JPS61151407A - Non-contacting diameter gauge - Google Patents

Non-contacting diameter gauge

Info

Publication number
JPS61151407A
JPS61151407A JP27341184A JP27341184A JPS61151407A JP S61151407 A JPS61151407 A JP S61151407A JP 27341184 A JP27341184 A JP 27341184A JP 27341184 A JP27341184 A JP 27341184A JP S61151407 A JPS61151407 A JP S61151407A
Authority
JP
Japan
Prior art keywords
image sensor
fan
bright
light
boundary line
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP27341184A
Other languages
Japanese (ja)
Inventor
Yoshiyuki Suda
良幸 須田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP27341184A priority Critical patent/JPS61151407A/en
Publication of JPS61151407A publication Critical patent/JPS61151407A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/08—Measuring arrangements characterised by the use of optical techniques for measuring diameters

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE:To effect non-contacting, high-accuracy and real-time measurement of a specimen of circular cross section, by calculating a diameter of the specimen by a calculating means based upon the bright and dark border line in an projected image with a beam of light from the 2 sources of different wave lengths as a fan-suaped beam. CONSTITUTION:When light of fan-shaped beams 5a, 5b is irradiated to a speci men 1 of circular cross-section, a projected image consisting of a bright part by the irradiation and a dark part shielded by the specimen 1 are formed on the plane on which an image sensor is place. The image sensor 6 detects bright- and-dark border lines XG1, XG2 and XR, XG2 in this projection image. The infor mation is as follows: distance L, from the zero point 0 to imaginary point light source Pc corresponding to the fan-shaped beam 5a, distance L2 between imagi nary point light sources PG, PR corresponding to the fan-shaped beams 5a, 5b, distance W of imaginary point light sources PG, PR and image sensor 6 surface, and output (information on bright and dark border line) from the image sensor 6 are given to the CUP8 and the radius R is obtained by calculation.

Description

【発明の詳細な説明】 〔発明の技術分野〕 本発明は、円形状断面を有する物体の径を光学的手段に
より非−接触で測定する非接触径測定装置に圏する。DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to a non-contact diameter measuring device that non-contactly measures the diameter of an object having a circular cross section by optical means.

（発明の技術的背景とその問題点） 非接触的な手段により径を測定することは、ＮＣ（数値
制ｔＩｌ）加工機における自動制御、あるいは手動によ
る加工において時々刻々と測定データをフィードバック
して加工する場合等において重要である。例えば電線等
の赤熱の連続圧延加工機において、線の形状を自動制御
する場合には接触式の径測定は不可能であり、非接触径
測定装置が不可欠となる。機械加工で最も多いものの一
つは円形状断面を有する物体の加工であり、そのような
物体は電線の他、グラスファイバ、化学ＩＩｉ。(Technical background of the invention and its problems) Measuring the diameter by non-contact means is possible through automatic control in NC (numerical control) processing machines or by constantly feeding back measurement data during manual processing. This is important when processing. For example, in a red-hot continuous rolling machine for electric wires, etc., when automatically controlling the shape of the wire, contact diameter measurement is impossible, and a non-contact diameter measurement device is essential. One of the most common machining processes is the processing of objects with circular cross sections, such as electric wires, glass fibers, chemical IIi.

エンジンのシャフト、＃４造用鉄柱、くぎのような構造
用加工部材、鉛筆、高速タービンのシャフト。Engine shafts, #4 steel columns, structural workpieces like nails, pencils, and high-speed turbine shafts.

電気配線用部材等、枚挙に事欠かない。There is no shortage of materials for electrical wiring, etc.

これらの円形状断面を有する物体の加工では、主として
２つの観点から高精度の非接触径測定装置が要求される
。第１はタービン、モータ、エンジンのシャフトのよう
に、真円度が要求される場合である。真円度が悪いと変
形破壊という重大な結果を招くため、寸法精度も要求さ
れるわけである。第２は電線に代表される線材であり、
加工時の測定精度が悪い場合は強度の点からマージンを
考慮する必要があるため、必要以上に径を大きく設計す
る必要がある。しかし精度が上がれば必要強度等を満た
す最小寸法で自動加工ができ、たとえ０．１ｍ程度の減
少であってもこのような量産部材では最終的に大幅なコ
ストダウンにつながる。Machining these objects having a circular cross section requires a highly accurate non-contact diameter measuring device mainly from two viewpoints. The first is when roundness is required, such as in the shafts of turbines, motors, and engines. Dimensional accuracy is also required because poor roundness can lead to serious consequences such as deformation and failure. The second is wire rods, typified by electric wires.
If the measurement accuracy during processing is poor, it is necessary to consider the margin from the viewpoint of strength, so it is necessary to design the diameter to be larger than necessary. However, if the precision improves, it will be possible to automatically process the minimum size that satisfies the required strength, etc., and even a reduction of about 0.1 m will ultimately lead to a significant cost reduction in mass-produced parts like this.

このような用途に使用される高精度非接触径測定装置で
は、被測定物体の多様性から、径の測定範囲については
１００μ雇オーダから数十α、精度については１０μｍ
オーダが要求される。しかしながら、現状ではこのよう
な仕様を満たす非接触径測定装置はなく、実際は加工物
の完成後に測定を行ない、そのデータを自動加工機や製
造システムにフィードバックするという方法が一般的で
ある。Due to the variety of objects to be measured, high-precision non-contact diameter measuring devices used for such applications have a diameter measurement range of 100 μm to several tens of μm, and an accuracy of 10 μm.
An order is requested. However, at present, there is no non-contact diameter measuring device that meets these specifications, and in reality, the common method is to measure the workpiece after it is completed and feed the data back to an automatic processing machine or manufacturing system.

比較的高精度の径測定が可能な非接触径測定装置として
、例えばレーザビームを用いて被測定物体上をリニアス
キャンし、レーザ光源と反対側に対向して設置したイメ
ージセンサにより投影像を検出して、投影像の被測定物
体による影の部分の寸法から径を求める光学式の径測定
装置が考えられているが、スキャン時間がかかる関係で
リアルタイム測定ができないため、前述のように時々刻
々と測定データをフィードバックして加工するというこ
とは困難であった。また、スキャンのためにレーザ光源
の可肋磯構が必要となる等、装置が＊連化するという欠
点もあった。As a non-contact diameter measurement device that can measure diameters with relatively high precision, for example, a laser beam is used to linearly scan the object to be measured, and the projected image is detected by an image sensor installed on the opposite side of the laser light source. Therefore, an optical diameter measuring device has been considered that calculates the diameter from the dimension of the shadow part of the object to be measured in the projected image, but since real-time measurement is not possible due to the scanning time, it is necessary to measure the diameter from time to time as mentioned above. It was difficult to feed back and process the measured data. In addition, there was also the drawback that the device was complicated, such as requiring a ribbed rock structure for the laser light source for scanning.

〔発明の目的） 本発明の目的は、被測定物体に接することなく、高精度
に、かつリアルタイムで径の測定ができ、しかも複雑な
機械的可動部分が不要で構成が簡単な非接触径測定装置
を提供することにある。[Object of the Invention] The object of the present invention is to provide non-contact diameter measurement that can measure the diameter with high precision and in real time without touching the object to be measured, and that does not require complicated mechanical moving parts and has a simple configuration. The goal is to provide equipment.

〔発明の概要〕[Summary of the invention]

本発明に係る非接触径測定装置はこの目的を達成するた
め、少なくとも２つの光源と、これらの光源からの光を
ファン状ビームとして、円形状断面を有する被測定物体
に対し、該ビームのファン状の広がり範囲内に被測定物
体の断面が含まれるように照射するレンズ系と、これら
ファン状ビームの光照射による投影像が形成される位置
に配置されたイメージセンサと、このイメージセンサの
出力を受け該イメージセンサ上の前記各ファン状ビーム
の光に基く投影像における明暗境界線の位置に基いて前
記被測定物体の径を算出する演算手段とを備えたことを
特徴とする。In order to achieve this objective, the non-contact diameter measuring device according to the present invention includes at least two light sources, and the light from these light sources is made into a fan-shaped beam, and the fan-shaped beam of the beam is applied to an object to be measured having a circular cross section. A lens system that irradiates the object to be measured so that the cross section of the object is included within the fan-shaped spread range, an image sensor that is placed at a position where a projected image is formed by the irradiation of these fan-shaped beams, and the output of this image sensor. and calculating means for calculating the diameter of the object to be measured based on the position of the bright/dark boundary line in the projected image based on the light of each of the fan-shaped beams on the image sensor.

ここで、上記少なくとも２つの光源として波長の異なる
光をそれぞれ発生するものを用いれば、イメージセンサ
はこれらの光源からのファン状ビームの光を波長を区別
して検出することにより、各ファン状ビームの光に基く
投影像における明暗境界線の位置を独立して検出するこ
とができる。Here, if the above-mentioned at least two light sources each generate light of different wavelengths, the image sensor detects the fan-shaped beams from these light sources by distinguishing the wavelengths, thereby detecting each fan-shaped beam. The position of the bright/dark boundary line in the projected image based on light can be independently detected.

一方、イメージセンサについては単純な１列、または使
用する光の各波長に対応した少なくとも２列の一次元イ
メージセンサを用意し、これらを明暗境界線と直交する
方向に沿って配置してもよいが、長手方向を明暗境界線
の方向に平行に配置した一次元イメージセンサを明暗境
界線と直交する方向に複数個配列したものとすれば、明
暗境界線をさらに高精度に検出することができる。その
場合、長手方向を明暗境界線の方向に平行に配置した一
次元イメージセンサを明暗境界線と直交する方向に複数
個配列すると同時に、明暗境界線の方向にも千鳥状に複
数列配列することにより、明暗境界線を連続的に検出す
ることも可能となる。On the other hand, as for the image sensor, one simple row or at least two rows of one-dimensional image sensors corresponding to each wavelength of light to be used may be prepared, and these may be arranged along the direction perpendicular to the bright/dark boundary line. However, by arranging multiple one-dimensional image sensors whose longitudinal direction is parallel to the bright/dark boundary line in a direction perpendicular to the bright/dark boundary line, the bright/dark boundary line can be detected with even higher precision. . In that case, a plurality of one-dimensional image sensors whose longitudinal direction is arranged parallel to the direction of the bright/dark boundary line should be arranged in a direction perpendicular to the bright/dark boundary line, and at the same time, they should be arranged in multiple rows in a staggered manner in the direction of the bright/dark boundary line. This also makes it possible to continuously detect the bright/dark boundary line.

〔発明の効果〕〔Effect of the invention〕

本発明によれば、光学的な手段により円形状断面を有す
る被測定物体の径を非接触で測定することができ、被測
定物体にセンサを接触させられない加工機等での径測定
に極めて有効である。また、高熱物体のような接触が不
可能な物体のほか、弾性を有する物体等、外力によって
容易に変形するような物体の測定にも有効である。測定
精度に関しては、イメージセンサの解像度にも依存する
が、１０μｎオ一ダ程度のＭ度を得ることも可能である
。According to the present invention, the diameter of an object to be measured having a circular cross section can be measured non-contact by optical means, and is extremely suitable for diameter measurement in processing machines etc. where a sensor cannot be brought into contact with the object to be measured. It is valid. It is also effective for measuring objects that cannot be touched, such as high-temperature objects, as well as objects that are easily deformed by external forces, such as elastic objects. Regarding the measurement accuracy, it is possible to obtain an M degree of the order of 10 μm, although it depends on the resolution of the image sensor.

また、少なくとも２つの光源として波長の異なる光を発
生するものを用いたり、あるいはそれらの光源を順次駆
動させるようにすることによって、少なくとも２つのフ
ァン状ビームの光の基く投影像における明暗境界線の位
置をイメージセンサ上で同時に、あるいはほぼ同時にそ
れぞれ独立して検出できるので、リアルタイム測定が可
能である。In addition, by using at least two light sources that generate light of different wavelengths, or by driving these light sources in sequence, it is possible to improve the contrast between brightness and darkness in the projected image based on the light of at least two fan-shaped beams. Real-time measurement is possible because the positions can be detected simultaneously or almost simultaneously and independently on the image sensor.

従って、時々刻々変化する測定結果を加工機等にフィー
ドバックしながら加工物の形状を自動制御するといった
、従来困難とされていた制御を実現することができる。Therefore, it is possible to realize control that has been considered difficult in the past, such as automatically controlling the shape of a workpiece while feeding back measurement results that change from time to time to a processing machine or the like.

ざらに、本発明において光源は単に静止した状態で被測
定物体にファン状ビームの光を照射すればよく、スキャ
ンは必要ないので、機械的可動機構のような複雑な機構
が不要となり、装置構成を単純化できるという利点があ
る。In general, in the present invention, the light source simply irradiates the object to be measured with a fan-shaped beam of light in a stationary state, and scanning is not necessary, so a complicated mechanism such as a mechanical movable mechanism is not required, and the device configuration can be simplified. It has the advantage that it can be simplified.

〔発明の実施例〕[Embodiments of the invention]

第１図は本発明の一実施例に係る非接触径測定装置の概
略的構成を示したものである。図において、被測定物体
１は円形状断面を有する物体であり、装置本体２を貫通
して配置される。装置本体２の側壁上に例えば１０μｍ
程度のビーム径のレーザ光を発光する２つのレーザ光［
３ａ、３ｂと、これらのレーザ光［３ａ、３ｂからの光
を幅（厚み）が１０μ乳程度、広がり角が被測定物体１
の断面方向を十分にカバーできる程度に大きいファン状
ビーム５ａ、５ｂにするための光学系４ａ。FIG. 1 shows a schematic configuration of a non-contact diameter measuring device according to an embodiment of the present invention. In the figure, an object to be measured 1 is an object having a circular cross section, and is arranged to penetrate through a main body 2 of the apparatus. For example, 10 μm on the side wall of the device main body 2.
Two laser beams that emit laser beams with a beam diameter of about [
3a, 3b, and these laser beams [light from 3a, 3b has a width (thickness) of about 10μ and a spread angle of the object to be measured 1
An optical system 4a for forming fan-shaped beams 5a and 5b large enough to cover the cross-sectional direction of the fan-shaped beams 5a and 5b.

４ｂが設置されている。光学系４ａ、４ｂは、例えばシ
リンドリカルレンズが用いられる。被測定物体１は断面
がファン状ビーム５ａ、５ｂのファン状の広がり範囲内
に含まれるように設置される。4b is installed. For example, cylindrical lenses are used for the optical systems 4a and 4b. The object to be measured 1 is installed so that its cross section is included within the fan-shaped spread range of the fan-shaped beams 5a and 5b.

レーザ光源３ａ、３ｂはそれぞれ異なる波長の光を発生
するものであり、ここでは第１のレーザ光１３ａは緑色
光を発光し、第２のレーザ光源３ｂは赤色光を発光する
ものとする。The laser light sources 3a and 3b each generate light of different wavelengths, and here it is assumed that the first laser light source 13a emits green light and the second laser light source 3b emits red light.

装置本体１の底面、つまりレーザ光源３ａ。The bottom surface of the device main body 1, that is, the laser light source 3a.

３ｂに対向した位置にイメージセンサ６が配置されてい
る。イメージセンサ６は例えば第２図に示すように、複
数個の受光素子（光電変換素子）を−列に配列した２本
の一次元イメージセンサ６ａ。An image sensor 6 is arranged at a position facing 3b. For example, as shown in FIG. 2, the image sensor 6 is two one-dimensional image sensors 6a in which a plurality of light receiving elements (photoelectric conversion elements) are arranged in a row.

６ｂからなり、その受光素子の配列方向がファン状ビー
ム５ａ、５ｂのファン状の広がり方向に平行となるよう
に配置される。また、−次元イメージセンサ６ａ、６ｂ
は受光素子の前面にカラーフィルタを有し、それぞれ緑
色光、赤色光に感光するように構成されているものとす
る。イメージセンサ６からの出力信号は、コネクタ７を
介して演算処理装置（ＣＰＵ）８に供給される。ＣＰＬ
Ｊ８は後述するようにして、イメージセンサ６からの信
号に基いて被測定物体１の径を算出する。6b, and are arranged so that the arrangement direction of the light receiving elements is parallel to the fan-shaped spreading direction of the fan-shaped beams 5a and 5b. Moreover, -dimensional image sensors 6a and 6b
It is assumed that the device has a color filter on the front side of the light receiving element, and is configured to be sensitive to green light and red light, respectively. An output signal from the image sensor 6 is supplied to a processing unit (CPU) 8 via a connector 7. C.P.L.
J8 calculates the diameter of the object to be measured 1 based on the signal from the image sensor 6, as will be described later.

次に、第３図を参照して本実施例における径測定の原理
を説明する。第３図は第１図の装置をファン状ビーム５
ａ、５ｂのファン状の広がり方向（イメージセンサ６の
受光素子配列方向）に直角な方向から見た図である。フ
ァン状ビーム５ａ。Next, the principle of diameter measurement in this embodiment will be explained with reference to FIG. Figure 3 shows the device in Figure 1 with a fan-shaped beam 5.
5A and 5B are views seen from a direction perpendicular to the direction in which the fan-like shapes of FIGS. Fan-shaped beam 5a.

５ｂは等価的に光学系（シリンドリカルレンズ）４ａ、
４ｂの入射面上の一点ＰＱ、ＰＲに置かれた点光源から
ファン状に放射される。これらファン状ビーム５ａ、５
ｂの光が円形状断面を有する被測定物体１に向けて照射
されると、イメージセンサ６が置かれた面上に、光が照
射された部分と、被測定物体１により遮られて光が照射
されない影の部分とからなる投影、Ｉ！Ｉが形成される
。イメージセンサ６はこの投影像における明暗境界線Ｘ
ａｓ。5b is equivalently an optical system (cylindrical lens) 4a,
Light is emitted in a fan shape from a point light source placed at one point PQ, PR on the incident surface of 4b. These fan-shaped beams 5a, 5
When the light b is irradiated toward the object to be measured 1 having a circular cross section, the light is blocked by the irradiated part and the object to be measured 1 on the surface where the image sensor 6 is placed. A projection consisting of a shadow part that is not illuminated, I! I is formed. The image sensor 6 detects the brightness boundary line X in this projected image.
as.

ＸＧ２　、　およびＸＲ１，ＸＲ２を検出する。Detect XG2, and XR1, XR2.

ＸＧ１．Ｘ（１２はファン状ビーム５ａに対応し、また
ＸＲ１，ＸＲ２はファン状ビーム５ｂに対応する。これ
ら明暗境界線の位置は、イメージセンサ６の一端Ｏを原
点として、この原点Ｏからの距離で表わされる。なお、
イメージセンサ６の出力は例えば原点０に対応する光電
変検出力から順次直列に読出され、その場合、出力の大
きく変化した点が明暗境界線に相当する。XG1. X(12 corresponds to the fan-shaped beam 5a, and XR1 and XR2 correspond to the fan-shaped beam 5b.The positions of these bright and dark boundaries are determined by the distance from the origin O, with one end O of the image sensor 6 being the origin. It is expressed.In addition,
The output of the image sensor 6 is sequentially read out in series from the photoelectric change detection force corresponding to the origin 0, for example, and in that case, the point where the output changes significantly corresponds to the bright/dark boundary line.

原点Ｏからファン状ビーム５ａに対応する仮想点光ｊｉ
　Ｐ　ａまでの距離をＬｔ、ファン状ビーム５ａ、５ｂ
に対応する仮想点光源ＰＧ、ＰＲ間の距離を１２．仮想
点光源ＰＧ、ＰＲとイメージセンサ６面との距離をＷと
すると、図中の角度θＡ。Virtual point light ji corresponding to the fan-shaped beam 5a from the origin O
The distance to P a is Lt, fan-shaped beams 5a, 5b
The distance between the virtual point light sources PG and PR corresponding to 12. If the distance between the virtual point light sources PG and PR and the image sensor 6 surface is W, then the angle θA in the figure.

θＡ’＋　θＢ、θＢ′は次式（１）で与えられる。θA'+　θB, θB' are given by the following equation (1).

θＡ　−ｊａｎ　”　　（Ｗ／　ｌ　Ｌｌ　＋Ｌ２−Ｘ
Ｒｔ　　ｌ　）ＯＡ’−ｔａｎ　−”　　（Ｗ／　ｌ　
ＸＲ２−Ｌｌ　−Ｌ２１　）θｓ　−ｔａｎ　’　　（
Ｗ／　Ｉ　Ｘａ　２−　Ｌｔ　　ｌ　）θａ’−ｔａｎ
　’　　（Ｗ／　ｌ　Ｌｔ　−ＸＧ　１　１　）・・・
・・・（１） これらの角度から、被測定物体１の径（半径）Ｒは次式
（２）に基いて計韓により求められる。θA −jan ” (W/ l Ll +L2−X
Rt l)OA'-tan-” (W/ l
XR2-Ll -L21 )θs -tan' (
W/ I Xa 2- Lt l ) θa'-tan
' (W/l Lt -XG 1 1)...
(1) From these angles, the diameter (radius) R of the object to be measured 1 is determined by the equation (2) below.

ｚ　　　　　　　　　　　２ ・・・・・・（′２Ｊ なお、Ｌ２はレーザー測距等により予め正確に決めてお
く。また、Ｌｌについては光学系４ａ。z 2 ('2J) Note that L2 is determined accurately in advance by laser distance measurement, etc. Also, Ll is determined by the optical system 4a.

４ｂを装置から取外した状態でレーザ光源３ａからの光
のビームスポット位置をイメージセンサ６ａで読取って
測定する。さらに被測定物体１の代りに径が既知の基準
円柱状サンプルを置き、そのときの径Ｒの計算値がサン
プルの実際の径に一致するようにＷを調整する。これに
よりし１とＷの校正ができることになる。第１図におけ
るＣＰＵ８に、これらし１．Ｌ２．Ｗの情報と、イメー
ジセンサ６からの出力（明暗境界線の情報）が供給され
、（１）、（２）式の計算により径Ｒが求められるわけ
である。4b is removed from the apparatus, the beam spot position of the light from the laser light source 3a is read and measured by the image sensor 6a. Furthermore, a reference cylindrical sample with a known diameter is placed in place of the object to be measured 1, and W is adjusted so that the calculated value of the radius R at that time matches the actual diameter of the sample. This makes it possible to calibrate Shi1 and W. The CPU 8 in FIG. 1 has the following 1. L2. The information on W and the output from the image sensor 6 (information on the brightness/darkness boundary line) are supplied, and the radius R is obtained by calculating equations (1) and (2).

２式には被測定物体１の位置情報を含まないから、ファ
ン状ビーム５ａ、５ｂのファン状の広がり範囲内に被測
定物体１の断面が含まれる限り、被測定物体１がどこに
あっても径Ｒを求めることができる。Since Equation 2 does not include the position information of the object to be measured 1, as long as the cross section of the object to be measured 1 is included within the fan-shaped spread range of the fan-shaped beams 5a and 5b, no matter where the object to be measured 1 is located, The diameter R can be determined.

次に、この径測定装置の測定精度について考察する。イ
メージセンサ６としては、ファクシミリ装置や電子複写
機で原稿の画像読取りに使用されるアモルファスシリコ
ン膜（ａ−３ｉ：Ｈ膜）を光電変換膜としたいわゆる密
着型イメージセンサを使用することができる。このよう
な密着型イメージセンサは長さ５０σ程度までの大面積
の成膜が可能であり、また解像度は１６本／ｊｗ＋が実
現されている。この解像度によると、前述した明暗境界
線の検出精度は約６０μｍとなる。イメージセンサの解
像度は今後さらに向上する見込みであり、それに伴い明
暗境界線の検出１ｉｆｔ、従って径Ｒの測定精度も向上
する。Next, the measurement accuracy of this diameter measuring device will be considered. As the image sensor 6, it is possible to use a so-called contact type image sensor in which a photoelectric conversion film is an amorphous silicon film (a-3i:H film) used for reading images of originals in facsimile machines and electronic copying machines. In such a contact type image sensor, it is possible to form a film over a large area up to a length of about 50σ, and a resolution of 16 lines/jw+ has been achieved. According to this resolution, the detection accuracy of the bright/dark boundary line described above is approximately 60 μm. It is expected that the resolution of image sensors will further improve in the future, and accordingly, the detection 1if of the bright/dark boundary line and, therefore, the measurement accuracy of the diameter R will also improve.

上記実施例ではイメージセンサ６として第２図に示した
ような一次元イメージセンサを使用したが、それに代え
て第４図に示すような構成のイメージセンサを用いると
、さらに高精度の径測定が可能となる。第４図に示すイ
メージセンサは１、長手方向が明暗境界線の方向に平行
に配置されたー次元イメージセンサを明暗境界線９と直
交する方向（ファン状ビーム５ａ、５ｂの広がり方向）
に複数個配列して構成されている。ここで、イメージセ
ンサ１１．１２はファン状ビーム５ａに対応するもので
あり、明暗境界線９の方向に千鳥状に配列されている。In the above embodiment, a one-dimensional image sensor as shown in FIG. 2 was used as the image sensor 6, but if an image sensor with a configuration as shown in FIG. 4 is used instead, even more accurate diameter measurement can be achieved. It becomes possible. The image sensor 1 shown in FIG. 4 is a -dimensional image sensor whose longitudinal direction is arranged parallel to the direction of the bright/dark boundary line 9 in a direction perpendicular to the bright/dark boundary line 9 (the spreading direction of the fan-shaped beams 5a, 5b).
It is configured by arranging multiple pieces. Here, the image sensors 11 and 12 correspond to the fan-shaped beam 5a, and are arranged in a staggered manner in the direction of the bright-dark boundary line 9.

また、イメージセンサ１３゜１４はファン状ビーム５ｂ
に対応するものであり、やはり明暗境界線９の方向に千
鳥状に配列されている。In addition, the image sensor 13° 14 has a fan-shaped beam 5b.
, and are also arranged in a staggered manner in the direction of the bright/dark boundary line 9.

このようなイメージセンサを用いると、次のような利点
がある。すなわち、従来一般の画像読取り用イメージセ
ンサは例えば１０本／ｌｌｌ１Ｋの解像度のものを例に
とると、第２図に示したように受光面のサイズが約０．
１ｊｗ＊角の受光素子を一列に配列したものであり、読
取り可能な階調数は数階間程度である。これに対し、本
発明で用いられるイメージセンサでは解像度は読取り軸
方向（ファン状ビーム５ａ、５’ｂのファン状の広がり
方向）の解像度のみが要求されるため、第４図に示すよ
うにこの方向と直交する方向に受光面を拡大しても差支
えない。例えば第４図中に示すように、約０．ｌｍＸ１
ｍ＋＋の受光面の一次元イメージセンサを１０本／順と
いうような密度で配列することができる。この場合には
、受光量は第２図に示したイメージセンサ６ａ、６ｂの
１０倍となり、読取り可能な階調数も２０〜３０階調程
度に増大する。Using such an image sensor has the following advantages. In other words, if a conventional general image reading image sensor has a resolution of, for example, 10 lines/11K, the size of the light receiving surface is approximately 0.5 mm, as shown in FIG.
It is made up of 1jw* square light-receiving elements arranged in a line, and the number of readable gradations is about several levels. On the other hand, in the image sensor used in the present invention, resolution is required only in the reading axis direction (the direction in which the fan-shaped beams 5a and 5'b spread). There is no problem even if the light-receiving surface is expanded in a direction perpendicular to the direction. For example, as shown in FIG. lmX1
One-dimensional image sensors with m++ light-receiving surfaces can be arranged at a density of 10/order. In this case, the amount of light received will be ten times that of the image sensors 6a and 6b shown in FIG. 2, and the number of readable gradations will also increase to about 20 to 30 gradations.

従って、明暗境界線の位置に応じて１／２０〜１／３０
倍の受光量の変化を読取ることができるため、例えば第
４図におけるイメージセンサ１２のように、明暗境界線
９がある一次元イメージセンサの受光面内にあっても、
１つの一次元イメージセンサの受光面の幅（明暗境界線
９と直交する方向の寸法）の１／２０〜１／３０の精度
で明暗境界線９の位置を検出することが可能となる。具
体的には、この検出精度は１０本／ｍの解像度の一次元
イメージセンサの場合で約３μｍとなり、第２図に示し
たようなイメージセンサを用いた場合に比べて大幅な向
上となる。Therefore, depending on the position of the bright and dark boundary line, 1/20 to 1/30
Since it is possible to read changes in the amount of light received, for example, even if the image sensor 12 in FIG.
It is possible to detect the position of the bright/dark boundary line 9 with an accuracy of 1/20 to 1/30 of the width of the light receiving surface of one one-dimensional image sensor (dimension in the direction orthogonal to the bright/dark boundary line 9). Specifically, this detection accuracy is approximately 3 μm in the case of a one-dimensional image sensor with a resolution of 10 lines/m, which is a significant improvement compared to the case where an image sensor as shown in FIG. 2 is used.

さ、らに、第４図に示すように各ファン状、ｅ−４５’
ａ、’５ｂに対応してそれぞれ２組゛の一次元イメージ
センサ群を千鳥状に配列すれば、明暗境界線９は必ずど
ちらかのイメージセンサ群の受光面上に位置するので、
明暗境界線９を連続的に検出することができ、上記検出
精度がどの位置でも得られることになる。Further, as shown in Fig. 4, each fan shape, e-45'
If two sets of one-dimensional image sensor groups corresponding to a and '5b are arranged in a staggered manner, the bright/dark boundary line 9 will always be located on the light-receiving surface of one of the image sensor groups.
The bright and dark boundary line 9 can be detected continuously, and the above detection accuracy can be obtained at any position.

なお、第４図に示したようなイメージセンサを使用した
場合には、ファン状ビーム５ａ、５ｂのファン状の広が
り方向と直交する方向の幅を、例えば４Ｈｎ以上と広く
とる必要がある。これに対しては、第５図に示すように
ファン状ビーム５ａ。Note that when an image sensor as shown in FIG. 4 is used, the width of the fan-shaped beams 5a and 5b in the direction orthogonal to the direction in which the fan-shaped beams spread needs to be wide, for example, 4Hn or more. For this purpose, a fan-shaped beam 5a is used as shown in FIG.

５ｂを得るための光学系左して、それぞれ２組のシリン
ドリカルレンズ１５，１６を軸方向を直交させて配置す
ればよい。この構成によりスポット径１０μｍのレーザ
光を一５ａｌ程度の幅のファン状ビームとすることがで
きる。On the left side of the optical system for obtaining 5b, two sets of cylindrical lenses 15 and 16 may be arranged with their axial directions orthogonal to each other. With this configuration, a laser beam with a spot diameter of 10 μm can be made into a fan-shaped beam with a width of about 15 al.

一方、ファン状ビームを得るための他の光学系として、
例えば第６図に示すようにレーザ光源３ａ、３ｂからの
光を回転ミラー１７ａ、１７ｂにより、ファン状ビーム
５ａ、５ｂにするものも有効である。この場合、回転ミ
ラー１７ａ。On the other hand, as another optical system for obtaining a fan-shaped beam,
For example, as shown in FIG. 6, it is also effective to turn light from laser light sources 3a and 3b into fan-shaped beams 5a and 5b using rotating mirrors 17a and 17b. In this case, the rotating mirror 17a.

１７ｂの回転は機械的であるが、その機構は従来装置に
おけるレーザ光源を移動させる機構に比べればはるかに
簡単である。Although the rotation of 17b is mechanical, the mechanism is much simpler than the mechanism for moving the laser light source in conventional devices.

本発明は上記した実施例に限定されるものではなく、例
えば実施例では２つの光源として波長の異なる光を発光
するものを用いたが、同一波長のものを使用し、それら
を時間をずらせて順次駆動して発光させ、それぞれの光
に暴く明暗境界線の位置を順次検出してもよい。その場
合、ｃｐｕｓでは第１のレーザ光源からの光に基く明暗
境界線の位置を検出した後、それを第２のレーザ光源か
らの光に基く明暗境界線の検出まで保持し、それらに基
いて径を算出することになる。このようにすると、測定
手順の一部が２段階となり、前記実施例より時間がかか
ることになるが、従来のレーザによるリニアスキャンに
比べればはるかに短時間で済み、リアルタイム性はほと
んど損われない。The present invention is not limited to the above-described embodiments. For example, in the embodiment, two light sources that emit light of different wavelengths were used. The light emitting devices may be sequentially driven to emit light, and the positions of the bright and dark boundaries exposed to each light may be sequentially detected. In that case, the CPU detects the position of the bright/dark boundary line based on the light from the first laser light source, then holds it until the bright/dark boundary line is detected based on the light from the second laser light source, and then detects the position of the bright/dark boundary line based on the light from the second laser light source. The diameter will be calculated. In this way, part of the measurement procedure will be in two steps, which will take more time than in the previous example, but it will take much less time than the conventional linear scan using a laser, and real-time performance will hardly be impaired. .

その他、本発明は要旨を逸脱しない範囲で種々変形実施
が可能である。In addition, various modifications can be made to the present invention without departing from the scope thereof.

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本発明の一実施例に係る非接触径測定装置の構
成図、第２図は同実施例で使用するイメージセンサの具
体的構成を示す図、第３図は同実施例における径測定の
原理を説明するための図、第４図は本発明の他の実施例
において使用するイメージセンサの構成を示す平面図、
第５図は第４図のイメージセンサを用いた場合に適した
ファン状ビームを得るための光学系を示す図、第６図は
ファン状ビームを得るための光学系の他の例を示す図で
ある。 １・・・被測定物体、２・・・装置本体、３ａ、３ｂ・
・・レーザ光源、４ａ、４ｂ・・・シリンドリカルレン
ズ、５ａ、５ｂ・・・ファン状ビーム、６・・・イメー
ジセンサ、６ａ、６ｂ・・・−次元イメージセンサ、７
・・・コネクタ、８・・・演算処理装置、９・・・明暗
境界線、１１〜１４・・・−次元イメージセンサ、１５
．１６・・・シリンドリカルレンズ、１７ａ、１７ｂ・
・・回転ミラー。 出願人代理人　弁理士　鈴江武彦 第１図 第２図 第３図 第４図 第５図 第６図Fig. 1 is a configuration diagram of a non-contact diameter measuring device according to an embodiment of the present invention, Fig. 2 is a diagram showing a specific configuration of an image sensor used in the embodiment, and Fig. 3 is a diagram showing the diameter measurement device according to the embodiment. A diagram for explaining the principle of measurement; FIG. 4 is a plan view showing the configuration of an image sensor used in another embodiment of the present invention;
FIG. 5 is a diagram showing an optical system for obtaining a fan-shaped beam suitable for using the image sensor shown in FIG. 4, and FIG. 6 is a diagram showing another example of the optical system for obtaining a fan-shaped beam. It is. 1... Object to be measured, 2... Device main body, 3a, 3b.
... Laser light source, 4a, 4b... Cylindrical lens, 5a, 5b... Fan-shaped beam, 6... Image sensor, 6a, 6b... -dimensional image sensor, 7
. . . Connector, 8 . . . Arithmetic processing unit, 9 .
．． 16... Cylindrical lens, 17a, 17b.
...Rotating mirror. Applicant's Representative Patent Attorney Takehiko Suzue Figure 1 Figure 2 Figure 3 Figure 4 Figure 5 Figure 6

Claims (4)

【特許請求の範囲】[Claims] （１）少なくとも２つの光源と、これらの光源からの光
をファン状ビームとして、円形状断面を有する被測定物
体に対し、該ビームのファン状の広がり範囲内に被測定
物体の断面が含まれるように照射するレンズ系と、これ
らファン状ビームの光照射による投影像が形成される位
置に配置されたイメージセンサと、このイメージセンサ
の出力を受け該イメージセンサ上の前記各ファン状ビー
ムの光に基く投影像における明暗境界線の位置に基いて
前記被測定物体の径を算出する演算手段とを備えたこと
を特徴とする非接触径測定装置。(1) Using at least two light sources and the light from these light sources as a fan-shaped beam, for an object to be measured having a circular cross section, the cross section of the object to be measured is included within the fan-shaped spread range of the beams. an image sensor disposed at a position where a projected image is formed by the light irradiation of these fan-shaped beams; and an image sensor that receives the output of the image sensor and receives the light of each of the fan-shaped beams on the image sensor. A non-contact diameter measuring device, comprising: calculation means for calculating the diameter of the object to be measured based on the position of a brightness/darkness boundary line in a projected image based on . （２）前記少なくとも２つの光源は波長の異なる光を発
生するものであり、前記イメージセンサはこれらの光源
からのファン状ビームの光を波長を区別して検出するも
のであることを特徴とする特許請求の範囲第１項記載の
非接触径測定装置。(2) The at least two light sources generate light with different wavelengths, and the image sensor detects fan-shaped beams of light from these light sources by distinguishing wavelengths. A non-contact diameter measuring device according to claim 1. （３）前記イメージセンサは長手方向が前記明暗境界線
の方向に平行に配置された一次元イメージセンサを、明
暗境界線と直交する方向に複数個配列したものであるこ
とを特徴とする特許請求の範囲第１項または第２項記載
の非接触径測定装置。(3) A patent claim characterized in that the image sensor is a plurality of one-dimensional image sensors whose longitudinal direction is arranged parallel to the direction of the bright/dark boundary line in a direction perpendicular to the bright/dark boundary line. The non-contact diameter measuring device according to the range 1 or 2. （４）前記イメージセンサは長手方向が前記明暗境界線
の方向に平行に配置された一次元イメージセンサを、明
暗境界線と直交する方向に複数個配列し、かつ明暗境界
線の方向に千鳥状に複数列配列したものであることを特
徴とする特許請求の範囲第１項または第２項記載の非接
触径測定装置。(4) The image sensor includes a plurality of one-dimensional image sensors whose longitudinal directions are arranged parallel to the bright-dark boundary line, and a plurality of one-dimensional image sensors arranged in a direction perpendicular to the bright-dark boundary line, and in a staggered pattern in the direction of the bright-dark boundary line. The non-contact diameter measuring device according to claim 1 or 2, characterized in that the non-contact diameter measuring device is arranged in a plurality of rows.
JP27341184A 1984-12-26 1984-12-26 Non-contacting diameter gauge Pending JPS61151407A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27341184A JPS61151407A (en) 1984-12-26 1984-12-26 Non-contacting diameter gauge

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27341184A JPS61151407A (en) 1984-12-26 1984-12-26 Non-contacting diameter gauge

Publications (1)

Publication Number Publication Date
JPS61151407A true JPS61151407A (en) 1986-07-10

Family

ID=17527512

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27341184A Pending JPS61151407A (en) 1984-12-26 1984-12-26 Non-contacting diameter gauge

Country Status (1)

Country Link
JP (1) JPS61151407A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1997012200A1 (en) * 1995-09-28 1997-04-03 Trautwein Sb-Technik Gmbh Device and method for measuring the diameters of articles
JP2004226319A (en) * 2003-01-24 2004-08-12 Saki Corp:Kk Visual inspection apparatus and image acquisition method
CN112729167A (en) * 2020-12-21 2021-04-30 福建汇川物联网技术科技股份有限公司 Calculation method and device of plane equation

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1997012200A1 (en) * 1995-09-28 1997-04-03 Trautwein Sb-Technik Gmbh Device and method for measuring the diameters of articles
DE19625055B4 (en) * 1995-09-28 2004-11-18 Hans-Hermann Trautwein Sb-Technik Gmbh Device and method for measuring the diameter of objects
JP2004226319A (en) * 2003-01-24 2004-08-12 Saki Corp:Kk Visual inspection apparatus and image acquisition method
CN112729167A (en) * 2020-12-21 2021-04-30 福建汇川物联网技术科技股份有限公司 Calculation method and device of plane equation

Similar Documents

Publication Publication Date Title
US11199395B2 (en) Profile inspection system for threaded and axial components
US4573193A (en) Individual identification apparatus
US3922093A (en) Device for measuring the roughness of a surface
US4875777A (en) Off-axis high accuracy structured light profiler
EP0017371A1 (en) Apparatus for inspecting defects in a periodic pattern
GB2136954A (en) Optical measurement system
US4854707A (en) Method and apparatus for the optical electronic measurement of a workpiece
EP1062478A1 (en) Apparatus and method for optically measuring an object surface contour
US6636310B1 (en) Wavelength-dependent surface contour measurement system and method
IE42799B1 (en) Gauging system for determining the contour of the surface of an object
Idesawa High-precision image position sensing methods suitable for 3-D measurement
JPS61151407A (en) Non-contacting diameter gauge
US4279513A (en) Optical inspection system for large parts and for multiple measurements
JPH0364816B2 (en)
Xie et al. Four-map absolute distance contouring
US4871910A (en) Method and apparatus for measuring the size of wire rod with laser beam and reference rod
RU2247939C2 (en) Method for checking cylindrical components such as nuclear fuel pellets for perpendicularity
CN208012545U (en) A kind of Spectral Confocal measuring device for drilling quality detection
JP2793931B2 (en) Light two-dimensional measuring method, surface roughness measuring method and measuring device
JP2947418B2 (en) Measurement method of refractive index distribution of optical fiber base material
JPH10170247A (en) Method and device for non-contact measurement of surface roughness
JPS62291511A (en) Distance measuring apparatus
JPS62291512A (en) Distance measuring apparatus
JP2675051B2 (en) Optical non-contact position measuring device
SU1523907A1 (en) Spherometer