JPS61202064U - - Google Patents
Info
- Publication number
- JPS61202064U JPS61202064U JP8485385U JP8485385U JPS61202064U JP S61202064 U JPS61202064 U JP S61202064U JP 8485385 U JP8485385 U JP 8485385U JP 8485385 U JP8485385 U JP 8485385U JP S61202064 U JPS61202064 U JP S61202064U
- Authority
- JP
- Japan
- Prior art keywords
- photoelectric switch
- optical sensors
- diode
- signal
- judgment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims description 4
- 238000007689 inspection Methods 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Description
第１図は本考案の一実施例を示す構成図、第２
図は、第１図の判定出力回路の回路図、第３図、
第４図は、従来の捺印検査装置の構造図である。
１ａ，１ｂ…光センサ、２…光電スイツチ、３
ａ…判定出力回路、４…ダイオード、６…光セン
サ固定治具。
Fig. 1 is a configuration diagram showing one embodiment of the present invention;
The figure shows a circuit diagram of the judgment output circuit in Fig. 1, Fig. 3,
FIG. 4 is a structural diagram of a conventional seal inspection device. 1a, 1b... Optical sensor, 2... Photoelectric switch, 3
a... Judgment output circuit, 4... Diode, 6... Optical sensor fixing jig.
Claims (1)
た２方向から検査する２個の光センサと、前記ダ
イオードの有無を検出する光電スイツチと、前記
２個の光センサの出力信号を組み合わせ、かつ前
記光電スイツチの信号と同期して判定信号を出力
する判定出力回路とを有することを特徴とする半
導体素子の捺印検査装置。 Two optical sensors that inspect the markings on the surface of the axial diode from two different directions, a photoelectric switch that detects the presence or absence of the diode, and a photoelectric switch that combines the output signals of the two optical sensors and A seal inspection device for a semiconductor device, comprising a judgment output circuit that outputs a judgment signal in synchronization with the signal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8485385U JPS61202064U (en) | 1985-06-05 | 1985-06-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8485385U JPS61202064U (en) | 1985-06-05 | 1985-06-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61202064U true JPS61202064U (en) | 1986-12-18 |
Family
ID=30634713
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8485385U Pending JPS61202064U (en) | 1985-06-05 | 1985-06-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61202064U (en) |
-
1985
- 1985-06-05 JP JP8485385U patent/JPS61202064U/ja active Pending