JPS61145413A - Sensing apparatus - Google Patents

Sensing apparatus

Info

Publication number
JPS61145413A
JPS61145413A JP59267686A JP26768684A JPS61145413A JP S61145413 A JPS61145413 A JP S61145413A JP 59267686 A JP59267686 A JP 59267686A JP 26768684 A JP26768684 A JP 26768684A JP S61145413 A JPS61145413 A JP S61145413A
Authority
JP
Japan
Prior art keywords
light
group
optical fibers
sensing
section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP59267686A
Other languages
Japanese (ja)
Inventor
Akihiko Oe
大江　昭彦
Tetsuo Imaida
今飯田　哲夫
Masatoshi Toda
正利 戸田
Masayoshi Komiya
正快 小宮
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Rayon Co Ltd
Original Assignee
Mitsubishi Rayon Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Rayon Co Ltd filed Critical Mitsubishi Rayon Co Ltd
Priority to JP59267686A priority Critical patent/JPS61145413A/en
Publication of JPS61145413A publication Critical patent/JPS61145413A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/268—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light using optical fibres
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Light Guides In General And Applications Therefor (AREA)
  • Optical Fibers, Optical Fiber Cores, And Optical Fiber Bundles (AREA)
  • Optical Transform (AREA)

Abstract

PURPOSE:To enable simultaneous sensing of divergent positions of a plurality of specimens, by constructing the sensing unit with a group of light-sending optical fibers with one end bundled and the other one, branched off into a plurality of sections and a group of light-receiving optical fibers. CONSTITUTION:The other end 21B of a group 21 of light-sending optical fibers is fixed with top and bottom layers and the other end 22B of a group 22 of light-receiving optical fibers are fixed in layers and a detecting end is arranged alternatedly or in circular form or in layers. A beam of light from a light-source 1 is irradiated from one end 21A of the group 21 and leaves the other end 21B. Wen a specimen is located on the detecting end of the other end 21B, a reflected beam enters from the other end 22B of the fiber 22 and leaves one end 22A. And, the leaving beam of light is photographed with a cameral of light-receiving unit 3 for detection. As the group of fibers 22 is provided with 5 detecting ends, a simultaneous sensing of 5 specimens becomes available. And, in the case of a rolling and zigzag running specimen, as any one of detecting ends I-V and also an amplitude can be detected, detection of the specimen by following the same procedures become possible.

Description

【発明の詳細な説明】 （産業上の利用分野） 本発明は、光ファイバーを用いたセンシング装置に関す
るものである。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a sensing device using optical fibers.

（従来の技術） （従来の技術） 走行あるいは移動している物体の存在や状態を検知する
場合、最近は光ファイバーを用いるセンシング装置が用
いられるようになっている。(Prior Art) (Prior Art) Sensing devices using optical fibers have recently been used to detect the presence and state of running or moving objects.

このようなセンシング装置は、対をなす送光用光ファイ
バーと受光用光ファイバーとを設置し、１つの定められ
た位置において被センシング物の検知を行なうものが一
般的である。Such a sensing device generally has a pair of optical fibers for transmitting light and optical fibers for receiving light, and detects an object to be sensed at one predetermined position.

（発明が解決しようとする問題点） ところがこのように１対１の送受光用ファイバーを組に
してセンシング装置を構成すると、多数本並列して走行
する糸条の糸切れを検知する場合、個々に光源と受光装
置とを必要とし、装置全体が大規模となると共に１個々
のファイバーの配置が煩雑化する難点があった。(Problem to be Solved by the Invention) However, when a sensing device is constructed by combining one-to-one light transmitting and receiving fibers in this way, it is difficult to detect yarn breakage in a large number of yarns running in parallel. This method requires a light source and a light receiving device, making the entire device large-scale and complicating the arrangement of each fiber.

また単数のもののセンシングにおいても、定まった位置
で検出しようとすると、走行する糸条やエンドレスベル
ト上の物体の検出のように若干の横振れや蛇行により検
出位置がずれた場合、これに対応することができず、従
って満足なセンシングができない憾みがあった。In addition, when sensing a single object, if you try to detect it at a fixed position, the detection position may shift due to slight lateral vibration or meandering, such as when detecting a running thread or an object on an endless belt. Therefore, there was a regret that satisfactory sensing could not be achieved.

本発明はこのような状況に鑑み、被センシング物が多数
あって広がりのある位置を同時的にセンシングしたり、
位置がずれた場合においてもセンシングができる装置を
提供しようとするものである。In view of this situation, the present invention is designed to simultaneously sense a wide range of locations where there are a large number of objects to be sensed,
The aim is to provide a device that can perform sensing even when the position is shifted.

（問題点を解決するための手段） すなわち本発明の要旨とするところは、光源部とセンシ
ング部と受光部とからなるセンシング装置において、一
端を集束し他端を複数に分岐させた送光用光フアイバー
群と受光用光フアイバー群と忙よってセンシング部を構
成し、このうちの送光用光フアイバー群の集束した一端
を光源部に対設すると共Ｋ、受光用フアイバー群の集束
した一端を受光部に対設し、しかもそれぞれの分岐した
他端同志を集合させて検出端を構成したことを特徴とす
るセンシング装置にある。(Means for Solving the Problems) That is, the gist of the present invention is to provide a sensing device comprising a light source section, a sensing section, and a light receiving section, in which one end is converged and the other end is branched into a plurality of light beams. A group of optical fibers and a group of light-receiving optical fibers constitute a sensing section, and one end of the group of light-transmitting optical fibers is placed opposite to the light source section. A sensing device is provided which is disposed opposite to a light receiving section, and further comprises a detecting end formed by gathering the other end of each branch.

以下、本発明を実施例の図面に従って説明する。The present invention will be described below with reference to drawings of embodiments.

第１図は本発明の一実施例を示すもので、図中（１）が
光源部、（２）がセンシング部、（３）が受光部である
。本発明はこのようなセンシング装置において、光ファ
イバーからなる独得のセンシング部（２）を構成したこ
とを特徴とするものである。FIG. 1 shows an embodiment of the present invention, in which (1) is a light source section, (2) is a sensing section, and (3) is a light receiving section. The present invention is characterized in that such a sensing device has a unique sensing section (2) made of an optical fiber.

すなわち本発明のセンシング部＋２１は、ともに一端を
集束し他端を複数に分岐させた送光用光フアイバー群（
２１）および受光用光フアイバー群（２２）で構成して
いる。セして送光州党フアイバー群（２１）の集束した
一端（２１Ａ）を光源（１）に対設すると共に、受光用
光フアイバー群（２２）の集束した一端（２２Ａ）を受
光部（３）に対設させている。In other words, the sensing unit +21 of the present invention includes a group of optical fibers for light transmission (both of which have one end converged and the other end branched into a plurality of parts).
21) and a group of light receiving optical fibers (22). The focused end (21A) of the light transmitting optical fiber group (21) is placed opposite to the light source (1), and the focused end (22A) of the light receiving optical fiber group (22) is connected to the light receiving section (3). It is set up opposite.

またそれぞれの光フアイバー群（２１）、（２２）の分
岐した他端（２１Ｂ）　、　（２２Ｂ）同志は、これを
集合させてそれぞれの検出端を構成している。第１図の
例では、それぞれの光フアイバー群（２１）、（２２）
の他端を５個に発端させ、（Ｉ）〜Ｍの検出端を構成し
ているが、勿論検出端の数は、目的に応じ適宜増減させ
ることができる。なおこの例において、送光用元フィバ
一群（２１）の一端（２１Ａ）はアトランダムに、また
受光用光フアイバー群（２２）の一端（２２Ａ）　ｔＸ
層状に配列しており、受光部（３）としては固体カメラ
を用いている。Further, the branched other ends (21B) and (22B) of the respective optical fiber groups (21) and (22) are assembled to form respective detection ends. In the example of FIG. 1, each optical fiber group (21), (22)
Five other ends are used to form the detection ends (I) to M, but of course the number of detection ends can be increased or decreased as appropriate depending on the purpose. In this example, one end (21A) of the group of original fibers for light transmission (21) is at random, and one end (22A) of the group of optical fibers for light reception (22) is tX
They are arranged in layers, and a solid-state camera is used as the light receiving section (3).

また第１図に示した例では、送光用光フアイバー群（２
１）の他端（２１Ｂ）を上下層に配し、この間に受光用
光フアイバー群（２２）の他端（２２Ｂ）を配して層状
にしているが、この検出端は１４２図＋Ａ１．（Ｂｌの
如く交互に、あるいは（Ｏの如く円形で層状に配置して
も良い。なお同図において便宜上送光用光フアイバー群
（２１）の光７アイパーに斜線を施している。In addition, in the example shown in Fig. 1, the optical fiber group for light transmission (2
1) The other end (21B) is arranged in the upper and lower layers, and the other end (22B) of the light-receiving optical fiber group (22) is arranged between them to form a layered structure. They may be arranged alternately as shown in (Bl) or circularly in layers as shown in (O. In the figure, for convenience, the light 7 eyepers of the light transmitting optical fiber group (21) are shaded.

本発明は以上のようになっているので、光源部（１）か
ら発せられた光は、送光用光フアイバー群（２１）の一
端（２１Ａ）から入射し、この他端（２１Ｂ）から出射
する。この他端（２１Ｂ）の検出端に被センシング物が
存在すると、その物によって反射された光が受光用光フ
ァイバー（２２）の他端（２２Ｂ）から入射し、導かれ
て一端（２２Ａ）から出射する。Since the present invention is configured as described above, the light emitted from the light source section (1) enters from one end (21A) of the light transmission optical fiber group (21) and exits from the other end (21B). do. When an object to be sensed exists at the detection end of the other end (21B), the light reflected by the object enters the other end (22B) of the light receiving optical fiber (22), is guided, and exits from the one end (22A). do.

そしてこの出射された光を受光部（３）としての固体カ
メラで撮影し、被センシング物の検出な行なうが、被セ
ンシング物が存在しないときは、反射が起らず、従って
受光用光フアイバー群（２２）には光は入射しない。第
１図の例では、（１１〜（１）の５つの検出端を備えて
いるので、同時に５個のセンシングが可能となる。また
、横振れや蛇行する被センシング物の場合には、（１）
から■までの検出端のいずれかが検出することとなり、
その振幅も検知できることとなり、同様にして被センシ
ング部の大きさをセンシングすることが可能となる。The emitted light is then photographed by a solid-state camera serving as a light receiving section (3) to detect an object to be sensed. However, when there is no object to be sensed, no reflection occurs, and therefore the light receiving optical fiber group No light is incident on (22). In the example shown in Fig. 1, five detection terminals (11 to (1)) are provided, so five detection terminals can be sensed at the same time.Furthermore, in the case of an object to be sensed that oscillates sideways or meanders, ( 1)
One of the detection ends from to ■ will be detected,
The amplitude can also be detected, and the size of the sensing target portion can be sensed in the same way.

第３図および第４図は本発明の別の実施例を示すもので
、第３図は光源部（１）としてレーザー装置を、また受
光部（３）として光電子増倍管を用いた例を示している
。ここで（１１）は気体レーザや半導体レーデ−等のレ
ーザー１．　（１２）は回転多面鏡、　　（１３）は補
正レンズであり、検出端は５個設けられている。なお、
この例における送光用光フアイバー群（２１）の一端（
２１Ａ）は２層に配列して集束されており、他端（２１
Ｂ）　ｆＺ第１図と同様層状に配列され、また受光用光
フアイバー群（２２）の他端（２２Ｂ）も層状に配列さ
れている。そして、この例においては光源部（１）とし
てのレーザー装置により、（Ｉｌ〜（至）の検出端に応
じ、送光甲光フアイバー群（２１）の一端（２１Ａ）を
順次センシングするようになっている。3 and 4 show another embodiment of the present invention, and FIG. 3 shows an example in which a laser device is used as the light source section (1) and a photomultiplier tube is used as the light receiving section (3). It shows. Here, (11) is a laser 1. such as a gas laser or a semiconductor radar. (12) is a rotating polygon mirror, (13) is a correction lens, and five detection ends are provided. In addition,
One end of the light transmission optical fiber group (21) in this example (
21A) are arranged and focused in two layers, and the other end (21A) is arranged in two layers and focused.
B) fZ They are arranged in a layered manner as in FIG. 1, and the other end (22B) of the light-receiving optical fiber group (22) is also arranged in a layered manner. In this example, the laser device as the light source section (1) sequentially senses one end (21A) of the light transmitting fiber group (21) according to the detection end (Il~(to)). ing.

また第４図の例は、第１図に示した装置をさらにコンパ
クトにしたもので、光源部（１）と受光’ｌｂ　ｆ３）
ヲ近接させて配置し、送光用光フアイバー群（２１）お
よび受光用光フアイバー群（２２）をオーバーラツプさ
せたものであるが、上記例と実質的に変癒るものではな
い。なお図中（４）は光源部（１）と受光部（３）の間
に設けた仕切り板である。The example in Figure 4 is a more compact version of the device shown in Figure 1, with a light source section (1) and a light receiving section ('lb f3).
Although the light transmitting optical fiber group (21) and the light receiving optical fiber group (22) are arranged close to each other and overlapped, this is not substantially different from the above example. Note that (4) in the figure is a partition plate provided between the light source section (1) and the light receiving section (3).

（発明の効果） 本発明は以上詳述した如き構成からなるものであるから
、複数の被センシング物を同時に効率的にセンシングす
ることができる利点を有しており、しかもその構成上被
センシング物の存在のみならずその大きさをセンシング
したり、あるいは横振れや蛇行する被センシング物をも
センシングすることができるセンシング装＃を提供する
ことができる利点がある。(Effects of the Invention) Since the present invention has the configuration as described in detail above, it has the advantage of being able to efficiently sense a plurality of objects to be sensed at the same time. There is an advantage in that it is possible to provide a sensing device that can sense not only the presence but also the size of an object, or even an object to be sensed that is swaying or meandering.

【図面の簡単な説明】[Brief explanation of drawings]

第１図は本発明の一実施例な示す斜視図、第２図は検出
端を構成する光ファイバーの配列の他の例を示す部分的
な平面図、第３図および第４図は本発明の他の実施例を
示す斜視図である。 （１）・・・・・・・・・・・・・・・光源部（２）・
・・・・・・・・・・・・・・センシング部（２１）・
・・・・・・・・送光用光フアイバー群（２１Ａ）・・
・・・・・・・一端 （２１Ｂ）・・・・・・・・・他端 （２２）・・・・・・・・・受光用光フアイバー群（２
２Ａ）・・・・・・・・・一端 （２２Ｂ）・・・・・・・・・他端 （３）・・・・・・・・・・・・・・・受光部１７図 為３図Fig. 1 is a perspective view showing one embodiment of the present invention, Fig. 2 is a partial plan view showing another example of the arrangement of optical fibers constituting the detection end, and Figs. 3 and 4 are a perspective view showing one embodiment of the present invention. FIG. 7 is a perspective view showing another embodiment. (1)・・・・・・・・・・・・Light source part (2)・
・・・・・・・・・・・・・・・Sensing part (21)・
...... Optical fiber group for light transmission (21A)...
......One end (21B)...Other end (22)...Group of optical fibers for light reception (2
2A)......One end (22B)......Other end (3)......Light receiving part 17 purpose 3 figure

Claims (1)

【特許請求の範囲】[Claims] 光源部とセンシング部と受光部とからなるセンシング装
置において、一端を集束し他端を複数に分岐させた送光
用光フアイバー群と受光用光フアイバー群とによつてセ
ンシング部を構成し、このうちの送光用光フアイバー群
の集束した一端を光源部に対設すると共に、受光用フア
イバー群の集束した一端を受光部に対設し、しかもそれ
ぞれの分岐した他端同志を集合させて検出端を構成した
ことを特徴とするセンシング装置。In a sensing device consisting of a light source section, a sensing section, and a light receiving section, the sensing section is constituted by a group of optical fibers for transmitting light and a group of optical fibers for receiving light, each of which has one end converged and the other end branched into a plurality of parts. One focused end of our light transmitting optical fiber group is placed opposite to the light source section, and one focused end of the light receiving fiber group is placed opposite to the light receiving section, and the other end of each branch is brought together for detection. A sensing device characterized in that an end is configured.
JP59267686A 1984-12-19 1984-12-19 Sensing apparatus Pending JPS61145413A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59267686A JPS61145413A (en) 1984-12-19 1984-12-19 Sensing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59267686A JPS61145413A (en) 1984-12-19 1984-12-19 Sensing apparatus

Publications (1)

Publication Number Publication Date
JPS61145413A true JPS61145413A (en) 1986-07-03

Family

ID=17448120

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59267686A Pending JPS61145413A (en) 1984-12-19 1984-12-19 Sensing apparatus

Country Status (1)

Country Link
JP (1) JPS61145413A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5319856B1 (en) * 2012-06-13 2013-10-16 株式会社シンクロン Film thickness measuring apparatus and film forming apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5319856B1 (en) * 2012-06-13 2013-10-16 株式会社シンクロン Film thickness measuring apparatus and film forming apparatus
WO2013186879A1 (en) * 2012-06-13 2013-12-19 株式会社シンクロン Device for measuring film thickness and device for forming film

Similar Documents

Publication Publication Date Title
CN101156098B (en) Optimized reconfigurable optical add-drop multiplexer architecture with mems-based attenuation or power management
US5243402A (en) Optical inspection apparatus
CN107063127A (en) Optical measuring device
US11796713B2 (en) Device and method for optically surveilling at least one area
US5862285A (en) Multichannel optical fiber bundle with ordered structure in its sensitive probe tip
GB2134249A (en) Fault detection apparatus for a material web
US5512741A (en) Target acquisition optoelectronic system with a very wide field
JPH02281129A (en) Optical system for detecting characteristics of progressing sheet material
JPS5821702A (en) Image-forming element using both side reflection band of minute width
JPH02110356A (en) Defect detecting apparatus using linear light source
JPS61145413A (en) Sensing apparatus
US3604802A (en) Wide angle photoelectric position detecting device utilizing a conical truncated optical condenser
KR100876461B1 (en) Laser optical sensing system with training for target characteristics
JP2004533609A (en) System and method for optically sensing movement of an object
CA1241856A (en) Light guide apparatus
JPH09288223A (en) Fiber optical plate
JPS63173940A (en) Optical type defect detector
JP2581555B2 (en) Light receiving position detection method using optical fiber
JPS63302349A (en) Apparatus of inspecting pattern
JP4723838B2 (en) Surface defect inspection equipment
JPH04215045A (en) Laser inspecting device
JPS6358369B2 (en)
JPH01267603A (en) Optical fiber coupler packaging body and production thereof
KR940006344B1 (en) Optics for 2-dimensional perfect shuffle switching network
JPS59128688A (en) Optical measurement system