JPS61246396A - Production of tiny nozzle - Google Patents

Abstract

PURPOSE:To easily produce a tiny nozzle having an outlet of a smaller thickness and a hole of an accurate diameter by electroforming by fixing the pointed tip of a die in an electrically conductive and soft metallic substrate and carrying out electroforming. CONSTITUTION:The pointed tip of a die 1 is fixed in a substrate 4 of a soft metal such as solder on a plate 5 of a hard metal such as iron under a fixed pressure, and electroforming is carried out to form an electrodeposited layer A on the die 1. At this time, an electrodeposited layer B is also formed on the substrate 4, so the thickness of the layer A is made smaller in the vicinity of the tip. Since the layers A, B intersect at an acute angle, a parting line is formed by the electroforming, the die 1 can be easily separated, and a tiny nozzle A having an outlet of a smaller thickness and a hole of an accurate diameter can be easily produced.

Description

【発明の詳細な説明】 本発明は、インクジエットノヅル等の微小ノヅルの製造
方法に関する事であり、特に電鋳法によるものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for manufacturing micro nodules such as inkjet nozzles, particularly by electroforming.

従来よりノヅルは、いろいろな方法で作られており、電
鋳によっても、流体が通る内戸のグらかさ等の特長があ
って種々の方法で製作されている。Traditionally, nozzles have been made using various methods, including electroforming, which has features such as a smooth inner door that allows fluid to pass through.

その代表例を第１図及び第２図に示す。Representative examples are shown in FIGS. 1 and 2.

先ず第１図について説明すると、先端のとがった型１の
先端に孔をあけプラスチッ゛り・ガラス等の絶縁棒又は
バイブ２を挿入した型を作り、通常の電鋳法によシ、剥
離処理等の前処理をした後、陰性につなぎこの上に銅、
ニッケル等の金属Ａを電着した後、型よシ剥離してノヅ
ルＡを得る。又第２図の方法は、先端に絶縁物を塗布す
る方法で、例えば、一定深さの焙融ワックスの中に型１
の先端を浸漬し、絶縁物３を形成した型を使用し、上記
と同様に電鋳法によりてノヅルＡを得る方法である。First, to explain Fig. 1, a hole is made at the tip of a mold 1 with a sharp tip and an insulating rod or vibrator 2 made of plastic or glass is inserted into the mold, and then the mold is molded using the usual electroforming method and peeled off. After pretreatment such as
After electrodepositing metal A such as nickel, it is peeled off from the mold to obtain nozzle A. The method shown in Figure 2 is a method in which an insulator is applied to the tip of the mold.
This method uses a mold in which the tip of the nozzle is immersed and the insulator 3 is formed, and the nozzle A is obtained by electroforming in the same manner as above.

第１図の方法では、孔径は、保証できるが、型１と絶縁
棒２とをすき間なく嵌合させる事が困難で、このすき間
にも電着し、しばしば剥離が出来なくなる事が起る。又
此の方法で数１０ミクロンの孔径のノヅルを詐る事は、
量産上不可能に近い。又第２図の方法では、絶縁物を一
定に塗布する事が困難であり、又電着の絶縁物上この張
シ出しによっても孔径が変化する欠点がある。又一般に
ノヅルの孔径の小さｂ場合、ノヅル出口の板厚もうすい
事を要求されるが、上記従来の方法では、孔の周囲は、
逆に厚くなってしまう欠点がある。In the method shown in FIG. 1, the hole diameter can be guaranteed, but it is difficult to fit the mold 1 and the insulating rod 2 without a gap, and electrodeposition occurs even in this gap, often making it impossible to peel it off. Also, using this method to fake a nozzle with a pore diameter of several tens of microns,
Almost impossible in terms of mass production. Furthermore, the method shown in FIG. 2 has the drawback that it is difficult to uniformly apply the insulator, and the pore diameter changes due to the overhang of the electrodeposited insulator. Generally, when the hole diameter of the nozzle is small, the thickness of the plate at the nozzle exit is also required to be thin, but in the above conventional method, the area around the hole is
On the other hand, it has the disadvantage of becoming thicker.

本発明の方法は、型１は単に先のとがった単純な形状の
ものを使い、ノヅル出口の板厚がうすく、且つ高精度の
孔径の微小ノヅルを電鋳によって、製作する方法である
。In the method of the present invention, a mold 1 with a simple, pointed shape is used, and a minute nozzle with a thin plate at the nozzle outlet and a highly accurate hole diameter is manufactured by electroforming.

先ず第３図につき説明すると軟金属の基板４に先端のと
がった型１を一定圧力でつきさした状態で電鋳する。こ
の時基板４にも電着Ｂするため先端ノヅル出口付近はう
すくなる。電着Ａと電着Ｂとは、鋭角で合さるため、電
鋳では、バーテングラインが出来容易に分離する。First, referring to FIG. 3, electroforming is performed with a mold 1 having a sharp tip inserted into a soft metal substrate 4 under a constant pressure. At this time, since the electrodeposition B is also applied to the substrate 4, the area near the exit of the tip nozzle becomes thin. Electrodeposition A and electrodeposition B meet at an acute angle, so in electroforming, a bartending line is created and they are easily separated.

第４図について説明すると硬金属の基板５とに軟金属４
を成る厚みに形成しンそれに同様型をつきさす方法で、
軟金属４の厚みを加減する事によシ、つきさす深さを加
減し、従って孔径をより精度良く製作するための方法で
ある。To explain FIG. 4, a hard metal substrate 5 and a soft metal 4 are connected to each other.
By forming it to a thickness of
This is a method for adjusting the depth of penetration by adjusting the thickness of the soft metal 4, thereby making the hole diameter more accurate.

第５図はフォトファプリケージｌン等により孔７をもっ
た金属板６を製作し、これに型１の先をその孔に嵌込み
同様電鋳して作るものである。In FIG. 5, a metal plate 6 with a hole 7 is manufactured by photofabrication or the like, and the tip of the mold 1 is fitted into the hole and similarly electroformed.

尚第６図に示す様に、型１は、必ずしも完全に尖った形
でなくとも良く、先端に微小の平面８をもたしても良い
。As shown in FIG. 6, the mold 1 does not necessarily have to have a completely pointed shape, and may have a minute flat surface 8 at the tip.

以下実施例を示す。Examples are shown below.

実施例１　第４図に基いて、鉄板５上に半田４を流し、
これを切削して４０μの厚 みとした。これに先端円錐角６０°を もった型１を押しつけて半田４の中 に挿入し、電鋳した所４８μφの孔を もったノヅルを得た。Example 1 Based on FIG. 4, solder 4 was poured onto the iron plate 5,
This was cut to a thickness of 40μ. A mold 1 having a cone angle of 60° at the tip was pressed onto this, inserted into the solder 4, and electroformed to obtain a nozzle with a hole of 48 μφ.

実施例２　第５図に基いて、先ず孔１をもった基板６を
ステンレス板に公知の方法 によって、孔に相当する部分にフォ トレジストを形成し、これ−ニッケ ル電鋳をして、４０μφの孔７をもつ た金属板６を作った。これに先端が 円錐状をしたとがった型１を圧着し た状態で、ニッケル電鋳Ａした所定　　　　、の厚みま
で電鋳した後１．金属板６及 び型１から剥した処、前述の孔と同 じ径の孔をもった製品が得られた。Example 2 Based on FIG. 5, first, a substrate 6 having a hole 1 is formed on a stainless steel plate by a known method to form a photoresist on the portion corresponding to the hole, and this is electroformed with nickel to form a 40 μΦ plate. A metal plate 6 with holes 7 was made. After crimping a mold 1 with a conical tip onto this, electroforming nickel A to a predetermined thickness, 1. When peeled from the metal plate 6 and the mold 1, a product having holes having the same diameter as the aforementioned holes was obtained.

本発明の方法は、このように型の製作が容易なげかりで
なく、高精度に量産が可能なノヅルの製作法を提供する
ものである。The method of the present invention provides a nozzle manufacturing method that not only facilitates mold manufacturing but also enables mass production with high precision.

【図面の簡単な説明】[Brief explanation of drawings]

第３図は、軟金属を用いた場合の断面図、第４図は、軟
金属と硬金属を重ねて用いた時の断面図、第５図は、基
板に孔を設けた実施例の断面図、第６図は、型の先端に
平旦面を設けた場合の断面図である。 符号の説明Fig. 3 is a cross-sectional view when soft metal is used, Fig. 4 is a cross-sectional view when soft metal and hard metal are used in layers, and Fig. 5 is a cross-sectional view of an example in which holes are provided in the substrate. FIG. 6 is a cross-sectional view when a flat surface is provided at the tip of the mold. Explanation of symbols

Claims (1)

【特許請求の範囲】[Claims] 先端のとがつた型の先端を導電性基板中で、何らかの方
法で遮断し、その他の部分に電鋳を施して型の周りに形
成したものを得る微小ノヅル等の製造方法。A method of manufacturing micro nozzles, etc., in which the tip of a mold with a sharp tip is blocked by some method in a conductive substrate, and the other parts are electroformed to form around the mold.