JPS61280553A - Apparatus for measuring humidity - Google Patents

Abstract

PURPOSE:To enhance measuring accuracy and to provide long life capacity, by calculating saturated steam pressures from the temp. signals of first and second temp. sensors by using an operation apparatus and calculating the humidity of a high temp. measuring atmosphere from said saturated steam pressures and the humidity signal from a temp. sensors. CONSTITUTION:Saturated steam pressures esa, esb are calculated from temp. signals Ta, Tb calculated by first and second temp. sensors 51, 52 while pressures Pa, Pb are calculated from first and second pressure sensors 61, 62 and humidity Hb is calculated from a temp. sensor 7 and all values are operated according to formula I by an operation circuit 8 to calculate the humidity Hb of a high temp. measuring atmosphere. By this method, measurement can be performed with high accuracy and the service life of the apparatus can be kept long.

Description

【発明の詳細な説明】 ［産業上の利用分野］ この発明は、高温測定雰囲気の湿度を測定する湿度測定
装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention relates to a humidity measuring device for measuring the humidity of a high temperature measurement atmosphere.

［従来の技術］ １００’Ｃ以上の高温雰囲気での湿度は、１＃渇での湿
度に比べて低くＯ％ＲＨに近σ１値となり、変化用も小
さく、一般に十分な精度が得られず、測定が困難である
。また、測定に使用する湿度計に耐熱性が必要とされる
。[Prior art] Humidity in a high-temperature atmosphere of 100'C or more is lower than the humidity at 1# dry, and the σ1 value is close to O%RH, and the variation is small, and generally sufficient accuracy cannot be obtained. Difficult to measure. Additionally, the hygrometer used for measurement must be heat resistant.

このため、従来、高温雰囲気の湿度測定には、露点計を
使用して露点ｍ度から相対湿度を求めたり、ジルコニア
を使用した耐熱性のある湿度計を使用したりして湿度を
測定していた。For this reason, conventional methods of measuring humidity in high-temperature atmospheres include using a dew point meter to determine the relative humidity from the dew point (m degrees), or using a heat-resistant hygrometer that uses zirconia. Ta.

［発明が解決しようとする問題点〕 しかしながら、このような露点計やジルコニア湿度計を
用いち方法墾は、装置全体が高価であり、また、周辺装
置も大がかりなものとなるため、かなり大きな設備とな
る不都合があった。[Problems to be solved by the invention] However, the method using such a dew point meter or zirconia hygrometer requires quite large equipment because the entire device is expensive and the peripheral equipment is also large-scale. There was an inconvenience.

また、常温で通常使用される高分子膜等の湿度によるイ
ンピーダンス変化を利用した電気式の湿度センサを使用
しようとすると、耐熱温度寿命が小さく、直接ｉｏｏ’
ｃ以上の高温雰囲気に放置して測定に使用することは困
難であった。In addition, if you try to use an electrical humidity sensor that utilizes the impedance change due to humidity of a polymer membrane, etc. that is normally used at room temperature, the heat-resistant temperature life is short, and the direct ioo'
It was difficult to leave it in a high-temperature atmosphere of c or higher and use it for measurement.

この発明の目的は、以上の点に鑑み、通常の電気式の湿
度センサを用い、容易に高温雰囲気の湿度の測定を行う
ようにした湿度測定装置を提供することである。In view of the above points, an object of the present invention is to provide a humidity measuring device that easily measures the humidity of a high-temperature atmosphere using an ordinary electric humidity sensor.

Ｌ問題点を解決するための手段］ この発明は、高温測定雰囲気の空気を冷却して低温測定
雰囲気に導き、高温測定雰囲気の温度を測定する第１の
温度センサ、低温測定雰囲気の濃度を測定する第２の温
度センサの濃度信号から各々の飽和水蒸気圧を算出し、
この飽和水蒸気圧と低温測定雰囲気の湿度を測定する湿
度センサの湿度信号から高温測定雰囲気の湿度を演算す
るようにした湿度測定装置である。Means for Solving Problem L] The present invention provides a first temperature sensor that cools air in a high-temperature measurement atmosphere and introduces it into a low-temperature measurement atmosphere, and a first temperature sensor that measures the temperature of the high-temperature measurement atmosphere; Calculate each saturated water vapor pressure from the concentration signal of the second temperature sensor,
This humidity measuring device calculates the humidity of a high temperature measurement atmosphere from this saturated water vapor pressure and a humidity signal from a humidity sensor that measures the humidity of a low temperature measurement atmosphere.

［実施例］ 第１図は、この発明の一実施例を示す構成説明図である
。[Embodiment] FIG. 1 is a configuration explanatory diagram showing an embodiment of the present invention.

図において、１は、高温測定雰囲気、２は、低温測定雰
囲気、３は、エアポンプ４で吸引することにより高温測
定雰囲気１の水蒸気を含んだ空気を冷却して低温測定雰
囲気２に導く管、５１は、高温測定雰囲気１の温度を測
定する第１の温度センサ、６１は、高温測定雰囲気１の
圧力を測定する圧力センサ、５２は、低温測定雰囲気２
の温度を測定する第２の温度センサ、６２は、低温測定
雰囲気２の圧力を測定する圧力センサ、７は、低温測定
雰囲気の湿度を測定する電気式の湿度センサ、８は、第
１、第２の温度センサ５１．５２の温度信号Ｔａ　、Ｔ
ｂから夫々の飽和蒸気圧ｅｓａ　。In the figure, 1 is a high-temperature measurement atmosphere, 2 is a low-temperature measurement atmosphere, and 3 is a tube 51 that cools the air containing water vapor in the high-temperature measurement atmosphere 1 by suctioning it with an air pump 4 and leads it to the low-temperature measurement atmosphere 2. is a first temperature sensor that measures the temperature of the high temperature measurement atmosphere 1; 61 is a pressure sensor that measures the pressure of the high temperature measurement atmosphere 1; and 52 is a low temperature measurement atmosphere 2.
62 is a pressure sensor that measures the pressure of the low temperature measurement atmosphere 2; 7 is an electric humidity sensor that measures the humidity of the low temperature measurement atmosphere; 8 is the first and second temperature sensor; Temperature signals Ta, T of temperature sensors 51 and 52 of No. 2
b to the respective saturated vapor pressure esa.

ｅｓｂを算出し、湿度センサ８の湿度信号Ｈｂ、第１、
第２の圧力センサ６１．６２の圧力信号ｐａ。esb is calculated, and the humidity signal Hb of the humidity sensor 8, the first,
Pressure signal pa of the second pressure sensor 61,62.

Ｐｂから高温測定雰囲気１の湿度Ｈａ、混合比Ｘ等を演
算する演算手段である。なお、高温測定雰囲気１の圧力
が、低温測定雰囲気２の圧力ｉよりも高ければ、空気は
自然に高温側から低温側へ流れ、エアポンプは不要とな
る。This is a calculation means that calculates the humidity Ha of the high temperature measurement atmosphere 1, the mixing ratio X, etc. from Pb. Note that if the pressure of the high temperature measurement atmosphere 1 is higher than the pressure i of the low temperature measurement atmosphere 2, air will naturally flow from the high temperature side to the low temperature side, and an air pump will not be necessary.

演算手段８で演算する演算式、測定原理は次のようであ
る。The calculation formula and measurement principle calculated by the calculation means 8 are as follows.

高温測定雰囲気１、低温測定雰囲気２の各々の水蒸気圧
をｅａ、　ｅｂ、飽和水蒸気圧をｅｓａ　、　ｅｓｂと
すると、各々の相対湿度１−１ａ、Ｈｂ（％）は次のよ
うになる。Assuming that the water vapor pressures of the high temperature measurement atmosphere 1 and the low temperature measurement atmosphere 2 are ea and eb, and the saturated water vapor pressures are esa and esb, the respective relative humidity 1-1a and Hb (%) are as follows.

Ｈａ−（ｅａ／ｅｓｋ）Ｘ１００　　　　　　　　（１
）Ｈｂ　−（８ｂ／ｅｓｂ　＞ｘｉｏｏ　　　　　　　
　（２）高温測定雰囲気１から低温測定雰囲気２に水蒸
気を含んだ空気がそのまま移動し、水分の出入がないと
し、夫々の全圧をｐａ　、Ｐｂとすると、水蒸気の分圧
は変わらないので次式が成り立つ。Ha-(ea/esk)X100 (1
)Hb −(8b/esb >xioo
(2) Assuming that air containing water vapor moves as it is from high-temperature measurement atmosphere 1 to low-temperature measurement atmosphere 2, and no moisture enters or exits, and the respective total pressures are pa and Pb, the partial pressure of water vapor does not change, so The formula holds true.

ｅａ−Ｐａ　−ｅｂ／Ｐｂ　　　　　　　　　　　　（
３）（２）、（３）式を、（１）式に代入すると、Ｈａ
　−Ｐａ　−ｅｓｂ　−１−１ｂ　／　（Ｐｂ　−ｅｓ
ａ　）となる。ea-Pa-eb/Pb (
3) Substituting equations (2) and (3) into equation (1), Ha
-Pa -esb -1-1b / (Pb -es
a).

つまり、第１、第２の温度センサ５１．５２で求めた温
度信＠Ｔａ　、Ｔｂから、飽和水蒸気圧ｅｓａ　、　ｅ
ｓｂを求め、第１、第２の圧力センサ６１．６２から圧
力Ｐａ　、Ｐｂを求め、湿度センサ７から湿１１１Ｈｂ
を求め、これらからＩＩＩ手段８により（４）式の演算
を行い高温測定雰囲気１の湿度Ｈｂを求める。That is, from the temperature signals @Ta, Tb obtained by the first and second temperature sensors 51, 52, the saturated water vapor pressures esa, e
sb is determined, pressure Pa and Pb are determined from the first and second pressure sensors 61 and 62, and humidity 111Hb is determined from the humidity sensor 7.
From these, the III means 8 calculates the equation (4) to determine the humidity Hb of the high temperature measurement atmosphere 1.

また、圧力損失がないとすれば、Ｐａ−ｐｂが成り立ち
、（４）式は、次式となる。Moreover, if there is no pressure loss, Pa-pb holds true, and equation (4) becomes the following equation.

１−１ａ　−ｅｓｂ　−Ｈｂ　／ｅｓａ　　　　　　　
　　　（５）また、乾燥工程では、混合比Ｘが比較的よ
く用いられ、湿度から次のようにして求まる。一般にＸ
−０，６２２ｅａ／　　（Ｐ−ｅａ）　　　　　　　　
　　　　　（６）ここで、ｅａ−＠ａ　−ｅｓａ　／　
１００．　Ｐ−Ｐａを代入すると次式となる。1-1a -esb -Hb /esa
(5) Also, in the drying process, the mixing ratio X is relatively often used and is determined from the humidity as follows. Generally X
-0,622ea/ (P-ea)
(6) Here, ea-@a-esa /
100. Substituting P-Pa gives the following equation.

Ｘ−０，００６２２ｅｓａ　Ｈａ　／ （ｐａ　−ｅｓａ　Ｈａ　／１００）　　　　　（７）
（７）式より混合比Ｘを求めればよい。X-0,00622esa Ha / (pa-esa Ha /100) (7)
The mixture ratio X may be obtained from equation (7).

なお、演算手段８は、メモリを含むマイクロコンピュー
タ、パーソナルコンピュータ、あるいはアナログ演算断
路等で構成し、メモリ等に温度から飽和水蒸気圧を求め
るテーブル、演算式を記憶させ、所定の上記演算を行う
ようにすればよい。The calculation means 8 is composed of a microcomputer including a memory, a personal computer, or an analog calculation circuit, and stores tables and calculation formulas for calculating saturated water vapor pressure from temperature in the memory, etc., and performs the above-described predetermined calculations. Just do it.

［発明の効果〕 以上述べたように、この発明は、高温測定雰囲気の空気
を冷却して測定を行っているので、相対湿度が上昇し、
変化量も大きくなり、測定精度が上がる。また、湿度セ
ンサは、高温雰囲気にさらされないので、高寿命となり
、設備も小さくて済み、安価、高信頼性のものとなる。[Effects of the Invention] As described above, this invention performs measurements by cooling the air in the high-temperature measurement atmosphere, so the relative humidity increases and
The amount of change also increases, improving measurement accuracy. Furthermore, since the humidity sensor is not exposed to a high temperature atmosphere, it has a long lifespan, requires small equipment, and is inexpensive and highly reliable.

【図面の簡単な説明】[Brief explanation of drawings]

第１図は、この発明の一実施例を示す構成説明図である
。 １・・・高温測定雰囲気、　２・・・低温測定雰囲気、
３・・・管、　４・・・エアポンプ、　５　’ｌ　、　
５２・・・温度センサ、６１．６２・・・圧力センサ、
　７・・・湿度センサ、　８・・・演算手段FIG. 1 is a configuration explanatory diagram showing an embodiment of the present invention. 1...High temperature measurement atmosphere, 2...Low temperature measurement atmosphere,
3...Pipe, 4...Air pump, 5'l,
52...Temperature sensor, 61.62...Pressure sensor,
7...Humidity sensor, 8...Calculating means

Claims (1)

【特許請求の範囲】 １、高温測定雰囲気の空気を低温測定雰囲気に導く管と
、高温測定雰囲気の温度を測定する第１の温度センサと
、低温測定雰囲気の温度を測定する第２の温度センサと
、低温測定雰囲気の湿度を測定する湿度センサと、第１
、第２の温度センサの温度信号から各々の飽和水蒸気圧
を算出し、この飽和水蒸気圧と湿度センサの湿度信号か
ら高温測定雰囲気の湿度を算出する演算手段とを備えた
ことを特徴とする湿度測定装置。 ２、高温測定雰囲気および低温測定雰囲気の圧力を第１
、第２の圧力センサで測定し、演算手段での湿度の演算
に用いられるようにしたことを特徴とする特許請求の範
囲第１項記載の湿度測定装置。[Claims] 1. A tube that guides air in a high-temperature measurement atmosphere to a low-temperature measurement atmosphere, a first temperature sensor that measures the temperature of the high-temperature measurement atmosphere, and a second temperature sensor that measures the temperature of the low-temperature measurement atmosphere. , a humidity sensor that measures the humidity of the low temperature measurement atmosphere, and a first
, calculating means for calculating each saturated water vapor pressure from the temperature signal of the second temperature sensor and calculating the humidity of the high temperature measurement atmosphere from the saturated water vapor pressure and the humidity signal of the humidity sensor. measuring device. 2. The pressure of the high-temperature measurement atmosphere and the low-temperature measurement atmosphere is
2. The humidity measuring device according to claim 1, wherein the humidity is measured by the second pressure sensor and used for calculating the humidity by the calculation means.