JPS61145476A - Optical range finder - Google Patents
Optical range finderInfo
- Publication number
- JPS61145476A JPS61145476A JP59266278A JP26627884A JPS61145476A JP S61145476 A JPS61145476 A JP S61145476A JP 59266278 A JP59266278 A JP 59266278A JP 26627884 A JP26627884 A JP 26627884A JP S61145476 A JPS61145476 A JP S61145476A
- Authority
- JP
- Japan
- Prior art keywords
- light
- optical fiber
- delay time
- light receiving
- optical path
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Optical Radar Systems And Details Thereof (AREA)
Abstract
Description
【発明の詳細な説明】
［発明の技術分野］
この発明は、例えばレーザ、ＬＥＤの光等を用いて測距
を行う光学的距離測定装置に関する。DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to an optical distance measuring device that measures distance using, for example, laser, LED light, or the like.
［発明の技術的背景とその問題点］
近年、レーザー光等の光を利用した測距において、光の
変調信号を基準にした所謂変調波テレメトり法による距
離測定装置が提案されている。[Technical Background of the Invention and Problems Therewith] In recent years, in distance measurement using light such as a laser beam, a distance measuring device using a so-called modulated wave telemetry method based on a modulated light signal has been proposed.
この変調波テレメトリ法による距離測定装置の基本原理
は、送受信光の変調信号の位相差を測定し、変調波の波
長を基準として距離を求めるものである。The basic principle of this distance measuring device using modulated wave telemetry is to measure the phase difference between modulated signals of transmitted and received light, and to determine distance using the wavelength of the modulated wave as a reference.
この方法による距離測定装置の基本的構成は、第３図に
示すように、変調信号源２１、光源１２５、受光部１２
９、位相差検出部３３、及び表示部３７を有する光波距
離計１０１とコーナキューブ５よりなる。この構成によ
る装置の基本的作用は、一方で、変調信号ＷＡ２１より
発せられる変調信号１２１によって光源１２５から変調
光をコーナキューブ５に投光し、反射された光を受光部
１２９で光電変換して電気信号１３１として位相差検出
部３３に入力し、同時に他方で、変調信号１２１を位相
差検出部３３に入力し、これを基準としてこの２つの入
力信号の位相差を検出することにより、距離を測定する
というものである。The basic configuration of a distance measuring device using this method is as shown in FIG.
9, a phase difference detection section 33, a light wave distance meter 101 having a display section 37, and a corner cube 5. The basic operation of the device with this configuration is, on the one hand, modulated light is projected from the light source 125 onto the corner cube 5 by the modulation signal 121 emitted from the modulation signal WA21, and the reflected light is photoelectrically converted by the light receiving section 129. The distance can be calculated by inputting the electrical signal 131 to the phase difference detection unit 33, simultaneously inputting the modulated signal 121 to the phase difference detection unit 33, and detecting the phase difference between these two input signals using this as a reference. It's about measuring.
ここで第３図の構成では、光源１２５から発せられる光
をチョッパービームスプリッタ１２３により、測定光路
１５９と内部参照光、路１６５とに分岐して、受光部１
２９で受光する構成となっている。これは、光源１２５
として一般に使用されている半導体レーザや受光部１２
９の受光素子、増幅器等は、遅れ要素を有しており、測
定光路１５９にこの遅れ分が含まれるので、前記位相差
にこの遅れ時間が含まれて測距精度が悪くなることが考
えられる。そこで、チョッパービームスプリッタ１２３
により、時間分割的に測定光路１５９と内部参照光路１
６５とに分岐して、受光部１２９の出力である両者の位
相差に前記遅れ要素の遅れ時間を含ませないようにして
補償を行っているのである。In the configuration shown in FIG. 3, the chopper beam splitter 123 branches the light emitted from the light source 125 into a measurement optical path 159, an internal reference beam, and a path 165.
It is configured to receive light at 29. This is the light source 125
Semiconductor lasers and light receiving parts 12 commonly used as
The light-receiving element, amplifier, etc. of 9 have a delay element, and this delay is included in the measurement optical path 159, so it is possible that this delay time is included in the phase difference and the distance measurement accuracy deteriorates. . Therefore, chopper beam splitter 123
, the measurement optical path 159 and the internal reference optical path 1 are divided in time.
65, and compensation is performed by not including the delay time of the delay element in the phase difference between the two, which is the output of the light receiving section 129.
ところで、測定環境等の理由から装置を測定場所に設置
できない場合には、遠隔測定を行うこととなるが、この
ような場合、距離測定装置は、例えば第４図に示すよう
に、光波距離計１０１より投光受光光学系１０３を分離
して、投光用光ファイバ１０７及び受光用光ファイバ１
１１によって接続するような構成が考えられる。しかし
ながら、この光ファイバの光路長は一定ではなく、光フ
ァイバを包むシリコン樹脂やナイロン被覆等の温度変化
が原因で、例えば光路長が百メートル程度の光ファイバ
の場合、数十度の温度変化により、数十ミリメートルの
光路長変化が生じる。このため、前記チョッパビームス
プリッタによってこの光路長変化を補償する場合には、
投光受光光学系１０３にチョッパビームスプリッタを置
いて、測定光路と内部参照光路とが投光用光ファイバ１
０７と受光用光ファイバ１１１を介する光路となるよう
にして、両者の位相差を検出することにより距離を求め
、光ファイバの光路長変化を補償することとなる。By the way, if the device cannot be installed at the measurement location due to reasons such as the measurement environment, remote measurement will be performed. The light emitting and receiving optical system 103 is separated from the light emitting optical fiber 101 and the light emitting optical fiber 107 and the light receiving optical fiber 1 are separated from each other.
A configuration in which connection is made by 11 is possible. However, the optical path length of this optical fiber is not constant, and is caused by temperature changes in the silicone resin or nylon coating that wraps the optical fiber. For example, in the case of an optical fiber with an optical path length of about 100 meters, temperature changes of several tens of degrees , a change in optical path length of several tens of millimeters occurs. Therefore, when compensating for this optical path length change using the chopper beam splitter,
A chopper beam splitter is placed in the light emitting and receiving optical system 103, and the measurement optical path and the internal reference optical path are connected to the light emitting optical fiber 1.
07 and the light-receiving optical fiber 111, the distance is determined by detecting the phase difference between the two, and the change in optical path length of the optical fiber is compensated for.
ところが、このチョッパービームスプリッタは機械的機
構で且つ電源等の電気的エネルギーを有しているため、
装置としては比較的規模の大きい乙のとなり、被測定場
所の物理的制約等によりチョッパービームスプリッタを
設置できない場合が生じる。また、特に被測定場所の環
境が電気的エネルギーを好まない場合、例えば爆発性の
ガス雰囲気中等の場合には、投光受光光学系１０３にチ
ョッパービームスプリッタを設置できない。このため、
光ファイバの光路長変化を補償することができず、結果
として、高精度な測定ができないという問題があった。However, since this chopper beam splitter is a mechanical mechanism and has electrical energy such as a power source,
As the equipment is relatively large in scale, there may be cases where it is not possible to install a chopper beam splitter due to physical constraints at the location to be measured. Further, especially when the environment of the place to be measured does not favor electrical energy, for example, when there is an explosive gas atmosphere, a chopper beam splitter cannot be installed in the light emitting/receiving optical system 103. For this reason,
There was a problem in that it was not possible to compensate for changes in the optical path length of the optical fiber, and as a result, highly accurate measurements were not possible.
［発明の目的コ
この発明は、上記に鑑みてなされたもので、その目的と
しては、Ｖｌ置の遅れ要素の遅れ時間や光路長の変化を
適確に補償することができ、更に該補償を被測距場所の
環境に関係なくすることのできる光学的距離測定装置を
提供することにある。[Purpose of the Invention] This invention has been made in view of the above, and its purpose is to be able to accurately compensate for changes in the delay time and optical path length of the delay element in the Vl position, and to further compensate for the compensation. An object of the present invention is to provide an optical distance measuring device that can perform distance measurement regardless of the environment of a place to be measured.
［発明の概要］
この発明は、上記目的を達成するため、光出力から反射
体による反射光の受光までの伝播遅延時間に基づき、当
該反射体までの距離を測定する装置において、時間分割
して光を出力する発光部と、発光部より時間分割して出
力された光の夫々に対して被測定系を介し不伝播する測
定光路と被測定系を介さずに伝播する内部参照光路とに
分岐する分岐手段と、前記測定光路及び内部参照光路を
介した光を交互に受けて所定の信号を出力する第１及び
第２の受光部と、測定光路を介して第１の受光手段にて
受光した光と内部参照光路を介して第２の受光手段にて
受光した光との伝播遅延時間差、及び測定光路を介して
第２の受光手段にて受光した光と内部参照光路を介して
第１の受光手段にて受光した光との伝播遅延時間差を交
互に算−出する時間差算出手段と、該時間差算出手段で
交互に算出された伝播遅延時間差の夫々の差を演算して
伝播遅延時間を求める演算手段とを有すること、更に、
前記分岐手段が、非電気的且つ非機械的要素から成るこ
とを要旨とする。[Summary of the Invention] In order to achieve the above object, the present invention provides a device for measuring the distance to a reflector based on the propagation delay time from the light output to the reception of the reflected light by the reflector. The light emitting unit outputs light, and the light output from the light emitting unit in a time-divided manner is split into a measurement optical path that does not propagate through the system under test and an internal reference optical path that propagates without passing through the system under test. a first and second light receiving unit that alternately receives the light via the measurement optical path and the internal reference optical path and outputs a predetermined signal; and a first light receiving unit that receives the light via the measurement optical path. The difference in propagation delay time between the light received by the second light receiving means via the measurement optical path and the light received by the second light receiving means via the internal reference optical path, and the difference in propagation delay time between the light received by the second light receiving means via the measurement optical path and the light received by the A time difference calculation means for alternately calculating the propagation delay time difference between the light received by the light receiving means, and a propagation delay time calculated by calculating the difference between the propagation delay time differences alternately calculated by the time difference calculation means. and further,
The gist is that the branching means consists of non-electrical and non-mechanical elements.
［発明の実施例ｊ 以下、図面を用いてこの発明の詳細な説明する。[Embodiment of the invention j Hereinafter, the present invention will be explained in detail using the drawings.
第１図はこの発明の一実論例に係る光学的距離測定装置
の構成図である。同図における構成は遠隔測定を想定し
ており、その概要は、光波距離計１とこの光波距離計１
に対し遠隔に設置される投光受光光学系３とを、光ファ
イバ（１）７、光ファイバ（２）９、光ファイバ（３）
１１、光ファイバ（４）１３によって接続し、被測定系
には、投光受光光学系３から投光された光を反射して返
すコーナキューブ５を有する構成となっている。FIG. 1 is a block diagram of an optical distance measuring device according to a practical example of the present invention. The configuration in the figure assumes remote measurement, and its outline is as follows:
The light emitting/receiving optical system 3 installed remotely is connected to the optical fiber (1) 7, the optical fiber (2) 9, and the optical fiber (3).
11, are connected by optical fibers (4) 13, and the system to be measured has a corner cube 5 that reflects and returns the light projected from the light emitting/receiving optical system 3.
光波距離計１は、発光系として、変調信号をスイッチ２
３を介して発光部（１）２５及び発光部（２＞２７に、
又位相差検出部３３に、夫々出力する変調信号源２１と
、前記変調信号を入力して変調光を光ファイバく１）７
に出力する発光部（１）２５と、前記変調信号を入力し
て変調光を光ファイバ（２）９に出力する発光部（２）
２７とを有する。また、受光系として、光ファイバ（３
）１１にて伝送された変調光を入力して、電気信号に変
換して出力する受光部（１）２９と、光ファイバ（４）
１３にて伝送された変調光を入力して、電気信号に変換
して出ノｊする受光部（２）３１とを有する。更に、処
理系として、前記２つの受光部２９．３１からの電気信
号の位相差を前記変調信号を基準として検出して記憶演
算処理部３５に出力する位相差検出部３３と、この検出
結果を一時記憶し、演算処理を行い結束を表示部３７に
出力する記憶演算処理部３５と、この処理結果を測定結
果として表示する表示部３７とを有する。The light wave distance meter 1 uses a switch 2 to transmit a modulation signal as a light emitting system.
3 to the light emitting unit (1) 25 and the light emitting unit (2>27,
Further, a modulated signal source 21 outputs each to the phase difference detection section 33, and a modulated light is inputted to the modulated signal and transmitted through an optical fiber 1) 7
a light emitting unit (1) 25 that outputs the modulated light to the optical fiber (2) 9; and a light emitting unit (2) that receives the modulation signal and outputs the modulated light to the optical fiber (2) 9.
27. In addition, an optical fiber (3
) 11, a light receiving unit (1) 29 that inputs the modulated light transmitted in 11, converts it into an electrical signal, and outputs it, and an optical fiber (4).
It has a light receiving section (2) 31 which inputs the modulated light transmitted at 13, converts it into an electric signal, and outputs it. Further, as a processing system, a phase difference detection section 33 detects the phase difference between the electric signals from the two light receiving sections 29 and 31 using the modulation signal as a reference and outputs it to the storage calculation processing section 35; It has a storage/arithmetic processing unit 35 that temporarily stores, performs arithmetic processing, and outputs the binding to a display unit 37, and a display unit 37 that displays the processing result as a measurement result.
投光受光光学系３は、光伝送系統における方向性結合器
としての４個のカブラ（４１乃至４７）と、光を反射さ
ぜる１個のミラー４９と、光を伝送する１０本の光フア
イバ５１乃至６９により構成され、何ら電気的なものは
有していないので、その被測定場所の環境に関係なく設
置できる。The light emitting/receiving optical system 3 includes four couplers (41 to 47) as directional couplers in an optical transmission system, one mirror 49 for reflecting light, and ten light beams for transmitting light. Since it is composed of fibers 51 to 69 and does not have any electrical components, it can be installed regardless of the environment of the place to be measured.
ここで、前記４個のカブラの機能を説明する。Here, the functions of the four coverlets will be explained.
カブラ（１）４１（２Ｘ２の方向性結合器）は、光ファ
イバ（１）７及び光ファイバ（５）５１を介して入力し
た発光部（１）２５からの光を光ファイバ（１１）６３
及び光ファイバ（１２＞ ６５に出力し、他方、光ファ
イバ（１１）６３を介して入力した光を光ファイバ（９
）５９に出力する。The coupler (1) 41 (2X2 directional coupler) converts the light from the light emitting unit (1) 25 input via the optical fiber (1) 7 and the optical fiber (5) 51 to the optical fiber (11) 63.
and an optical fiber (12>65), and on the other hand, the light input via the optical fiber (11) 63 is output to the optical fiber (9).
)59.
カブラ（２）４３ （２Ｘ２の方向性結合器）は、光フ
ァイバ（２）９及び光ファイバ（６）５３を介して入力
した発光部（２＞２７からの光を光ファイバ（１３）６
７及び光ファイバ（１４）６９に出力し、他方、光ファ
イバ（１３）６７を介して入力した光を光ファイバ（１
０）６１に出力する。カブラ（３）４５ （２Ｘ１の方
向性結合器）は、光ファイバ（１０）６１を介して入力
した光並びに光ファイバ（１４）６９を介して入力した
光を光ファイバ（７）５５に出力し、光ファイバ（３）
１１を介して受光部（１）２９に伝送する。The coupler (2) 43 (2X2 directional coupler) converts the light from the light emitting unit (2>27) input via the optical fiber (2) 9 and the optical fiber (6) 53 to the optical fiber (13) 6.
7 and optical fiber (14) 69, and on the other hand, the light input via optical fiber (13) 67 is output to optical fiber (14) 69.
0) Output to 61. The coupler (3) 45 (2X1 directional coupler) outputs the light input via the optical fiber (10) 61 and the light input via the optical fiber (14) 69 to the optical fiber (7) 55. , optical fiber (3)
11 to the light receiving section (1) 29.
カップ（４）４７（２Ｘ１の方向性結合器）は、光ファ
イバ（９）５９を介して伝送した光並びに光ファイバ（
１２）６５を介して伝送した光を光ファイバ（８）５７
に出力し、光ファイバ（４）１３を介して受光部（２）
３１に伝送する。The cup (4) 47 (2X1 directional coupler) connects the light transmitted via the optical fiber (9) 59 as well as the optical fiber (
12) The light transmitted through 65 is connected to optical fiber (8) 57
output to the light receiving section (2) via the optical fiber (4) 13.
31.
次に、本実施例の作用を説明する。Next, the operation of this embodiment will be explained.
この距離測定装置では、スイッチ２３の切換えにより変
調信号が発光部（１）２５又は発光部（２）２７に与え
られ、各発光部から時間分割して変調光が出力されてい
る。In this distance measuring device, a modulated signal is applied to the light emitting section (1) 25 or the light emitting section (2) 27 by switching the switch 23, and each light emitting section outputs modulated light in a time-divided manner.
まず、発光部（１）２５から出力される変調光は、光フ
ァイバ（１）７及び光ファイバ（５）５１を介して伝送
され、カブラ（１）４１に至る。First, modulated light output from the light emitting section (1) 25 is transmitted via the optical fiber (1) 7 and the optical fiber (5) 51, and reaches the coupler (1) 41.
この変調光はカブラ（１）４１により分岐されて受光部
（１）２９及び受光部（２）３１に至る。This modulated light is branched by a coupler (1) 41 and reaches a light receiving section (1) 29 and a light receiving section (2) 31.
即ち、光ファイバ（１１）６３→ミラー４９による反射
→コーナキューブ５による反射→ミラー４９による反射
→光ファイバ（１３）６７→カプラ（２）４３→光フア
イバ（１０）６１→カブラ（３）４５→光フアイバ（７
）５５→光ファイバ（３）１１→受光部（１）２９とい
う測定光路と、光ファイバ（１２）６５→カブラ（４ン
４７→光フアイバ（８）５７→光フ？イバ（４）１３→
受光部（２）３１という内部参照光路とに分岐されるの
である。That is, optical fiber (11) 63 → reflection by mirror 49 → reflection by corner cube 5 → reflection by mirror 49 → optical fiber (13) 67 → coupler (2) 43 → optical fiber (10) 61 → coupler (3) 45 →Optical fiber (7)
) 55 → optical fiber (3) 11 → light receiving part (1) 29, and optical fiber (12) 65 → coupler (4) 47 → optical fiber (8) 57 → optical fiber (4) 13 →
The light receiving section (2) is branched into an internal reference optical path called 31.
他方、発光部（２＞２７から出力される変調光は、光）
？イバ（２）９及び光ファイバ（６）５３を介して伝送
され、カブラ（２＞４３に至る。On the other hand, the modulated light output from the light emitting section (2>27 is light)
? The signal is transmitted via the fiber (2) 9 and the optical fiber (6) 53, and reaches the optical fiber (2>43).
この変調光はカプラ（２）４３により分岐されて受光部
（１）２９及び受光部（２）３１に至る。This modulated light is branched by a coupler (2) 43 and reaches a light receiving section (1) 29 and a light receiving section (2) 31.
即ち、光ファイバ（１３）６７→ミラー４９による反射
→コーナキューブ５による反射→ミラー４９による反射
→光ファイバ（１１）６３→カブラ（１）４１→光フア
イバ（９）５９→カプラ（４）４７→光フアイバ（８）
５７→光フアイバ（４）１３→受光部（２）３１という
測定光路と、光ファイバ（１４）６９→カブラ（３）４
５→光フアイバ（７）５５→光フアイバ（３）１１→受
光部（１）２９という内部参照光路とに分岐されるので
ある。That is, optical fiber (13) 67 → reflection by mirror 49 → reflection by corner cube 5 → reflection by mirror 49 → optical fiber (11) 63 → coupler (1) 41 → optical fiber (9) 59 → coupler (4) 47 →Optical fiber (8)
57 → Optical fiber (4) 13 → Light receiving part (2) 31 measurement optical path, and optical fiber (14) 69 → Cobra (3) 4
5 -> optical fiber (7) 55 -> optical fiber (3) 11 -> light receiving section (1) 29 - an internal reference optical path.
次に、光波距離計１の処理系の作用を説明する。Next, the operation of the processing system of the optical distance meter 1 will be explained.
まず、スイッチ２３がａ側接点にある時には、受光部（
１）２９からは測定光路を経た発光部＜１）２５より発
せられた変調光が光電変換されて出力され、受光部（２
）３１からは内部参照光路を経た発光部（１）２５より
発せられた変調光が光電変換されて出力される。位相差
検出部３３は、これら２つの電気信号の位相差を変調信
号源２１より出力される変調信号を基準として検出し記
憶演算処理部３５へ出力する。記憶演算処理部３５はこ
れを一時記憶する。次に、時間分割してスイッチ２３が
ｂ側接点に切換えられた時には、受光部（１）２９から
は内部参照光路を経た発光部（２＞２７より発せられた
変調光が光電変換されで出力され、受光部（２）３１か
らは測定光路を経た発光部（２＞２７より発せられた変
調光が光電変換されて出力される。同様に、位相差検出
部３３は、これら２つの電気信号の位相差を検出し、記
憶演算処理部３５へ出力する。記憶演算処理部３５はこ
れを一時記憶し、この位相差と前に一時記憶した位相差
との減算を行い、この結果を後述する所定の補正を行っ
て表示部３７に出力する。表示部３７はこの値を測定結
果として表示する。First, when the switch 23 is in the a side contact, the light receiving part (
1) The modulated light emitted from the light emitting unit <1) 25 via the measurement optical path is photoelectrically converted and output from the light receiving unit (2).
) 31 outputs the modulated light emitted from the light emitting unit (1) 25 via the internal reference optical path after being photoelectrically converted. The phase difference detection section 33 detects the phase difference between these two electrical signals using the modulation signal output from the modulation signal source 21 as a reference, and outputs it to the storage calculation processing section 35 . The storage calculation processing unit 35 temporarily stores this. Next, when the switch 23 is switched to the b-side contact in a time-divided manner, the modulated light emitted from the light receiving section (1) 29 passes through the internal reference optical path to the light emitting section (2>27) and is photoelectrically converted and output. The modulated light emitted from the light emitting unit (2>27) that has passed through the measurement optical path is photoelectrically converted and output from the light receiving unit (2) 31.Similarly, the phase difference detection unit 33 converts these two electrical signals into Detects the phase difference and outputs it to the storage calculation processing unit 35.The storage calculation processing unit 35 temporarily stores this and subtracts this phase difference from the previously temporarily stored phase difference.The result will be described later. A predetermined correction is performed and output to the display unit 37. The display unit 37 displays this value as a measurement result.
次に、第２図を用いて、前述の一連の処理を定量的に説
明する。Next, the series of processes described above will be described quantitatively using FIG.
第２図は第１図の作用原理を説明するための図である。FIG. 2 is a diagram for explaining the principle of operation of FIG. 1.
ここで、発光部の遅れ要素による遅延時間を△φｓ＋（
＋＝＋、ｚ）受光部の遅れ要素による遅延時間をΔφＰ
ｉ（ｉ＝＋、２）光ファイバ（１）７乃至（４）１３の
遅延時間を△Ｔｊ （ｊ＝Ｉ〜４）、被測定系の片道
の遅延時間を△ＴＸとしている。即ち、以下の如くであ
る。Here, the delay time due to the delay element of the light emitting part is △φs+(
+=+,z) Delay time due to delay element of light receiving section ΔφP
i (i=+, 2) The delay time of the optical fibers (1) 7 to (4) 13 is ΔTj (j=I to 4), and the one-way delay time of the system under test is ΔTX. That is, as follows.
発光部（１）２５の遅延時間・・・Δφ６Ｉφ光部（２
）２７の遅延時間・・・△φｓ２φ光部（１）２９の遅
延時間・・・Δφ唱受光部（２＞３１の遅延時間・・・
Δφ龍先光ファイバ１）７の遅延時間・・・△Ｔ１光フ
ァイバ（２）９の遅延時間・・・ΔＴ２Ｔ２光フアイバ
）１１の遅延時間・・・へＴ３光ファイバ（４）１３の
遅延時間・・・Δ丁４被測定系の遅延時間（片道）・・
・△ＴＸ尚、投光受光光学系３内の光ファイバ（５）５
１乃至（１４）６９については、光路長が光ファイバ（
１）７乃至（４）１３のものと比べて非常に短く、光路
長の変化は無視できるため、この光路長を予め測定して
おき定数として取扱い、最終的な測定結果を補正すれば
よく、ここでは考慮しないものとする。Delay time of light emitting section (1) 25...Δφ6Iφ light section (2
) Delay time of 27...Δφs2φ light section (1) Delay time of 29...Δφs light receiving section (Delay time of 2>31...
Δφ Dragon end optical fiber 1) Delay time of 7...ΔT1 optical fiber (2) Delay time of 9...ΔT2 Delay time of T2 optical fiber) 11...Delay time of T3 optical fiber (4) 13 ...Delay time of the system under test (one way)...
・△TX, optical fiber (5) in the light emitting/receiving optical system 3
1 to (14)69, the optical path length is the optical fiber (
It is very short compared to those of 1) 7 to (4) 13, and changes in the optical path length can be ignored, so it is sufficient to measure this optical path length in advance, treat it as a constant, and correct the final measurement result. It will not be considered here.
さて発光部（１）２５が変調光を出力した時の受光部（
１）２９の出力信号Ｖ ｌ５−１の全遅延時間△Ｔ １
．−１は、第２図（１）で示ず如く、次式のようになる
。Now, when the light emitting unit (1) 25 outputs modulated light, the light receiving unit (
1) Total delay time ΔT 1 of output signal V l5-1 of 29
．． -1 is as shown in the following equation, as shown in FIG. 2 (1).
Δ１’＋、＋ ＝△φｓ１ ＋△Ｔ１十△Ｔ３ 士△φ
ＩＦ１ヤ２△Ｔ× ・・・■その時の
受光部（２＞３１の出力信号ｖ２呵の全遅延時間△Ｔ２
４−１ は、次式のようになる。Δ1'+, + = △φs1 + △T1 ten △T3 shi△φ
IF1 y2 △T
4-1 becomes as follows.
△Ｔ２．＋＝△φｇ＋＋△Ｔ１＋八Ｔ４＋Δφれ・・・
■
■、■式より、両者の遅延時間差φＶｌ−Ｖｌは次式で
求められる。△T2. +=△φg＋＋△T1+8T4+Δφre...
(2) From the equations (2) and (2), the delay time difference φVl-Vl between the two can be obtained using the following equation.
φ易ｖ、＝ΔＴ３十△φ９＋−ΔＴ４−△φ彎１＋２△
ＴＸ
＝△Ｌ十２△Ｔｘ ・・・■ここで、
ΔＬ−△Ｔ３＋Δφ１０−△Ｔ４−Δφ究１同様に、発
光部（２）２７が変調光を出力した時の受光部（１）２
９の出力信号Ｖ１４−２の全避延時間へＴ＋、−２、受
光部（２＞３１の出力信号Ｖ２←２の全遅延時門へｒ
２４−２は、第２図（２）で示す如く、次式のようにな
る。φeasyv, =ΔT30△φ9+−ΔT4−△φcurvature1+2△
TX = △L12△Tx ・・・■Here,
ΔL−ΔT3+Δφ10−ΔT4−ΔφK1 Similarly, light receiving unit (1) 2 when light emitting unit (2) 27 outputs modulated light
To the total delay time of output signal V14-2 of 9 T+, -2, light receiving section (to the total delay time of output signal V2←2 of 2>31 r
24-2 is expressed by the following equation, as shown in FIG. 2 (2).
ΔＴ１．２−Δφｓ２＋ΔＴ２＋Δｒ３＋Δφｇ−・・
・■
△Ｔ２．２−Δφ話＋ΔＴ２＋△Ｔ４＋Δφ９Ｌ＋２Δ
７ｘ ・・・■■、０式より、両者
の遅延時間差φＶ＋ −Ｖｌは次式で求められる。ΔT1.2−Δφs2+ΔT2+Δr3+Δφg−・・
・■ △T2.2-Δφ story + ΔT2+△T4+Δφ9L+2Δ
7x...■■, From the formula 0, the delay time difference φV+ -Vl between the two can be obtained by the following formula.
φＶ、−Ｖｂ−ΔＴ３＋Δφｌ１１−ΔＴ４−ΔφＷ１
−２ΔＴｘ
−へＬ−２ΔＴｘ ・・・■ ここで
求めたφＶ＋ −Ｖｈ及びφ％ −Ｖｌは前記位相差検
出部３３の出力であり、各々の値は前記記憶演算処理部
３５に一時記憶され、次の演算が行われる。即ち次式に
示される減算である。φV, -Vb-ΔT3+Δφl11-ΔT4-ΔφW1
-2ΔTx - to L-2ΔTx...■ φV+ -Vh and φ% -Vl found here are the outputs of the phase difference detection section 33, and each value is temporarily stored in the storage calculation processing section 35, The following operations are performed. That is, the subtraction is shown in the following equation.
（す
φＶ＋−Ｖｍ−φＶ＋−Ｖｈ−４Δ７ ｘ
−＝■更に、これに刻して前記補正及び所定の
演算処理を行って、測定結果として表示部３７にて表示
する。(SφV+-Vm-φV+-Vh-4Δ7 x
-=■Furthermore, the above-mentioned correction and predetermined arithmetic processing are performed on this, and the result is displayed on the display section 37 as a measurement result.
したがって、この装置の測距によれば、発光部、受光部
、及び光ファイバの遅延時間が測定結果に表われず、発
光部、受光部の遅れ要素、及び光ファイバの光路長の温
度変化を補償することができる。Therefore, according to the distance measurement using this device, the delay time of the light emitting part, light receiving part, and optical fiber does not appear in the measurement results, and temperature changes in the delay elements of the light emitting part, light receiving part, and the optical path length of the optical fiber are not reflected in the measurement results. can be compensated.
［発明の効果コ
以上説明したように、この発明によれば、光学的距離測
定装置において、発光手段から時間分割して光を出力し
、該光を分岐手段により夫々測定光路と内部参照光路に
分岐し、測定光路を介して第１の受光手段にて受光した
光と内部参照光路を介して第２の受光手段にて受光した
光との伝播遅延時間差、及び測定光路を介して第２の受
光手段にて受光した光と内部参照光路を介して第１の受
光手段にて受光した光との伝播遅延時間差を夫々算出し
、更に夫々の差を演算してこの差により測定距離を求め
ることとしたので、装置の遅れ要素や光路長の変化を補
償することができ、また更に前記分光手段に時間分割制
御の機能を持たせることなく、即ち機械的機構及び電気
的エネルギーを有することなく、また、これにより装置
として比較的小規模で実現可能としたので、被測距場所
の環境に関係なく補償することができ、結果として、高
精度な測距が可能となる。[Effects of the Invention] As explained above, according to the present invention, in an optical distance measuring device, light is outputted from the light emitting means in a time-divided manner, and the light is divided into the measurement optical path and the internal reference optical path by the branching means, respectively. The difference in propagation delay time between the light received by the first light receiving means via the measurement optical path and the light received by the second light receiving means via the internal reference optical path, and the second Calculating the propagation delay time difference between the light received by the light receiving means and the light received by the first light receiving means via the internal reference optical path, further calculating the respective differences, and determining the measurement distance from this difference. Therefore, it is possible to compensate for the delay elements of the device and changes in the optical path length, and further, without providing the spectroscopic means with a time division control function, that is, without having a mechanical mechanism or electrical energy. Further, since this allows the device to be implemented on a relatively small scale, it is possible to compensate regardless of the environment of the distance measurement location, and as a result, highly accurate distance measurement is possible.
第１図はこの発明の一実施例に係る光学的距離測定装置
の構成図、第２図は第１図の作用原理を説明するための
図、第３図は従来の光学釣用１１１１を測定装置の構成
図、第４図は遠隔測定を行う場合の光学的距離測定装置
のブロック図の一例を示す。
２１・・・変調信号源 ２３・・・スイッチ２５・・
・発光部（１） ２７・・・発光部（２）２９・・・
受光部（１） ３１・・・受光部（２）３３・・・位
相差検出部 ３５・・・記憶演算処理部３７・・・表示
部 ４１・・・カブラ（１）４３・・・カプラ（
２）Fig. 1 is a configuration diagram of an optical distance measuring device according to an embodiment of the present invention, Fig. 2 is a diagram for explaining the principle of operation of Fig. 1, and Fig. 3 is a diagram for measuring a conventional optical distance measuring device 1111. FIG. 4 shows an example of a block diagram of an optical distance measuring device for remote measurement. 21... Modulation signal source 23... Switch 25...
- Light emitting part (1) 27... Light emitting part (2) 29...
Light receiving section (1) 31... Light receiving section (2) 33... Phase difference detection section 35... Memory calculation processing section 37... Display section 41... Coupler (1) 43... Coupler (
2)
Claims (2)
遅延時間に基づき、当該反射体までの距離を測定する装
置において、時間分割して光を出力する発光部と、発光
部より時間分割して出力された光の夫々に対して被測定
系を介して伝播する測定光路と被測定系を介さずに伝播
する内部参照光路とに分岐する分岐手段と、前記測定光
路及び内部参照光路を介した光を交互に受けて所定の信
号を出力する第１及び第２の受光部と、測定光路を介し
て第１の受光手段にて受光した光と内部参照光路を介し
て第２の受光手段にて受光した光との伝播遅延時間差、
及び測定光路を介して第２の受光手段にて受光した光と
内部参照光路を介して第１の受光手段にて受光した光と
の伝播遅延時間差を交互に算出する時間差算出手段と、
該時間差算出手段で交互に算出された伝播遅延時間差の
夫々の差を演算して伝播遅延時間を求める演算手段とを
有することを特徴とする光学的距離測定装置。(1) In a device that measures the distance to a reflector based on the propagation delay time from the light output to the reception of the reflected light by the reflector, there is a light emitting part that outputs light in time division, and a time division from the light emission part. branching means for branching each of the output lights into a measurement optical path that propagates through the measured system and an internal reference optical path that propagates without passing through the measured system; first and second light receiving units that alternately receive the light transmitted through the optical path and output a predetermined signal; The propagation delay time difference between the light received by the means,
and time difference calculating means for alternately calculating the propagation delay time difference between the light received by the second light receiving means via the measurement optical path and the light received by the first light receiving means via the internal reference optical path;
1. An optical distance measuring device comprising a calculation means for calculating the propagation delay time by calculating the differences between the propagation delay time differences alternately calculated by the time difference calculation means.
ることを特徴とする特許請求の範囲第１項に記載の光学
的距離測定装置。(2) The optical distance measuring device according to claim 1, wherein the branching means comprises a non-electrical and mechanical element.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59266278A JPS61145476A (en) | 1984-12-19 | 1984-12-19 | Optical range finder |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59266278A JPS61145476A (en) | 1984-12-19 | 1984-12-19 | Optical range finder |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61145476A true JPS61145476A (en) | 1986-07-03 |
| JPH0550710B2 JPH0550710B2 (en) | 1993-07-29 |
Family
ID=17428736
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59266278A Granted JPS61145476A (en) | 1984-12-19 | 1984-12-19 | Optical range finder |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61145476A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0325182U (en) * | 1989-07-20 | 1991-03-14 | ||
| EP0603826A1 (en) * | 1992-12-21 | 1994-06-29 | Kabushiki Kaisha Topcon | Optical distance meter |
| WO2007020856A1 (en) * | 2005-08-17 | 2007-02-22 | Hitachi, Ltd. | Method and equipment for measuring displacement, stage equipment and probe microscope |
| JP2007127541A (en) * | 2005-11-04 | 2007-05-24 | Sokkia Co Ltd | Electronic distance meter |
| WO2013084616A1 (en) * | 2011-12-05 | 2013-06-13 | 株式会社日立製作所 | Distance measurement method and device, and shape measurement device in which distance measurement device is installed |
-
1984
- 1984-12-19 JP JP59266278A patent/JPS61145476A/en active Granted
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0325182U (en) * | 1989-07-20 | 1991-03-14 | ||
| EP0603826A1 (en) * | 1992-12-21 | 1994-06-29 | Kabushiki Kaisha Topcon | Optical distance meter |
| WO2007020856A1 (en) * | 2005-08-17 | 2007-02-22 | Hitachi, Ltd. | Method and equipment for measuring displacement, stage equipment and probe microscope |
| JP2007051900A (en) * | 2005-08-17 | 2007-03-01 | Hitachi Ltd | Displacement measuring method, instrument therefor, stage device, and probe microscope |
| US20090210971A1 (en) * | 2005-08-17 | 2009-08-20 | Toshihiko Nakata | Displacement Measurement Method and Apparatus Thereof, Stage Apparatus, and Probe Microscope |
| US8284406B2 (en) | 2005-08-17 | 2012-10-09 | Hitachi, Ltd. | Displacement measurement method and apparatus thereof, stage apparatus, and probe microscope |
| US20120327429A1 (en) * | 2005-08-17 | 2012-12-27 | Toshihiko Nakata | Displacement Measurement Method and Apparatus Thereof, Stage Apparatus, and Probe Microscope |
| US8629985B2 (en) | 2005-08-17 | 2014-01-14 | Hitachi, Ltd. | Displacement measurement method and apparatus thereof, stage apparatus, and probe microscope |
| JP2007127541A (en) * | 2005-11-04 | 2007-05-24 | Sokkia Co Ltd | Electronic distance meter |
| WO2013084616A1 (en) * | 2011-12-05 | 2013-06-13 | 株式会社日立製作所 | Distance measurement method and device, and shape measurement device in which distance measurement device is installed |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0550710B2 (en) | 1993-07-29 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4356396A (en) | Fiber optical measuring device with compensating properties | |
| EP0646767B1 (en) | Interferometric distance measuring apparatus | |
| US5657405A (en) | Optical fiber sensor for measuring pressure or displacement | |
| EP2329218B1 (en) | Compact fiber-optic geometry for a counter chirp fmcw coherent laser radar | |
| CN111007483A (en) | Laser radar based on silicon optical chip | |
| CA1306524C (en) | Optical position sensor | |
| JP2008531993A (en) | Compact fiber optic geometry for inverse chirped FMCW coherent laser radar | |
| EP0793079A2 (en) | Fiber coupled interferometric displacement sensor | |
| EP1203211A1 (en) | Method and device for fibre-optical measuring systems | |
| US6847437B2 (en) | Laser anemometer | |
| US6329648B1 (en) | Phase locked loop fiber optic sensor system | |
| JPH0726890B2 (en) | Optical fiber effective refractive index measuring device | |
| US5504577A (en) | Method and apparatus for measuring meteorological visibility and scattering of light, said apparatus utilizing common optics for transmission and reception | |
| JPH03180704A (en) | Laser interference gauge | |
| JPS61145476A (en) | Optical range finder | |
| JPH0829128A (en) | Physical-quantity measuring apparatus, and measuring instrument thereof | |
| US5747793A (en) | Variable light source compensated optical fiber sensing system | |
| US5781305A (en) | Fiber optic transmissometer | |
| JPS61145403A (en) | Optical detector | |
| JPH11295153A (en) | Wavelength detecting device | |
| US5233176A (en) | Precision laser surveying instrument using atmospheric turbulence compensation by determining the absolute displacement between two laser beam components | |
| JPS60138484A (en) | Distance measuring device | |
| JPS61272677A (en) | Measuring instrument for length of optical path | |
| JPS61270683A (en) | Light applied measuring instrument | |
| JPH0435997Y2 (en) |