JPS6063442A - Method for stabilizing calibration gas composition - Google Patents

Method for stabilizing calibration gas composition

Info

Publication number
JPS6063442A
JPS6063442A JP3125984A JP3125984A JPS6063442A JP S6063442 A JPS6063442 A JP S6063442A JP 3125984 A JP3125984 A JP 3125984A JP 3125984 A JP3125984 A JP 3125984A JP S6063442 A JPS6063442 A JP S6063442A
Authority
JP
Japan
Prior art keywords
aluminum
gas
resin
titanium
container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3125984A
Other languages
Japanese (ja)
Inventor
Tadashi Karaki
唐木 正
Shuji Ueda
上田 修次
Hiroichi Hara
博一 原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Seika Chemicals Co Ltd
Original Assignee
Seitetsu Kagaku Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seitetsu Kagaku Co Ltd filed Critical Seitetsu Kagaku Co Ltd
Priority to JP3125984A priority Critical patent/JPS6063442A/en
Publication of JPS6063442A publication Critical patent/JPS6063442A/en
Pending legal-status Critical Current

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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004Gaseous mixtures, e.g. polluted air
    • G01N33/0006Calibrating gas analysers

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  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Medicinal Chemistry (AREA)
  • Food Science & Technology (AREA)
  • Combustion & Propulsion (AREA)
  • Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Sampling And Sample Adjustment (AREA)

Abstract

PURPOSE:To preserve stably for a long time a compsn. of an easily variable low concn. calibration gas such as nitrogen monooxide, carbon monooxide in the usage of an air pollution measurement, by using a high pressure gas vessel whose inner surface is coated by metal or synthetic resin or inorganic material. CONSTITUTION:A thin film is formed in the inner surface of the high pressure gas vessel. The thin film is formed by spattering a metal selected from gold, nickel, aluminum, copper, tantalum, silver, lead, antimony, tin, bismuth, platinum, molybdenum, tungsten, cadmium, chromium, zinc, titanium, palladium, zorconium, etc., or alloy of these metals, or metal nitride or oxide such as aluminum nitride, aluminum oxide, tantalum oxide, titanium oxide, or one kind of resin selected from polytetrafluoroethylene resin, polytrifluoroethylene resin, polyamide resin, epoxy resin, polypropylene resin, polyethylene resin, etc., or one kind of inorganic material such as quartz, glass. The easily variable low concn. reference calibration gas is packed into such high pressure gas vessel and stored therein.

Description

【発明の詳細な説明】 詳しく述べればスパッタリング現象を利用して高圧ガス
#器の内面に金属,その他の#膜を施こしたものを用い
て、こ、rLに削起標準校正ガスを充填して安定化する
方法をこ関するものである。
[Detailed Description of the Invention] To be more specific, a metal or other # film is applied to the inner surface of a high-pressure gas container using sputtering phenomenon, and the rL is filled with a standard calibration gas. This article concerns a method for stabilizing it.

近時公害防止の観点から大気汚染度の一定が問題となり
、各種の微量分析計が盛.に使用されているが、これら
には厳密な定j7選択性を有するものが少ないため、分
析計に供給す6校正ガスを準備する際最適の標準ガスの
組成を決定すると同時に、調製した標準校正ガス組成を
でさる限り変化させことなく安定した状態で分析計に供
給することが望まれる。
In recent years, constant air pollution has become a problem from the perspective of pollution prevention, and various microanalyzers have become popular. However, there are few of these that have strict constant j7 selectivity, so when preparing the six calibration gases to be supplied to the analyzer, it is necessary to determine the optimal composition of the standard gas and at the same time use the prepared standard calibration gas. It is desirable to supply the gas to the analyzer in a stable state without changing the gas composition as much as possible.

このような大気汚染の一定に使用されろ標準校正ガスと
しては一酸化窒素.−酸化炭素などをはじめ多くの品種
が用いられているが希薄濃度域におけるこれらの標準ガ
スは、一般に窒素,アルゴンをバランスガスとして希釈
するもので、保存しておくと標準ガス組成に経時変化を
生じ高圧ガス容器自着こおけろ校正ガスの値が安定しな
い場合が多い。 校正ガスの標準値、とくに微量濃度域
校正ガスの標準値が一定しないと測定に正m注を欠き、
標準校正ガスとしてのiIIb値を失うことはdうまで
もない。
Nitric oxide is the standard calibration gas used to measure air pollution. -Many types of standard gases are used, including carbon oxide, but these standard gases in dilute concentration ranges are generally diluted with nitrogen or argon as a balance gas, and if stored, the standard gas composition will not change over time. The value of the calibration gas produced by the high-pressure gas container itself is often unstable. If the standard value of the calibration gas, especially the standard value of the calibration gas in the trace concentration range, is not constant, the measurement will not be accurate.
Needless to say, the iIIb value as a standard calibration gas will be lost.

本発明者等は、−酸化窒素あるいは一酸化炭素などの校
正ガスが高圧ガス容器内で経時変化を起こし標準値の不
安定をもたらす要因につい〔凶々検討の結果、高圧容器
材の内面状ra s ことに鉄。
The present inventors have investigated the factors that cause the calibration gas such as nitrogen oxide or carbon monoxide to change over time in the high-pressure gas container and cause the standard value to become unstable. s Especially iron.

水酸化鉄,酸化鉄等によるものであ渇との知見を得、−
破イと窒素,あるいは−酸化炭素などの標準組成ガスが
鯛鉄製容器内面と直接接触することを防ぐため充填すべ
き標準校正ガス成分に対し安定な金属または合成樹脂も
しくは無機物質を高圧容器内1逗に被覆することにより
標準校正ガスの経時安定性が長期に亘って保てることを
確認して本発明に至った。
It was discovered that iron hydroxide, iron oxide, etc. caused thirst.
In order to prevent the standard composition gas such as nitrogen or carbon oxide from coming into direct contact with the inner surface of the Tai-tetsu container, a metal, synthetic resin, or inorganic substance that is stable against the standard calibration gas components to be filled is placed inside the high-pressure container. The present invention was achieved by confirming that the stability of the standard calibration gas over time can be maintained over a long period of time by coating the standard calibration gas.

本発明の要旨は、経時変化を起しゃすい低濃度諌止ガス
を安定に保存する方法が、ガス容器の上部平端部に配設
したガスケットと、該ガス容器内に延長させた円柱状電
極と、該容器内を真空排気する手段と、該容器内にイオ
ン化可能な気体を導入する手夜と、前記−極に高周波も
しくは直流電圧を印加する手段とから構成されたスパッ
タリング装置により、前記容器内にグロー放電を発生さ
せ、金属,合金,金属化合物.プラスチック及び無機化
合物よりなる群より選ばれた1種を,スパッタリングし
1内壁に形成された被膜を有す゛る高圧ガス容器に、前
記校正ガスを充填すゐことよりなることを特徴とする低
濃度校正ガス組成の安だ化方法である。
The gist of the present invention is to provide a method for stably storing low-concentration stop gas that tends to change over time, using a gasket disposed at the upper flat end of a gas container, and a cylindrical electrode extended into the gas container. , a sputtering device comprising means for evacuating the inside of the container, a means for introducing an ionizable gas into the container, and a means for applying a high frequency or DC voltage to the negative electrode. It generates a glow discharge in metals, alloys, and metal compounds. A low-concentration calibration characterized in that a high-pressure gas container having a film formed on the inner wall by sputtering one selected from the group consisting of plastics and inorganic compounds is filled with the calibration gas. This is a method of making the gas composition cheaper.

本発明は、−酸化窒素あるいは一順化炭素などの変化し
やすい低濃度校正ガス組成を安定に保存する方法が金,
ニッケル、アルミ・ニウム、銅,タンタル、銀,鉛,ア
ンチモン、錫,蒼鉛,白金。
The present invention provides a method for stably preserving the composition of a low-concentration calibration gas such as nitrogen oxide or monoacclimated carbon.
Nickel, aluminum, copper, tantalum, silver, lead, antimony, tin, blue lead, platinum.

モリブテン、タングステン、カドミウム、クロム。Molybdenum, tungsten, cadmium, chromium.

亜鉛,チタン、パラジウム、ジルコニウム等よりなる群
より選ばれた金属の1種またはこれらの合金、もしくは
窒化アルミニウム、t1!化アルミニウム、酸化タンタ
ル、酸化チタン等の金属窒化物もしくは鍍化響の111
1、または四弗化エチレン樹脂。
One metal selected from the group consisting of zinc, titanium, palladium, zirconium, etc. or an alloy thereof, or aluminum nitride, t1! Metal nitrides such as aluminum oxide, tantalum oxide, titanium oxide or 111
1, or tetrafluoroethylene resin.

三弗化エチレンm脂,ポリアミド1目脂,エポキシ樹脂
,ポリプロピレン41,J脂,ポリエチレン樹1屑等の
安定な合成樹脂よりなろ群より選ばれたll(n。
ll (n.

あるいは石英,硝子等の無機物の1稠をスパッタリング
現象を利用して高圧ガス容器内面に薄膜を形成すること
よりなり、これに変化しやすい低濃度標準校正ガスを充
填して貯蔵することを狩徴とする低濃度校正ガスの安定
化方法である。
Alternatively, it is possible to form a thin film on the inner surface of a high-pressure gas container using a sputtering phenomenon with a single concentration of inorganic material such as quartz or glass, and then fill this with a easily changeable low-concentration standard calibration gas and store it. This is a method for stabilizing low concentration calibration gas.

本発明の方法を適用でさろ校正ガスは、鉄の存在下に変
化を起しやすい性質を有するガスであればどのようなガ
スでもよいが、ここでは便宜上−酸化窒素および一酸化
炭素を対象として説明する。
The calibration gas to which the method of the present invention is applied may be any gas as long as it has the property of easily changing in the presence of iron, but here, for convenience, nitrogen oxide and carbon monoxide are used as the calibration gas. explain.

本発明の方法は出願人がさきに特許出願した特盗器に内
張すする方法として主としてメッキを対象としていたも
のであるが、本発明者等はその後引続いて発明の目的を
より充分に達成すべく検討を重ねた結果本発明を完成し
たものである。
Although the method of the present invention was primarily intended for plating as a method for lining a special stealth device for which the applicant previously applied for a patent, the present inventors subsequently continued to pursue the purpose of the invention more fully. The present invention has been completed as a result of repeated studies to achieve this goal.

即ち本発明の目的は一酸化窒素、、−wI化戻素などの
変化しゃすい低濃度校正ガスの組成を長期に亘り安定に
保存することにあり、もって大気汚染測定用校正ガスを
供給することができるようになしたことをこある。
That is, the purpose of the present invention is to stably preserve the composition of a low-concentration calibration gas that easily changes, such as nitrogen monoxide, -wI, and the like, over a long period of time, thereby supplying a calibration gas for air pollution measurement. Here's what I did to make it possible.

従来容器の内張りとして知られているものとしては金属
メッキ及びプラスチックのライニングがある。しかしな
がらこれら′の内張りはいずれも欠点を有し、前者はと
ンホールが生じゃ丁い、水素等のガスが吸蔵される、膜
が厚く従って貴金属の場合材料費が非常に高くつく、膜
があらい、加工に手数を要し時間がかかる、メッキ廃液
の処理が面倒である等、またメッキの1種である溶融メ
ッキにおいては処理温度、高く容器材質に影響を及ぼす
、剥離しやすい等、後者の場合は、隅々まで被覆しにく
い、ピンホールが多い、ガスが1吸着される、剥離しや
すい等の問題が多い。これに反し不発IIにおけるスパ
ッタリング被1良はビンホーlしが少ない、ガスの吸蔵
が生じない、薄膜で低コストのため高価な材料を使用で
さる、被膜はメッキに比べ非常に緻密である、加工時1
1が短い、低温で処理可能である、付さまわり性がよい
等の従来法の欠点を排除した叡々の長所を−w してい
ろ。
Conventional container linings include metal plating and plastic linings. However, all of these linings have drawbacks; the former has poor throughholes and absorbs gases such as hydrogen; the membrane is thick; therefore, the material cost is very high in the case of precious metals; and the membrane is prone to scratches. , processing is laborious and time-consuming, treatment of plating waste liquid is troublesome, and hot-dip plating, which is a type of plating, requires a high processing temperature that affects the container material and is easily peeled off. In this case, there are many problems such as difficulty in covering every corner, many pinholes, adsorption of gas, and easy peeling. On the other hand, the sputtering target in Fudo II has few holes, no gas occlusion, thin film and low cost, so expensive materials can be used, the film is very dense compared to plating, and processing hour 1
Take advantage of the advantages of conventional methods, such as short lengths, the ability to process at low temperatures, and good wraparound properties, which eliminate the drawbacks of conventional methods.

更に従来法ではできなかった石英、硝子4の被膜を内面
に作ることができ、これら無績不苗性祷質によって一層
前記の目的達成に効果あらしめることができる。
Furthermore, a coating of quartz or glass 4, which could not be produced by conventional methods, can be formed on the inner surface, and these qualities that prevent seedling failure can be made even more effective in achieving the above-mentioned purpose.

次に本釦明の効果を実施例をあげて説明する。Next, the effect of this button light will be explained by giving an example.

これらは、−1俊化窒素、二酸化窒素、−酸化炭ぶ。These are -1 nitrogen, nitrogen dioxide, and carbon oxide.

硫化水巣、硫化カルボニル、ジメチルサルファイド、ニ
ー比いおう、二酸化いおう、塩化水素、塩素、アンモニ
ア、トリメチルアミン、アクロレイン、メチルメルカプ
タン、塩化ビニル、ボ(水蒸気)オゾンをいずれも窒素
またはアルゴンをバランスガスとしてFAI表に示す材
料で内面被膜を施こした内容積10jの間圧ガス容器に
、常温で圧力的100kg/Qn’ Gで充填L1充填
後容器内の混合ガ謬を定期的に抜出して校正ガス組成の
経日変化を測定したもので、結果は第1表の1〜17に
示すとありである。ここをこ−鹸化窒素、二酸化窒素は
CLD型窒粱萌化物分析計で、−酸化炭素は非分林型赤
外線号析計で、アンモニア、トツメチルアミン、アクロ
レインはFIL)型ガマクロマトグラフで、水($蒸気
)はガルバニック型微量分析計で、オゾンは化学元光型
オゾン自動分析計で分析し1これ以外のガスは丁べてF
PD型ガマクロマトグラフにより測定した。
Water sulfide, carbonyl sulfide, dimethyl sulfide, carbonyl sulfide, sulfur dioxide, hydrogen chloride, chlorine, ammonia, trimethylamine, acrolein, methyl mercaptan, vinyl chloride, water vapor, ozone, and FAI with nitrogen or argon as the balance gas. Fill an intermediate pressure gas container with an inner volume of 10j and an inner surface coated with the material shown in the table with a pressure of 100 kg/Qn'G at room temperature. After filling L1, periodically extract the mixed gas from the container and calculate the calibration gas composition. The results are shown in Table 1, 1 to 17. Here, saponified nitrogen and nitrogen dioxide are measured using a CLD-type nitric oxide analyzer, carbon oxide is measured using a non-branched type infrared analyzer, ammonia, methylamine, and acrolein are measured using a FIL-type gas macromatograph, and water ( $ steam) was analyzed using a galvanic type microanalyzer, and ozone was analyzed using a chemical source ozone automatic analyzer.
It was measured using a PD type Gamacromatograph.

Vゞ この表から明らかなように充填後640日あるいはJl
tt、gsoo日にも亘る経日変化値は従来汎用のマン
ガン鋼の容器(毫印)と比較して非常に変化が少なく格
段の安定さを示した。
VゞAs is clear from this table, 640 days after filling or Jl
The changes over time over tt and gsoo days showed very little change and great stability compared to conventional general-purpose manganese steel containers (marked).

実施例 弗 l 衣 1、NO層 2、NO2ハ2 3.Co/N2 4 、 H2S/N2 5、cosハ2 6、(Ctia )zS/N2 12、(CMす3N/N2 13.アクロレイン/N2 15、CH2= CMCI/Ar 16 +HzO/H2Example 弗 L robe 1. NO layer 2.NO2ha2 3. Co/N2 4, H2S/N2 5, cos ha 2 6, (Ctia)zS/N2 12, (CMsu3N/N2 13. Acrolein/N2 15, CH2=CMCI/Ar 16 +HzO/H2

Claims (1)

【特許請求の範囲】 (1) 経時鋭化を起しやすい低り度校正ガスを安定に
保存する方法が、ガス容器の上部平端部に配設したガス
グツトと、該ガス容器内に延長させた円柱状電極と、該
容器内を真空排気する手段と、該容器内Qこイオン化可
能な気体を尋人する手段と、前記!極に高周波もしくは
直流電圧を印加する手段とから栂成されたスパッタリン
グ装置により、前記容器内にグロー放電を発生させ、金
属1合金。 金属化合物、プラスチック及び無機化合物よりなる群よ
り選ばれた1fiを、スパッタリングし1内壁に形成さ
れた被膜を・汀する高圧ガス容器に、前記校正ガスを光
填することよりなることを待機とする低り度校正ガス組
成の安定化方法。 (2)前記被膜が金、ニッケル、アルミニウム。 銅、タンタル、銀、鉛、アンチモン、錫、蒼鉛。 白金、タングステン、9.力下ミウム、クロム。 モリブデン、亜鉛、チタン、パラジウム、ジルコニウム
よりなん金属の群より一選ばれた少なくとも1種である
特J「請求/)相聞(1)記載の方法。 (8) Iln記波膜がニッケルー銅、ニッケル−クロ
ム、ニッケルーモリブデン、@−アルミニウム。 アルミニウムー錫−チタン、チタンーマンガノ。 チタン−アルミニウムーバナジウム、チタン−モリブテ
ン、チタン−ジルコニウム、アルミニウムーマグネシウ
ム、アルミニウムー亜鉛よりな石合金/)群より選ばれ
た1種である特許請求の範囲(11記載の方法。 (4) 前記被膜が窒化アルミニウム、酸化アルミニウ
ム、酸化タンタル、 #Il化チクチタンなる群より選
ばれた金属化合物の1種である特許請求の範囲(1)記
載の方法。 (5) 前記被膜が四弗化エチレン樹脂、三弗化塩化エ
チレン樹脂、ポリアミド樹IJtj 、エポキシ樹脂。 ポリプロピレン樹7+131ポリ工チレンm IJ目よ
りなる群より選ばれた合成樹脂の1種であゐ待計i1j
求の範囲(1)記載の方法。 (6) 前記被膜が石英、硝子よりなる群より選ばれた
無機化合物のl細である特許請求の範囲(1ン記載の方
法。 (7) 前記校正ガスの成分が一酸化窒素、−酸化炭素
、二酸化窒撲、硫化水射、アンモニア、二酸化イオウ、
塩化水素、三酸化イオウ、水(水蒸気9メチルメルカプ
タン ルサルファイド、1帽アクロレイン、塩化ビニール、硫
化カルボニル、オゾンよりなるガスの群より選ばれた少
なくとも1種である特許請求の範囲(1)記載の方法。
[Claims] (1) A method for stably storing low-altitude calibration gas that tends to sharpen over time is provided by using a gas gut disposed at the upper flat end of a gas container and extending into the gas container. A cylindrical electrode, means for evacuating the inside of the container, means for removing ionizable gas from inside the container, and the above! A glow discharge is generated in the container by means of a sputtering device consisting of a means for applying a high frequency or direct current voltage to the poles, and a metal 1 alloy is generated in the container. 1fi selected from the group consisting of metal compounds, plastics, and inorganic compounds is sputtered, and the calibration gas is optically filled into a high-pressure gas container in which a coating formed on the inner wall of 1 is left to settle. Method for stabilizing low altitude calibration gas composition. (2) The coating is gold, nickel, or aluminum. Copper, tantalum, silver, lead, antimony, tin, blue lead. Platinum, tungsten, 9. Force Mium, Chromium. (8) The Iln wave recording film is made of at least one metal selected from the group of metals molybdenum, zinc, titanium, palladium, and zirconium. -chromium, nickel-molybdenum, @-aluminum, aluminum-tin-titanium, titanium-mangano, titanium-aluminum-vanadium, titanium-molybdenum, titanium-zirconium, aluminum-magnesium, aluminum-zinc stone alloys. (4) The coating is one of the metal compounds selected from the group consisting of aluminum nitride, aluminum oxide, tantalum oxide, and titanium chloride. The method according to range (1). (5) The coating is selected from the group consisting of tetrafluoroethylene resin, trifluorochloride ethylene resin, polyamide tree IJtj, epoxy resin. Polypropylene tree 7 + 131 polyethylene m IJtj It is a type of synthetic resin.
The method described in scope of request (1). (6) The method according to claim 1, wherein the coating is made of an inorganic compound selected from the group consisting of quartz and glass. (7) The components of the calibration gas are nitrogen monoxide, -carbon oxide. , nitrogen dioxide attack, sulfide water injection, ammonia, sulfur dioxide,
Claim (1) which is at least one gas selected from the group consisting of hydrogen chloride, sulfur trioxide, water (steam 9-methyl mercaptan sulfide, 1-cap acrolein, vinyl chloride, carbonyl sulfide, and ozone) Method.
JP3125984A 1984-02-20 1984-02-20 Method for stabilizing calibration gas composition Pending JPS6063442A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3125984A JPS6063442A (en) 1984-02-20 1984-02-20 Method for stabilizing calibration gas composition

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3125984A JPS6063442A (en) 1984-02-20 1984-02-20 Method for stabilizing calibration gas composition

Publications (1)

Publication Number Publication Date
JPS6063442A true JPS6063442A (en) 1985-04-11

Family

ID=12326348

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3125984A Pending JPS6063442A (en) 1984-02-20 1984-02-20 Method for stabilizing calibration gas composition

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Country Link
JP (1) JPS6063442A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0279454A2 (en) * 1987-02-20 1988-08-24 Horiba, Ltd. Assistant combustion agent for the use in a high-frequency combustion furnace
JPH05249007A (en) * 1991-12-27 1993-09-28 Intevep Sa Method and apparatus for treating and storing sulfurcontaining gas sample for analyzing sulfur
CN111725125A (en) * 2020-06-11 2020-09-29 深圳市华星光电半导体显示技术有限公司 Microarray adsorption substrate, driving circuit and display device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0279454A2 (en) * 1987-02-20 1988-08-24 Horiba, Ltd. Assistant combustion agent for the use in a high-frequency combustion furnace
JPH05249007A (en) * 1991-12-27 1993-09-28 Intevep Sa Method and apparatus for treating and storing sulfurcontaining gas sample for analyzing sulfur
CN111725125A (en) * 2020-06-11 2020-09-29 深圳市华星光电半导体显示技术有限公司 Microarray adsorption substrate, driving circuit and display device

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