JPS6132816B2 - - Google Patents

Info

Publication number: JPS6132816B2
Authority: JP; Japan
Prior art keywords: semiconductor wafer; dry plate; objective lens; optical system; holder
Prior art date: 1976-05-26
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired

Application number

JP51060032A

Other languages

English (en)

Japanese (ja)

Other versions

JPS52143775A (en

Inventor

Kyoshi Nakagawa

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Hitachi Ltd

Original Assignee

Hitachi Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1976-05-26

Filing date

1976-05-26

Publication date

1986-07-29

1976-05-26 Application filed by Hitachi Ltd filed Critical Hitachi Ltd

1976-05-26 Priority to JP6003276A priority Critical patent/JPS52143775A/ja

1977-11-30 Publication of JPS52143775A publication Critical patent/JPS52143775A/ja

1986-07-29 Publication of JPS6132816B2 publication Critical patent/JPS6132816B2/ja

Status Granted legal-status Critical Current

Links

238000007639 printing Methods 0.000 claims description 27
239000004065 semiconductor Substances 0.000 claims description 18
230000003287 optical effect Effects 0.000 claims description 13
238000001514 detection method Methods 0.000 claims description 10
238000000034 method Methods 0.000 claims description 7
238000005259 measurement Methods 0.000 claims 1
238000000926 separation method Methods 0.000 claims 1
235000012431 wafers Nutrition 0.000 description 13
238000010586 diagram Methods 0.000 description 3
238000006073 displacement reaction Methods 0.000 description 3
230000008878 coupling Effects 0.000 description 2
238000010168 coupling process Methods 0.000 description 2
238000005859 coupling reaction Methods 0.000 description 2
230000007423 decrease Effects 0.000 description 2
230000002093 peripheral effect Effects 0.000 description 2
239000007787 solid Substances 0.000 description 2
230000005540 biological transmission Effects 0.000 description 1
230000008602 contraction Effects 0.000 description 1
239000000428 dust Substances 0.000 description 1
238000005516 engineering process Methods 0.000 description 1
239000012530 fluid Substances 0.000 description 1
229920002120 photoresistant polymer Polymers 0.000 description 1
230000001105 regulatory effect Effects 0.000 description 1
230000000630 rising effect Effects 0.000 description 1

Landscapes

Projection-Type Copiers In General (AREA)
Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

JP6003276A 1976-05-26 1976-05-26 Reduction projecting and printing method and reduction projecting and printing apparatus used in this method Granted JPS52143775A (en)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP6003276A JPS52143775A (en)	1976-05-26	1976-05-26	Reduction projecting and printing method and reduction projecting and printing apparatus used in this method

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP6003276A JPS52143775A (en)	1976-05-26	1976-05-26	Reduction projecting and printing method and reduction projecting and printing apparatus used in this method

Publications (2)

Publication Number	Publication Date
JPS52143775A JPS52143775A (en)	1977-11-30
JPS6132816B2 true JPS6132816B2 (de)	1986-07-29

Family

ID=13130313

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP6003276A Granted JPS52143775A (en)	1976-05-26	1976-05-26	Reduction projecting and printing method and reduction projecting and printing apparatus used in this method

Country Status (1)

Country	Link
JP (1)	JPS52143775A (de)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS6256621A (ja) *	1985-09-04	1987-03-12	Ngk Spark Plug Co Ltd	セラミツク軸と金属軸の接合構造
JPH0540312Y2 (de) *	1986-08-08	1993-10-13

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS59169134A (ja) *	1983-03-16	1984-09-25	Hitachi Ltd	縮小投影露光装置

1976
- 1976-05-26 JP JP6003276A patent/JPS52143775A/ja active Granted

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS6256621A (ja) *	1985-09-04	1987-03-12	Ngk Spark Plug Co Ltd	セラミツク軸と金属軸の接合構造
JPH0540312Y2 (de) *	1986-08-08	1993-10-13

Also Published As

Publication number	Publication date
JPS52143775A (en)	1977-11-30

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