JPS6120561U - Vacuum film forming equipment - Google Patents
Vacuum film forming equipmentInfo
- Publication number
- JPS6120561U JPS6120561U JP10126184U JP10126184U JPS6120561U JP S6120561 U JPS6120561 U JP S6120561U JP 10126184 U JP10126184 U JP 10126184U JP 10126184 U JP10126184 U JP 10126184U JP S6120561 U JPS6120561 U JP S6120561U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- film forming
- vacuum film
- forming equipment
- gas introduction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measuring Fluid Pressure (AREA)
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
図は本考案の一実施例の真空槽の真空ゲージ取付部の断
面図である。
1・・・真空槽内、2・・・プラズマ回り込み防止板、
3・・・ガス導入口、4・・・真空槽壁、5・・・電離
真空計本体、6・・・イオンコレクタ、7・・・グリッ
ド、8・・・フィラメント。The figure is a sectional view of a vacuum gauge attachment part of a vacuum chamber according to an embodiment of the present invention. 1... Inside the vacuum chamber, 2... Plasma wraparound prevention plate,
3... Gas inlet, 4... Vacuum chamber wall, 5... Ionization vacuum gauge body, 6... Ion collector, 7... Grid, 8... Filament.
Claims (1)
プラズマ放電現象を利用して薄膜を作成する真空成膜装
置において、プラズマ放電中の真空度の正確な測定を可
能にするために真空ゲージ取付部もしくは真空ゲージ本
体のガス導入部にプラズマの回り込みを防ぐ防止板又は
防止網を設けた事を特徴とする真空成膜装置。Consists of vacuum exhaust system, gas introduction system, vacuum chamber, power supply, etc.
In vacuum film forming equipment that uses plasma discharge phenomenon to create thin films, in order to enable accurate measurement of the degree of vacuum during plasma discharge, the plasma wraps around the vacuum gauge attachment part or the gas introduction part of the vacuum gauge body. A vacuum film forming apparatus characterized by being provided with a prevention plate or a prevention net.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10126184U JPS6120561U (en) | 1984-07-06 | 1984-07-06 | Vacuum film forming equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10126184U JPS6120561U (en) | 1984-07-06 | 1984-07-06 | Vacuum film forming equipment |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6120561U true JPS6120561U (en) | 1986-02-06 |
Family
ID=30660700
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10126184U Pending JPS6120561U (en) | 1984-07-06 | 1984-07-06 | Vacuum film forming equipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6120561U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010276597A (en) * | 2009-04-09 | 2010-12-09 | Canon Anelva Corp | Cold cathode ionization vacuum gauge, vacuum processing apparatus including the same, and discharge starting auxiliary electrode |
-
1984
- 1984-07-06 JP JP10126184U patent/JPS6120561U/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010276597A (en) * | 2009-04-09 | 2010-12-09 | Canon Anelva Corp | Cold cathode ionization vacuum gauge, vacuum processing apparatus including the same, and discharge starting auxiliary electrode |
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