを
上下動させて切込み量調整を行なうことを特徴とするロ
ータリー研削盤における切込み量調整方法。Amount of cut adjustment in a rotary grinding machine in which a table that rotates with power from a drive source is guided and supported by a static pressure guide means that has a static pressure pocket that generates a predetermined static pressure inside by fluid pressure from a working fluid supply source. This method measures the grinding error, calculates the depth of cut adjustment value for each part of the workpiece based on the measured value, synchronizes the rotation of the table with an adjustment signal based on the depth of cut adjustment value, and uses the adjustment signal to calculate the depth of cut adjustment value for each part of the workpiece. A method for adjusting the depth of cut in a rotary grinder, characterized in that the static pressure in the static pressure pocket is adjusted by controlling a working fluid supply source, and thereby the table is moved up and down to adjust the depth of cut.