JPS61251543A - Bonding of glass substrate - Google Patents

Bonding of glass substrate

Info

Publication number
JPS61251543A
JPS61251543A JP60090670A JP9067085A JPS61251543A JP S61251543 A JPS61251543 A JP S61251543A JP 60090670 A JP60090670 A JP 60090670A JP 9067085 A JP9067085 A JP 9067085A JP S61251543 A JPS61251543 A JP S61251543A
Authority
JP
Japan
Prior art keywords
adhesive
glass substrate
bonding
substrate
adhesive layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP60090670A
Other languages
Japanese (ja)
Inventor
Shinichi Kondo
伸一 近藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Citizen Watch Co Ltd
Original Assignee
Citizen Watch Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Citizen Watch Co Ltd filed Critical Citizen Watch Co Ltd
Priority to JP60090670A priority Critical patent/JPS61251543A/en
Publication of JPS61251543A publication Critical patent/JPS61251543A/en
Pending legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C66/00General aspects of processes or apparatus for joining preformed parts
    • B29C66/40General aspects of joining substantially flat articles, e.g. plates, sheets or web-like materials; Making flat seams in tubular or hollow articles; Joining single elements to substantially flat surfaces
    • B29C66/41Joining substantially flat articles ; Making flat seams in tubular or hollow articles
    • B29C66/45Joining of substantially the whole surface of the articles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C65/00Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor
    • B29C65/02Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure
    • B29C65/14Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using wave energy, i.e. electromagnetic radiation, or particle radiation
    • B29C65/1403Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using wave energy, i.e. electromagnetic radiation, or particle radiation characterised by the type of electromagnetic or particle radiation
    • B29C65/1406Ultraviolet [UV] radiation
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C65/00Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor
    • B29C65/48Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor using adhesives, i.e. using supplementary joining material; solvent bonding
    • B29C65/4805Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor using adhesives, i.e. using supplementary joining material; solvent bonding characterised by the type of adhesives
    • B29C65/483Reactive adhesives, e.g. chemically curing adhesives
    • B29C65/4845Radiation curing adhesives, e.g. UV light curing adhesives
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C65/00Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor
    • B29C65/48Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor using adhesives, i.e. using supplementary joining material; solvent bonding
    • B29C65/52Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor using adhesives, i.e. using supplementary joining material; solvent bonding characterised by the way of applying the adhesive
    • B29C65/521Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor using adhesives, i.e. using supplementary joining material; solvent bonding characterised by the way of applying the adhesive by spin coating
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C65/00Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor
    • B29C65/78Means for handling the parts to be joined, e.g. for making containers or hollow articles, e.g. means for handling sheets, plates, web-like materials, tubular articles, hollow articles or elements to be joined therewith; Means for discharging the joined articles from the joining apparatus
    • B29C65/7802Positioning the parts to be joined, e.g. aligning, indexing or centring
    • B29C65/7832Positioning the parts to be joined, e.g. aligning, indexing or centring by setting the overlap between the parts to be joined, e.g. the overlap between sheets, plates or web-like materials
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C66/00General aspects of processes or apparatus for joining preformed parts
    • B29C66/01General aspects dealing with the joint area or with the area to be joined
    • B29C66/05Particular design of joint configurations
    • B29C66/10Particular design of joint configurations particular design of the joint cross-sections
    • B29C66/11Joint cross-sections comprising a single joint-segment, i.e. one of the parts to be joined comprising a single joint-segment in the joint cross-section
    • B29C66/112Single lapped joints
    • B29C66/1122Single lap to lap joints, i.e. overlap joints
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29LINDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
    • B29L2031/00Other particular articles
    • B29L2031/34Electrical apparatus, e.g. sparking plugs or parts thereof
    • B29L2031/3475Displays, monitors, TV-sets, computer screens

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Laminated Bodies (AREA)
  • Joining Of Glass To Other Materials (AREA)

Abstract

PURPOSE:To carry out the bonding of a glass substrate with an adhesive layer having uniform thickness, by supplying an adhesive to the surface of a glass substrate placed on a table, placing another glass substrate on the adhesive and rotating the table to effect the spreading of the adhesive layer by the centrifugal force. CONSTITUTION:A glass substrate 22 to be bonded is placed on a spinner head 21 (a substrate table) facing the bonding surface upward. An adhesive 23 is supplied to the surface of the substrate 22 e.g. by dripping, and another glass substrate 24 is placed on the substrate 22 facing the bonding surface downward. The spinner head 21 is rotated at a rotational speed of preferably 1,000-3,000rpm to spread the adhesive 23 radially by the centrifugal force. A uniform adhesive layer can be formed by this procedure to give a bonded glass substrate having high flatness. The staining of the outer circumference of the substrate with the adhesive can be prevented and the bonding cost can be reduced remarkably.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明はガラス基板の貼り合せ方法に関するものである
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method for bonding glass substrates.

〔従来の技術〕[Conventional technology]

従来複数枚のガラス基板を接着剤で接着固定する場合、
接着される一対のガラス基板の間に接着剤を滴下し、双
方のガラス基板によって圧縮し。
Conventionally, when fixing multiple glass substrates with adhesive,
Adhesive is dropped between the pair of glass substrates to be bonded and compressed by both glass substrates.

接着剤層を押し拡げて行なう加圧接着法等が行なわれて
いた。この加圧接着法を第2図に基づき説明する。
Pressure adhesion methods have been used in which the adhesive layer is pushed and spread. This pressure bonding method will be explained based on FIG. 2.

平面度の良い定盤11の上に被着される一方のガラス基
板12を載せ、該ガラス基板12の上面に接着剤13を
滴下し、他の被着ガラス基板14を載せ、その上から平
面度の良いもう一方の定盤15を載せて加圧し、接着剤
13を圧縮し延伸する方法である。
One glass substrate 12 to be adhered is placed on a surface plate 11 with good flatness, adhesive 13 is dripped onto the upper surface of the glass substrate 12, the other glass substrate 14 is placed, and a flat surface is placed on top of it. This is a method of placing another surface plate 15 with good strength and applying pressure to compress and stretch the adhesive 13.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

この方法に於いては被着される少なくとも一方のガラス
基板12又は14よりハミ出した接着剤は該ガラス基板
12又は14の縁部に盛り上がり、基板外周に付着する
ので、この余分な接着剤を除去するために多大な時間を
必要とした。また圧縮する定盤11乃至15とガラス基
板12乃至14の間にゴミ等の凸起物が存在すると、こ
の部分が局部的に加圧されるので接着剤層厚みが不均一
となり、被着ガラス基板が1 mm以下の薄板ガラスの
場合、接着後のガラス基板の平面度が損なわれる場合が
多かった。更に加圧力が偏ると接着剤が均一に拡がらず
、接着剤厚みムラが生じる等の欠点も有った。
In this method, the adhesive that protrudes from at least one of the glass substrates 12 or 14 to be applied rises to the edge of the glass substrate 12 or 14 and adheres to the outer periphery of the substrate, so it is necessary to remove this excess adhesive. It took a lot of time to remove it. Furthermore, if there is a convex object such as dust between the surface plates 11 to 15 to be compressed and the glass substrates 12 to 14, this area will be locally pressurized, resulting in uneven adhesive layer thickness and When the substrate is a thin glass sheet with a thickness of 1 mm or less, the flatness of the glass substrate after bonding is often impaired. Furthermore, if the applied pressure is uneven, the adhesive will not spread uniformly, resulting in uneven thickness of the adhesive.

本発明の目的は薄板ガラスの貼り合せプロセスに於いて
上記欠点を解決し、接着剤層厚みを一定にし、接着後の
ガラス基板の平面度を良好に保ちしかも余剰な接着剤の
除去が容易な量産的な製造方法を提供するものである。
The purpose of the present invention is to solve the above-mentioned drawbacks in the process of bonding thin glass sheets, to make the thickness of the adhesive layer constant, to maintain good flatness of the glass substrate after bonding, and to easily remove excess adhesive. This provides a mass-production manufacturing method.

〔問題点を解決するための手段〕[Means for solving problems]

上記の目的を達成させるために、本発明は次のようなプ
ロセスとなっている。
In order to achieve the above object, the present invention has the following process.

複数枚のガラス基板を接着剤を介して貼り合せ接着固定
する製造方法に於いて、被着される一方のガラス基板を
回転可能な基台の上に載せ、該ガラス基板上に接着剤を
供給した後膣接着剤上に被着される他の一方のガラス基
板を載せ、前記基台を回転させることにより、前記接着
剤層を遠心力によって拡げることを特徴とする。
In a manufacturing method in which multiple glass substrates are bonded and fixed using an adhesive, one of the glass substrates to be adhered is placed on a rotatable base, and an adhesive is supplied onto the glass substrate. After that, the other glass substrate to be adhered is placed on the vaginal adhesive and the base is rotated to spread the adhesive layer by centrifugal force.

〔作用〕[Effect]

このプロセスで接着されたガラス基板は、回転により生
ずる遠心力で接着剤は中心から放射状に拡がろうとする
ので一定の回転速度、回転時間を与えれば接着剤層厚さ
がほぼ一定となる。また被着されるガラス基板の端面ま
で拡がった接着剤は、ガラス基板の端面に留まらず遠心
力によって外に飛ばされるので余剰な接着剤を後で除去
する手間が不用となる。
In glass substrates bonded by this process, the adhesive tends to spread radially from the center due to the centrifugal force generated by rotation, so if a constant rotation speed and rotation time are given, the adhesive layer thickness will be approximately constant. Further, the adhesive that has spread to the end surface of the glass substrate to be adhered does not stay on the end surface of the glass substrate but is blown out by centrifugal force, so that there is no need to remove excess adhesive later.

〔実施例〕〔Example〕

以下本発明を液晶カラーテレビ用の表示パネルの製造工
程に於けるカラーフィルター用基板と表示用セグメント
電極基板の貼り合せに用いた実施例を第1図に従って詳
述する。
Hereinafter, an embodiment in which the present invention is used for bonding a color filter substrate and a display segment electrode substrate in the manufacturing process of a display panel for a liquid crystal color television will be described in detail with reference to FIG.

第2図に於いて22は被着される一方のガラス基板で被
着面側には赤、緑、青3色で構成されるカラーフィルタ
ーが形成されている。24は被着される他の一方のガラ
ス基板で被着面の反対側の面に液晶駆動用の電極が形成
されている。21は回転可能な基台としてのスピンナー
ヘッドであり。
In FIG. 2, reference numeral 22 denotes one of the glass substrates to be adhered, and a color filter consisting of three colors of red, green, and blue is formed on the adhered surface side. Reference numeral 24 denotes another glass substrate to be adhered, and electrodes for driving liquid crystal are formed on the surface opposite to the surface to be adhered. 21 is a spinner head as a rotatable base.

このスピンナーヘッド21上には、前記ガラス基板22
.24を上記ヘッド21上に載せた時読ガラス基板22
.24を取り囲む様に複数個のガイドピン25が設けで
ある。これはスピンナーヘッド21の回転中に被着ガラ
ス基板22.24が回転方向にズレない様に規制するた
めのものである。
On this spinner head 21, the glass substrate 22
.. 24 placed on the head 21 and the time reading glass substrate 22
.. A plurality of guide pins 25 are provided to surround the guide pins 24. This is to prevent the adhered glass substrates 22 and 24 from shifting in the rotational direction while the spinner head 21 is rotating.

次に接着プロセスを順を追って説明する。Next, the adhesion process will be explained step by step.

第1図の前記スピンナーヘッド21上に前記一方の被着
ガラス基板22の被着面な上にして載せる。この場合一
対ガラス基板22.24の内どちら側が先でも良い。ま
た最初に載せるガラス基板22の下面を真空吸着しても
良い。
The one glass substrate 22 is placed on the spinner head 21 shown in FIG. 1 with the surface to be adhered facing up. In this case, it does not matter which side of the pair of glass substrates 22 and 24 comes first. Alternatively, the lower surface of the glass substrate 22 to be placed first may be vacuum-adsorbed.

次に該ガラス基板22上に接着剤23を滴下等の方法で
供給する。接着剤としては紫外線硬化型接着剤を用いた
が、接着剤として他の熱硬化型接着剤を用いても支障な
いことは云うまでもない。
Next, the adhesive 23 is supplied onto the glass substrate 22 by a method such as dropping. Although an ultraviolet curable adhesive was used as the adhesive, it goes without saying that other thermosetting adhesives may be used as the adhesive.

接着剤はほぼ中心に滴下するのが好ましい。Preferably, the adhesive is dropped approximately in the center.

次に被着する他の一方のガラス基板24を被着面な下に
して前記ガラス基板22の上に重ねる様に載せる。
Next, the other glass substrate 24 to be adhered is placed on top of the glass substrate 22 with the surface to be adhered facing downward.

次にスピンナーヘッド21を回転する。ここで回転数は
ガラス基板22.24の大きさにより多少異なるが、1
000 rpm〜3000 rpmの範囲が適当である
。回転時間は30秒〜100秒の範囲で行なった。
Next, the spinner head 21 is rotated. Here, the number of rotations varies somewhat depending on the size of the glass substrate 22,24, but 1
A range of 000 rpm to 3000 rpm is suitable. The rotation time was in the range of 30 seconds to 100 seconds.

尚、回転数及び回転時間は、接着剤の粘度と合わせて接
着剤層の厚gを決める要素となるので目的に合わせて設
定すべきである。本実施例では接着・剤として1例えば
東しの紫外線硬化型接着剤フォトレックA206(粘度
約50cps)を使用した場合は回転数200Orpm
、回転時間80秒で6インチ角寸法の薄板ガラス2枚を
平面度良く接着することができた。この時の接着剤層厚
は約15μmの均一な膜厚が実現できた。接着剤として
紫外線硬化型接着剤を用いたので上記接着プロセスの後
355nmを主波長とする紫外線を接着面に約3分間照
射し、硬化させることで貼り合せのプロセスを完了した
。このプロセスで滴下した接着剤231.5ccの内実
際に接着層として有効な必要量は約20%のQ、 3 
ccであり、余剰な80%の接着剤はガラス基板22.
24の旋回中に遠心力により振り切られて廃棄されたこ
とになる。実はこの様に余剰の接着剤を被着基板から除
去することもこのプロセスの優れた効果の一つであり。
Note that the rotation speed and rotation time are factors that determine the thickness g of the adhesive layer together with the viscosity of the adhesive, so they should be set according to the purpose. In this example, when using the adhesive/agent 1, for example, Toshi's ultraviolet curable adhesive Photorec A206 (viscosity approximately 50 cps), the rotation speed was 200 rpm.
With a rotation time of 80 seconds, two sheets of 6-inch square thin glass sheets could be bonded together with good flatness. At this time, a uniform adhesive layer thickness of approximately 15 μm was achieved. Since an ultraviolet curable adhesive was used as the adhesive, after the above bonding process, the adhesive surface was irradiated with ultraviolet rays having a main wavelength of 355 nm for about 3 minutes to cure and complete the bonding process. Of the 231.5 cc of adhesive dropped in this process, the amount actually required to be effective as an adhesive layer is approximately 20% Q, 3
cc, and the excess 80% of the adhesive is on the glass substrate 22.
24, it was thrown off by centrifugal force and discarded. In fact, removing excess adhesive from the adhered substrate in this way is one of the excellent effects of this process.

従来の前記加圧接着法等での余剰のハミ出した接着剤を
後処理により除去する多大な労力の削減が出来た。
It is possible to reduce the great amount of labor involved in removing excess adhesive that has spilled out in the conventional pressure bonding method or the like through post-processing.

尚本実施例は液晶カラーテレビ用の表示パネルの製造工
程に於ける。カラーフィルター用基板と表示用セグメン
ト電極基板の貼り合せの工程を示したが、これに限定さ
れるものではなく当技術は太陽電池の製造等信の産業上
の利用分野は広く存在する。
Note that this embodiment concerns the manufacturing process of a display panel for a liquid crystal color television. Although the process of bonding the color filter substrate and display segment electrode substrate is shown, the present invention is not limited to this, and the present technology can be used in a wide range of industrial fields of communication, such as the production of solar cells.

〔発明の幕果〕[Results of invention]

以上の説明で明らかな様忙、本発明によれば2枚以上の
複数枚のガラス基板を接着する際に、均一な接着剤層厚
が得られるので、接着後のガラス基板の平面度が良好で
、かつ余剰接着剤の被着基板外周部への付着が無く、し
かも短時間のプロセスで実現できたことは、接着コスト
を大幅に削減することが可能となり、安価な液晶カラー
テレビ用表示パネル等の提供が可能となった。
As is clear from the above explanation, according to the present invention, when bonding two or more glass substrates, a uniform adhesive layer thickness can be obtained, so the flatness of the glass substrates after bonding is good. Moreover, the fact that there is no excess adhesive adhering to the outer periphery of the substrate to be adhered, and that it was achieved in a short process time has made it possible to significantly reduce adhesive costs and create inexpensive LCD color TV display panels. It is now possible to provide the following.

【図面の簡単な説明】[Brief explanation of drawings]

第2図は従来の加圧接着法の原理を示す斜視図で、第1
図は本発明による接着法の原理を示す斜視図である。 21・・・・・・スピンナーヘッド。 1>、14.22.24・・・・・・ガラス基板、16
.26・・・・・・接着剤。
Figure 2 is a perspective view showing the principle of the conventional pressure bonding method.
The figure is a perspective view showing the principle of the adhesive method according to the present invention. 21...Spinner head. 1>, 14.22.24...Glass substrate, 16
.. 26...Adhesive.

Claims (2)

【特許請求の範囲】[Claims] (1)複数枚のガラス基板を接着剤を介して貼り合せ、
接着固定する製造方法に於いて、被着される一方のガラ
ス基板を回転可能な基台の上に載せ、該ガラス基板上に
接着剤を供給した後該接着剤上に被着される他の一方の
ガラス基板を載せ、前記基台を回転させることにより、
前記接着剤層を遠心力によって拡げることを特徴とする
ガラス基板の貼り合せ方法。
(1) Bonding multiple glass substrates via adhesive,
In the manufacturing method of adhesive fixing, one glass substrate to be adhered is placed on a rotatable base, an adhesive is supplied onto the glass substrate, and then another glass substrate to be adhered is placed on the glass substrate. By placing one glass substrate and rotating the base,
A method for bonding glass substrates, characterized in that the adhesive layer is expanded by centrifugal force.
(2)接着剤として紫外線硬化型接着剤を使用すること
を特徴とした特許請求の範囲第1項記載のガラス基板の
貼り合せ方法。
(2) The method for bonding glass substrates according to claim 1, characterized in that an ultraviolet curable adhesive is used as the adhesive.
JP60090670A 1985-04-26 1985-04-26 Bonding of glass substrate Pending JPS61251543A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60090670A JPS61251543A (en) 1985-04-26 1985-04-26 Bonding of glass substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60090670A JPS61251543A (en) 1985-04-26 1985-04-26 Bonding of glass substrate

Publications (1)

Publication Number Publication Date
JPS61251543A true JPS61251543A (en) 1986-11-08

Family

ID=14004968

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60090670A Pending JPS61251543A (en) 1985-04-26 1985-04-26 Bonding of glass substrate

Country Status (1)

Country Link
JP (1) JPS61251543A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1996036675A1 (en) * 1995-05-15 1996-11-21 Shellcase Ltd. Bonding machine
WO2002093571A3 (en) * 2001-05-14 2003-05-01 Aprilis Inc Method and apparatus for producing optical recording media with accurately parallel surfaces

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
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