JPS6060624A - Liquid crystal display panel and its production - Google Patents
Liquid crystal display panel and its productionInfo
- Publication number
- JPS6060624A JPS6060624A JP58168618A JP16861883A JPS6060624A JP S6060624 A JPS6060624 A JP S6060624A JP 58168618 A JP58168618 A JP 58168618A JP 16861883 A JP16861883 A JP 16861883A JP S6060624 A JPS6060624 A JP S6060624A
- Authority
- JP
- Japan
- Prior art keywords
- liquid crystal
- alignment film
- grating
- display panel
- crystal display
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
- G02F1/13378—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation
- G02F1/133788—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation by light irradiation, e.g. linearly polarised light photo-polymerisation
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
- G02F1/133765—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers without a surface treatment
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Mathematical Physics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Liquid Crystal (AREA)
- Liquid Crystal Substances (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、文字あるいは画像表示用の液晶表示パネルお
よびその製造方法に関し、特に配向膜の表面に親規な方
法で液晶の配向性能を付与した構造の液晶表示パネルお
よびその製造方法に関するものである。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a liquid crystal display panel for displaying characters or images and a method for manufacturing the same, and in particular to a structure in which the surface of an alignment film is given liquid crystal alignment performance by a conventional method. The present invention relates to a liquid crystal display panel and a manufacturing method thereof.
従来例の構成とその問題点
液晶表示パネルは、よく知られているように、対向面側
にそれぞれ電極が形成されている一対の基板（以下単に
電極基板という）間に液晶を充填したパネルに偏光板を
組合せたもので、初期配向した液晶分子と電極に電圧を
印加した状態で再配列した液晶分子との複屈折性の差に
より濃淡を表示するものである。液晶を初期配向させる
には、通常、液晶の接するパネル内壁に配向処理と呼ば
れる各種の処理が施される。Conventional configuration and its problems As is well known, a liquid crystal display panel is a panel in which liquid crystal is filled between a pair of substrates (hereinafter simply referred to as electrode substrates) each having an electrode formed on the opposite side. It is a combination of polarizing plates, and displays shading based on the difference in birefringence between the initially oriented liquid crystal molecules and the liquid crystal molecules that are rearranged when a voltage is applied to the electrodes. In order to initially align the liquid crystal, various treatments called alignment treatments are usually performed on the inner wall of the panel in contact with the liquid crystal.
配向処理の一例は、有機拐料たとえばポリイミドを塗布
し、硬化した膜に、ナイロン系またはビニル系の繊維を
一定方向にこすりつけるもので、配向処理のラビング法
と呼ばれる。配向処理の他の一例は、無機材料たとえば
ＳｉＯを一電極基板に対して斜方向から蒸着するもので
、配向処理の斜蒸着法と呼ばれる。An example of an orientation treatment is to apply an organic material such as polyimide and rub nylon or vinyl fibers in a fixed direction on the cured film, which is called a rubbing method for orientation treatment. Another example of the alignment treatment is to deposit an inorganic material such as SiO from an oblique direction with respect to one electrode substrate, which is called an oblique vapor deposition method of alignment treatment.
配向処理した配向膜表面で液晶分子が一定方向に配列す
る現象は、長鎖状の高分子である液晶分子の位置エネル
ギーが、その方向に配列した場合に最も小さくなるため
である０ラビングによる配向膜が配向性能を有するメカ
ニズムについては、ラビングにより表面に物理的凹凸、
いわゆるヘアライン加工表面のようなスクラッチ状の凹
凸が生じるためであるとする説や、ラビング布の有機物
質が表面に方向性を持って付着するためであるとする説
等があり、いずれも定説となっていない。The phenomenon in which liquid crystal molecules align in a certain direction on the surface of an alignment film that has been subjected to alignment treatment is because the potential energy of liquid crystal molecules, which are long-chain polymers, is minimized when they are aligned in that direction.Alignment by zero rubbing The mechanism by which the film has alignment properties is due to physical irregularities on the surface due to rubbing.
There are theories that this is due to scratch-like unevenness like the so-called hairline processed surface, and theories that it is due to organic substances from the rubbing cloth adhering to the surface in a directional manner. is not.
このようなことからラビング処理の最適条件は、有機配
向膜の月質、硬化条件、ラビング布の拐質。For this reason, the optimum conditions for the rubbing process are the quality of the organic alignment film, the curing conditions, and the grain quality of the rubbing cloth.
繊維構造、こすりつけの押圧力、相対速度１回数等を組
合せにより実験じ、経験的にめているのが実情である。The reality is that the fiber structure, the pressing force of rubbing, the number of relative speeds, etc. are tested and determined empirically.
特にラビングの場合、機械的に配向膜表面をこすること
から、脱落したラビング布繊維やごみにより配向膜表面
に欠陥や異常スクラッチが生じやすいこと、ラビング布
の耐久性が十分でないために使用回数を重ねる度に配向
性能が変化したシ、配向の不均一を生じる等の欠点があ
る。さらに画像表示用の液晶表示パネルで、多数の画素
子の一つ一つに対応したスイッチング用の簿膜トランジ
スタが電極基板に構成されたものでは、基板表面に凹凸
があり、ラビングにょる配向ではこの凹凸の段差近傍で
配向のむらを生じることがある。さらにラビングによる
帯電により、このような能動素子を静電破壊させてしま
うこともある。In particular, in the case of rubbing, since the surface of the alignment film is mechanically rubbed, defects and abnormal scratches are likely to occur on the surface of the alignment film due to fallen rubbing cloth fibers and debris, and the durability of the rubbing cloth is not sufficient, resulting in the number of times it is used. There are drawbacks such as the alignment performance changing each time the layers are stacked and non-uniform alignment. Furthermore, in liquid crystal display panels for displaying images, in which film transistors for switching corresponding to each of a large number of pixel elements are constructed on an electrode substrate, the surface of the substrate is uneven, and alignment due to rubbing is difficult. Non-uniform orientation may occur near the step of this unevenness. Furthermore, charging due to rubbing may cause electrostatic damage to such active elements.
斜蒸着による配向処理はラビングによる配向処理に比べ
てこのような諸々の欠陥は比較的少ないが、蒸着装置の
規模および基板の斜装置の制約から大きな電極基板を処
理しにくいこと、工数が犬となること、最適条件範囲（
特に蒸着角度、蒸着速度、基板温度等）が比較的に狭く
、蒸着条件管理が必要なこと等の欠点があるＯ
発明の目的
本発明はこのような従来の配向膜に対してその欠点を解
決あるいは改善した、新規、な方法で配向処理した配向
膜を有する液晶表示パネルおよびその製造方法を提供す
るものである。Alignment processing by oblique vapor deposition has relatively fewer defects such as these compared to alignment processing by rubbing, but it is difficult to process large electrode substrates due to the size of the vapor deposition equipment and restrictions on the substrate tilting equipment, and the number of man-hours is extremely large. The optimal condition range (
In particular, the deposition angle, deposition rate, substrate temperature, etc.) are relatively narrow, and the deposition conditions must be controlled. Another object of the present invention is to provide a liquid crystal display panel having an alignment film subjected to an alignment treatment using an improved and novel method, and a method for manufacturing the same.
発明の構成
本発明の液晶表示パネルは、一対の電極基板間に配向膜
を介して液晶を充填してなる液晶表示ノくネルにおいて
、配向膜に感光性樹脂を用い、この配向膜の表面にレー
ザ元の２光束干渉縞を照射させたグレーティング状の凹
凸を有する構成としたことを特徴とするものである。Structure of the Invention The liquid crystal display panel of the present invention is a liquid crystal display panel in which liquid crystal is filled between a pair of electrode substrates via an alignment film, in which a photosensitive resin is used for the alignment film, and the surface of the alignment film is coated with a photosensitive resin. It is characterized by having a structure having grating-like irregularities onto which the two-beam interference fringes of the laser source are irradiated.
さらに必要に応じてこのグレーティング状の凹凸を、液
晶の配向方向・に平行するグレーティングと、これと略
直交し、液晶のティルト角を与える鋸状断面を有するグ
レーティングとの２種類のグレーティングで構成する。Furthermore, if necessary, this grating-like unevenness can be configured with two types of gratings: a grating parallel to the alignment direction of the liquid crystal, and a grating having a serrated cross section that is substantially perpendicular to this and giving a tilt angle of the liquid crystal. .
このような２種類のグレーティングの構成により液晶に
ティルト角を与えることは、たとえば、ツイストネマテ
ィック型液晶表示パネルにおいて、その表示に指向性を
つけるのに有効である。Providing a tilt angle to the liquid crystal using such a configuration of two types of gratings is effective for imparting directivity to the display in, for example, a twisted nematic liquid crystal display panel.
配向膜としては感光性ボυビニノ１アルコール捷たは感
光性ポリイミドが配向性能の点で良好である。As the alignment film, photosensitive polyvinyl alcohol or photosensitive polyimide is good in terms of alignment performance.
このような、配向膜の表面にグレーティング状の凹凸を
有する液晶表示パネルを製造するには、感光性樹脂より
なる配向膜を塗布し、この配向膜の表面にレーザ光の２
元束干渉縞を照射する０レ一ザ光強度が適当であれば、
この感光性樹脂のレーザ光照射領域と非照射領域に架橋
率の差を生じこれに伴って体積収縮に差を生じて表面に
微小なグレーティング状の凹凸を生じる。この状態でも
液晶配向は可能であるが、配向性能金玉けるためにはこ
の後加熱硬化したり上記のレーザ光の２元束干渉縞の照
射を、通常のフォトン１ブリケーフヨンにおけるホトレ
ノストの露光と同様と考え、レーザ光の照射後、この感
光性樹脂をケミカルエッチ、プラズマ灰化あるいはスパ
ックエッチしてグレーティング状の凹凸を犬ならしめて
もよい。In order to manufacture such a liquid crystal display panel having grating-like irregularities on the surface of the alignment film, an alignment film made of photosensitive resin is coated, and the surface of this alignment film is exposed to two rays of laser light.
If the intensity of the 0 laser beam that irradiates the original bundle interference pattern is appropriate,
There is a difference in crosslinking rate between the laser beam irradiated area and the non-irradiated area of this photosensitive resin, and this causes a difference in volume shrinkage, resulting in minute grating-like irregularities on the surface. Although liquid crystal alignment is possible even in this state, in order to improve the alignment performance, heat curing or irradiation with the above-mentioned binary flux interference fringes of the laser beam should be performed in the same way as the exposure of photorenost in normal photon 1-briquefon. After irradiation with laser light, this photosensitive resin may be chemically etched, plasma ashed, or spack etched to form grating-like irregularities.
実施例の説明
第１図は本発明にかかわる液晶表示パネルの一例（構成
図）を示しており、多数の画素子に対応した透明電極１
を有する下側の電極基板２と、全面透明電極３を有する
もう一方の電極基板４の間に液晶５をシール６で周囲を
封止して充填しである。この液晶セルフは偏光板８，９
に挾まれており、面発光体１０を加えて全体として画像
表示用の透過型液晶表示パネル１１を構成している。DESCRIPTION OF EMBODIMENTS FIG. 1 shows an example (configuration diagram) of a liquid crystal display panel according to the present invention.
A liquid crystal 5 is filled between the lower electrode substrate 2 having a transparent electrode 3 and the other electrode substrate 4 having a fully transparent electrode 3, the periphery of which is sealed with a seal 6. This liquid crystal self has polarizing plates 8, 9
In addition to the surface light emitting body 10, the whole constitutes a transmissive liquid crystal display panel 11 for displaying images.
液晶５を初期前面させるためには、下側の電極基板２の
電極面側およびもう一方の電極基板４の電極面側に感光
性樹脂を塗布した後、レーザ光の２元束干渉縞をこれに
照射してグレーティング状の凹凸を形成する〇
第２図および第３阻はレーザ光の２光束干渉縞の照射装
置の原理図を示しており、レーザ光源２゜を出た光線は
反射鏡２１．２２を経て集光レンズ２３に入射し、ピン
ホール２４を通過した後、コリメークレンズ２５を通っ
てエキスバンドされた平行光線となる。その後さらにこ
の平行光線は反射鏡２６で反射された後、ビームスプリ
ッタ２７で２分割され、反射鏡２８．２９で反射されて
一電極基板３０に塗布された感光性樹脂３１に入射する
。２分割されたレーザ行光の２光束はこの試料付近の空
間で干渉を生じ、試料面にストット状の干渉縞を生じし
める。In order to initially bring the liquid crystal 5 to the front, a photosensitive resin is applied to the electrode surface side of the lower electrode substrate 2 and the electrode surface side of the other electrode substrate 4, and then the binary flux interference fringes of the laser beam are applied to this surface. Figures 2 and 3 show the principle of the irradiation device for two-beam interference fringes of laser light, and the light beam exiting the laser light source 2° is reflected by the reflecting mirror .22, enters the condensing lens 23, passes through the pinhole 24, passes through the collimating lens 25, and becomes an expanded parallel light beam. Thereafter, this parallel light beam is further reflected by a reflecting mirror 26, split into two by a beam splitter 27, reflected by reflecting mirrors 28 and 29, and incident on the photosensitive resin 31 coated on the one-electrode substrate 30. The two beams of the laser beam divided into two interfere with each other in the space near the sample, producing spot-like interference fringes on the sample surface.
第２図でｉｌ″ｊ：２光束の光軸が試料面の法線方向に
対して等角度で入射する場合を示しており、この時の試
料表面の光強度分布および試料表面に形成されるグレー
ティング状の凹凸３２を第４図ａおよびｂにそれぞれ示
している。第３図でｔ／′ｉ２ｉ束の光軸が試料面に対
して傾いた角度を入射する場合を示しており、この時の
試料表面の光強度分布および試料表面に形成されるグレ
ーティング状の凹凸３３を第５図ａおよびｂにそれぞれ
示している。このように２元束が試料面に対して傾いた
角度で入射する場合には形成される試料表面の凹凸は鋸
状断面を有するグレーティングになる。Figure 2 shows the case where the optical axis of the il''j:2 beam is incident at equal angles to the normal direction of the sample surface, and the light intensity distribution on the sample surface and the light formed on the sample surface at this time are shown. The grating-like unevenness 32 is shown in Figures 4a and 4b, respectively. Figure 3 shows the case where the optical axis of the t/'i2i bundle is incident at an inclined angle with respect to the sample surface. The light intensity distribution on the sample surface and the grating-like unevenness 33 formed on the sample surface are shown in FIGS. In some cases, the unevenness formed on the sample surface becomes a grating with a serrated cross section.
グレーティング状の凹凸を上記２種類の方法で互いに略
直交する方向に形成した試料表面を第６図に示す。第６
図には試料表面に配列する液晶分子３４を円筒状に模式
的に示してあり、鋸状９５１面のスリン）［より液晶分
子３４はティルト角θを持って一方向に配列する。この
ようなティルト角は、ツイストネマティック型液晶表示
パネルにおいて、その表示に指向性をつけたり、逆ティ
ルトによる表示の濃淡の部分的なむらを防止したりする
点で有効である。グレーティングのピッチは液晶の配向
度合を上げる上でより小さいことが望ましいが、実験的
に試作した０、２μｍ、ピッチ深さ５００人のグレーテ
ィングで良好な配向を示した〇レーザ光源としてはＨｅ
−Ｃｄレーザ光源（波長２２４４１６人）を用いたが
、より短波長の紫外レーザを用いたり、２光束の入射角
度条件を変えたりすることにより、よ、り小ピツチ化で
きる。FIG. 6 shows the surface of a sample on which grating-like irregularities were formed in directions substantially orthogonal to each other using the two methods described above. 6th
In the figure, the liquid crystal molecules 34 arranged on the sample surface are schematically shown in a cylindrical shape, and the liquid crystal molecules 34 are arranged in one direction with a tilt angle θ. Such a tilt angle is effective in imparting directivity to the display in a twisted nematic liquid crystal display panel and preventing partial unevenness in display shading due to reverse tilt. It is desirable that the pitch of the grating be smaller in order to increase the degree of alignment of the liquid crystal, but experimentally produced gratings with a pitch depth of 500 and 0.2 μm showed good alignment. As a laser light source, He
Although a -Cd laser light source (wavelength: 224,416) was used, the pitch can be made smaller by using an ultraviolet laser with a shorter wavelength or by changing the incident angle conditions of the two beams.
感光性樹脂よりなる配向膜としては、液晶表示パネルの
ラビング配向膜として広く使われているポリイミドの感
光性の強いものおよび感光性ポリビニルアルコールが良
好な配向を示す。As alignment films made of photosensitive resins, highly photosensitive polyimide and photosensitive polyvinyl alcohol, which are widely used as rubbing alignment films for liquid crystal display panels, exhibit good alignment.
グレーティングの形成は上記のレーザ光の２元束干渉縞
を照射するだけでも行なわれるが（感光性樹脂のレーザ
光照射領域と非照射領域に架橋率の差を生じ、これに伴
って体積収縮に差を生じて表面に微小なグレーティング
状の凹凸を生じる）、液晶の配向度合を上げるには、レ
ーザ光の照射後。Formation of a grating can be achieved simply by irradiating the binary interference fringes of the laser beam described above (a difference in crosslinking rate occurs between the laser beam irradiated area and the non-irradiated area of the photosensitive resin, resulting in volumetric shrinkage). to increase the degree of alignment of the liquid crystal (after irradiation with laser light).
次の処理をしてグレーティング深さを太きぐすることが
有効である。It is effective to increase the grating depth by performing the following process.
（１）レーザー）’ｅ２元束干渉縞を感光性樹脂に照射
後感光性樹脂を現像液でエツチングする。(1) Laser) After irradiating the photosensitive resin with the binary bundle interference fringes, the photosensitive resin is etched with a developer.
（２）感光性樹脂を加熱硬化し、レーザ光照射領域と非
照射領域の熱収縮差を利用して凹凸を拡大させる。(2) The photosensitive resin is heated and cured, and the unevenness is expanded using the difference in thermal contraction between the laser beam irradiated area and the non-irradiated area.
（３）感光性樹脂の表面を軽度にプラズマアッシャで灰
化し凹凸を拡大させる。(3) Lightly incinerate the surface of the photosensitive resin with a plasma asher to enlarge the irregularities.
（４）感光性樹脂の表面をスパックエッチし凹凸を拡大
させる。(4) Spack etching the surface of the photosensitive resin to enlarge the irregularities.
発明の詳細
な説明したように、本発明によれば、配向処理をフォト
ファブリケーション技術で行なうため、従来機械的な表
面のこすりによっていた場合に問題であった表面の各種
欠陥、異常スクラッチが生じることなく、配向の巨視的
むら、微視的むらの少なく均質な配向品質が得られ、表
示品質の優れた液晶表示パネルを提供することができる
０さらに従来の斜蒸着による配向処理に比べて真空装置
を用いたプロセスを要することなく、比較的安定に大量
の処理を行なうことができる０As described in detail, according to the present invention, since the alignment process is performed using photofabrication technology, various defects and abnormal scratches on the surface, which were problems when the surface was conventionally rubbed mechanically, are generated. It is possible to obtain a homogeneous alignment quality with less macroscopic unevenness and microscopic unevenness in alignment, and to provide a liquid crystal display panel with excellent display quality.0 Furthermore, compared to the conventional alignment treatment using oblique vapor deposition, it is possible to obtain a homogeneous alignment quality with less macroscopic unevenness and microscopic unevenness. It is possible to process large quantities relatively stably without requiring any process using equipment.
第１図は本発明にかかわる液晶表示パネルの基本構成図
、第２図および第３図はそれぞれ本発明のレーザ光の２
光束干渉縞の照射装置の原理図、第４図ａ、第５図ａお
よび第４図す、第５図すはそれぞれ試料表面の光強度分
布および試料表面のグレーティング状の凹凸を示す説明
図、第６図はグレーティング状の凹凸を略直交する方向
に形成した試料表面の模式図である。
２．４．．３０・・・・・・電極基板、５・・・・・・
液晶、２０・・・・・・レーザ光源、３１・・・・・・
配向膜（感光性樹脂）、３２．３３・・・・・・グレー
ティング状の凹凸０代理人の氏名 弁理士 中 尾 敏
男 ほか１名第 １ 図
２図
０
３図
０FIG. 1 is a basic configuration diagram of a liquid crystal display panel according to the present invention, and FIGS.
4a, 5a, 4s and 5s are explanatory diagrams showing the light intensity distribution on the sample surface and grating-like unevenness on the sample surface, respectively; FIG. 6 is a schematic diagram of a sample surface on which grating-like irregularities are formed in substantially orthogonal directions. 2.4. ．． 30... Electrode substrate, 5...
Liquid crystal, 20... Laser light source, 31...
Alignment film (photosensitive resin), 32.33...Grating-like unevenness 0 Name of agent Patent attorney Toshio Nakao and 1 other person No. 1 Figure 2 Figure 0 3 Figure 0
Claims (1)
り、かつ、前記配向膜が感光性樹脂であり、前記配向膜
の表面にレーザ光の２光束干渉縞の照射によるグレーテ
ィング状の凹凸が形成されていることを特徴とする液晶
表示パネル。 （２）グレーティング状の凹凸が、液晶の配向方向に平
行するグレーティングと、これと略直交し、液晶のティ
ルト角を与える鋸状断面を有するグレーティングとから
なることを特徴とする特許請求の範囲第１項記載の液晶
表示パネル。 （３）配向膜が感光性ポリビニルアルコールまたは感光
性ポリイミドであることを特徴とする特許請求の範囲第
１項記載の液晶表示パネル。 （４）基板に感光性樹脂よりなる配向膜を塗布する工程
と、前記配向膜の表面にレーザ光の２光束干渉縞を照射
することによシ前記配向膜の表面にグレーティング状の
凹凸を形成する工程とを有することを特徴とする液晶表
示パネルの製造方法。 （６）配向膜の表面にグレーティング状の凹凸を形成す
る工程が、前記配向膜のレーザ元照射領域と非照射領域
の架橋率に応じた体積収縮の差を利用したレーザ光照射
工程であることを特徴とする特許請求の範囲第４項記載
の液晶表示ノくネルの製造方法〇 （６）配向膜の表面にグレーティング状の凹凸を形成す
る工程が、前記配向膜のレーザ元照射領域と非照射領域
の溶剤に対する溶解性の差を利用したエツチング工程で
あることを特徴とする特許請求の範囲第４項記載の液晶
表示ノ々ネルの製造方法。 （７）配向膜の表面にグレーティング状の凹凸を形成す
る工程が、前記配向膜のレーザ元照射領域と非照射領域
の熱収縮性の差を利用した加熱硬化工程であることを特
徴とする特許請求の範囲第４項記載の液晶表示パネルの
製造方法０（８）配向膜の表面にグレーティング状の凹
凸を形成する工程が、前記配向膜のレーザ光照射領域と
非照射領域の酸化性の差を利用したプラズマ灰化工程で
あることを特徴とする特許請求の範囲第４項記載の液晶
表示パネルの製造方法。 （９）配向膜の表面にグレーティング状の凹凸を形成す
る工程が、前記配向膜のレーザ光照射領域と非照射領域
のイオレスバック率の差を利用したスパッタエツチング
工程であることを特徴とする特許請求の範囲第４項記載
の液晶表示パネルの製造方法。[Scope of Claims] (1) Liquid crystal is filled between a pair of substrates via an alignment film, and the alignment film is a photosensitive resin, and the surface of the alignment film has two-beam interference of laser light. A liquid crystal display panel characterized by having grating-like unevenness formed by striped irradiation. (2) The grating-like unevenness consists of a grating parallel to the orientation direction of the liquid crystal, and a grating having a serrated cross section that is substantially perpendicular to the grating and provides a tilt angle of the liquid crystal. The liquid crystal display panel according to item 1. (3) The liquid crystal display panel according to claim 1, wherein the alignment film is made of photosensitive polyvinyl alcohol or photosensitive polyimide. (4) Forming grating-like irregularities on the surface of the alignment film by coating the substrate with an alignment film made of photosensitive resin and irradiating the surface of the alignment film with two-beam interference fringes of laser light. A method for manufacturing a liquid crystal display panel, comprising the steps of: (6) The process of forming grating-like irregularities on the surface of the alignment film is a laser beam irradiation process that utilizes the difference in volume shrinkage depending on the crosslinking rate between the laser source irradiation area and the non-irradiation area of the alignment film. A method for manufacturing a liquid crystal display channel according to claim 4, characterized in that (6) the step of forming grating-like irregularities on the surface of the alignment film is located in a region that is not irradiated with the laser source of the alignment film; 5. The method of manufacturing a liquid crystal display panel according to claim 4, wherein the etching process takes advantage of the difference in solubility in a solvent in the irradiated area. (7) A patent characterized in that the process of forming grating-like irregularities on the surface of the alignment film is a heat curing process that utilizes the difference in heat shrinkage between the laser source irradiation area and the non-irradiation area of the alignment film. Method for manufacturing a liquid crystal display panel according to claim 4 0(8) The step of forming grating-like irregularities on the surface of the alignment film is based on the difference in oxidation property between the laser beam irradiated area and the non-irradiated area of the alignment film. 5. The method for manufacturing a liquid crystal display panel according to claim 4, wherein the method is a plasma ashing step using. (9) The process of forming grating-like irregularities on the surface of the alignment film is a sputter etching process that utilizes the difference in ioless back ratio between the laser beam irradiated area and the non-irradiated area of the alignment film. A method for manufacturing a liquid crystal display panel according to claim 4.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58168618A JPS6060624A (en) | 1983-09-13 | 1983-09-13 | Liquid crystal display panel and its production |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58168618A JPS6060624A (en) | 1983-09-13 | 1983-09-13 | Liquid crystal display panel and its production |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6060624A true JPS6060624A (en) | 1985-04-08 |
Family
ID=15871394
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58168618A Pending JPS6060624A (en) | 1983-09-13 | 1983-09-13 | Liquid crystal display panel and its production |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6060624A (en) |
Cited By (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6111725A (en) * | 1984-06-26 | 1986-01-20 | Fujitsu Ltd | Liquid crystal display device and its manufacture |
| JPS63142327A (en) * | 1986-12-04 | 1988-06-14 | Semiconductor Energy Lab Co Ltd | Method for orienting liquid crystal molecule |
| JPH01178922A (en) * | 1987-12-29 | 1989-07-17 | Nec Corp | Production of ferroelectric liquid crystal |
| WO1995022075A1 (en) * | 1994-02-09 | 1995-08-17 | The Secretary Of State For Defence | Liquid crystal device alignment |
| WO1996024880A1 (en) * | 1995-02-10 | 1996-08-15 | The Secretary Of State For Defence | Liquid crystal device alignment |
| US5604615A (en) * | 1994-05-27 | 1997-02-18 | Sharp Kabushiki Kaisha | Liquid crystal display device and methods for producing same with alignment layer having new bond formation or bond cleavage reaction of molecular chains by light irradiation |
| GB2312523A (en) * | 1995-02-10 | 1997-10-29 | Secr Defence | Liquid crystal device alignment |
| US5838407A (en) * | 1991-07-26 | 1998-11-17 | Rolic Ag | Liquid crystal display cells |
| US6001277A (en) * | 1995-05-26 | 1999-12-14 | Hitachi Chemical Company, Ltd. | Liquid-crystal alignment film |
| US6362863B1 (en) | 1998-09-18 | 2002-03-26 | Fujitsu Limited | Liquid crystal display device with saw-tooth alignment control layer |
| WO2005014756A1 (en) * | 2003-07-16 | 2005-02-17 | Merck Patent Gmbh | Polymerised lc films with varying thickness |
| JP2005117042A (en) * | 2003-10-10 | 2005-04-28 | Samsung Electronics Co Ltd | Organic thin film transistor enhanced in charge carrier mobility by virtue of uneven surface structure |
| US6965421B2 (en) | 2002-08-14 | 2005-11-15 | Seiko Epson Corporation | Liquid crystal device and electronic equipment therewith |
| JP2007025045A (en) * | 2005-07-13 | 2007-02-01 | Sigma Recycle Gijutsu Kenkyusho:Kk | Porous regenerated cellulose film and liquid crystal alignment layer using the same |
| US7218367B2 (en) | 2000-04-03 | 2007-05-15 | Konica Corporation | Optical compensation sheet and liquid crystal display |
| JP2007199241A (en) * | 2006-01-25 | 2007-08-09 | Seiko Epson Corp | Liquid crystal device, manufacturing method thereof and projection type display apparatus |
| JP2008096562A (en) * | 2006-10-10 | 2008-04-24 | Japan Science & Technology Agency | Bistable nematic liquid crystal display device |
| JP2008102508A (en) * | 2006-09-22 | 2008-05-01 | Hitachi Displays Ltd | Liquid crystal display device and manufacturing method thereof |
| CN102346337A (en) * | 2011-08-05 | 2012-02-08 | 南京中电熊猫液晶显示科技有限公司 | Light alignment equipment for LCD (liquid crystal display) panel |
| US20140237817A1 (en) * | 2013-02-15 | 2014-08-28 | Hpo Assets Llc | Liquid crystal alignment layers and method of fabrication |
| CN107844006A (en) * | 2016-09-21 | 2018-03-27 | 上海微电子装备（集团）股份有限公司 | A kind of smooth alignment system |
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|---|---|---|---|---|
| JPS54147850A (en) * | 1978-05-09 | 1979-11-19 | Siemens Ag | Liquid crystal indicator and method of fabricating same |
| JPS56130718A (en) * | 1980-03-18 | 1981-10-13 | Seiko Instr & Electronics Ltd | Liquid-crystal display device and its manufacture |
| JPS5781234A (en) * | 1980-11-10 | 1982-05-21 | Matsushita Electric Ind Co Ltd | Production of liquid crystal display element |
| JPS581129A (en) * | 1981-06-26 | 1983-01-06 | Alps Electric Co Ltd | Two-layer type and guest-host type liquid crystal display element and its manufacture |
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1983
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54147850A (en) * | 1978-05-09 | 1979-11-19 | Siemens Ag | Liquid crystal indicator and method of fabricating same |
| JPS56130718A (en) * | 1980-03-18 | 1981-10-13 | Seiko Instr & Electronics Ltd | Liquid-crystal display device and its manufacture |
| JPS5781234A (en) * | 1980-11-10 | 1982-05-21 | Matsushita Electric Ind Co Ltd | Production of liquid crystal display element |
| JPS581129A (en) * | 1981-06-26 | 1983-01-06 | Alps Electric Co Ltd | Two-layer type and guest-host type liquid crystal display element and its manufacture |
Cited By (27)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6111725A (en) * | 1984-06-26 | 1986-01-20 | Fujitsu Ltd | Liquid crystal display device and its manufacture |
| JPS63142327A (en) * | 1986-12-04 | 1988-06-14 | Semiconductor Energy Lab Co Ltd | Method for orienting liquid crystal molecule |
| JPH01178922A (en) * | 1987-12-29 | 1989-07-17 | Nec Corp | Production of ferroelectric liquid crystal |
| US5838407A (en) * | 1991-07-26 | 1998-11-17 | Rolic Ag | Liquid crystal display cells |
| WO1995022075A1 (en) * | 1994-02-09 | 1995-08-17 | The Secretary Of State For Defence | Liquid crystal device alignment |
| US5724113A (en) * | 1994-02-09 | 1998-03-03 | The Secretary Of State For Defence In Her Britannic Majesty's Government Of The United Kingdom Of Great Britain And Northern Ireland | Liquid crystal device alignment layer having an asymmetric profile grating on its surface |
| US5604615A (en) * | 1994-05-27 | 1997-02-18 | Sharp Kabushiki Kaisha | Liquid crystal display device and methods for producing same with alignment layer having new bond formation or bond cleavage reaction of molecular chains by light irradiation |
| WO1996024880A1 (en) * | 1995-02-10 | 1996-08-15 | The Secretary Of State For Defence | Liquid crystal device alignment |
| GB2312523A (en) * | 1995-02-10 | 1997-10-29 | Secr Defence | Liquid crystal device alignment |
| GB2312523B (en) * | 1995-02-10 | 1998-10-07 | Secr Defence | Liquid crystal device alignment |
| US5917570A (en) * | 1995-02-10 | 1999-06-29 | The Secretary Of State For Defence In Her Britannic Majesty's Government Of The United Kingdom Of Great Britain And Northern Ireland | Liquid crystal device alignment |
| US6001277A (en) * | 1995-05-26 | 1999-12-14 | Hitachi Chemical Company, Ltd. | Liquid-crystal alignment film |
| US6362863B1 (en) | 1998-09-18 | 2002-03-26 | Fujitsu Limited | Liquid crystal display device with saw-tooth alignment control layer |
| US7218367B2 (en) | 2000-04-03 | 2007-05-15 | Konica Corporation | Optical compensation sheet and liquid crystal display |
| US6965421B2 (en) | 2002-08-14 | 2005-11-15 | Seiko Epson Corporation | Liquid crystal device and electronic equipment therewith |
| WO2005014756A1 (en) * | 2003-07-16 | 2005-02-17 | Merck Patent Gmbh | Polymerised lc films with varying thickness |
| JP2005117042A (en) * | 2003-10-10 | 2005-04-28 | Samsung Electronics Co Ltd | Organic thin film transistor enhanced in charge carrier mobility by virtue of uneven surface structure |
| JP2007025045A (en) * | 2005-07-13 | 2007-02-01 | Sigma Recycle Gijutsu Kenkyusho:Kk | Porous regenerated cellulose film and liquid crystal alignment layer using the same |
| JP2007199241A (en) * | 2006-01-25 | 2007-08-09 | Seiko Epson Corp | Liquid crystal device, manufacturing method thereof and projection type display apparatus |
| JP2008102508A (en) * | 2006-09-22 | 2008-05-01 | Hitachi Displays Ltd | Liquid crystal display device and manufacturing method thereof |
| JP2008096562A (en) * | 2006-10-10 | 2008-04-24 | Japan Science & Technology Agency | Bistable nematic liquid crystal display device |
| CN102346337A (en) * | 2011-08-05 | 2012-02-08 | 南京中电熊猫液晶显示科技有限公司 | Light alignment equipment for LCD (liquid crystal display) panel |
| US20140237817A1 (en) * | 2013-02-15 | 2014-08-28 | Hpo Assets Llc | Liquid crystal alignment layers and method of fabrication |
| US9939682B2 (en) * | 2013-02-15 | 2018-04-10 | E-Vision, Llc | Liquid crystal alignment layers and method of fabrication |
| US10838258B2 (en) | 2013-02-15 | 2020-11-17 | E-Vision, Llc | Liquid crystal alignment layers and method of fabrication |
| CN107844006A (en) * | 2016-09-21 | 2018-03-27 | 上海微电子装备（集团）股份有限公司 | A kind of smooth alignment system |
| CN107844006B (en) * | 2016-09-21 | 2020-06-16 | 上海微电子装备（集团）股份有限公司 | Optical alignment system |
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