JPS6136714A - Manipulator of multijoint reflection mirror system - Google Patents
Manipulator of multijoint reflection mirror systemInfo
- Publication number
- JPS6136714A JPS6136714A JP15763284A JP15763284A JPS6136714A JP S6136714 A JPS6136714 A JP S6136714A JP 15763284 A JP15763284 A JP 15763284A JP 15763284 A JP15763284 A JP 15763284A JP S6136714 A JPS6136714 A JP S6136714A
- Authority
- JP
- Japan
- Prior art keywords
- mirror
- mirror holder
- optical axis
- adjustment
- manipulator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
- G02B7/1822—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors comprising means for aligning the optical axis
- G02B7/1824—Manual alignment
- G02B7/1825—Manual alignment made by screws, e.g. for laser mirrors
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mounting And Adjusting Of Optical Elements (AREA)
Abstract
Description
【発明の詳細な説明】
〔発明の技術分野〕
本発明は、多関節反射鏡式マニピュレータ、例えば、レ
ーザー手術装置に用いられる多関節反射鏡式マニピュレ
ータであって、特にその反射ミラー調整装置に関するも
のである。Detailed Description of the Invention [Technical Field of the Invention] The present invention relates to a multi-joint reflector manipulator, for example, a multi-joint reflector manipulator used in a laser surgical device, and particularly relates to a reflector adjustment device thereof. It is.
従来、この種の装置の関節部の一例としては第１図に示
すようなものがあった。Conventionally, an example of a joint part of this type of device is shown in FIG.
すなわち１図において、符号ｌは入射光軸１．２は出射
光軸１、？はハウジング、ｌはハウジングＪに設けられ
た反射ミラー設置のための開口部、５は軸受６を介して
ハウジング３の一端が回転自在に支持されているアーム
、７は反射ミラーｔが一面に取り付けられているミラー
ホルダ、りはミラーホルダ７をハウジング、７に押し付
けるように作用する押ねじ、１０はミラーホルダ７をハ
ウジング３から離れるように作用する引ばね、／ｌは入
射光軸／と出射光軸コとほぼ等角に傾斜する開口部参の
開口の軸心、１．２は反射ミラーｔの回転軸である。That is, in Fig. 1, the symbol l indicates the incident optical axis 1, 2 indicates the output optical axis 1, and ? 1 is a housing, 1 is an opening provided in the housing J for installing a reflection mirror, 5 is an arm on which one end of the housing 3 is rotatably supported via a bearing 6, and 7 is a reflection mirror t attached to one side. 10 is a tension spring that acts to move the mirror holder 7 away from the housing 3, /l is the incident optical axis / and the output screw. The axis 1.2 of the aperture of the aperture, which is inclined at approximately the same angle as the emission axis, is the rotation axis of the reflecting mirror t.
従来装置は上記のよ５に構成されるが１次にその作用に
ついて説明する。The conventional device is constructed as described above, and its operation will be explained first.
多関節反射鏡式マニピュレータでは第１図に示す関節部
が複数個接続されレーザービームを導いていくものであ
る。それ故もし反射ミラー、ｔへの入射光軸／と反射ミ
ラーの回転軸ｌ−とが一致していない場合には１反射ミ
ラーｔの回転によって、出射光軸コは芯ブレを生じる。In the multi-joint reflector type manipulator, a plurality of joints shown in FIG. 1 are connected to guide a laser beam. Therefore, if the incident optical axis / to the reflecting mirror t does not coincide with the rotational axis l- of the reflecting mirror, the output optical axis will cause center deviation due to the rotation of the reflecting mirror t.
そしてこの芯プレはレーザービームの伝達距離が長くな
るＫつれて拡大し、最終的にはアームの内！に当たり、
以後。As the transmission distance of the laser beam increases, this core expands and eventually reaches the inside of the arm! On the occasion of
From then on.
レーザービームが伝達されなくなってしまうものである
。従って、このような関節部では入射光軸と反射ミラー
の回転軸とが常に一致するように各関節部で調整されて
いなければならず、また、ショック等により光軸が狂わ
ない構造でなくてはならない。This causes the laser beam to no longer be transmitted. Therefore, each joint must be adjusted so that the incident optical axis always matches the rotation axis of the reflecting mirror, and the structure must be such that the optical axis will not be distorted due to shocks, etc. Must not be.
上記のような調整をするために、第１図に示す従来装ｆ
ｊＬにおいては、押ねじデと引ねじｌＯとが６グ間隔で
１個おきに設けられている。今、この押ねじと引ねじと
を適宜、前進、後退させることによって、ミラーホルダ
部の傾斜角度及び前後方向の調節を行ない、最終的に反
射ミラーｌの回転軸１２と入射光軸ｌとを完全に一致さ
せ、かつ入射光軸／と反射光軸＝が直交するようＫＭ整
する。In order to make the above adjustment, the conventional equipment f shown in Fig. 1 is used.
In jL, push screws D and pull screws lO are provided every other at intervals of 6 g. Now, by moving the set screw and pull screw forward and backward as appropriate, the inclination angle and front-back direction of the mirror holder are adjusted, and finally the rotation axis 12 of the reflecting mirror l and the incident optical axis l are adjusted. The KM adjustment is made so that they completely match and the incident optical axis / and the reflected optical axis = are orthogonal.
従来の多関節反射鏡式マニピュレータの関節部は以上の
ように構成されかつ調節されるので、ミラーホルダ部は
押ねじ２．引ねじｌＯの微妙なバランスによってｖＩ４
ｆｌｔＪシ保持されているために、外部ショックによっ
て簡単に変位させられ２その結果。Since the joints of the conventional multi-joint reflector manipulator are constructed and adjusted as described above, the mirror holder part is attached to the push screw 2. vI4 due to the delicate balance of the draw screw lO
As a result, the fltJ is easily displaced by an external shock because it is retained.
光軸が狂うことがしばしばあった。また、従来の構造で
は１反射ミラーｔの角度調整及び前後位置の調節を同時
に行なわなければならず、そして。The optical axis often went awry. In addition, in the conventional structure, the angle adjustment and the front-rear position adjustment of one reflecting mirror t must be performed simultaneously.
この両者は相互に関連しておき、一方のみを単独で調整
することはできず、従って、同時に調整することは非、
常に難しいという欠点があった。Both of these are interrelated and cannot be adjusted alone; therefore, it is not recommended to adjust them at the same time.
The downside was that it was always difficult.
本発明は、上記のような従来装置の欠点を除去して、容
易に反射ミラーの角度調整及び前後位置調整が可能な多
関節反射鏡式マニピュレータを得ることを目的としてな
された反射ミラーの角度調整のみを行ない、しかも、一
度調整したら容易に狂わないようにするために１反射ミ
ラーを一面に取り付けたミラーホルダ部の背面と７・ウ
ジングに取り付は固定される取付部とがたゆみ軸によっ
て結合されているミラーホルダを備え、入射光軸と出射
光軸との交点に反射ミラーがあるようにノ・ウジングに
ミラーホルダを取付は固定し、取付部に設置の複数個の
調整ねじにより、ミラーホルダのたわみ軸を変形させミ
ラーホルダ部を傾けて反射ミラーの角度を調整可能とす
ると共に調整ねじを回動不能に固定したミラー調整機構
を有する関節部を供えた多関節反射鏡式マニピュレータ
を提供するものである。The present invention aims to eliminate the drawbacks of the conventional devices as described above and to provide an articulated reflecting mirror manipulator that can easily adjust the angle and the front and back position of the reflecting mirror. In addition, in order to prevent the mirror from going out of order once it has been adjusted, the back of the mirror holder part with the reflecting mirror attached to one side and the mounting part that is fixed to the housing are connected by a sway shaft. Attach and fix the mirror holder to the nozzle so that the reflection mirror is at the intersection of the input optical axis and the output optical axis. Provided is a multi-joint reflecting mirror manipulator that is capable of adjusting the angle of a reflecting mirror by deforming the deflection axis of the holder and tilting the mirror holder part, and is provided with a joint part having a mirror adjustment mechanism in which an adjusting screw is fixed unrotatably. It is something to do.
以下１本発明をその一実施例を示す図に基づいて説明す
る。DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be explained below based on figures showing one embodiment thereof.
第ａ図、第３図及び第ψ図において、入射光軸ｌ、出出
射光ココ５ハウジング、開ロ部弘、アーム！、軸受６１
反射ミラーｊ、開口部参の細心ｌへ反射ミラーｊの回転
軸ｌコはいずれも従来装置におけるものと同等のもので
あり、また、符号−７は反射ミラーｔを一面に取り付け
たンラーホルダ部２コの背面と、ハウジング３に取り付
は固定される取付部コ３とがたわみ軸コＩＩＫよって連
結されて構成されているミラーホルダ、コ５はミラーホ
ルダ部−一を押してたわみ軸コアの変形によりミラーホ
ルダ部ココを傾ける調整ボルト、コロはこの調整ポルト
コ！を調整後回動不能に固定するために調整ポルトコ！
のねじ穴を横断して取付部コＪＫ形成されるスリットで
あり、コアは調整ポルトコｊを回動不能にするために調
整ポル）、２ｊのねじ穴近辺のスリットコロの間隔を狭
くするための固定ねじである。なお、コｔはミラーホル
ダ部／の取付部コ３をハウジングＪＫ取り付は固定する
取付ねじである。In Fig. a, Fig. 3, and Fig. ψ, the incident optical axis l, the output light here 5 housing, the opening part Hiroshi, and the arm! , bearing 61
The reflection mirror j and the rotation axis l of the reflection mirror j are all the same as those in the conventional device, and the reference numeral -7 indicates the mirror holder part 2 on which the reflection mirror t is attached on one side. The mirror holder is constructed by connecting the back surface of the holder and the mounting part 3, which is fixedly attached to the housing 3, by a flexible shaft core IIK. The adjustment bolt that tilts the mirror holder part is this adjustment port! Adjust portoco to fix it unrotatable after adjustment!
This is a slit formed across the screw hole of the mounting part (JK), and the core is an adjustment port (adjustment port) to make the adjustment port (J) unrotatable, and a slit (core) to narrow the spacing between the slit rollers near the screw hole of 2J. It is a fixing screw. Note that t is a mounting screw for fixing the mounting part 3 of the mirror holder part to the housing JK.
また、このように構成されるミラーＳは、ミラーホルダ
ー７等の加工精度により、入射光軸／と出射光軸−との
交点にあるように構成されている。Moreover, the mirror S configured in this manner is configured to be located at the intersection of the incident optical axis / and the output optical axis -, due to the processing precision of the mirror holder 7 and the like.
次に本発明装置の作用について説明する。Next, the operation of the device of the present invention will be explained.
今反射ミラーｔの面の位置は、ミラーホルダ部ｌとハウ
ジング３との機械加工精度により、入射光軸／と出射光
軸コとの交点にあるものとする。なお、この程度の機械
加工精度は通常の機械設備で十分可能であり、困難な加
工ではない。Now, it is assumed that the position of the surface of the reflecting mirror t is at the intersection of the input optical axis / and the output optical axis /, depending on the machining accuracy of the mirror holder part l and the housing 3. It should be noted that this level of machining accuracy is sufficiently possible with ordinary mechanical equipment, and is not a difficult process.
この状態において、複数個例えば３本の調整ねじコ！を
適宜前進、後退させるととＫよって、たわみ軸コ弘を曲
げてミラーホルダ部２−を傾け。In this state, use multiple adjustment screws, for example, three adjustment screws! When the mirror holder portion 2- is moved forward and backward as appropriate, the deflection axis is bent and the mirror holder portion 2- is tilted.
反射ミラーｔの角度を調整する。角度の調整が完了した
ならば、固定ねじコアを締め付ける。この固定ねじコク
の締め付ＩＫよりミラーホルダーｌの取付部、２３のス
リットλ６のすきまは縮まり。Adjust the angle of the reflection mirror t. Once the angle adjustment is complete, tighten the fixing screw core. By tightening this fixing screw more fully, the clearance between the slit λ6 of mirror holder l and 23 will be reduced.
従って、調整ねじ２Ｓは回動不能となって固定され、そ
の結果、外部ショックによっても容易に緩まなくなる。Therefore, the adjusting screw 2S is fixed and cannot be rotated, and as a result, it does not loosen easily even when an external shock occurs.
なお、たわみ軸、２ダを変形させて反射ミラーにの角度
を調整した場合にあっても、ミラーｌの面の前後移動量
は１分封ミラーの周辺部は大きくても、中心部は嫌とん
ど零であり、光軸変化への影響はほとんど無視できる。Furthermore, even if the angle of the reflection mirror is adjusted by deforming the deflection axis, 2D, the amount of back-and-forth movement of the surface of the mirror L will be large at the periphery of the mirror, but the center will be undesirable. The effect on the optical axis change is almost negligible.
以上のように本発明の反射ミラーの調整機構は、角度調
整のみを行なえばよく、シかも、そのＩ４！！方法はき
わめて簡単であって熟練を必要としない。As described above, the adjustment mechanism of the reflective mirror of the present invention only needs to adjust the angle, and I4! ! The method is extremely simple and does not require any skill.
また、一度調整した後は簡単に固定でき、外部ショック
を受けても容易に狂わない構造となっており、かつ、再
調整も容易に行ない得る。Further, once adjusted, it can be easily fixed, has a structure that does not easily go awry even when subjected to external shock, and can be readjusted easily.
なお、上記実施例では調整ねじλよを回動不能にし固定
する手段としてスリットコロ及び固定ねじコアを設けた
が、これに限らず、公知の固定装置例えばロックナツト
等によってもよい。In the above embodiment, a slit roller and a fixed screw core are provided as means for fixing the adjustment screw λ so that it cannot rotate, but the present invention is not limited to this, and a known fixing device such as a lock nut may be used.
以上のように１本発明によれば１反射ミラーの調整を角
度調整のみ圧したので、光軸調整がきわめて容易となり
、かつ、外部ショックを受けても光軸が狂わず、また、
装置も安価に製作することができ、使用に際しての保守
上のトラブルも生じない多関節反射鏡式マニピュレータ
が得られるという効果を有している。As described above, according to the present invention, only the angle adjustment is required for the adjustment of the reflecting mirror, so the optical axis adjustment is extremely easy, and the optical axis does not go awry even when subjected to an external shock.
The device can also be manufactured at low cost, and has the effect of providing an articulated reflector type manipulator that does not cause maintenance troubles during use.
第１図は従来の多関節反射鏡式マニピュレータの関節部
の縦断面図、第一図は本発明の一実施例による多関節反
射鏡式マニピュレータの関節部の第３図の■−■−肛線
による縦断面図、第３図は第１図の矢印ｒＩＩＫよる矢
視図、第一図は第３図のＩＶ−ＩＶ線による断面図であ
る。
／・・入射光軸、コ・φ出射光軸、３・・ハウジング、
ψ・・開口部、３・・アーム、６−”軸受、り、−／・
・ミラーホルダ、「◆・反射ミラー−、／／争・開口の
軸心、ｌコφ・回転軸、−コ・・ミラーホルダ部、コ３
−・取付部、コｐ−・たわみ軸、コＳ−会調整ねじ、λ
６鳴・スリット。
コク・・固定ねじ、コｔ・−取付ねじ。
なお、各図中、同一符号は同−又は相当部分を示す。
ｄ
２′
幣２図
第３図FIG. 1 is a vertical cross-sectional view of the joint of a conventional multi-joint reflector manipulator, and FIG. FIG. 3 is a longitudinal cross-sectional view taken along line IV--IV in FIG. 3, and FIG. 3 is a cross-sectional view taken along line IV--IV in FIG. /...Incoming optical axis, Co/φ output optical axis, 3...Housing,
ψ...Opening, 3...Arm, 6-" bearing, -/...
・Mirror holder, ``◆・Reflection mirror-, // ・Aperture axis, φ・Rotation axis, ・Mirror holder part, 3
-・Mounting part, Cop-・Deflection shaft, Co-S-kai adjustment screw, λ
6 sounds/slits. Koku: Fixing screw, Kot: -Mounting screw. In each figure, the same reference numerals indicate the same or corresponding parts. d 2' Banknote 2 Figure 3
Claims (2)
して互いに連結されると共にその内部にレーザービーム
を通過させるアームとを有し、該関節部の少なくとも一
端はこの一端に接続されるアームに回転自在に連結され
、これによつて入射レーザービームを任意の位置に伝送
するようにした多関節反射鏡式マニピュレータにおいて
、反射ミラーが入射光軸及び出射光軸に面するように反
射ミラーを一面に取り付けたミラーホルダ部の背面とハ
ウジングに取付け固定される取付部とがたわみ軸によつ
て結合されているミラーホルダを備え入射光軸と出射光
軸とが直交する点に反射ミラーを設置するように上記ミ
ラーホルダをハウジングに固定すると共に取付部に設置
の複数個の調整ねじによりたわみ軸を変形させミラーホ
ルダ部を傾けて反射ミラーの角度を調整し、かつ、調整
ねじを回動不能に固定する固定装置を備えていることを
特徴とする多関節反射鏡式マニピュレータ。(1) It has a plurality of joints equipped with reflective mirrors and an arm that is connected to each other via the joints and allows a laser beam to pass therein, and at least one end of the joint is connected to this one end. In an articulated reflector manipulator that is rotatably connected to an arm that transmits an incident laser beam to an arbitrary position, the reflector mirror faces the input optical axis and the output optical axis. The mirror holder includes a mirror holder in which the back surface of the mirror holder part, which has a mirror attached to one side, and a mounting part that is attached and fixed to the housing are connected by a deflection shaft. At the same time, fix the mirror holder to the housing so that the mirror holder is installed, and adjust the angle of the reflecting mirror by tilting the mirror holder by deforming the deflection axis using multiple adjustment screws installed on the mounting part, and then turning the adjustment screws. An articulated reflector manipulator characterized by being equipped with a fixing device that fixes the device immovably.
調整ねじのねじ穴を横断するように取付部に形成された
スリットと、ねじ穴部のスリットの間隔を締め付けによ
つて狭めるように設けられた固定ねじとからなる特許請
求の範囲第１項記載の多関節反射鏡式マニピュレータ。(2) The fixing device that fixes the adjustment screw unrotatably is
Claim 1 includes a slit formed in the mounting portion so as to cross the screw hole of the adjustment screw, and a fixing screw provided so as to narrow the interval between the slits in the screw hole portion by tightening. Articulated reflector manipulator.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15763284A JPS6136714A (en) | 1984-07-30 | 1984-07-30 | Manipulator of multijoint reflection mirror system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15763284A JPS6136714A (en) | 1984-07-30 | 1984-07-30 | Manipulator of multijoint reflection mirror system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6136714A true JPS6136714A (en) | 1986-02-21 |
Family
ID=15653962
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15763284A Pending JPS6136714A (en) | 1984-07-30 | 1984-07-30 | Manipulator of multijoint reflection mirror system |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6136714A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63127218A (en) * | 1986-11-18 | 1988-05-31 | Toyoda Mach Works Ltd | Direction adjusting device for light beam changing mirror |
| KR100832850B1 (en) | 2007-01-29 | 2008-05-28 | 주식회사 이오테크닉스 | Polygon mirror housing and method of compensation align-errors in the polygon mirror housing using the same |
-
1984
- 1984-07-30 JP JP15763284A patent/JPS6136714A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63127218A (en) * | 1986-11-18 | 1988-05-31 | Toyoda Mach Works Ltd | Direction adjusting device for light beam changing mirror |
| KR100832850B1 (en) | 2007-01-29 | 2008-05-28 | 주식회사 이오테크닉스 | Polygon mirror housing and method of compensation align-errors in the polygon mirror housing using the same |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS6136715A (en) | Manipulator of multijoint reflection mirror system | |
| US6198580B1 (en) | Gimballed optical mount | |
| EP0340735A3 (en) | Headlight apparatus for automotive vehicle | |
| US4362523A (en) | Derailleur for a cycle | |
| US5647559A (en) | Apparatus for flight path correction of flying bodies | |
| EP0703088B1 (en) | Image forming apparatus having a two-beam optical scanning unit | |
| AU6817094A (en) | An apparatus for measuring the dimensions of objects | |
| US4023891A (en) | Adjustable mirror mount assembly | |
| CA2179837A1 (en) | Light Scanner | |
| JPS6136714A (en) | Manipulator of multijoint reflection mirror system | |
| US4824420A (en) | Rear derailer for bicycle gears | |
| JP4677657B2 (en) | Scanning optical device | |
| EP0769992B1 (en) | Optical system for positioning laser beams in a straight or angular position | |
| JPS6136713A (en) | Manipulator of multijoint reflection mirror system | |
| JP2987211B2 (en) | Articulated reflector device | |
| EP0055491A1 (en) | Balancing system for laser machining device | |
| JPH04200892A (en) | Laser beam transmitting device in laser beam machine | |
| EP0877296A3 (en) | Transmission system for synchrotron radiation | |
| EP0064784B1 (en) | Optical branch coupler | |
| JPH06331913A (en) | Two-beam optical scanner | |
| JPH01215487A (en) | Bender for laser beam | |
| JP2686713B2 (en) | Vehicle mounting mechanism for vehicle lighting | |
| JPH0224195B2 (en) | ||
| JPH07294833A (en) | Laser beam splitting device | |
| JPH05297256A (en) | Optical member holding device |