JPS61126627A - Magnetic recording medium - Google Patents
Magnetic recording mediumInfo
- Publication number
- JPS61126627A JPS61126627A JP24794584A JP24794584A JPS61126627A JP S61126627 A JPS61126627 A JP S61126627A JP 24794584 A JP24794584 A JP 24794584A JP 24794584 A JP24794584 A JP 24794584A JP S61126627 A JPS61126627 A JP S61126627A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- recording medium
- lubricating oil
- magnetic recording
- magnetic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
Description
【発明の詳細な説明】
〔発明の利用分野〕
本発明は記録媒体に係り、特に磁気ディスク、磁気テー
ブルなどの磁気記録媒体に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a recording medium, and particularly to a magnetic recording medium such as a magnetic disk or a magnetic table.
近年、磁気記録媒体の分野では記録密度向上が最大の課
題となっている。このためには、従来から行われている
磁性粉末をバインダと共に塗布し乾−させて固定して磁
性媒体層を形成する方法では磁性採光てん車内上に限界
があり、磁性物質を直接薄膜化する方法が考案されてい
る
上記薄膜化方法としては、例えば蒸着、めっき、スパッ
タリングなどがある。これらの方法により形成した磁性
媒体薄膜は、一般に記録再生時にヘッドとの摺動により
摩耗し、脱落しやすく、かつ摩擦係数が高いためヘッド
を痛める。特にリジッドな磁気ディスクの場合には、ヘ
ッド浮上特性の劣下が起こシ、磁気テープではテープ走
行性不良の原因になる。In recent years, increasing recording density has become a major issue in the field of magnetic recording media. To achieve this, the conventional method of coating magnetic powder together with a binder, drying and fixing it to form a magnetic medium layer has its limits on the inside of the magnetic daylight trolley, so it is necessary to directly form a thin film of magnetic material. Examples of the above-mentioned thin film forming methods that have been devised include vapor deposition, plating, and sputtering. The magnetic medium thin film formed by these methods is generally worn out by sliding with the head during recording and reproduction, and easily falls off, and has a high coefficient of friction, which damages the head. In particular, in the case of a rigid magnetic disk, the head flying characteristics deteriorate, and in the case of a magnetic tape, it causes poor tape running performance.
そこで磁性媒体層上に保護層を設けて、長寿命化や走向
性向上をはかる工夫が種々性われている。Therefore, various efforts have been made to provide a protective layer on the magnetic medium layer to extend the service life and improve the magnetism.
例えば特開昭５７−１１６７７１には、イミド基を有す
る高分子をスパッタする方法が示されておシ、特開昭５
８−７７０３１には高分子化合物をターゲット材料とし
てスパッタする例がある。また、カーボンやＢＮ、 Ｍ
Ｏ８２等は以前から固体潤滑剤として知らｎており、こ
れらをスパッタや蒸着により薄膜化する方法もある。For example, JP-A-57-116771 discloses a method for sputtering polymers having imide groups;
No. 8-77031 has an example of sputtering using a polymer compound as a target material. Also, carbon, BN, M
O82 and the like have long been known as solid lubricants, and there is also a method of forming a thin film using sputtering or vapor deposition.
一方、摺動面に滑性を与える潤滑油としてフッ素系潤滑
油を用いることがあシ、ＫＲＹＴＯＸ■。On the other hand, KRYTOX ■ requires the use of fluorine-based lubricating oil as a lubricating oil that provides lubricity to sliding surfaces.
ＶＯＮＢＬＩＮ■等が市販されている。VONBLIN■ etc. are commercially available.
我々は上記の方法を各々試みたが１有機高分子やカーボ
ンなどをスパッタした場合には保護膜なしの場合に比べ
確かに摺動時の摩耗が軽減された。We have tried each of the above methods, and found that when organic polymers, carbon, etc. were sputtered, the wear during sliding was certainly reduced compared to when no protective film was used.
しかし長時間の摺動により膜はがれを生じ、摩耗粉が急
増することにより磁性媒体層も破壊され寿命となるため
、実用上はさらに寿命を延ばす必要があった。また潤滑
油を磁性層上に塗布した場合には、厚く塗布するとヘッ
ド粘着が起こり、薄く塗布すると潤滑効果が小さく十分
な効果が得られなかった。However, due to long-term sliding, the film peels off, and the magnetic medium layer is also destroyed due to a rapid increase in abrasion particles, resulting in the end of the service life, so it is necessary to further extend the service life in practice. Further, when lubricating oil was applied on the magnetic layer, if it was applied thickly, head sticking occurred, and if it was applied thinly, the lubricating effect was small and a sufficient effect could not be obtained.
本発明の目的は上記した従来技術の欠点をなくし、対ヘ
ツド摺動において潤滑性に優れ、摩耗の少ない磁気記録
媒体を提供することにある。SUMMARY OF THE INVENTION An object of the present invention is to eliminate the above-mentioned drawbacks of the prior art and to provide a magnetic recording medium that has excellent lubricity and less wear when sliding against a head.
上記目的は、磁性層上に硬質カーボン膜と含フッ素潤滑
油の複合層を設けることにより達成される。The above object is achieved by providing a composite layer of a hard carbon film and a fluorine-containing lubricating oil on the magnetic layer.
この複合層により、カーボン層単独あるいは潤滑油層単
独の場合に比べ飛躍的な耐摩耗性改善が実現されること
がわかった。It has been found that this composite layer achieves a dramatic improvement in wear resistance compared to the case of a carbon layer alone or a lubricant layer alone.
一般に潤滑油による潤滑機構は、摺動面と被摺動面との
間に油膜の層ができた場合に流体潤滑となシ、固体同志
が接触しないため理想的な潤滑作用が達成される。しか
るに高密度磁気記録媒体においては、ヘッドと媒体の間
隔を広げることは特性劣下の原因となるため好ましくな
い。特に本発明に係わる薄膜磁気記録媒体では、潤滑層
は１１μ情以下、好ましくは０．０３μ倶以下とされる
。In general, a lubrication mechanism using lubricating oil uses fluid lubrication when an oil film is formed between the sliding surface and the sliding surface, and ideal lubrication is achieved because solid objects do not come into contact with each other. However, in high-density magnetic recording media, increasing the distance between the head and the medium is not preferable because it causes deterioration in characteristics. In particular, in the thin film magnetic recording medium according to the present invention, the lubricating layer has a thickness of 11 μm or less, preferably 0.03 μm or less.
しかし、このよりな卑さでは油膜の均一性が保てず、部
分的に破断が生じて摺動面と被摺動面が部分的に接触す
るいわゆる境界摩耗の領域となる。However, with this coarser oil film, the uniformity of the oil film cannot be maintained, resulting in a region of so-called boundary wear where partial breakage occurs and the sliding surface and the slidable surface partially contact each other.
この領域においては油の潤滑特性が十分に生かされず、
摩擦係数が大きくなり、かつ被摺動面の摩耗が生じ、記
録特性の劣下や工２−発生又は走行性不良の原因となる
。In this area, the lubricating properties of oil are not fully utilized.
The coefficient of friction becomes large and the sliding surface is abraded, resulting in deterioration of recording characteristics, occurrence of cracks, or poor running performance.
本発明においては潤滑油層の下地となる硬質カーボン層
がそれ自身潤滑性および耐摩耗性を有するため境界潤滑
における固体間の摺動を大巾に軽減し、潤滑油の効果を
助けていることが飛躍的な特性向上の第一の原因である
。また、これと逆に潤滑油の存在によりカーボン層の摩
耗作用が軽減されていることや含フッ素潤滑油のカーボ
ン膜に対、するなじみ性等いくつかの原因の組み合わせ
により本発明の効果が発現されていると考えられる。In the present invention, the hard carbon layer underlying the lubricating oil layer has its own lubricity and wear resistance, so it greatly reduces the sliding between solids during boundary lubrication and helps the lubricating oil's effectiveness. This is the primary reason for the dramatic improvement in properties. Conversely, the effects of the present invention are achieved due to a combination of several factors, including the fact that the presence of lubricating oil reduces the abrasive effect of the carbon layer, and the compatibility of fluorine-containing lubricating oil with carbon films. It is thought that this has been done.
なお硬質カーボン層の厚嘔と潤滑油層の厚さは共に０．
００１〜０．１ａｍであシ、好ましくは０．０１〜０．
０６μ惜である。The thickness of the hard carbon layer and the lubricant layer are both 0.
001 to 0.1 am, preferably 0.01 to 0.00 am.
06μ is a shame.
本発明における硬質カーボン膜はカーボン又はグラファ
イト状カーボン素材を不活性ガス又は不活性ガスと炭化
水素ガスの混合ガス雰囲気中でスパッタするか炭化水素
ガスを放電エネルギーにより分解反応させ、基体上に堆
積させることにより形成される。スパッタの場合ガス圧
が高いと膜の硬度が低下するので０．０１Ｔｏｒｒ以下
が好ましい。The hard carbon film in the present invention is deposited on a substrate by sputtering carbon or a graphite-like carbon material in an atmosphere of an inert gas or a mixed gas of an inert gas and a hydrocarbon gas, or by decomposing and reacting a hydrocarbon gas with discharge energy. It is formed by In the case of sputtering, if the gas pressure is high, the hardness of the film decreases, so it is preferably 0.01 Torr or less.
スパッタの方法には直流スパッタ、交流スパッタ、高周
波スパッタ、直流マグネトロンスパッタ、高周波マグネ
トａンスバッタ、イオンビームスパッタ等があり、いず
れでもよいが、硬質な膜を形成するためにはエネルギー
密度を高くするのがよく、たとえば高周波マグネトロン
スパッタではターゲット面積あたシの投入電力はＩ Ｗ
／ｃｍ 以上、好ましくは１．５〜０ 、３ ＶＪ／
ｃｍである。また、基体を保持する側の電極にθ〜−３
ＫＶの範囲より選ばれる電圧を印加しつつススバッタす
ることは膜の硬度を増大しかつ膜と基体との密着性を向
上させる効果がある。Sputtering methods include DC sputtering, AC sputtering, high-frequency sputtering, DC magnetron sputtering, high-frequency magnetron sputtering, and ion beam sputtering, and any of these methods may be used, but in order to form a hard film, it is necessary to increase the energy density. For example, in high-frequency magnetron sputtering, the input power per target area is I W
/cm or more, preferably 1.5 to 0,3 VJ/
cm. In addition, the electrode on the side that holds the substrate has θ~-3
Sputtering while applying a voltage selected from the KV range has the effect of increasing the hardness of the film and improving the adhesion between the film and the substrate.
上記スパッタで形成された炭素膜は′＆度は大であるが
しはしは内部応力のために変形し基体からはがれたシ亀
裂を生じたりする。これを防ぐためにはスパッタ雰囲気
に炭化水素ガス゛を混入するのがよい。上記炭化水素ガ
スとしては、メタン、エタン、プロパン、ブタン、イソ
ブタン、シクロブタン、ペンタン、インペンタン、ナオ
ベンタン。Although the carbon film formed by the above sputtering process has a high degree of strength, the carbon film deforms due to internal stress and may peel off from the substrate, causing cracks. In order to prevent this, it is preferable to mix hydrocarbon gas into the sputtering atmosphere. Examples of the hydrocarbon gas include methane, ethane, propane, butane, isobutane, cyclobutane, pentane, impentane, and naobentane.
ヘキサン、ベンゼン、トルエン等を用いることができる
。このようにしてスパッタ形成された膜には少量の水素
が含まれるが、水素の比率が多いものは硬度が減少する
ため原子数の比で炭素の３０％以下とするものが好まし
い。Hexane, benzene, toluene, etc. can be used. Although a small amount of hydrogen is contained in the film formed by sputtering in this manner, a film with a large proportion of hydrogen decreases hardness, so it is preferable that the proportion of hydrogen is 30% or less of that of carbon in terms of the ratio of the number of atoms.
一方、炭化水素ガスを放電エネルギーで分解する場合に
は真空容器中に炭化水素ガスを単独ま九は不活性ガスと
１ ： ０．１ないし１：２０の割合で混合して導入し
、ガス圧を０．０１〜１Ｔｏｒｒの中から選ばれた値に
保持し、容器内部に放電を発生させて該炭化水素を分解
活性化し、容器内に設置された被加工物基体表面に炭素
および水素から成る膜を堆積させる。前記炭化水素とし
てはスパッタの項で既に列記した化合物の中から選ぶこ
とができる。On the other hand, when hydrocarbon gas is decomposed using electrical discharge energy, hydrocarbon gas is introduced into a vacuum container either singly or mixed with an inert gas at a ratio of 1:0.1 to 1:20, and the gas pressure is increased. is maintained at a value selected from 0.01 to 1 Torr, a discharge is generated inside the container to decompose and activate the hydrocarbons, and the surface of the workpiece substrate placed in the container is made of carbon and hydrogen. Deposit the film. The hydrocarbon can be selected from the compounds already listed in the sputtering section.
また不活性ガスとしてはＨｅ 、 Ｎｅ 、 Ａｒ ｓ
’ Ｋｒ 、 Ｘｓの中から選ぶのがよいが、この他に
Ｈ２を用いることもできる。前記放電の発生方法として
は内部電極に高電圧を印加するか容器外部から高周波電
磁誘導によるか、又はマイクロ波を導入して発生させる
。内部電極を用いる場合には電源としては直流から高周
波までのいずれの周波数を用いてもよい。ただし、硬負
の膜を得るためには放電エネルギーを大きくするのが好
ましく、かつ基体の温度は可能な限シ高くするのがよい
。In addition, inert gases include He, Ne, Ars
' It is preferable to choose from Kr and Xs, but H2 can also be used. The discharge can be generated by applying a high voltage to the internal electrodes, by high-frequency electromagnetic induction from outside the container, or by introducing microwaves. When internal electrodes are used, any frequency from direct current to high frequency may be used as the power source. However, in order to obtain a hard and negative film, it is preferable to increase the discharge energy and to make the temperature of the substrate as high as possible.
磁性体薄膜は、例えばＦａ、 Ｃｏ 、 Ｎｉ 、 Ｃ
ｒなどの金属やこれらの合金、あるいはこれらの酸化物
などの中で強磁性を有する物質からなる薄膜で６９、蒸
着、めっき、スパッタリングイオンブレーティング等の
方法で形成される。The magnetic thin film is made of, for example, Fa, Co, Ni, C
It is a thin film made of a ferromagnetic substance among metals such as r, alloys thereof, or oxides thereof, and is formed by methods such as vapor deposition, plating, sputtering, and ion blasting.
本発明で用いる含フッ素潤滑油としては、たとえば一般
式
％式％
！与えられる分子量４０００〜６２００のポリパーフロ
ロアルキルエーテルがあシ（但し式中ＲハＦ 。The fluorine-containing lubricating oil used in the present invention has, for example, the general formula %! A given polyperfluoroalkyl ether with a molecular weight of 4,000 to 6,200 (where R in the formula is F).
Ｃｒ５又はＣ’Ｈ３）、ＫＲＹＴＯＸ■、 ＶＯＮＢＬ
ＩＮ■等の名称で市販されているものを用いることがで
きる。Cr5 or C'H3), KRYTOX■, VONBL
Those commercially available under names such as IN■ can be used.
また、上記ポリパーフロロアルキルエーテルノ誘導体も
使用できる。上記誘導体としては例えば＋ＣＦ２−０
＋−１−ｅＣＦ２０Ｆ２−０÷ｍあるいは末端をＣ０Ｏ
Ｈで置換した上記バーフロロポリエーテルなどかある潤
滑油層の形成方法としては潤滑油を７レオン等の溶剤に
溶かし、塗布乾燥させるのがよい口塗布の方法にはスピ
ンコード、ディップ法またけスプレーによる吹きつけ法
などがあり、いずれを用いてもよい。Moreover, the above-mentioned polyperfluoroalkyl ether derivatives can also be used. Examples of the above derivatives include +CF2-0
+-1-eCF20F2-0÷m or end with C0O
The method for forming a lubricating oil layer is to dissolve the lubricating oil in a solvent such as 7 Leon, apply it and let it dry.The coating method includes spin cord, dip method, and spray. There are spraying methods, and any of them may be used.
゛ 〔発明の実施例〕 以下、本発明を実施例により説明する。゛ [Embodiments of the invention] The present invention will be explained below using examples.
実施例１
表面に厚さ３μｍのアルマイト層を設けたアルミ製ディ
スク基板上に、ＦａをターゲットとしてＡｒ１０２混合
ガス雰囲気中でスパッタし、厚さ０．２μ鵠のＦａ ５
０１層を形成した。該基板を空気中で熱酸化しｒ−Ｆ、
、Ｏ，磁性層を形成した。Example 1 On an aluminum disk substrate with an alumite layer of 3 μm thick on the surface, sputtering was performed in an Ar102 mixed gas atmosphere using Fa as a target, and Fa 5 with a thickness of 0.2 μm was sputtered.
01 layer was formed. The substrate is thermally oxidized in air by r-F,
, O, a magnetic layer was formed.
次いで該基板にカーボンをターゲットとしてＡｒ雰囲気
中で高周波マグネトロンスパッタにょ９スパツタし炭素
ａｔ影形成せた。Ａｒのガス圧は帆００３Ｔｏｒｒ、ス
パッタ中の投入電力密度はターゲット面積あたシ３ Ｗ
／ｃｍ であった。膜厚は０．０２μｍとした。Next, the substrate was subjected to high-frequency magnetron sputtering in an Ar atmosphere using carbon as a target to form a carbon shadow. The Ar gas pressure was 0.3 Torr, and the power density during sputtering was 3 W per target area.
/cm. The film thickness was 0.02 μm.
このようにして形成し次炭素膜は非常に硬く、０．１只
のサファイア針で５Ｏｆの荷重をかけて引掻いても傷を
生じなかつ次。該基板＠ ＫＲＹＴＯＸ■をフレオン中
に０．１マｏ１％の濃度で溶がした溶液中に浸し、約１
０ ｃｍ／ｓｅｃの速度で引き上げて乾燥させ炭素膜上
にＫＲＹＴＯＸ＠潤滑層を設けた。このようなプロセス
で製造した磁気ディスク基板にｔｏ Ｈの球面をもつサ
ファイア製摺動子を２Ｏｆの荷重で押しつけ、ディスク
を２００Ｏｒｐｍで回転させて摩擦係数と磁性層が破壊
するまでの回転数で測定した。The carbon film formed in this way is extremely hard and does not cause any scratches even when scratched with a 0.1 mm sapphire needle under a load of 50°. The substrate @KRYTOX■ was immersed in a solution of Freon at a concentration of 0.1 MaO1%, and then heated for about 1 hour.
The carbon film was pulled up and dried at a speed of 0 cm/sec to provide a KRYTOX@lubrication layer on the carbon film. A sapphire slider with a to H spherical surface was pressed against the magnetic disk substrate manufactured by this process with a load of 2Of, and the disk was rotated at 200 rpm to measure the friction coefficient and the number of rotations until the magnetic layer was destroyed. did.
結果を第１表の４１に示した。特性は良好であつ念。The results are shown in 41 of Table 1. The characteristics are good and I am sure it will work.
実施例２
カーＪンターゲットをグラファイトカーボンとし、それ
以外は実施例１と同様のプロセスで磁気ディスクを作製
し、摺動評価を行った。結果を第１表のム２に示し念。Example 2 A magnetic disk was produced using the same process as in Example 1 except that the carbon target was graphite carbon, and sliding evaluation was performed. The results are shown in column 2 of Table 1.
特性は良好であった。The characteristics were good.
実施例３
実施例１と同様のプロセスで磁性層を形成した磁気ディ
スク基板を２５０■径の平行電極を有する真空容器の１
方の電極面に取シクけ、系内を排気した後Ａｒとメタン
を５対１の割合で混合したガスを導入し１系内圧を０．
２Ｔｏｒｒに保った。その後基板を取りつけた側の電極
に１３．５６ＭＨｚの高周波を３００ Ｗ印加してグロ
ー放電を発生させ、基板表面に厚さ０．０３μｍの膜を
堆積させた。この基板を容器から取り出し実施例１と同
様の手順で潤滑油層を設は摺動評価を行ったつ結果を第
１表の扁３に示し友。特性は良好であった。Example 3 A magnetic disk substrate on which a magnetic layer was formed using the same process as in Example 1 was placed in a vacuum container having parallel electrodes with a diameter of 250 mm.
After evacuating the system, a gas containing a mixture of Ar and methane at a ratio of 5:1 was introduced to reduce the internal pressure of the system to 0.
It was maintained at 2 Torr. Thereafter, a 13.56 MHz high frequency wave of 300 W was applied to the electrode on the side to which the substrate was attached to generate a glow discharge, and a film with a thickness of 0.03 μm was deposited on the surface of the substrate. This substrate was taken out of the container, a lubricating oil layer was applied in the same manner as in Example 1, and a sliding evaluation was performed.The results are shown in Table 3 of Table 1. The characteristics were good.
以下余白
実施例４
厚す１２μ惰ポリエチレンテレフタレートフイルムの片
面にＣｏ／Ｎ ｉ合金を０．１μ溝の厚みに蒸着し、磁
性層を形成した。該磁性層表面に実施例１と同じ手順で
厚さ０．０２μ惰のカーボンおよびグラファイトカーボ
ンのスパッタ膜を設けた後、実施例１と同じＫＲＹＴＯ
Ｘ■溶液に浸し、引き上げて潤滑油層を設け、磁気テー
プとした。Example 4 Co/Ni alloy was deposited to a thickness of 0.1 μm on one side of a 12 μm thick inertial polyethylene terephthalate film to form a magnetic layer. After forming a sputtered film of carbon and graphite carbon with a thickness of 0.02 μm on the surface of the magnetic layer in the same manner as in Example 1, the same KRYTO film as in Example 1 was applied.
A magnetic tape was prepared by dipping it in X■ solution and pulling it up to provide a lubricating oil layer.
この磁気テープｔ−８Ｉｌ１１１巾にスリットし、４■
−のＳＵＳ製ピンに磁性層側が接触するように９０°の
角度で巻きつけ、２０ｔの荷重をかけて１ｍ／ｍｉｎの
速度でテープを往復動させた。１００回摺動後の摩擦係
数と傷のはいｐ方を観察した。結果を第２表（ＤＡ６Ｇ
Ｃ示した。特性は良好であった。This magnetic tape was slit to a width of 111 mm.
- The tape was wound around a SUS pin at an angle of 90° so that the magnetic layer side was in contact with it, and the tape was reciprocated at a speed of 1 m/min under a load of 20 t. The coefficient of friction and the extent of scratches after sliding 100 times were observed. The results are shown in Table 2 (DA6G
C shown. The characteristics were good.
比較例１
実施例１のディスク用基板に磁性層のみを実施例１と同
様にして形成したものを、実施例１゛と同様に摺動評価
した。結果を第１表の扁４に示した。Comparative Example 1 A disk substrate of Example 1 with only a magnetic layer formed in the same manner as in Example 1 was subjected to sliding evaluation in the same manner as in Example 1''. The results are shown in Section 4 of Table 1.
特性は良くなかった。The characteristics were not good.
比較例２
実施例１のディスク用基板に実施例１と同様にして磁性
層を設けた後、実施例１と同様の条件でカーボンをスパ
ッタしたもの、およびカーボンスパッタなしで実施例１
と同様にしてＫＲＹＴＯＸ（′ｆｏの潤滑１２Ｉ＃を設
けたものを、実施例１と同様に摺動評価した。結果第１
表のＡ５に示した。特注は良くなかった。Comparative Example 2 A magnetic layer was provided on the disk substrate of Example 1 in the same manner as in Example 1, and then carbon was sputtered under the same conditions as in Example 1, and Example 1 was prepared without carbon sputtering.
In the same manner as in Example 1, the sliding performance of KRYTOX ('fo' lubricant 12I#) was evaluated.
It is shown in A5 of the table. Custom order was not good.
比較例３
実施例４で用いたポリエチレンテレフタレートフィルム
に、実施例４と同様にしてＣｏ／Ｎｉ合金の磁性層のみ
を設けたものおよび、実施例４と同様にして磁性層とカ
ーボンスパッタ膜を設けたもの、実施例４と同様にして
磁性層とＫＲＹＴＯＸ■の潤滑層を設けたものをそれぞ
れ実施例４と同様に評価した。結果を第２表の憲７に示
した。特性は良くなかった
以下余白
〔発明の効果〕
以上示し念ように、不研究によれば磁気記録媒体の摩擦
係数を下げ、摩耗に対し飛躍的な耐性をもたせることが
できるため対ヘツド耐動特性を向上させ磁気記録媒体の
寿命および信頼性向上に大きな効果がある。Comparative Example 3 A polyethylene terephthalate film used in Example 4 was provided with only a Co/Ni alloy magnetic layer in the same manner as in Example 4, and a magnetic layer and a carbon sputtered film were provided in the same manner as in Example 4. A magnetic layer and a lubricating layer of KRYTOX■ were provided in the same manner as in Example 4, and the same evaluation was performed as in Example 4, respectively. The results are shown in Section 7 of Table 2. The characteristics were not good.Blank below [Effects of the Invention] As mentioned above, according to unresearched results, it is possible to lower the friction coefficient of magnetic recording media and make them dramatically resistant to wear, thereby improving the head dynamic resistance. This has a great effect on improving the lifespan and reliability of magnetic recording media.
Claims (1)
性層上に設けられた保護層とからなる磁気記録媒体にお
いて、前記保護層が硬質カーボン層と含フッ素潤滑油層
からなることを特徴とする磁気記録媒体。 ２、前記硬質カーボン層は、カーボン素材又はグラファ
イト状カーボン素材を不活性ガス雰囲気中または不活性
ガスと炭化水素ガスの混合雰囲気中でスパッタして形成
されたものであることを特徴とする特許請求の範囲第１
項記載の磁気記録媒体。 ３、前記硬質カーボン層は、炭化水素ガスを放電エネル
ギーにより分解し基体上に堆積させたものであることを
特徴とする特許請求の範囲第１項記載の磁気記録媒体。 ４、前記含フッ素潤滑油はポリパーフロロアルキルエー
テル又はその誘導体であることを特徴とする特許請求の
範囲第１項記載の磁気記録媒体。 ５、前記含フッ素潤滑油が、一般式 ▲数式、化学式、表等があります▼ で示される分子量４０００〜６２００のポリパーフロロ
アルキルエーテルであることを特徴とする特許請求の範
囲第１項記載の磁気記録媒体。 但し、一般式中ＲはＦ、ＣＦ＿３又はＣＨ＿３である。 ６、前記硬質カーボン層と含フッ素潤滑油層が、共に厚
さ０．００１〜０．１μｍであることを特徴とする磁気
記録媒体。[Claims] 1. A magnetic recording medium comprising a substrate, a magnetic layer provided on the substrate, and a protective layer provided on the magnetic layer, wherein the protective layer includes a hard carbon layer and a fluorine-containing layer. A magnetic recording medium characterized by comprising a lubricating oil layer. 2. A patent claim characterized in that the hard carbon layer is formed by sputtering a carbon material or a graphite-like carbon material in an inert gas atmosphere or a mixed atmosphere of an inert gas and a hydrocarbon gas. range 1
Magnetic recording medium described in Section 1. 3. The magnetic recording medium according to claim 1, wherein the hard carbon layer is formed by decomposing hydrocarbon gas using discharge energy and depositing it on the substrate. 4. The magnetic recording medium according to claim 1, wherein the fluorine-containing lubricating oil is polyperfluoroalkyl ether or a derivative thereof. 5. The fluorine-containing lubricating oil is a polyperfluoroalkyl ether having a molecular weight of 4000 to 6200 and represented by the general formula ▲ Numerical formula, chemical formula, table, etc. ▼ magnetic recording medium. However, R in the general formula is F, CF_3 or CH_3. 6. A magnetic recording medium, wherein the hard carbon layer and the fluorine-containing lubricating oil layer both have a thickness of 0.001 to 0.1 μm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24794584A JPS61126627A (en) | 1984-11-26 | 1984-11-26 | Magnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24794584A JPS61126627A (en) | 1984-11-26 | 1984-11-26 | Magnetic recording medium |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6095118A Division JP2892588B2 (en) | 1984-11-26 | 1984-11-26 | Manufacturing method of magnetic recording medium |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61126627A true JPS61126627A (en) | 1986-06-14 |
| JPH0533456B2 JPH0533456B2 (en) | 1993-05-19 |
Family
ID=17170880
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24794584A Granted JPS61126627A (en) | 1984-11-26 | 1984-11-26 | Magnetic recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61126627A (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63231721A (en) * | 1987-03-20 | 1988-09-27 | Fuji Electric Co Ltd | Magnetic recording medium |
| US4816334A (en) * | 1986-04-04 | 1989-03-28 | Tdk Corporation | Magnetic recording medium |
| US4820584A (en) * | 1986-06-12 | 1989-04-11 | Kabushiki Kaisha Toshiba | Magnetic recording medium and method of manufacturing the same |
| US4840843A (en) * | 1986-10-17 | 1989-06-20 | Fuji Photo Film Co., Ltd. | Magnetic recording medium |
| US4871625A (en) * | 1987-04-16 | 1989-10-03 | Hitachi Metals, Ltd. | Synthetic lubricant for lubricating thin film and magnetic recording medium |
| US4880687A (en) * | 1986-05-09 | 1989-11-14 | Tdk Corporation | Magnetic recording medium |
| US4889767A (en) * | 1986-04-23 | 1989-12-26 | Tdk Corporation | Magnetic recording medium |
| US5607783A (en) * | 1993-06-08 | 1997-03-04 | Fuji Electric Co., Ltd. | Magnetic recording medium and method for fabricating the same |
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|---|---|---|---|---|
| JPS53143206A (en) * | 1977-05-18 | 1978-12-13 | Nec Corp | Magnetic disc |
| JPS54161909A (en) * | 1978-05-15 | 1979-12-22 | Storage Technology Corp | Lubricated magnetic record member and method of lubricating same |
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| JPS57167131A (en) * | 1981-04-03 | 1982-10-14 | Fujitsu Ltd | Magnetic recording medium |
| JPS5841438A (en) * | 1981-09-02 | 1983-03-10 | Nec Corp | Medium of magnetic disk |
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| JPS6089817A (en) * | 1983-10-20 | 1985-05-20 | Hitachi Maxell Ltd | Magnetic recording medium |
| JPS6196512A (en) * | 1984-10-18 | 1986-05-15 | Seiko Epson Corp | Magnetic recording medium |
-
1984
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53143206A (en) * | 1977-05-18 | 1978-12-13 | Nec Corp | Magnetic disc |
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| JPS5647926A (en) * | 1979-09-21 | 1981-04-30 | Hitachi Ltd | Magnetic recording medium |
| JPS5687236A (en) * | 1979-12-14 | 1981-07-15 | Hitachi Maxell Ltd | Magnetic recording medium |
| JPS57167131A (en) * | 1981-04-03 | 1982-10-14 | Fujitsu Ltd | Magnetic recording medium |
| JPS5841438A (en) * | 1981-09-02 | 1983-03-10 | Nec Corp | Medium of magnetic disk |
| JPS58114331A (en) * | 1981-12-26 | 1983-07-07 | Fujitsu Ltd | Production of magnetic recording medium |
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| JPS59107428A (en) * | 1982-12-10 | 1984-06-21 | Seiko Epson Corp | Formation of lubricating layer for magnetic recording medium |
| JPS59112432A (en) * | 1982-12-18 | 1984-06-28 | Victor Co Of Japan Ltd | Magnetic recording medium |
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| JPS59154641A (en) * | 1983-02-23 | 1984-09-03 | Fuji Photo Film Co Ltd | Magnetic recording medium |
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| JPS6196512A (en) * | 1984-10-18 | 1986-05-15 | Seiko Epson Corp | Magnetic recording medium |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4816334A (en) * | 1986-04-04 | 1989-03-28 | Tdk Corporation | Magnetic recording medium |
| US4889767A (en) * | 1986-04-23 | 1989-12-26 | Tdk Corporation | Magnetic recording medium |
| US4880687A (en) * | 1986-05-09 | 1989-11-14 | Tdk Corporation | Magnetic recording medium |
| US4820584A (en) * | 1986-06-12 | 1989-04-11 | Kabushiki Kaisha Toshiba | Magnetic recording medium and method of manufacturing the same |
| US4840843A (en) * | 1986-10-17 | 1989-06-20 | Fuji Photo Film Co., Ltd. | Magnetic recording medium |
| JPS63231721A (en) * | 1987-03-20 | 1988-09-27 | Fuji Electric Co Ltd | Magnetic recording medium |
| JPH0731807B2 (en) * | 1987-03-20 | 1995-04-10 | 富士電機株式会社 | Magnetic recording medium |
| US4871625A (en) * | 1987-04-16 | 1989-10-03 | Hitachi Metals, Ltd. | Synthetic lubricant for lubricating thin film and magnetic recording medium |
| US5607783A (en) * | 1993-06-08 | 1997-03-04 | Fuji Electric Co., Ltd. | Magnetic recording medium and method for fabricating the same |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0533456B2 (en) | 1993-05-19 |
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