JPS6097253A - Vibration applying apparatus for ultrasonic microscope - Google Patents
Vibration applying apparatus for ultrasonic microscopeInfo
- Publication number
- JPS6097253A JPS6097253A JP58204711A JP20471183A JPS6097253A JP S6097253 A JPS6097253 A JP S6097253A JP 58204711 A JP58204711 A JP 58204711A JP 20471183 A JP20471183 A JP 20471183A JP S6097253 A JPS6097253 A JP S6097253A
- Authority
- JP
- Japan
- Prior art keywords
- head
- ultrasonic wave
- center
- vibration
- counter balance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q11/00—Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
- B23Q11/0032—Arrangements for preventing or isolating vibrations in parts of the machine
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/26—Arrangements for orientation or scanning by relative movement of the head and the sensor
- G01N29/265—Arrangements for orientation or scanning by relative movement of the head and the sensor by moving the sensor relative to a stationary material
-
- G—PHYSICS
- G10—MUSICAL INSTRUMENTS; ACOUSTICS
- G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
- G10K11/00—Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
- G10K11/18—Methods or devices for transmitting, conducting or directing sound
- G10K11/26—Sound-focusing or directing, e.g. scanning
- G10K11/35—Sound-focusing or directing, e.g. scanning using mechanical steering of transducers or their beams
- G10K11/352—Sound-focusing or directing, e.g. scanning using mechanical steering of transducers or their beams by moving the transducer
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K33/00—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system
- H02K33/18—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system with coil systems moving upon intermittent or reversed energisation thereof by interaction with a fixed field system, e.g. permanent magnets
Abstract
Description
【発明の詳細な説明】
技術分野
本発明は、超音波顕微鏡において試料を走査するために
圧電トランスジューサを有する超音波ヘッドを直線的に
振動させる加振装置に関するものである。TECHNICAL FIELD The present invention relates to an excitation device for linearly vibrating an ultrasonic head having a piezoelectric transducer in order to scan a sample in an ultrasonic microscope.
従来技術
従来の加振装置として、例えば第1図に示すように、圧
電トランスジューサを有する超音波ヘラ、ド1を支持棒
2の一端部に保持し、この支持棒2の他端部を、磁石8
、ヨーク4およびポールピース5を有する磁気回路の磁
束を横切るようにヨーク4とポールピース5との間に巻
装したボイスコイル6に連結すると共に、板ばね7によ
りボイスコイル6の軸方向で、超音波ヘッド1からの超
音波の投44方向と直交する方向に変位可能に支持して
、ボイスコイル6に所要の交番電流を供給することによ
り超音波ヘッド1を振動させるようにしたものがある。BACKGROUND ART As a conventional vibration excitation device, for example, as shown in FIG. 8
, connected to the voice coil 6 wound between the yoke 4 and the pole piece 5 so as to cross the magnetic flux of the magnetic circuit having the yoke 4 and the pole piece 5, and in the axial direction of the voice coil 6 by the leaf spring 7. There is one in which the ultrasonic head 1 is supported so as to be displaceable in a direction orthogonal to the direction in which the ultrasonic waves are projected from the ultrasonic head 1, and the ultrasonic head 1 is vibrated by supplying a required alternating current to the voice coil 6. .
しかし、第1図に示す従来の加振装置にお゛いては、超
音波ヘッド1、支持棒2およびボイスコイル6の振動に
応じて重心が移動し、これにより加振装置全体が縦方向
、例えば超音波ヘッド1からの超音波の投射方向に振動
して焦点位置がその縦振動に応じて変化すると共に、こ
の縦振動が試料台等にも伝達されるために解像度の高い
超音波像が得られない欠点がある。However, in the conventional vibration excitation device shown in FIG. For example, the ultrasonic head 1 vibrates in the projection direction of the ultrasonic wave, and the focal position changes according to the longitudinal vibration, and this longitudinal vibration is also transmitted to the sample stage, etc., so a high-resolution ultrasonic image is created. There are disadvantages that cannot be obtained.
発 明 の 目 的
本発明の目的は、上述した欠点を除去し、縦方向の不所
望な振動が発生しないよう適切に構成した超音波顕微鏡
の加振装置を提供しようとするものである。OBJECTS OF THE INVENTION An object of the present invention is to eliminate the above-mentioned drawbacks and to provide an excitation device for an ultrasonic microscope that is suitably constructed so that undesired vertical vibrations do not occur.
発 明 の 概 要
本発明の加振装置は、圧電トランスジューサを有する超
音波ヘッドと、これとは〈同質量のカウンタバランスと
を同軸上でこれら超音波ヘッドとカウンタバランスとの
中央を中心として対称に振動させる駆動機構を具えるこ
とを特徴とするものである。Summary of the Invention The vibration device of the present invention comprises an ultrasonic head having a piezoelectric transducer and a counterbalance having the same mass, which are coaxially arranged symmetrically about the center of the ultrasonic head and the counterbalance. The device is characterized in that it includes a drive mechanism that vibrates.
実施例
第2図は本発明の加振装置の一例の構成を示すものであ
る。この加振装置は、第1図に示すものを左右対称に配
置して構成したもので、ヨーク8は左右対称な形状を有
する一体のものを用いてい、る。支持棒2 、2’ 、
磁石8.13’、ポールピース゛5,5’、ボイスコイ
/l/8 e 6’および板はね7.7′はそれぞれは
寸同−形状で同質量のものを用い、また支持棒2′の先
端部には、支持棒2の先端部に保持する超音波ヘッド1
とは寸同質温のカウンタバランス9を取付ける。このよ
うにして、ボイスコイル6および6′にWA l1ll
aの等しい所要の交番電流を供給し2て、超音波ヘッド
1およびカウンタバランス9を同軸上で互いに反対方向
に対称に振動させる。Embodiment FIG. 2 shows the configuration of an example of the vibration excitation device of the present invention. This vibration excitation device is constructed by arranging the devices shown in FIG. 1 laterally symmetrically, and the yoke 8 is an integral unit having a laterally symmetrical shape. Support rods 2, 2',
The magnet 8.13', the pole pieces 5, 5', the voice coil/l/8e 6' and the plate 7.7' are of the same dimensions and the same mass, and the support rod 2' is At the tip, there is an ultrasonic head 1 held at the tip of the support rod 2.
Attach a counterbalance 9 with the same temperature as that of the counterbalance 9. In this way, voice coils 6 and 6' are
The ultrasonic head 1 and the counterbalance 9 are vibrated symmetrically on the same axis in opposite directions by supplying the required alternating currents 2 equal to a.
このようにすれば、加振装置の重心は、常に超音波ヘッ
ド1とカウンタバランス9との中央の位置Pに維持され
るから、重心の移動による不所望な縦方向の振動の発生
を有効に防止することができ、常に解像度の高い超音波
像を得ることができる0
なお、第2図においてカウンタバランス9は、圧電トラ
ンスジューサを有する超音波ヘッドをもって構成するこ
ともできる。このようにすれば、同時に二つの超音波像
を得ることができる。また1、超音波ヘッドを所定の方
向に振動させる手段は、上述したボイスコイルを用い以
外、圧電バイモルフ板、偏心カム、電磁石等を用いて構
成することもできる。In this way, the center of gravity of the vibrating device is always maintained at the center position P between the ultrasonic head 1 and the counterbalance 9, thereby effectively preventing the generation of undesired vertical vibrations due to movement of the center of gravity. The counterbalance 9 in FIG. 2 can also be configured with an ultrasonic head having a piezoelectric transducer. In this way, two ultrasound images can be obtained at the same time. Further, 1. The means for vibrating the ultrasonic head in a predetermined direction may be constructed using a piezoelectric bimorph plate, an eccentric cam, an electromagnet, etc., instead of using the voice coil described above.
発 明 の 効 果
以上述べたように、本発明においては、試料に超音波を
投射するための圧電トランスジューサを有する超音波ヘ
ッドと、これとは(同w、量のカウンタバランスとを、
同軸上でそれらの中央を中心として所定の走査方向で対
称に振動させるようにしたから、重心の移動がなく、シ
たがって加振装置全体の不所望な縦方向の振動の発生を
有効に防止でき、常に高解像度の超音波像を得ることが
できる。Effects of the Invention As described above, in the present invention, an ultrasonic head having a piezoelectric transducer for projecting ultrasonic waves onto a sample, and a counterbalance for the amount of
Since they are vibrated symmetrically in a predetermined scanning direction around the center on the same axis, there is no movement of the center of gravity, thus effectively preventing the occurrence of undesired vertical vibration of the entire vibrating device. This allows high-resolution ultrasound images to be obtained at all times.
第1図は従来の加振装置の構成を示蓋断面図、第2図は
本発明の加振装置の一例の構成を示す防面図である。
190.超音波ヘッド 2,2′・・・支持棒、8.3
’・・・磁石 5,5′・・・ポールピース6.6′・
・・ボイスコイル 7.7′・・・板はね8・・・ヨー
ク 9・・・カウンタバランス。FIG. 1 is a sectional view showing the structure of a conventional vibration excitation device, and FIG. 2 is a front view showing the structure of an example of the vibration device of the present invention. 190. Ultrasonic head 2, 2'...Support rod, 8.3
'...Magnet 5,5'...Pole piece 6.6'
...Voice coil 7.7'...Plate spring 8...Yoke 9...Counter balance.
Claims (1)
れとはソ同質量のカウンタバランスとを、同軸上でこれ
ら超音波ヘッドとカウンタバランスとの中央を中心とし
て対称に振動させる駆動機構を具えることを特徴とする
超音波顕微鏡の加振装置。1. The ultrasonic head having a piezoelectric transducer and the counterbalance having the same mass are provided with a drive mechanism that vibrates symmetrically about the center of the ultrasonic head and the counterbalance on the same axis. A vibrating device for an ultrasonic microscope.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP58204711A JPS6097253A (en) | 1983-11-02 | 1983-11-02 | Vibration applying apparatus for ultrasonic microscope |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP58204711A JPS6097253A (en) | 1983-11-02 | 1983-11-02 | Vibration applying apparatus for ultrasonic microscope |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6097253A true JPS6097253A (en) | 1985-05-31 |
JPH0426058B2 JPH0426058B2 (en) | 1992-05-06 |
Family
ID=16495042
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP58204711A Granted JPS6097253A (en) | 1983-11-02 | 1983-11-02 | Vibration applying apparatus for ultrasonic microscope |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6097253A (en) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6415650A (en) * | 1987-04-30 | 1989-01-19 | Sonosukan Inc | Balance type scan mechanism |
JP2009532746A (en) * | 2006-04-07 | 2009-09-10 | バイオ−ラッド ラボラトリーズ,インコーポレイティド | Balance means for high-speed scanning |
CN101879688A (en) * | 2010-07-28 | 2010-11-10 | 齐齐哈尔二机床(集团)有限责任公司 | Balancing motion shock-absorbing device for heavy punch |
US20160305913A1 (en) * | 2014-01-02 | 2016-10-20 | Aircelle | Device and assembly for non-destructive testing of a composite part and method for non-destructive testing of a composite part through transmission ultrasound |
CN108655805A (en) * | 2018-05-07 | 2018-10-16 | 芜湖撼江智能科技有限公司 | A kind of Metal Cutting Machine Tool being convenient to clean |
CN109660101A (en) * | 2019-01-25 | 2019-04-19 | 信利光电股份有限公司 | A kind of linear oscillator mould group |
KR102036058B1 (en) * | 2019-05-10 | 2019-10-24 | 부경대학교 산학협력단 | Apparatus for Fast scanning with scanning acoustic microscopy |
-
1983
- 1983-11-02 JP JP58204711A patent/JPS6097253A/en active Granted
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6415650A (en) * | 1987-04-30 | 1989-01-19 | Sonosukan Inc | Balance type scan mechanism |
JP2009532746A (en) * | 2006-04-07 | 2009-09-10 | バイオ−ラッド ラボラトリーズ,インコーポレイティド | Balance means for high-speed scanning |
CN101879688A (en) * | 2010-07-28 | 2010-11-10 | 齐齐哈尔二机床(集团)有限责任公司 | Balancing motion shock-absorbing device for heavy punch |
US20160305913A1 (en) * | 2014-01-02 | 2016-10-20 | Aircelle | Device and assembly for non-destructive testing of a composite part and method for non-destructive testing of a composite part through transmission ultrasound |
CN108655805A (en) * | 2018-05-07 | 2018-10-16 | 芜湖撼江智能科技有限公司 | A kind of Metal Cutting Machine Tool being convenient to clean |
CN109660101A (en) * | 2019-01-25 | 2019-04-19 | 信利光电股份有限公司 | A kind of linear oscillator mould group |
KR102036058B1 (en) * | 2019-05-10 | 2019-10-24 | 부경대학교 산학협력단 | Apparatus for Fast scanning with scanning acoustic microscopy |
Also Published As
Publication number | Publication date |
---|---|
JPH0426058B2 (en) | 1992-05-06 |
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