JPS6121178B2 - - Google Patents
Info
- Publication number
- JPS6121178B2 JPS6121178B2 JP10961882A JP10961882A JPS6121178B2 JP S6121178 B2 JPS6121178 B2 JP S6121178B2 JP 10961882 A JP10961882 A JP 10961882A JP 10961882 A JP10961882 A JP 10961882A JP S6121178 B2 JPS6121178 B2 JP S6121178B2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- base material
- temperature
- optical fiber
- different
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000463 material Substances 0.000 claims description 32
- 238000006243 chemical reaction Methods 0.000 claims description 16
- 239000013307 optical fiber Substances 0.000 claims description 14
- 239000011521 glass Substances 0.000 claims description 11
- 238000000034 method Methods 0.000 claims description 8
- 238000004519 manufacturing process Methods 0.000 claims description 7
- 239000002994 raw material Substances 0.000 claims description 4
- 238000001816 cooling Methods 0.000 claims description 3
- 238000000151 deposition Methods 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims 3
- 230000007062 hydrolysis Effects 0.000 claims 2
- 238000006460 hydrolysis reaction Methods 0.000 claims 2
- 239000007789 gas Substances 0.000 description 29
- 230000003472 neutralizing effect Effects 0.000 description 5
- 239000010953 base metal Substances 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- 238000009826 distribution Methods 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000010419 fine particle Substances 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 229910003902 SiCl 4 Inorganic materials 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 229910000041 hydrogen chloride Inorganic materials 0.000 description 1
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000004043 responsiveness Effects 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/0144—Means for after-treatment or catching of worked reactant gases
Description
発明の技術分野
本発明は光フアイバ用母材の製造方法の改良に
関するものである。
技術の背景
光フアイバ用母材の製造は、図に示すように反
応容器１の下方に配置された複数のノズルを有す
る酸水素炎バーナ２からガラス原料およびその屈
折率を変える屈折率制御用原料を所定の空間分布
となるよう上方に向けて吹き出させ、これを加水
分解し該酸水素炎バーナ２と対向する支持棒３の
下端部に反応によつて生成したガラス微粒子を付
着堆積させ、成長に従つて支持棒３を回転させつ
つ引き上げて光フアイバ用母材１０を得るもので
ある。
従来技術と問題点
図に示す光フアイバ用母材１０の生成過程にお
いては、該母材１０の表面、特にまさにガラス微
粒子の堆積が行なわれつつある母材下端部の母材
成長面６の表面の温度を均一に保つことが高品質
の母材を得るための非常に有効な手段となる。然
し、ガラス微粒子が堆積中の母材表面における母
材成長面６の温度は、酸水素炎バーナ２が形成す
る炎４のゆらぎ、反応容器１の外表面の外気によ
る冷却作用の変化に起因する反応容器１内部のガ
スの温度の変化、反応容器１内部のガスの流れ状
態の変化による母材１０周囲のガスの温度分布の
変化、反応容器１から排気管５を経由して外部へ
排出される排気ガス８の流量の変化等の影響を受
け変動する。従来からこの変動を一定に抑える手
段として、酸水素炎バーナ２から供給される水素
量または酸素量を操作することにより、または外
部からタングステンランプ、CO2レーザ等の熱源
を利用して直接母材成長面６の温度を制御する方
法が提案されているが、前者は炎４内で起つてい
るガス微粒子生成反応と炎の形状自体に直接影響
を与えてしまうので好ましくなく、後者について
はその影響が局部的であること、または装置とし
て組込むことに操作上の安定性、反応容器１の形
状、材質に対する制約が大きく好ましくないとい
う問題があつた。
発明の目的
本発明の目的は、反応容器内へガラス原料を吹
きつけるバーナとは別の個所から供給されるガス
（以下余剰ガスと云う）の温度を操作することに
より、反応容器内にて生成中の光フアイバ用母材
の表面温度を一定に制御することにより光フアイ
バ用母材の長手方向、すなわち生長方向の品質を
均一に維持し良質の光フアイバ用母材を得ること
にある。以下図により説明する。
発明の実施例
本発明は、図において反応容器１内へ供給され
る余剰ガス７の温度を加熱器９によつて操作する
ことにより母材成長面６の温度を一定に制御する
ものである。本発明の方法によれば母材成長面６
の温度を炎４をして、または母材成長面６の周辺
から母材１０の熱伝導によつて間接的に制御でき
るため、先に述べた従来の方法による欠点は存在
しない。図において１１ａ乃至１１ｄは酸水素炎
バーナ２に酸素、水素および原料ガス、さらに不
活性ガス等を供給するポートである。１２は排気
ガス８に含まれる主として塩化水素ガスを中和す
るための洗浄塔であり、１３は中和液を噴霧する
ノズル、１４は中和液をノズル１３へ送るポン
プ、１５は中和液の受槽である。１６は排気フア
ンで排気ガス８はもとより余剰ガス７もすべて該
排気フアン１６に吸引される。１７はチヤツクで
支持棒３を回転させつつガラス微粒子の堆積速度
に合わせて上方に移動する。１８は母材成長面６
の温度を検出する温度計であり、通常は赤外放射
温度計を用いる。１９は制御回路で加熱器９の出
力パワを、温度計１８の出力値と設定値との偏差
が零になるよう制御する。なお加熱器９の熱慣性
を小さくすることは制御の応答性を早めるうえで
重要であるが構造上限度がある。従つて応答の非
常に早い制御系が必要な場合には図の破線内に示
す構成による方法が有利である。加熱器９と反応
容器１を接続する配管２０の途中にガスの合流部
２１を設け、加熱器９を通過する余剰ガス７ａと
加熱器９を通らない余剰ガス７ｂを合流させる。
余剰ガス７ａと７ｂの混合比を、余剰ガス７ｂの
配管中に設けた流量調節弁２２の開度によつて変
えることにより、結果的に反応容器１内に流入す
る余剰ガス７の温度を制御する。２３は流量調節
弁２２を駆動するモータ、２４は余剰ガス７ａと
７ｂを効率的に混合するアジテータである。この
方法によれば応答の非常に早い制御系を実現でき
ることは明らかである。
次に母材成長面６の温度制御を実施するに際し
て、破線部内の構成を用いない場合（CASE
Ａ）と、該構成を用いた場合（CASE Ｂ）及び
全く温度制御を実施しない場合（CASE Ｃ）の
３条件で光フアイバ用母材を製造した結果を表に
示す。表は品質の安定性を帯域特性で示すととも
に、参考として各CASEにおける母材成長面６の
温度変動幅を示す。余剰ガス７，７ａ，７ｂは空
気を用いた。
TECHNICAL FIELD OF THE INVENTION The present invention relates to improvements in a method for manufacturing optical fiber preforms. Background of the Technology As shown in the figure, the production of the base material for optical fiber is carried out from an oxyhydrogen flame burner 2 having a plurality of nozzles arranged below a reaction vessel 1 to a raw material for glass and a raw material for controlling the refractive index to change its refractive index. is blown upward in a predetermined spatial distribution, hydrolyzed, and the glass fine particles generated by the reaction are deposited on the lower end of the support rod 3 facing the oxyhydrogen flame burner 2, and the glass particles are grown. Accordingly, the support rod 3 is rotated and pulled up to obtain the optical fiber base material 10. Prior Art and Problems In the production process of the optical fiber base material 10 shown in the figure, the surface of the base material 10, particularly the surface of the base material growth surface 6 at the lower end of the base material where glass fine particles are being deposited. Maintaining a uniform temperature is a very effective means of obtaining a high quality base material. However, the temperature of the base material growth surface 6 on the base material surface where the glass particles are being deposited is due to fluctuations in the flame 4 formed by the oxyhydrogen flame burner 2 and changes in the cooling effect of the outside air on the outer surface of the reaction vessel 1. Changes in the temperature of the gas inside the reaction vessel 1, changes in the temperature distribution of the gas around the base material 10 due to changes in the flow state of the gas inside the reaction vessel 1, and changes in the temperature distribution of the gas around the base material 10 due to changes in the gas flow state inside the reaction vessel 1; It fluctuates under the influence of changes in the flow rate of exhaust gas 8, etc. Conventionally, as a means to keep this fluctuation constant, by manipulating the amount of hydrogen or oxygen supplied from the oxyhydrogen flame burner 2, or by using an external heat source such as a tungsten lamp or CO 2 laser, it is possible to directly control the base material. A method of controlling the temperature of the growth surface 6 has been proposed, but the former is undesirable because it directly affects the gas particle generation reaction occurring within the flame 4 and the shape of the flame itself, while the latter is unfavorable. There is a problem that the reaction is localized, or that it is undesirable to incorporate it into a device because there are significant restrictions on operational stability, the shape of the reaction vessel 1, and the material. Purpose of the Invention The purpose of the present invention is to control the temperature of gas (hereinafter referred to as surplus gas) supplied from a location other than the burner that blows glass raw materials into the reaction container. The purpose of the present invention is to maintain uniform quality of the optical fiber base material in the longitudinal direction, that is, the growth direction, by controlling the surface temperature of the optical fiber base material to obtain a high-quality optical fiber base material. This will be explained below using figures. Embodiments of the Invention In the present invention, the temperature of the base material growth surface 6 is controlled to be constant by controlling the temperature of the surplus gas 7 supplied into the reaction vessel 1 using a heater 9 as shown in the figure. According to the method of the present invention, the base material growth surface 6
The disadvantages of the conventional methods mentioned above do not exist because the temperature of the base metal 10 can be controlled indirectly by the flame 4 or by heat conduction through the base metal 10 from the vicinity of the base metal growth surface 6. In the figure, 11a to 11d are ports for supplying oxygen, hydrogen, source gas, and inert gas to the oxyhydrogen flame burner 2. 12 is a cleaning tower for neutralizing mainly hydrogen chloride gas contained in the exhaust gas 8; 13 is a nozzle that sprays a neutralizing liquid; 14 is a pump that sends the neutralizing liquid to the nozzle 13; 15 is a neutralizing liquid It is a receiving tank. 16 is an exhaust fan, and not only the exhaust gas 8 but also the excess gas 7 are all sucked into the exhaust fan 16. Reference numeral 17 rotates the support rod 3 with a chuck and moves it upward in accordance with the deposition rate of the glass particles. 18 is the base material growth surface 6
It is a thermometer that detects the temperature of a person, and usually an infrared radiation thermometer is used. A control circuit 19 controls the output power of the heater 9 so that the deviation between the output value of the thermometer 18 and the set value becomes zero. Although it is important to reduce the thermal inertia of the heater 9 in order to speed up control responsiveness, there is a structural upper limit. Therefore, when a control system with very quick response is required, the method using the configuration shown within the broken line in the figure is advantageous. A gas merging section 21 is provided in the middle of a pipe 20 connecting the heater 9 and the reaction vessel 1, and surplus gas 7a passing through the heater 9 and surplus gas 7b not passing through the heater 9 are merged.
By changing the mixing ratio of the surplus gases 7a and 7b by changing the opening degree of the flow rate control valve 22 provided in the pipe for the surplus gas 7b, the temperature of the surplus gas 7 flowing into the reaction vessel 1 is controlled as a result. do. 23 is a motor that drives the flow control valve 22, and 24 is an agitator that efficiently mixes the surplus gases 7a and 7b. It is clear that this method makes it possible to realize a control system with very quick response. Next, when controlling the temperature of the base material growth surface 6, if the configuration inside the broken line is not used (CASE
The table shows the results of manufacturing optical fiber base materials under three conditions: A), when this configuration was used (CASE B), and when no temperature control was performed at all (CASE C). The table shows the stability of quality in terms of band characteristics, and also shows the temperature fluctuation range of the base material growth surface 6 in each CASE for reference. Air was used as the surplus gases 7, 7a, and 7b.
【表】
なお表中CASE Ａ、Ｂにおいて余剰空気の反
応容器入口での温度は20乃至50℃を示し、CASE
Ａ、Ｂ、Ｃにおいて余剰空気の量は50／分であ
つた。また次の条件はCASE Ａ、Ｂ、Ｃにおい
て同一とした。
(1) マツフル形状：300mmO.D×800mmHeight
(2) バーナ供給ガス：H2、４／分、O2、７
／分、Ar；２／分、SiCl4；1.7ｇ／分、
GeCl4；0.3ｇ／分
(3) 母材形状：50mmO.D.×400mmLength
(4) 成長速度：0.5gr／分
発明の効果
以上述べたように本発明は生成中の母材のまさ
に粒状ガラスの堆積しつつある部分またはその近
傍の表面温度を、ガラス材料を吹きつけるバーナ
の設置個所とは異なる個所から余剰ガスを供給
し、該余剰ガスの温度を操作して一定温度に制御
することにより、安定な操作で光フアイバ用母材
の成長方向の品質を均一に維持することができ、
良質の光フアイバ用母材を得ることができその効
果顕著である。[Table] In CASE A and B in the table, the temperature of excess air at the inlet of the reaction vessel is 20 to 50℃, and CASE
In A, B, and C, the amount of excess air was 50/min. In addition, the following conditions were the same for CASE A, B, and C. (1) Matsuful shape: 300mm OD × 800mm Height (2) Burner supply gas: H 2 , 4/min, O 2 , 7
/min, Ar; 2/min, SiCl 4 ; 1.7g/min,
GeCl 4 ; 0.3g/min( 3 ) Base material shape: 50mm OD By supplying surplus gas from a location different from the location where the burner that blows the glass material is installed, and manipulating the temperature of the surplus gas to control the surface temperature of the part where it is being deposited or its vicinity to a constant temperature, Through stable operation, the quality of the base material for optical fibers can be maintained uniformly in the growth direction.
A high-quality base material for optical fiber can be obtained, and the effect is remarkable.
図は本発明の光フアイバ用母材の製造方法を示
す概略図である。
１……反応容器、２……酸水素炎バーナ、３…
…支持棒、４……炎、５……排気管、６……母材
成長面、７，７ａ，７ｂ，……余剰ガス、８……
排気ガス、９……加熱器、１０……母材、１１ａ
乃至１１ｄ……ポート、１２……洗浄塔、１３…
…中和液噴霧用ノズル、１４……ポンプ、１５…
…受槽、１６……排気フアン、１７……チヤツ
ク、１８……温度計、１９……制御回路、２０…
…配管、２１……ガス合流部、２２……流量調節
弁、２３……モータ、２４……アジテータ。
The figure is a schematic diagram showing a method for manufacturing an optical fiber base material of the present invention. 1... Reaction vessel, 2... Oxyhydrogen flame burner, 3...
... Support rod, 4 ... Flame, 5 ... Exhaust pipe, 6 ... Base metal growth surface, 7, 7a, 7b, ... Surplus gas, 8 ...
Exhaust gas, 9... Heater, 10... Base material, 11a
to 11d...port, 12...washing tower, 13...
... Neutralizing liquid spray nozzle, 14... Pump, 15...
...Receiving tank, 16...Exhaust fan, 17...Chuck, 18...Thermometer, 19...Control circuit, 20...
... Piping, 21 ... Gas confluence section, 22 ... Flow control valve, 23 ... Motor, 24 ... Agitator.
Claims (1)
せて火炎加水分解し、火炎加水分解によつて生成
する粒状ガラスを棒状に堆積させて多孔質の光フ
アイバ用母材を反応容器内で製造し、前記生成中
の母材のまさに粒状ガラスの堆積しつつある部分
または部分の近傍の表面温度を検出し、 表面温度を前記酸水素バーナの噴出個所とは異
なる個所から供給するガスに温度制御をかけるこ
とによつて前記表面温度を制御する光フアイバ用
母材の製造方法において、 前記噴出個所とは異なる個所から供給するガス
に温度制御をかける方法は、 前記ガスを加熱または冷却する手段と、 前記ガスを加熱または冷却する手段と前記反応
容器とを接続する配管の途中から前記ガスとは異
なるガスを合流する手段と、 前記異なるガスの流量を調節する手段 とからなることを特徴とする光フアイバ用母材の
製造方法。[Scope of Claims] 1. Glass raw material gas is ejected from an oxyhydrogen burner to undergo flame hydrolysis, and granular glass produced by the flame hydrolysis is deposited in a rod shape to react with a porous optical fiber base material. Produced in a container, detecting the surface temperature of the part or the vicinity of the part where the granular glass is just depositing on the base material being produced, and supplying the surface temperature from a part different from the spouting part of the oxyhydrogen burner. In the method for manufacturing an optical fiber base material in which the surface temperature is controlled by temperature-controlling the gas, the method of temperature-controlling the gas supplied from a location different from the ejection location includes heating or heating the gas. a means for cooling the gas; a means for merging a gas different from the gas from the middle of a pipe connecting the means for heating or cooling the gas and the reaction vessel; and a means for adjusting the flow rate of the different gas. A method for producing a base material for optical fiber, characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10961882A JPS593033A (en) | 1982-06-25 | 1982-06-25 | Manufacture of base material for optical fiber |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10961882A JPS593033A (en) | 1982-06-25 | 1982-06-25 | Manufacture of base material for optical fiber |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS593033A JPS593033A (en) | 1984-01-09 |
| JPS6121178B2 true JPS6121178B2 (en) | 1986-05-26 |
Family
ID=14514853
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10961882A Granted JPS593033A (en) | 1982-06-25 | 1982-06-25 | Manufacture of base material for optical fiber |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS593033A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0372283U (en) * | 1989-11-10 | 1991-07-22 | ||
| WO2003062159A1 (en) * | 2002-01-24 | 2003-07-31 | Sumitomo Electric Industries, Ltd. | Method of manufacturing glass particulate sedimentary body, and method of manufacturing glass base material |
-
1982
- 1982-06-25 JP JP10961882A patent/JPS593033A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS593033A (en) | 1984-01-09 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4062665A (en) | Continuous optical fiber preform fabrication method | |
| US3957474A (en) | Method for manufacturing an optical fibre | |
| US4367085A (en) | Method of fabricating multi-mode optical fiber preforms | |
| JP3521681B2 (en) | Manufacturing method of optical fiber preform | |
| JP4043768B2 (en) | Manufacturing method of optical fiber preform | |
| EP0231022B1 (en) | Apparatus for the production of porous preform of optical fiber | |
| CN101492244B (en) | Apparatus and method for producing prefabricated stick of optical fiber | |
| JPS6269010A (en) | Burner device and manufacture of glass product | |
| US4414008A (en) | Process for producing optical fiber preform | |
| JPH10245242A (en) | Apparatus for producing porous glass base material for optical fiber | |
| JPS6121178B2 (en) | ||
| KR20000052506A (en) | Method and apparatus for forming an optical fiber preform by combustionless hydrolysis | |
| KR20040001769A (en) | Outside vapor deposition apparatus used for making optical fiber | |
| JPH02102146A (en) | Production of glass fine particle deposit | |
| US5207813A (en) | Method for producing glass article | |
| JP5655418B2 (en) | Method and apparatus for producing porous glass base material | |
| JPS6081035A (en) | Manufacture of base material for optical fiber | |
| JPH0971430A (en) | Production of preformed material for optical fiber and production unit therefor | |
| RU2245853C2 (en) | Method of production of a porous billet of glass (alternatives) | |
| JPS62162637A (en) | Production of optical fiber preform | |
| JPS63147841A (en) | Production of optical fiber base material | |
| KR101556635B1 (en) | Constant weight powder feeding equipment for manufacturing quartz glass ingot | |
| JPH05319849A (en) | Production of silica porous preform | |
| JPS63307137A (en) | Production of glass preform for optical fiber | |
| JP3818567B2 (en) | Method for producing synthetic quartz glass ingot |