JPS6120561U - Vacuum film forming equipment - Google Patents

Vacuum film forming equipment

Info

Publication number
JPS6120561U
JPS6120561U JP10126184U JP10126184U JPS6120561U JP S6120561 U JPS6120561 U JP S6120561U JP 10126184 U JP10126184 U JP 10126184U JP 10126184 U JP10126184 U JP 10126184U JP S6120561 U JPS6120561 U JP S6120561U
Authority
JP
Japan
Prior art keywords
vacuum
film forming
vacuum film
forming equipment
gas introduction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10126184U
Other languages
Japanese (ja)
Inventor
健二 古田
好治 山口
Original Assignee
株式会社日立製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社日立製作所 filed Critical 株式会社日立製作所
Priority to JP10126184U priority Critical patent/JPS6120561U/en
Publication of JPS6120561U publication Critical patent/JPS6120561U/en
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

図は本考案の一実施例の真空槽の真空ゲージ取付部の断
面図である。 １・・・真空槽内、２・・・プラズマ回り込み防止板、
３・・・ガス導入口、４・・・真空槽壁、５・・・電離
真空計本体、６・・・イオンコレクタ、７・・・グリッ
ド、８・・・フィラメント。The figure is a sectional view of a vacuum gauge attachment part of a vacuum chamber according to an embodiment of the present invention. 1... Inside the vacuum chamber, 2... Plasma wraparound prevention plate,
3... Gas inlet, 4... Vacuum chamber wall, 5... Ionization vacuum gauge body, 6... Ion collector, 7... Grid, 8... Filament.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 真空排気系、ガス導入系、真空槽及び電源等より成り、
プラズマ放電現象を利用して薄膜を作成する真空成膜装
置において、プラズマ放電中の真空度の正確な測定を可
能にするために真空ゲージ取付部もしくは真空ゲージ本
体のガス導入部にプラズマの回り込みを防ぐ防止板又は
防止網を設けた事を特徴とする真空成膜装置。Consists of vacuum exhaust system, gas introduction system, vacuum chamber, power supply, etc.
In vacuum film forming equipment that uses plasma discharge phenomenon to create thin films, in order to enable accurate measurement of the degree of vacuum during plasma discharge, the plasma wraps around the vacuum gauge attachment part or the gas introduction part of the vacuum gauge body. A vacuum film forming apparatus characterized by being provided with a prevention plate or a prevention net.
JP10126184U 1984-07-06 1984-07-06 Vacuum film forming equipment Pending JPS6120561U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10126184U JPS6120561U (en) 1984-07-06 1984-07-06 Vacuum film forming equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10126184U JPS6120561U (en) 1984-07-06 1984-07-06 Vacuum film forming equipment

Publications (1)

Publication Number Publication Date
JPS6120561U true JPS6120561U (en) 1986-02-06

Family

ID=30660700

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10126184U Pending JPS6120561U (en) 1984-07-06 1984-07-06 Vacuum film forming equipment

Country Status (1)

Country Link
JP (1) JPS6120561U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010276597A (en) * 2009-04-09 2010-12-09 Canon Anelva Corp Cold cathode ionization vacuum gauge, vacuum processing apparatus including the same, and discharge starting auxiliary electrode

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010276597A (en) * 2009-04-09 2010-12-09 Canon Anelva Corp Cold cathode ionization vacuum gauge, vacuum processing apparatus including the same, and discharge starting auxiliary electrode

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