JPS6066342A - Stamper and its production - Google Patents
Stamper and its productionInfo
- Publication number
- JPS6066342A JPS6066342A JP17297383A JP17297383A JPS6066342A JP S6066342 A JPS6066342 A JP S6066342A JP 17297383 A JP17297383 A JP 17297383A JP 17297383 A JP17297383 A JP 17297383A JP S6066342 A JPS6066342 A JP S6066342A
- Authority
- JP
- Japan
- Prior art keywords
- adhesive
- stamper
- substrate
- film
- metal film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Manufacturing Optical Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】
〔発明の利用分野〕
本発明は、コンピュータのメモリなどの業務用光ディス
クに適したスタンパとその製造方法に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a stamper suitable for business-use optical discs such as computer memories, and a method for manufacturing the stamper.
第１図は従来のスタンパの一例を示す断面図であって、
１は金属膜、２は記録トラックパターン、３は裏打部材
、すなわち基板、４は接着剤である。FIG. 1 is a sectional view showing an example of a conventional stamper,
1 is a metal film, 2 is a recording track pattern, 3 is a backing member, that is, a substrate, and 4 is an adhesive.
業務用光ディスクは、家庭用のビデオデイスりなどと違
って、記録トラック溝にはアドレス符号を除いて未だ情
報信号を記録しておらず空白の′！！：まとしてスタン
パによって複製されたディスクに所望のデータが記録す
ることができるようにする必要があるので、そのスタン
パも、アドレス以外は空白のトラック溝を作るような凹
凸形状となっている。Unlike home-use video discs, professional optical discs do not yet record any information signals other than address codes in the recording track grooves, so they are blank! ! : Since it is necessary to be able to record desired data on the disk copied by the stamper, the stamper also has an uneven shape that creates a blank track groove except for the address.
第１図において、基板３上に、上記記録トラックパター
ン２が形成された金属膜１が、接着剤４により固定され
ている。このようなスタンパを作製するには、記録トラ
ックパターン２とは逆の凸凹の記録トラックパターンの
刻まれた原盤（図示せず）に、まず蒸着法などの方法で
導電膜を形成し、ついでその表面に電気メツキ法により
ニッケルメッキを施すようにする。このニッケルメッキ
層の表面にエポキシ系樹脂の接着剤４により、基板６が
接着される。基板３はスタンパ表面の平坦性を保持する
ために、接着面の平坦度を十分に高くするように研磨加
工した鉄や黄銅等の材料が用いられる。基板３の接着後
前記蒸着導電膜およびニッケルメッキ膜からなる金属膜
１から原盤を引き剥して第１図のスタンパを得る。In FIG. 1, a metal film 1 on which the recording track pattern 2 is formed is fixed on a substrate 3 with an adhesive 4. As shown in FIG. To manufacture such a stamper, a conductive film is first formed by a method such as vapor deposition on a master disc (not shown) on which a recording track pattern with a concave and convex shape opposite to recording track pattern 2 is engraved, and then a conductive film is formed on the master disc (not shown) by a method such as vapor deposition. Nickel plating is applied to the surface by electroplating. A substrate 6 is bonded to the surface of this nickel plating layer with an epoxy resin adhesive 4. In order to maintain the flatness of the stamper surface, the substrate 3 is made of a material such as iron or brass that has been polished to ensure a sufficiently high flatness of the adhesive surface. After bonding the substrate 3, the master is peeled off from the metal film 1 consisting of the vapor-deposited conductive film and the nickel plating film to obtain the stamper shown in FIG.
第２図は第１図のスタンパにより所定の記録トラックパ
ターンを有するディスクを量産する方法を示す説明図で
あって、５はスタンパの表面、６はレジン、７はアクリ
ル板であり、第１図に対応する部分には同一符号をつけ
ている。FIG. 2 is an explanatory diagram showing a method for mass-producing disks having a predetermined recording track pattern using the stamper of FIG. Corresponding parts are given the same reference numerals.
第２図において、スタンパの表面５にレジン６を塗布し
、その上に補強用のアクリル板Ｚをのせて、紫外線など
によってレジン６を固化させてレジン６とアクリル板７
とを固着し、しかる後アクリル板７の周辺部を持ち上げ
ることによって、レジン６をアクリル板７に固着した−
１：ｔの状態でスタンパ５から剥離し、このようにして
スタンパ表面に形成された記録トラックパターン１（第
１図）を反転した記録トラックパターンを有するレジン
６とアクリル板７とからなるディスクが形成されるもの
である。In FIG. 2, a resin 6 is applied to the surface 5 of the stamper, a reinforcing acrylic plate Z is placed on top of the resin 6, and the resin 6 and the acrylic plate 7 are solidified by ultraviolet rays or the like.
The resin 6 was fixed to the acrylic plate 7 by lifting the peripheral part of the acrylic plate 7.
1: A disk consisting of the resin 6 and the acrylic plate 7 is peeled off from the stamper 5 in the state of t and has a recording track pattern that is an inversion of the recording track pattern 1 (FIG. 1) formed on the surface of the stamper in this way. It is something that is formed.
しかるに、このような従来のスタンパでは、金属膜１す
なわちニッケル膜に対するエポキシ系樹脂などの接着剤
の接着力がビール強度で１００〜３００ｇ／ｃｒｎ 程
度しかなく、このため、レジン６の同化後アクリル板７
を剥離するときに金属膜１が基板３からはがれてしまう
という欠点があった。このように、一度金属膜１が基板
ろから剥離すると金属膜１が変形してしまうので、再び
接着し々おしても金属膜１としては所定の平坦度が得ら
れず、したがって、スタンパとしては再使用することが
できず、どうしても寿命が極めて短かいということにな
る。However, in such a conventional stamper, the adhesive force of an adhesive such as an epoxy resin to the metal film 1, that is, the nickel film, is only about 100 to 300 g/crn in terms of beer strength. 7
There was a drawback that the metal film 1 was peeled off from the substrate 3 when the metal film 1 was peeled off. As described above, once the metal film 1 is peeled off from the substrate, the metal film 1 will be deformed, so even if it is repeatedly bonded again, the metal film 1 will not have the desired flatness, and therefore, it cannot be used again as a stamper. It cannot be used and its lifespan is extremely short.
本発明の目的は、上記従来技術の欠点を除き基板からの
金属膜の剥離がなく、寿命を充分に長くすることができ
るようにしたスタンパとその製造方法に関する。SUMMARY OF THE INVENTION An object of the present invention is to provide a stamper and a method for manufacturing the stamper, which eliminates the drawbacks of the above-mentioned prior art, eliminates peeling of the metal film from the substrate, and makes it possible to have a sufficiently long life.
この目的を達成するために、本発明のスタンパは、記録
トラックパターンが形成された金属膜に、接着剤との結
合力が大きい金属表面処理層を設け、かつ接着剤として
、接着剤硬化物の破断時の伸び率が５０チ以上の接着剤
を用い、前記金属膜と基板とを強固に接着したことを特
徴とする。In order to achieve this object, the stamper of the present invention is provided with a metal surface treatment layer having a high bonding strength with an adhesive on a metal film on which a recording track pattern is formed, and a cured adhesive material is used as the adhesive. It is characterized in that the metal film and the substrate are firmly bonded using an adhesive having an elongation at break of 50 inches or more.
また、本発明のスタンパの製造方法は、原盤の所定パタ
ーンが形成された表面に導電膜を形成する第１の工程と
、前記導電膜に電気メツキ法により金属膜を形成する第
２の工程と、前記金属膜に接着剤との結合力が大きい金
属表面処理層を形成する第６の工程と、接着剤破断時の
伸び率が３０％以上である接着剤により金近膜に基板を
接着する第４の工程とからなることを特徴とする。The stamper manufacturing method of the present invention also includes a first step of forming a conductive film on the surface of the master on which a predetermined pattern is formed, and a second step of forming a metal film on the conductive film by electroplating. , a sixth step of forming a metal surface treatment layer that has a strong bonding force with the adhesive on the metal film, and bonding the substrate to the gold film using an adhesive whose elongation rate at breakage is 30% or more. It is characterized by comprising a fourth step.
以下、本発明の詳細を図面に従って説明する。 The details of the present invention will be explained below with reference to the drawings.
第３図は本発明によるスタンパの一実施例を示す断面図
であって、８は金属表面処理層であり、第１図に対応す
る部分には同一符号をつけている。FIG. 3 is a sectional view showing an embodiment of the stamper according to the present invention, in which 8 is a metal surface treatment layer, and parts corresponding to those in FIG. 1 are given the same reference numerals.
第５図において、記録トラックパターン２が形成された
金属膜１は、金属表面処理層８を介して接着剤４Ｉこよ
り基板ろに固着されている。In FIG. 5, a metal film 1 on which a recording track pattern 2 is formed is fixed to a substrate through an adhesive 4I via a metal surface treatment layer 8.
金属膜１と１〜では、上記従来技術と同様に、ニッケル
によって形成されており、かかる金属膜１を接着剤４に
よって直接基板乙に接着したのでは、前述のように、接
着が充分ではない。The metal films 1 and 1~ are made of nickel, as in the prior art described above, and if the metal film 1 were directly bonded to the substrate B with the adhesive 4, the adhesion would not be sufficient as described above. .
そこで、本知明においては、金属膜１に、接着剤４との
結合力が大きい金属表面処理層８を形成し、かつ接着剤
４として、接着剤硬化物の破断時伸び率が６０φ以上め
る接着剤を用い、前記金属膜１と基板３とを接着してい
る。Therefore, in the present invention, a metal surface treatment layer 8 having a strong bonding force with the adhesive 4 is formed on the metal film 1, and the elongation at break of the cured adhesive is 60φ or more as the adhesive 4. The metal film 1 and the substrate 3 are bonded together using an adhesive.
前記金属表面処理層８の形式に当っては、ニッケルを適
度に溶解し、かつ酸化膜を作る硝酸を用いた。硝酸の処
理条件は、濃硝酸の場合液温２５°Ｃで２０秒、５０Ｖ
ａ１％硝酸水溶液で１は液温２５°Ｃで２分間浸漬する
ことが最適で、その後水洗、風乾した。Regarding the type of the metal surface treatment layer 8, nitric acid was used which dissolves nickel appropriately and forms an oxide film. The processing conditions for nitric acid are: in the case of concentrated nitric acid, the liquid temperature is 25°C, 20 seconds, 50V.
It is optimal to immerse 1 in a 1% nitric acid aqueous solution at a temperature of 25°C for 2 minutes, followed by washing with water and air drying.
一方、前記接着剤４は、その主成分がアクリル系または
ウレタン変性アクリル系である場合前記金属表面処理層
８に対して強固に接着し、３．５ □” ４．０ ｋ、
９ ／ ｃｍの大きなビール強度が得られる。On the other hand, when the adhesive 4 has an acrylic type or a urethane-modified acrylic type as its main component, it firmly adheres to the metal surface treatment layer 8,
A large beer strength of 9/cm is obtained.
第４図（Ａ）ないしくＦ）は本発明によるスタンパの製
造方法の一実施例全示す工程図であって９は原盤、１０
は基板、１１はホトレジスト膜、１′１“はニッケル膜
、２′は記録トラックパターンであり、第６図に対応す
る部分には同一行１号をつけている。FIGS. 4(A) to 4(F) are process diagrams showing an embodiment of the stamper manufacturing method according to the present invention, in which 9 is a master, 10
1 is a substrate, 11 is a photoresist film, 1'1'' is a nickel film, and 2' is a recording track pattern. Portions corresponding to FIG. 6 are numbered 1 in the same row.
まず、厚さ５朋、直径３００ｍｙｉのガラス基板１０に
破着したホトレジス］・膜１１に所定の記録トラックパ
ターン２′を形成した原盤９を準（＋ｆｆｉ Ｌ、 （
第４図（Ａ））、これに蒸着法によりニッケル膜１′を
形成し、た（同図（Ｂ））。つぎに電気メツキ法によっ
てニラクルメッキ膜１“全形成した（同図（Ｃ））。こ
のメッキ条件は、例えば、スルファミン酸ニッケルｓｏ
ｏ、９／、３塩化ニッケル１ｏ９／ｌ硼酸３０ｇ／ｌか
ら成るヌルファミン酸ニッケルメッキ液で、液温３００
ＣＳ電流密度０１〜１０Ａ／市ｎ２メッキ時間約２００
分である。次に、このようにして作った金属ニッケル膜
の上に金属表面処理層８を硝酸処理法により形成した（
同図（Ｄ））。First, the master 9 on which a predetermined recording track pattern 2' has been formed on the photoresist film 11, which has been broken on a glass substrate 10 with a thickness of 5 mm and a diameter of 300 myi, is placed in a standard (+ffi L, (
4(A)), and a nickel film 1' was formed thereon by vapor deposition (FIG. 4(B)). Next, a Niracle plating film 1'' was completely formed by electroplating ((C) in the same figure).The plating conditions were, for example, nickel sulfamate so
o, 9/, nickel trichloride 1o9/l boric acid nickel plating solution consisting of 30g/l boric acid, solution temperature 300
CS current density 01~10A/city n2 plating time approximately 200
It's a minute. Next, a metal surface treatment layer 8 was formed on the metal nickel film thus produced by a nitric acid treatment method (
Same figure (D)).
この処理条件は、例えば５０ＶａＡ％硝酸水溶液で液温
２５°Ｃ１処理時間２分である。次に、金属表面処理層
８に、接着剤破断時の伸び率が１２０係のウレタン変性
アクリル系接着剤４を用いて基板′５を接着した（同図
（Ｅ））。基板３としては、鉄、真鋳、銅、アルミニウ
ム、ステンレス等の板が適している。つぎにニッケル膜
１′と原盤９との聞分剥離１〜、最後に内周と外周を整
形加工して、ホトレジスト膜１１に形成した記録トラッ
クパターン２′を反転した記録トラックバター ７２
’を有ｆるスタンパ（同図（Ｆ））余得た。The processing conditions are, for example, a 50 VaA% nitric acid aqueous solution, a liquid temperature of 25° C., and a processing time of 2 minutes. Next, a substrate '5 was bonded to the metal surface treatment layer 8 using a urethane-modified acrylic adhesive 4 having an elongation rate of 120 at break (FIG. 4(E)). As the substrate 3, a plate made of iron, brass, copper, aluminum, stainless steel, etc. is suitable. Next, the nickel film 1' and the master 9 are peeled apart 1~, and finally, the inner and outer peripheries are shaped and the recording track pattern 2' formed on the photoresist film 11 is reversed to create a recording track butter 72.
A stamper ((F) in the same figure) with 'f was obtained.
なお、ニッケル膜１′、１“がスタンパの金属膜１を溝
底する１、
実施例の結果、この実施例により形成したスタンパの金
属膜１と基板６との接着力は６．５〜４．αＣ９／ｃｒ
ｎの大きな値を有していた。これは、ニッケルの表面粗
化および酸化膜が形成されかつ、接着剤との金相に優れ
、さらに接着剤の破断時の伸びが太きいため、ビール強
度測定時に応力集中が少ないためと考えられる。The nickel films 1' and 1'' form the groove bottom of the metal film 1 of the stamper 1. As a result of the example, the adhesion strength between the metal film 1 of the stamper formed by this example and the substrate 6 is 6.5 to 4. .αC9/cr
It had a large value of n. This is thought to be because the surface of nickel is roughened and an oxide film is formed, and it has a good metallic phase with the adhesive, and the adhesive has a large elongation at break, so there is less stress concentration when measuring beer strength. .
以上のようにして形成されたスタンパは、金属膜と基板
との間の接着力（ビール強度）が従来の１００〜うＯＯ
ｇ／ｃｒｎから５．５〜４．ＯＩ＊９ ／ ｃｒ、ｑと
なって大幅に向上した。The stamper formed as described above has an adhesive strength (beer strength) between the metal film and the substrate of 100 to 000
g/crn to 5.5-4. The OI*9/cr,q was significantly improved.
なお、との実施例では接着剤として、接着破断時の伸び
率が１２０％のウレタン変性アクリル系接着剤を用いた
例を示し、だが、接着剤破断時の伸び率が６０チ以上あ
る接着剤であれば前述と同等の作用、効果を達成できる
。In addition, an example using a urethane-modified acrylic adhesive with an elongation rate of 120% at adhesive breakage was used as the adhesive, but an adhesive with an elongation rate of 60 inches or more at adhesive breakage was used as the adhesive. If so, the same effects and effects as described above can be achieved.
また、この実施例ではニッケル膜１を蒸着法により形成
したが、これに限ることなく、スパッタ法、イオンブし
／−ティング法などの舐相成長法でもよく、化学メッキ
法、銀鏡反応法などの湿式法でもよいことはいう寸でも
乃°い。さらに、ニッケルに限ること表＜、金、 ６＋
ｌ、 ｇ＊など導電率の大きな金属であわば制限は碌い
。Further, in this example, the nickel film 1 was formed by a vapor deposition method, but the method is not limited to this, and a liquid phase growth method such as a sputtering method or an ion bubbling/tinting method may be used, or a chemical plating method, a silver mirror reaction method, or the like may be used. There is no need to say that a wet method is sufficient. Furthermore, the table is limited to nickel <, gold, 6+
Metals with high electrical conductivity, such as l and g*, have strong limitations.
さらに、上記実施例では、蒸着導電膜１′と電気メツキ
層１“とがスタンパの金属膜１と１７ているが、必要に
応じて、ガラス原盤９から剥離した後、泰着導電膜１′
を溶乃了して取り除き、電気メッキ層１“のみをスタン
パの金属膜１としてもよい。Further, in the above embodiment, the vapor-deposited conductive film 1' and the electroplated layer 1'' are the metal films 1 and 17 of the stamper, but if necessary, after peeling from the glass master 9, the adhesively deposited conductive film 1'
may be removed by melting away, and only the electroplated layer 1'' may be used as the metal film 1 of the stamper.
以上６５１１明したように、本発明によれば、所定の記
録トラックパターンが形成されている金属膜と基板との
間の接着力を充分に大きくすることができて両者の剥離
を防止することができるから、寿命が著しく延び、また
、スタンピング時におけるディスクのスタンパからの剥
離速度を上昇させることができてディスクの月産化が可
能となり、さらに、スタンパの製造工程中の整形加工条
件に余裕ができて整形加工が容易となり、上記従来技術
の欠点を除いて優れた機能のスタンパおよびその製造方
法を提供することができる。As explained above, according to the present invention, it is possible to sufficiently increase the adhesive force between the metal film on which a predetermined recording track pattern is formed and the substrate, thereby preventing separation between the two. As a result, the service life is significantly extended, and the peeling speed of the disk from the stamper during stamping can be increased, making it possible to produce disks on a monthly basis.Furthermore, there is less leeway in shaping conditions during the stamper manufacturing process. This facilitates shaping and processing, and it is possible to provide a stamper with excellent functions and a method for manufacturing the same, which eliminates the drawbacks of the prior art described above.
第１図は従来のスタンパの断面図、第２図はディスクを
複製する方法を示す説明図、第３図は本発明によるスタ
ンパの一実施例を示す断面図、第４図は本発明によるス
タンパの製造方法の一実施例を示す工程図である。
１・・・金属膜 １′、１／／・・・ニッケル膜２・・
・記録トラックパターン
６・・基板 ４・・・接着剤
８・・・金属表面処理層 ９・・・原盤艷１図
矛ｊ図
鞘４図FIG. 1 is a sectional view of a conventional stamper, FIG. 2 is an explanatory diagram showing a method for duplicating a disk, FIG. 3 is a sectional view showing an embodiment of a stamper according to the present invention, and FIG. 4 is a sectional view of a stamper according to the present invention. FIG. 3 is a process diagram showing an example of a manufacturing method. 1...Metal film 1', 1//...Nickel film 2...
・Recording track pattern 6...Substrate 4...Adhesive 8...Metal surface treatment layer 9...Master disc 1 figure, spear 4, sheath 4 figure
Claims (1)
板に接着してなるスタンパにおいて、前記金属膜に、接
着剤との結合力が大きい金属表面処理層を設け、かつ前
記接着剤として接着剤破断時の伸び率が３０％以上の接
着剤を用い、前記金属膜と前記基板とを強固に接着した
ことを特徴とするスタンパ。 ２、特許請求の範囲第１項において、前記接着剤の主成
分が、アクリル系またはウレタン変性アクリル系である
ことを特徴とするスタンパ。 ３、所定のパターンを有する金属膜を接着剤により基板
に接着してなるスタンパの製造方法において、原盤の所
定パターンが形成された表面に導電膜を形成する第１の
工程と、前記導電膜に電気メツキ法により金属膜を形成
する第２の工程と、前記金属膜に接着剤との結合力が大
きい金属表面処理層を形成する第５の工程と、接着剤破
断時の伸び率が、５０％以上である接着剤により金属膜
に基板を接着する第４の工程とからなることを特徴とす
るスタンパの製造方法。 ４、特許請求の範囲第６項において、前記第６の工程は
、ＨＮＯ３により前記金属表面処理層を形成することｅ
％徴とするスタンパの製造方法。[Claims] 1o In a stamper formed by adhering a metal film having a predetermined pattern to a substrate with an adhesive, the metal film is provided with a metal surface treatment layer having a strong bonding force with the adhesive, and the adhesive A stamper characterized in that the metal film and the substrate are firmly bonded using an adhesive having an elongation rate of 30% or more at breakage. 2. The stamper according to claim 1, wherein the main component of the adhesive is acrylic or urethane-modified acrylic. 3. In a method for manufacturing a stamper in which a metal film having a predetermined pattern is bonded to a substrate with an adhesive, a first step of forming a conductive film on the surface of the master on which the predetermined pattern is formed; a second step of forming a metal film by electroplating; a fifth step of forming a metal surface treatment layer with a high bonding force with the adhesive on the metal film; % or more of adhesive to bond the substrate to the metal film. 4. In claim 6, the sixth step includes forming the metal surface treatment layer with HNO3.
A method for manufacturing a stamper with percentage characteristics.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17297383A JPS6066342A (en) | 1983-09-21 | 1983-09-21 | Stamper and its production |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17297383A JPS6066342A (en) | 1983-09-21 | 1983-09-21 | Stamper and its production |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6066342A true JPS6066342A (en) | 1985-04-16 |
| JPH0255851B2 JPH0255851B2 (en) | 1990-11-28 |
Family
ID=15951790
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17297383A Granted JPS6066342A (en) | 1983-09-21 | 1983-09-21 | Stamper and its production |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6066342A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2011016148A1 (en) * | 2009-08-07 | 2011-02-10 | ニッタ株式会社 | Adhesive sheet for fixing mold, and adhesive tape for fixing mold, and process for producing fine structure |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57100637A (en) * | 1980-12-15 | 1982-06-22 | Toshiba Corp | Manufacture of master for sound disk or recording disk |
-
1983
- 1983-09-21 JP JP17297383A patent/JPS6066342A/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57100637A (en) * | 1980-12-15 | 1982-06-22 | Toshiba Corp | Manufacture of master for sound disk or recording disk |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2011016148A1 (en) * | 2009-08-07 | 2011-02-10 | ニッタ株式会社 | Adhesive sheet for fixing mold, and adhesive tape for fixing mold, and process for producing fine structure |
| JP5329666B2 (en) * | 2009-08-07 | 2013-10-30 | ニッタ株式会社 | Mold fixing adhesive sheet, mold fixing adhesive tape, and microstructure manufacturing method |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0255851B2 (en) | 1990-11-28 |
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