JPS6064206A - Two-dimensional and three-dimensional displacement detecting device - Google Patents
Two-dimensional and three-dimensional displacement detecting deviceInfo
- Publication number
- JPS6064206A JPS6064206A JP17378283A JP17378283A JPS6064206A JP S6064206 A JPS6064206 A JP S6064206A JP 17378283 A JP17378283 A JP 17378283A JP 17378283 A JP17378283 A JP 17378283A JP S6064206 A JPS6064206 A JP S6064206A
- Authority
- JP
- Japan
- Prior art keywords
- dimensional
- movable member
- displacement
- displacement detection
- fixed part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006073 displacement reaction Methods 0.000 title claims abstract description 56
- 238000001514 detection method Methods 0.000 claims description 36
- 239000000523 sample Substances 0.000 abstract 4
- 239000000470 constituent Substances 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 11
- 238000005259 measurement Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 239000013585 weight reducing agent Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
- B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements
- B23Q1/36—Springs
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/004—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points
- G01B7/008—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points using coordinate measuring machines
- G01B7/012—Contact-making feeler heads therefor
Abstract
Description
【発明の詳細な説明】
乙の発明は主として座標測定機に取付けられて、対象物
体の寸法、形状を二次元もしくは三次元に、すなわちＸ
、、ＹもしくはＸ、Ｙ、Ｚの方向に検出する装置に係る
。づ列えば接触子をその物体の設計された形状に沿って
移動させたとき、物体形状の設計値からの誤差により接
触子が変位する。そのときの変位量を二次元もしくは三
次元に検出ずろ装置である。[Detailed Description of the Invention] The invention of Party B is mainly attached to a coordinate measuring machine to measure the size and shape of a target object in two or three dimensions, that is,
, , Y, or a device that detects in the X, Y, and Z directions. If the contactor is moved along the designed shape of the object, the contactor will be displaced due to an error in the shape of the object from the designed value. This is a displacement device that detects the amount of displacement at that time two-dimensionally or three-dimensionally.
ここて三次元検出装置について、その必要条件を考える
に、第１に接触子（よ接触により三次元方向に自由に変
位してベクトル変位量Ｘ、Ｙ、Ｚ方向における変位量の
成分として検出できること、第２は接触が解除されたと
きには、接触子は高精度に一定位置に復帰できる乙と、
第３に三次元座標測定機の測定範囲を損なわない為に小
型である乙と、第４に座標測定機の移動機構の正誤差を
極力小さくするためにその重量を出来ろだけ軽くするこ
と等である。Considering the necessary conditions for a three-dimensional detection device, the first is that the contact element can be freely displaced in three-dimensional directions by contact and detected as a component of vector displacement in the X, Y, and Z directions. , the second is that the contact can return to a fixed position with high precision when the contact is released;
Thirdly, the three-dimensional coordinate measuring machine must be small in size so as not to impair its measurement range, and fourthly, the weight must be as light as possible in order to minimize the error in the movement mechanism of the coordinate measuring machine. It is.
これらの点から判断して従来使用された検出装置には欠
点があった。例えば特公昭５４−６２１８号に示された
「多次元電子センサ」は、この目的のために考えられた
もので、第１、第２の上記条件はこれを満している。し
かし第２の条件を満すために［個々の直線案内装置Ｘ、
Ｙ１Ｚ３段の中に精密鎖錠装置を設は更に機械的幾何学
的零点が電気的零点に一致するようにする為に電動調整
装置により調整可能な係止ｍ構」 （公告公報の第３図
）を必要としている。そしてこれ等は夫々Ｖ型鎖錠溝、
鎖錠味、レバー、板バネ、カム板及びこれらの駆動源で
ある電！１ｔｌＪ機等数多くの部品で構成されるため直
線案内装置の内部空間は充満し、更に必要とする付加装
置を内蔵することが不可能なためＸＹＺ３段の」一部に
更に大きなセンシングヘッドを設ける事を余儀な（され
、前述した第３・第４の小型軽量化の条件に反し重く大
型な構造になっている。更に上部に設けた付加装置の作
動には長いリンク機構を必要とし、乙のリンク部材が中
芯部を通過する為精密計測の原理であるアツベの原理に
適した中心線上に変位センサーを設ける事が出来ず精度
上も問題があった。Judging from these points, conventionally used detection devices have drawbacks. For example, the "multidimensional electronic sensor" disclosed in Japanese Patent Publication No. 54-6218 was devised for this purpose, and satisfies the first and second conditions mentioned above. However, in order to satisfy the second condition [individual linear guide device X,
A precision locking device is installed in the third stage of Y1Z, and the locking mechanism is adjustable by an electric adjustment device to ensure that the mechanical and geometric zero points coincide with the electrical zero points.'' (Figure 3 of the official bulletin) ) is needed. Each of these has a V-shaped locking groove,
The lock, the lever, the leaf spring, the cam plate, and the electricity that drives them! Since it is composed of many parts such as 1tlJ machine, the internal space of the linear guide device is full, and it is impossible to incorporate the necessary additional equipment, so it is necessary to install a larger sensing head in a part of the 3rd stage of XYZ. The structure is heavy and large, contrary to the third and fourth conditions of compactness and weight reduction mentioned above.Furthermore, a long link mechanism is required to operate the additional device installed at the top, and the Since the link member passes through the center core, it is not possible to install the displacement sensor on the center line, which is suitable for Atsube's principle, which is the principle of precision measurement, and there is also a problem in terms of accuracy.
そこで第１、第２の条件を完全に満足させ、かつ第３、
第４の条件をも満すものが要望されている。この発明は
第２の条件の復帰機構に簡単で高精度なものを採用する
と共に、この復帰機構によって得られた安定な機械的原
点に電気的零点を一致させるようにしたものである。Therefore, the first and second conditions are completely satisfied, and the third condition is
There is a demand for something that also satisfies the fourth condition. This invention employs a simple and highly accurate return mechanism for the second condition, and also makes the electrical zero point coincide with the stable mechanical origin obtained by this return mechanism.
第１図は本発明の実施の一例の概要を示す。FIG. 1 shows an overview of an example of implementation of the invention.
最上部の固定部１は三次元座標測定機の垂直軸に取付け
られ、接触子２の変位はその上のＸ、ＹＸＺ変位検出ユ
ニット３．４．５によって検出される。なおことて各変
位検出ユニットにおいては、次に示すように駆動源を必
要としない自動原点復帰機構を採用する。またｘ、ｙ、
ｚの各変位検出ユニットの組合せは、その順序を自由に
変更することが可能である。The top fixed part 1 is mounted on the vertical axis of the three-dimensional coordinate measuring machine, and the displacement of the contact 2 is detected by the X, YXZ displacement detection unit 3.4.5 above it. In addition, each displacement detection unit employs an automatic origin return mechanism that does not require a driving source, as described below. Also x, y,
The order of the combinations of displacement detection units of z can be freely changed.
第２図は変位検出ユニットの一例を示す。変位検出ユニ
ットは固定部、第１可動部材、第２可動部材の三つの構
成要素からなり、固定部６はＬ字型をなし、第１可動部
材７が平行ばね８．９によって同定部６の下方に吊され
ている。そして固定部６のＬ字型の下端と第ｉ ｎＪ動
部材７どの間に第１ストツパ１０を設け、このストッパ
が常時接触しているように、引張りスプリング１］を固
定部６と第１可動部材７との間に入れろ。FIG. 2 shows an example of a displacement detection unit. The displacement detection unit consists of three components: a fixed part, a first movable member, and a second movable member. The fixed part 6 is L-shaped, and the first movable member 7 is connected to the identification part 6 by a parallel spring 8. suspended below. A first stopper 10 is provided between the L-shaped lower end of the fixed part 6 and the i-th movable member 7, and the tension spring 1 is connected between the fixed part 6 and the first movable member so that this stopper is always in contact with the first stopper 10. Insert it between it and member 7.
また固定部６から平行ばね１３．１４をもって第２可動
部材１２を下げ、これに接触子２を取付ける。Further, the second movable member 12 is lowered from the fixed part 6 with parallel springs 13, 14, and the contactor 2 is attached thereto.
そして第１可動部材７と第２可動部材１２との間に第２
ストッパ１５を設け、これが常時接触するようにスプリ
ング１６を入れる。そし−（第２１＋Ｊ ＠Ｊ部材１２
と固定部６との間に変位検出器１７を設ける。なおこの
検出器としては差動変圧器、モアレスケール等の直線変
位検出部が使用できろ。The second movable member 7 and the second movable member 12
A stopper 15 is provided, and a spring 16 is inserted so that the stopper 15 is always in contact with the stopper 15. Soshi-(21st +J @J member 12
A displacement detector 17 is provided between the fixed part 6 and the fixed part 6. Note that a linear displacement detector such as a differential transformer or a moiré scale can be used as this detector.
このような構造において接触子２に（＋Ｘ）の変位が加
わると、第２可動部材１２はスプリング１６を伸はし、
ストッパ１５を離して＋Ｘ量平行に変位して、これが変
位ｆｌｌ＋Ｘ）として検出部１７によって検出される。In such a structure, when a displacement of (+X) is applied to the contactor 2, the second movable member 12 stretches the spring 16,
When the stopper 15 is released, it is displaced +X amount in parallel, and this is detected by the detection unit 17 as a displacement fll+X).
次に（−Ｘｌの変位が加わると、第２可動部祠１２は（
−入）量平行に移動して、第２ストｙパ１５を介して第
１可動部材７を（−）方向に移動させる。この時スプリ
ング１１ば１申ばされ、ストッパ１０は離れ、そのとき
の変位量（−ＸＩ Ｉよ検出部１７によって検出される
。そして接触イが被測定物より離れ（＋Ｘ）又は（−Ｘ
）の変位が解除されると二組の平行ばね８．９と１３．
１４及び二つの引張りスプリング１１．１６によって他
の駆動力を用いる事なく自動的に原点に復帰する。Next, when a displacement of (-Xl is applied, the second movable part shrine 12 is (
The first movable member 7 is moved in the (-) direction via the second stopper 15. At this time, the spring 11 is released, the stopper 10 is released, and the amount of displacement (-XI) at that time is detected by the detection unit 17.Then, the contact A moves away from the object to be measured (+X) or (-X
) is released, two sets of parallel springs 8.9 and 13.
14 and two tension springs 11 and 16 to automatically return to the origin without using any other driving force.
第３図は変位検出二１．ニットの他の実施例を示す。こ
こては前記の三つの構成要素の連結方法を一部変える。Figure 3 shows displacement detection 21. Another example of knit is shown. Here, the method of connecting the three components described above is partially changed.
すなわち固定部６に対して第１可動部材２０を平行ばね
で関連させ、その間にストッパ２１を設け、常時接触す
る方向にスプリングを設け、かつ第１ｉ３ＪＩｌｌＪ部
材２０に対して第２可動部材２２を平行ばねて第１、第
２可動部材を平行に関連させ、その間にストッパ２３を
設け、常時接触する方向のスプリングを設は第２ ｎＪ
動部材２２と固定部６との間に検出部１７を設けろ。ま
た第２可動部材２２に接触子２を取付ける１、そして（
＋Ｘ）方向変位に対してはストッパ２１が開き、（−Ｘ
）方向変位に対してはストッパ２３が開く。なお変位量
の検出、自動原点１に帰については第２図に示した第１
の実施例とまっノこく同様である。That is, the first movable member 20 is connected to the fixed part 6 by a parallel spring, the stopper 21 is provided between them, the spring is provided in the direction of constant contact, and the second movable member 22 is connected parallel to the 1i3JIllJ member 20. A spring is used to connect the first and second movable members in parallel, a stopper 23 is provided between them, and a spring is provided in the direction of constant contact with the second movable member.
A detection section 17 should be provided between the moving member 22 and the fixed section 6. Further, 1 attaches the contactor 2 to the second movable member 22, and (
The stopper 21 opens for displacement in the (-X) direction, and
) direction, the stopper 23 opens. For detecting the amount of displacement and automatically returning to the origin 1, please refer to the
This is exactly the same as the embodiment.
このように構成された第１実施例あるし）は第２実施例
の検出ユニットを９０°回転ずればＹ方向に、横に使用
すればＺ方向の検出装置となる。If the detection unit of the second embodiment is rotated by 90 degrees, it becomes a Y-direction detection device, and if used laterally, it becomes a Z-direction detection device.
そしてこれを第１図に示すように積み重ねるのであるが
、Ｘ方向変位ユニット３における固定部６をＹ方向変位
ユニット４の第２可動部利に、Ｙ方向変位ユニット４の
固定部をＺ方向変位ユニシト５の第２可動部材に連結す
る。These are stacked as shown in Figure 1, with the fixed part 6 of the X-direction displacement unit 3 serving as the second movable part of the Y-direction displacement unit 4, and the fixed part of the Y-direction displacement unit 4 being used as the second movable part of the Y-direction displacement unit 4. It is connected to the second movable member of the unit 5.
以上に示すユニットはそのいずれを使用しても、また混
合使用しても良いが以下の使用例て（よ第２図のユニッ
トを使用した場合を示す。Any of the units shown above may be used or they may be used in combination, but the following usage example shows a case where the unit shown in FIG. 2 is used.
第４図において最下段のユニット３は第２図に示すもの
とまったく同じでＸ方向の変位量の検出を行なう。ここ
で乙の平行ばねはそれぞれＹ方向の力には強い剛性を有
するので、Ｙ方向の変位２よ（図面に対し直角な方向）
はそのまま中段Ｙ方向ユニット４に伝達される。そして
変位がＸ、Ｙ方向の中間方向であれば、Ｘ方向成分ｊ！
けをＸ方向コニットが検出し、Ｙ方向成分はＹ方向ユニ
ットが検出する。なお第４図においてＹ方向ユニット４
は断面を図示している。In FIG. 4, the lowest unit 3 is exactly the same as that shown in FIG. 2, and detects the amount of displacement in the X direction. Here, each of the parallel springs B has strong rigidity against the force in the Y direction, so the displacement in the Y direction is 2 (direction perpendicular to the drawing).
is transmitted as is to the middle Y-direction unit 4. If the displacement is in an intermediate direction between the X and Y directions, the X direction component j!
The X direction component detects the damage, and the Y direction component is detected by the Y direction unit. In addition, in FIG. 4, the Y direction unit 4
shows a cross section.
そしてその上に重ねられたＹ方向ユニット−５＋よ平行
ばねが水平になるように、Ｘ方向ユニツＩ・３を横にし
た姿勢となる。なおＸ方向ユニソ）・３の固定部がＹ方
向ユニット４の第２可動部材に、Ｙ方向ユニット４の固
定部がＺ方向ユニット５の第２可動部材２６に連結され
る。ここてＸ、Ｙ方向ユニット３．４及び接触子２の重
量が総てＺ方向ユニット５の第２可動部ヰ４２６にかか
ることになるので、乙の重量のバランスを取り、第２可
動部材２６にＺ方向の変位量だけが伝達されるように、
スプリング２７．２８によって吊り、二つのストッパが
常時接触しているように調整する。Then, the X-direction unit I/3 is placed horizontally so that the parallel springs of the Y-direction unit -5+ superimposed on it are horizontal. Note that the fixed part of the X-direction unit 3 is connected to the second movable member of the Y-direction unit 4, and the fixed part of the Y-direction unit 4 is connected to the second movable member of the Z-direction unit 5. Here, the weight of the X- and Y-direction units 3.4 and the contactor 2 will all be applied to the second movable part 426 of the Z-direction unit 5, so the weight of the second movable member 426 is balanced and so that only the displacement in the Z direction is transmitted to
It is suspended by springs 27 and 28 and adjusted so that the two stoppers are in constant contact.
なお上記においては三つのユニットを重ねる方式を示し
たが、これをＸ、Ｙ二段とすることも可能である。また
三つのユニット各々を組込むことも可能である。すなわ
ち、例えばＸ方向ユニットの内部にＹ方向ユニットを）
Ｉｔ込み、更にその中にＺ方向ユニットを入れる。第５
図はこれを示すものであるが、接触子を、１ずＺ方向ユ
ニットの第２可動部材に連結し、その固定部をこれを取
巻いて位置しているＹ方向ユニノ）−に連結（Ｙ方向ユ
ニットは紙面に直角方向なので図示省略）し、更にその
外側をＸ方向コニノドに連結したものである。なお接触
子の重紙は貫通ずる調整可能のスプリング３０によって
吊ってバランスを取る。そしてこの組合せは自由に取る
ことが可能であって、第６図てＣよ接触子をＺ方向ユニ
ットに取付け、Ｘ方向ユニットとＹ方向ユニットとを組
込んで２方向ユニツトの上に重ねて取付けろ。こうする
と平行ばねの長さを長く取ることが可能となる。In addition, although the method in which three units are stacked is shown above, it is also possible to make this into two stages, X and Y. It is also possible to incorporate each of the three units. In other words, for example, a Y-direction unit inside an X-direction unit)
It is included, and the Z direction unit is further inserted into it. Fifth
The figure shows this. First, the contactor is connected to the second movable member of the Z-direction unit, and its fixed part is connected to the Y-direction unit located surrounding it (Y The direction unit is perpendicular to the plane of the paper (not shown), and its outer side is connected to the X-direction controller. Note that the heavy paper of the contactor is suspended and balanced by a spring 30 whose penetration is adjustable. This combination can be chosen freely; as shown in Figure 6, the contactor C is attached to the Z-direction unit, the X-direction unit and the Y-direction unit are assembled, and the two-direction unit is stacked and installed on top of it. reactor. This makes it possible to increase the length of the parallel spring.
次に各々の変位検出ユニットの直線変位検出器の電気的
零点を機械的原点と一致させる下段について説明する。Next, the lower stage of aligning the electrical zero point of the linear displacement detector of each displacement detection unit with the mechanical origin will be explained.
一般に電気的零点はミクロン的に見た場合渦電変化等の
外乱により長詩間においては磯城的Ｍ点に一致しない事
か知らＭ’している。本装置では各ユニットの第１、第
２ストツパを本体と電気絶縁して接触により導通状態と
なる電気接点を兼ねて使用′４る。第７図第８図におい
て示ずスイノ：ｆ３１．３２は第１及び第２のストッパ
を電気（に点としｔ：ものである。測定の開始時或いは
一定時間経過し、電気的零点の不一致が予測された時、
−Ｌ勤スイッチ又は）−ケンス信号に、１．り零点一致
指令信号を加える。In general, it is known that the electrical zero point does not coincide with the Isoshiro M point in long poems due to disturbances such as eddy electric changes when viewed from a micron perspective. In this device, the first and second stoppers of each unit are electrically insulated from the main body and are used as electrical contacts that become conductive upon contact. (not shown in Fig. 7 and Fig. 8): f31.32 is the one in which the first and second stoppers are electrically connected. At the start of measurement or after a certain period of time, the mismatch of the electrical zero points occurs. When predicted,
-L shift switch or)-to signal, 1. Add a zero point coincidence command signal.
この侶月はストッパ接点侶号３］ 、３２とのＡＮＤ回
路３３に加又られ、接点がＯＮの状態すなわち接触子が
被測定物体等に触れていない事が確認されたときこの状
態におけろ直線変位検出器（第７図においては差動変圧
器１７）の出力電圧Ａは誤差信号として記憶回路３４に
記憶される。この状態における検出器の出力電圧は、零
である様に作られてはいるが製作時の誤差或いは経時変
化等により零であるとは限らない１、との（ｆｌが測定
誤差となる。記憶回９３４の誤差にうぢは常時Ｂとして
読み出され、次に設けられ／、： ？１ｎ ｉＦ演Ｗ器
３５に導かれ直線変位検出器１７からのイ、１号Ａとの
間でＡ−Ｂの演算が行なわれ出力４フ；号となる。This output is added to the AND circuit 33 with the stopper contacts 3] and 32, and is in this state when it is confirmed that the contact is ON, that is, the contact is not touching the object to be measured, etc. The output voltage A of the linear displacement detector (differential transformer 17 in FIG. 7) is stored in the storage circuit 34 as an error signal. Although the output voltage of the detector in this state is made to be zero, it may not always be zero due to manufacturing errors or changes over time (1) (fl is the measurement error. Memory) Due to the error in the rotation 934, the signal is always read as B, and then provided as /,: ?1n. The calculation of B is performed and the output is number 4.
零点一致指令信号が加えられｌ一時点てＩｔ Ａ＝ １
３てありＡ−Ｂ＝Ｏとなり、２つのス１ ツバ３Ｉ。At one point when the zero point coincidence command signal is applied, ItA=1
3 and A-B=O, so there are two S1 Tsuba 3I.
３２が接触してし）る暗部ら機械的原点て（よ電気的出
力は常に零となり一致ずろ。被測定物の測定時に於ても
記憶回路出力Ｂは出力されているので誤差量は常に補正
演算され正しい測定（Ｉｎが得られる。第７図に示すも
のは−１−記した直線変位検出器の電気的零点を機械的
原点と一致させる方法としてアナログメモリによるアナ
ログ出力回路による実施例でありまた第８図に示すもの
はＡＤ変換したディジタル回路によるものである。ディ
ジタル回路による補止は検出部がモアレスケール等のデ
ィノタルスケール方式とその読取装置を使用する場合に
は同様てあ−、て、第９図にその回路を示す。From the dark area where 32 is in contact with the mechanical origin, the electrical output is always zero and does not match. Even when measuring the object to be measured, the memory circuit output B is output, so the error amount is always corrected. The correct measurement (In) is obtained by calculation.The one shown in Fig. 7 is an example using an analog output circuit using an analog memory as a method of aligning the electrical zero point of the linear displacement detector marked -1- with the mechanical origin. The one shown in Fig. 8 is based on a digital circuit that performs AD conversion.The correction using a digital circuit is the same when the detection section uses a dinotal scale method such as a moiré scale and its reading device. The circuit is shown in FIG.
零点一致指令（ｇ号を発生ずるシーケンス信号にはタイ
マー等に、Ｌろ定時間毎の方式の他に第１０図に示す様
にスｈソバ接点３１．３２がＯＮの時、Ａ−Ｂの補正演
算器３５の出力信号を零電圧検出回路３６に加え予しめ
設定した許容電圧値以−１−になった時零点一致指令信
号を自動的に発生させろ方ン去もある。The sequence signal that generates the zero point coincidence command (g) is sent to a timer, etc., in addition to the method for every L filter time, as shown in Figure 10, when the contacts 31 and 32 are ON, the A- It is also possible to add the output signal of the correction calculator 35 of B to the zero voltage detection circuit 36 and automatically generate a zero point coincidence command signal when the voltage becomes -1- below a preset allowable voltage value.
以上訂述した。Ｌうに本発明によれば各検出ユニソ）・
の第１’ｒｒＪ ！ＦＩ＋部イイおよび第２可動部材を
それぞれ一対の平行ばねて支持するという簡単な構造で
接触子が？ＩＱ ｉ！！Ｑ定物に接触した瞬間を検出す
ることかてき、かつその接触が解除されたときはその接
触子は、！−＆精度に原点位置に復帰し、さらにこの高
精度に１４帰した供城的昂点に電気的零点を容易に一致
させることかできるという種々の省れた効果を炎するこ
とがＣきた。I have elaborated above. According to the present invention, each detection unit)
The 1st 'rrJ! A simple structure in which the FI+ part II and the second movable member are each supported by a pair of parallel springs allows the contactor to be fixed. IQ i! ! Q: It is possible to detect the moment of contact with a fixed object, and when the contact is released, the contact is ! The electric zero point can be returned to the original position with high precision, and the electric zero point can be easily made to coincide with the high point resulting from this high precision.
第１図は本発明の一実施例の概要を示す説明図、第２図
は本発明を構成する変位検出ユニットの構造説明図、第
３図は変位検出ユニソ１−の他の実施例を示す説明図、
第４図は本発明の一実施例における構造説明図、第５図
は他の実施例を示す構造説明図、第６図は他の実施例の
概要を示す説明図、第７図はアナログ方式に、Ｌる機械
的原点と電気的零点を一致させる為の回路図、第８図は
ディジタル方式における機械的原点と電気的零点を一致
させる為の回路図、第９図はスケール読取方式におけろ
機械的１９点と電気的零点を一致さゼる為の回路図、第
１Ｏ図はアナログ方式における機織的原点と電気的零点
を一致させるだめの自動シーケンスを；Ｉくず回路図３
゜２＝接触子
３．４、ｓ ：ｘ、 ｙ、 ｚ方向変位検出ユニット６
：固定部 ７．２０：第１可動部オイ１０．１５．２１
．２３：ストソバ １１．１６：引張りスプリング１２
．２２：第２可動部材 ２７．２８．３０：調整スフリ
レグ３１．３２：ストツバ兼電気接点
特許出願人
株式会社 東京ｖＰ（密
零占−＝秒指１デ信号
零点一致指令信号FIG. 1 is an explanatory diagram showing an outline of one embodiment of the present invention, FIG. 2 is a structural explanatory diagram of a displacement detection unit constituting the present invention, and FIG. 3 is a diagram showing another embodiment of the displacement detection unit 1-. Explanatory diagram,
Fig. 4 is a structural explanatory diagram of one embodiment of the present invention, Fig. 5 is a structural explanatory diagram showing another embodiment, Fig. 6 is an explanatory diagram showing an outline of another embodiment, and Fig. 7 is an analog system. Figure 8 is a circuit diagram for matching the mechanical origin and electrical zero point in the digital system, and Figure 9 is a circuit diagram for matching the mechanical origin and electrical zero point in the digital system. The circuit diagram for matching the 19 mechanical points and the electrical zero point, Figure 1O shows the automatic sequence for matching the mechanical origin and the electrical zero point in the analog system; I scrap circuit diagram 3
゜2=contact 3.4, s: x, y, z direction displacement detection unit 6
:Fixed part 7.20:First movable part 10.15.21
．． 23: Stosoba 11.16: Tension spring 12
．． 22: Second movable member 27.28.30: Adjustment souffling leg 31.32: Stopper and electric contact patent applicant Tokyo vP (close zero count - = second finger 1 de signal zero point coincidence command signal
Claims (8)
２絹の平行ばねをもって相互に平行に連結し、上記圧つ
の主要構成部月間に常に接触状態に付勢されている第１
、第２のストッパを設け、第２可動部材に接触子を設け
、第２可動部材と固定部との間に変位検出部を設けてな
る変位検出ユニν１・の固定部を他の変位検出ユニット
の第２可動部材に順次連結ずろことにより、Ｘ、Ｙ、も
しく１．ｌＸ、Ｙ、Ｚの三方向に組合せてなる二次元お
よび三次元変位検出装置。(1) The fixed part, the first movable member, and the second movable member are connected in parallel to each other by two silk parallel springs, and the main components of the above-mentioned pressure parts are always urged to be in contact with each other. 1
, a second stopper is provided, a contact is provided on the second movable member, and a displacement detection unit is provided between the second movable member and the fixed part.The fixed part of the displacement detection unit ν1 is connected to another displacement detection unit. X, Y, or 1. A two-dimensional and three-dimensional displacement detection device that is combined in three directions: lX, Y, and Z.
第１可動部祠及び第２可動部材を連結し、第１可動部ヰ
」と第２ ｉｊＪ動部材との間及び固定部と第１ ｎＪ
動部材との間にストッパを設けてなる変位検出ユニット
を使用した二次元及び三次元変位検出装置。(2) In the Fu enclosure clause of the claim - (, the first movable part and the second movable member are connected to the fixed part, and between the first movable part and the second moving member and the fixed part and the first nJ
A two-dimensional and three-dimensional displacement detection device using a displacement detection unit provided with a stopper between the moving member and the moving member.
可動部材、第１可動部材に対して第２可動部材を連結し
、固定部と第１可動部材、第１可動部材と第２可動部材
との間にストンパを設けてなる二次元及び三次元変位検
出装置。(3) In @Izutsu Clause 1 of the claim, the first
A movable member, a two-dimensional and three-dimensional displacement device in which a second movable member is connected to the first movable member, and a stopper is provided between the fixed part and the first movable member, and between the first movable member and the second movable member. Detection device.
位検出ユニットを混合して組合せた二次元及び三次元変
位検出装置。(4) A two-dimensional and three-dimensional displacement detection device according to claims 1, 2, and 3, in which displacement detection units are mixed and combined.
直列に組立ててなる二次元及び三次元変位検出装置。(5) A two-dimensional and three-dimensional displacement detection device according to claim 1, which is formed by assembling displacement detection units in series.
、一つのユニットの内に他を組込みＩ’４ Ｈする関係
に組合せてなる二次元及び三次元変位検出装置。(6) A two-dimensional and three-dimensional displacement detecting device in which displacement detecting units are combined in a relationship such that one unit incorporates another in the first term of the H range.
一つを他の中に組込み、更に残りの一つを直列に組合せ
てなる二次元及び三次元変位検出装置。(7) A two-dimensional and three-dimensional displacement detection device according to claim 1, in which one of the displacement detection units is incorporated into the other, and the remaining one is further combined in series.
第１、第２のストッパを電気接点とし、この二つの接点
の導通状態のときの変位検出器の出力を記憶し、この信
号を用いて電気的零点を機械的原点と一致させる乙とを
特徴とした二次元及び三次元変位検出装置。(8) In claim 1, the first and second stoppers of the displacement detection unit are electrical contacts, the output of the displacement detector when these two contacts are in a conductive state is stored, and this signal is used. A two-dimensional and three-dimensional displacement detection device characterized by (B) which aligns an electrical zero point with a mechanical origin.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17378283A JPS6064206A (en) | 1983-09-19 | 1983-09-19 | Two-dimensional and three-dimensional displacement detecting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17378283A JPS6064206A (en) | 1983-09-19 | 1983-09-19 | Two-dimensional and three-dimensional displacement detecting device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6064206A true JPS6064206A (en) | 1985-04-12 |
Family
ID=15967046
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17378283A Pending JPS6064206A (en) | 1983-09-19 | 1983-09-19 | Two-dimensional and three-dimensional displacement detecting device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6064206A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0243766A2 (en) * | 1986-04-24 | 1987-11-04 | Renishaw plc | Probe for measuring workpieces |
| JPH01501969A (en) * | 1987-01-15 | 1989-07-06 | フィディーア・ソシエタ・ペル・アチオーニ | Feeler device especially for copying machines |
| JPH05332766A (en) * | 1992-05-28 | 1993-12-14 | Mitsutoyo Corp | Copying probe |
| EP0628785A3 (en) * | 1993-06-05 | 1995-06-14 | Heidenhain Gmbh Dr Johannes | Multi-coordinates feeler head. |
| JP2007114106A (en) * | 2005-10-21 | 2007-05-10 | Mitsutoyo Corp | Displacement sensor and surface property measuring instrument |
| CN102155896A (en) * | 2011-03-11 | 2011-08-17 | 天津大学 | Single-sensor two-dimensional contact type measuring probe based on gear measurement |
-
1983
- 1983-09-19 JP JP17378283A patent/JPS6064206A/en active Pending
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0243766A2 (en) * | 1986-04-24 | 1987-11-04 | Renishaw plc | Probe for measuring workpieces |
| US4813151A (en) * | 1986-04-24 | 1989-03-21 | Renishaw Plc | Probe for measuring workpieces |
| US4934065A (en) * | 1986-04-24 | 1990-06-19 | Renishaw Plc | Probe for measuring workpieces |
| JPH01501969A (en) * | 1987-01-15 | 1989-07-06 | フィディーア・ソシエタ・ペル・アチオーニ | Feeler device especially for copying machines |
| JPH05332766A (en) * | 1992-05-28 | 1993-12-14 | Mitsutoyo Corp | Copying probe |
| EP0628785A3 (en) * | 1993-06-05 | 1995-06-14 | Heidenhain Gmbh Dr Johannes | Multi-coordinates feeler head. |
| JP2007114106A (en) * | 2005-10-21 | 2007-05-10 | Mitsutoyo Corp | Displacement sensor and surface property measuring instrument |
| CN102155896A (en) * | 2011-03-11 | 2011-08-17 | 天津大学 | Single-sensor two-dimensional contact type measuring probe based on gear measurement |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5832416A (en) | Calibration system for coordinate measuring machine | |
| EP0386115B1 (en) | Calibration system for coordinate measuring machine | |
| US4939678A (en) | Method for calibration of coordinate measuring machine | |
| US4798004A (en) | Displacement detecting apparatus | |
| CN101377414B (en) | Apparatus and method for measuring two-dimensional small angle based on light beam angle drift dynamic compensation | |
| CN105823422A (en) | Two-degree-of-freedom heterodyne grating interferometer displacement measurement system and method | |
| US3631603A (en) | Method and apparatus for measuring profile and lead errors in gear teeth | |
| JPS6064206A (en) | Two-dimensional and three-dimensional displacement detecting device | |
| EP0179935A1 (en) | Interferometric thickness analyzer and measuring method | |
| US3068743A (en) | Optical apparatus for measuring small distances | |
| JPH0359364B2 (en) | ||
| US7581326B1 (en) | Optical solid-state heading sensor | |
| US3916528A (en) | Apparatus for compensation of dimensional position changes | |
| US5142146A (en) | High-accuracy position comparator using 2 dimensional grating | |
| CN103412405B (en) | Light beam coupler | |
| US3305931A (en) | Measuring apparatus | |
| Schneider | Testing The Mann Type 4800DSWTM Wafer Steppertm | |
| US20230304830A1 (en) | Low-cost compact micro-displacement sensor | |
| WO2016032156A1 (en) | Weight compensation device and method | |
| Podoloff et al. | An accuracy test procedure for robotic manipulators utilizing a vision based, 3-D position sensing system | |
| JPH07270723A (en) | Fixed point detecting device | |
| JPS60177239A (en) | Detector for axis shift of optical system | |
| JPH04204106A (en) | Optical displacement gage camera | |
| WO2017122979A1 (en) | Weight measuring device | |
| SU1696862A1 (en) | Optronic device for contact-free measuring of polished surface profile |