JPS61133848A - Grid inspector - Google Patents
Grid inspectorInfo
- Publication number
- JPS61133848A JPS61133848A JP59257179A JP25717984A JPS61133848A JP S61133848 A JPS61133848 A JP S61133848A JP 59257179 A JP59257179 A JP 59257179A JP 25717984 A JP25717984 A JP 25717984A JP S61133848 A JPS61133848 A JP S61133848A
- Authority
- JP
- Japan
- Prior art keywords
- ray
- grid
- angle
- collimator
- intensity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007689 inspection Methods 0.000 claims abstract description 11
- 238000005259 measurement Methods 0.000 abstract description 10
- 238000000034 method Methods 0.000 description 9
- 238000010586 diagram Methods 0.000 description 4
- 230000007547 defect Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000002950 deficient Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
- G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Apparatus For Radiation Diagnosis (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明は、医療用１Ｍ撮影に使用するグリッドの製品
検量、製造検査装置に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a product calibration and manufacturing inspection device for grids used in medical 1M imaging.
従来は第４図に示すようｌこＸ線管１からのＸ線ビーム
２をグリッド８１こ照射し透過Ｘ線をｘ＃フィルム４に
焼付け、検査員が目視で検査している。Conventionally, as shown in FIG. 4, an X-ray beam 2 from an X-ray tube 1 is irradiated onto a grid 81, and the transmitted X-rays are burned onto an x# film 4, which is visually inspected by an inspector.
この方法では検査員の個人差や、検査洩れ、フィルムの
現像時間、製造工場での検査不能等の問題がある。This method has problems such as individual differences among inspectors, omissions in inspection, film development time, and inability to inspect at manufacturing plants.
グリッドの製品不良は第８図及び第１図に示す次の項目
の
第８図の間隔不良 （狭い）（１０）
第８図の異物の存在 （１１）
第８図の間隔不良 （広い）（１２）
第１図に示す角度（３）が正しく放射状になって犠いの
４つにまとめられる。Product defects in the grid include the following items shown in Figure 8 and Figure 1: Incorrect spacing in Figure 8 (Narrow) (10) Presence of foreign matter in Figure 8 (11) Incorrect spacing in Figure 8 (Wide) ( 12) The angle (3) shown in Figure 1 is correctly radial and can be grouped into four sacrificial angles.
この項目の検査の自動化の方法と手段を考案するのがこ
の発明の目的である。It is an object of the present invention to devise a method and means for automating the inspection of this item.
つまり、ＸＹステージを有し、検査するべきグリッド全
体にわたり、移動、測定が可能なかつコリメータの角度
調整が可能なＸ線検出器によりＸ線強度全測定し、グリ
ッドの不良を検出するものである。That is, the system has an XY stage and measures the entire X-ray intensity over the entire grid to be inspected using an X-ray detector that can be moved and measured and whose collimator angle can be adjusted to detect defects in the grid.
次に各不良の検出方法をさらに詳しく説明する（１）正
しい角度になっている事の検査第一に示す構成でＸＹス
テージ６で測定位置を移動し角度調整装＃５で角度を変
えＸ線強度が最大になる角度を求める、順次ＸＹステー
・ジを移動し同様な測定を行なりあらかじめ設定されて
いるデータとつき合せ設計通りの角度になっているかを
検査する。Next, we will explain in more detail how to detect each defect. (1) Inspecting that the angle is correct First, move the measurement position with the XY stage 6 using the configuration shown in the first section, change the angle with the angle adjustment device #5, and use the X-ray The angle at which the intensity is maximum is determined. The XY stage is sequentially moved and similar measurements are made to check whether the angle is as designed by checking with preset data.
（２）間隔不良と異物の検査
次にコリメータ４ｆｔＸ線テレビカメラ７の前から移動
し、Ｘ線テレビカメラ７でとらえたグリッド像、第８図
の像よりブリットの濃淡間隔と異物像をコンピュータに
読み込みあらかじめ設定されている間隔と異物の有無に
より合否の判定をする。以上は主に特許請求の範囲第２
項について説明しである。(2) Inspection for poor spacing and foreign objects Next, move the collimator 4ft from in front of the X-ray television camera 7, and use the grid image captured by the X-ray television camera 7 and the image in Figure 8 to calculate the density spacing of the bullets and the foreign object image on a computer. A pass/fail judgment is made based on the read interval and the presence or absence of foreign objects. The above is mainly the second claim.
This section explains the section.
次に特許請求の範囲第２項について説明する。Next, Claim 2 will be explained.
特許請求の範囲（２）の方法の手段説明第１図において
、この場Ｘ線テレビカメラ７に代えて細いスリットを有
する検出器を使用する。Explanation of means for the method according to claim (2) In FIG. 1, the in-situ X-ray television camera 7 is replaced by a detector having a narrow slit.
正しい角度になっている事の検査はＸ線テレビカメラを
用いた場合と同様な処理である１間隔不良と異物の検査
方法についてはＫＹステージにより検出器を移動しＸ線
信号強度を測定制御装置８に読み込みあらかじめ設定さ
れている値より間隔不良と異物の有無を判定する。この
方法ではＸ線テレビカメラ方式に比較してスキャンステ
ップを小さく取る必要がある。Inspecting that the angle is correct is the same process as using an X-ray television camera.To inspect for defective intervals and foreign objects, a KY stage is used to move the detector and measure the X-ray signal intensity using a control device. 8 and determines the presence or absence of poor spacing and foreign matter based on preset values. This method requires a smaller scan step than the X-ray television camera method.
以下にこの発明の実施例を図面にもとすいて説明する。 Embodiments of the present invention will be described below with reference to the drawings.
第１図において角度調整装置５を水平位置にセットしＸ
Ｙステージ６で検出器をＸ方向にスキャ７ ＬＸｔｈＪ
テレビカメラのＸ線信号強度〃Ｘ＃大になる位置を見つ
ける。この位置がブリッドの中心位置になる。次にステ
ージをＸ方向に測定有効面積以内の所定の距離だけ移動
する。移動後角度調整装置５でコリメータの角度を変え
Ｘ線強度が最大の位置を見つけ、あらかじめ装置に設定
されている値と比較し設定誤差以内かの判定を行な５、
次Ｊこコリメータ４をＸ線テレビカメラの前より移動し
Ｘ線強度のビデオ信号をＡＤ変換し測定制御装置８に取
り込み信号強度が第３図に示す間隔不良、異物の有＃ｉ
が所定の設定！＠月内かを判断する。これが一連の操作
であり次にコリメータ４をＸ線テレビカメラの前に移動
しＸ、Ｙステージにより次の測定位置へ移動し一連の測
定をくり返えす。In Figure 1, the angle adjustment device 5 is set in the horizontal position
Scan the detector in the X direction with Y stage 6 7 LXthJ
Find the position where the TV camera's X-ray signal strength〃X# is high. This position will be the center position of the bridge. Next, the stage is moved in the X direction by a predetermined distance within the effective measurement area. After moving, change the angle of the collimator using the angle adjustment device 5 to find the position where the X-ray intensity is maximum, and compare it with the value set in advance in the device to determine whether it is within the setting error 5.
Next, the collimator 4 is moved from in front of the X-ray television camera, and the video signal of the X-ray intensity is AD converted and taken into the measurement control device 8.
is the predetermined setting! @Determine whether it is within the month. This is a series of operations, and then the collimator 4 is moved in front of the X-ray television camera, moved to the next measurement position by the X and Y stages, and the series of measurements is repeated.
上記の方法でブリッドの自動検査が可能になりフィルム
を使用しないのでＩｌｆ室操作が不用ｌこなり製造工程
に検査工程をくみ込む事も可能になり生産性が向上する
と同時に、コリメータ角度調整機構とＸ線テレビカメラ
を組合せた事によりＸ線写真用グリッドの自動検査が行
なえるという効果がある。The above method makes it possible to automatically inspect the hybrid, and since no film is used, there is no need to operate the Ilf chamber.It is also possible to incorporate the inspection process into the manufacturing process, improving productivity.At the same time, the collimator angle adjustment mechanism The combination of an X-ray television camera has the effect of automatically inspecting the X-ray photographic grid.
第１図はこの発明にかかるグリッド検査装置の構成原理
図、第２図にグリッドサイズと測定範囲の略図、第８図
にＸｉテレビカメラが検出するＸ線信号図、第４図に従
来の検査方法を示す。
１・・Ｘ線発生器 １１・・異物不良２６・１Ｍビー
ム Ｊ２・・間隔不良（広い）ａ＠ａグリッド
４・・コリメータ
５・・角度調整装置
５− 、 Ｘ、Ｙステージ
７・、Ｘ線テレビカメラ、Ｘ線検出器
８・・測定、制御装置
９ＩｌｅＸ線フイルム
エ０・・間隔不良（狭い）
以 上
出願人 セイコー電子工業株式会社
第１図
’１ｍ 第２図
第３図
第４図
従来の撞査方ｊ去Fig. 1 is a diagram of the configuration principle of the grid inspection device according to the present invention, Fig. 2 is a schematic diagram of the grid size and measurement range, Fig. 8 is a diagram of the X-ray signal detected by the Xi television camera, and Fig. 4 is a diagram of the conventional inspection method. Show how. 1... X-ray generator 11... Foreign object defective 26. 1M beam J2... Poor spacing (wide) a@a grid 4... Collimator 5... Angle adjustment device 5-, X, Y stage 7... X-ray Television camera, X-ray detector 8...Measurement, control device 9Ile How to review
Claims (3)
動、測定が可能で、コリメータの角度調整が可能なＸ線
検出器を有するグリッド検査装置。(1) A grid inspection device that has an X- and Y-stage, is capable of moving and measuring over the entire grid, and has an X-ray detector that can adjust the collimator angle.
範囲第１項記載のグリッド検査装置。(2) The grid inspection device according to claim 1, wherein the X-ray detector is an X-ray television camera.
範囲第１項記載のグリッド検査装置。(3) The grid inspection device according to claim 1, wherein the X-ray detector has a fine slit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59257179A JPS61133848A (en) | 1984-12-04 | 1984-12-04 | Grid inspector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59257179A JPS61133848A (en) | 1984-12-04 | 1984-12-04 | Grid inspector |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61133848A true JPS61133848A (en) | 1986-06-21 |
Family
ID=17302777
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59257179A Pending JPS61133848A (en) | 1984-12-04 | 1984-12-04 | Grid inspector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61133848A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10275647B2 (en) | 2015-11-17 | 2019-04-30 | Fujifilm Corporation | Method, apparatus, and program for judging grid quality |
-
1984
- 1984-12-04 JP JP59257179A patent/JPS61133848A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10275647B2 (en) | 2015-11-17 | 2019-04-30 | Fujifilm Corporation | Method, apparatus, and program for judging grid quality |
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