JPS6057073A - Fluid control system - Google Patents
Fluid control systemInfo
- Publication number
- JPS6057073A JPS6057073A JP16363583A JP16363583A JPS6057073A JP S6057073 A JPS6057073 A JP S6057073A JP 16363583 A JP16363583 A JP 16363583A JP 16363583 A JP16363583 A JP 16363583A JP S6057073 A JPS6057073 A JP S6057073A
- Authority
- JP
- Japan
- Prior art keywords
- control
- signals
- signal
- serial
- converter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
- F02D—CONTROLLING COMBUSTION ENGINES
- F02D41/00—Electrical control of supply of combustible mixture or its constituents
- F02D41/24—Electrical control of supply of combustible mixture or its constituents characterised by the use of digital means
- F02D41/26—Electrical control of supply of combustible mixture or its constituents characterised by the use of digital means using computer, e.g. microprocessor
- F02D41/28—Interface circuits
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Magnetically Actuated Valves (AREA)
Abstract
Description
【発明の詳細な説明】
この発明は、流体制御装置に関し、一層詳細には複数個
の電磁弁を連設した電磁弁マニホールドにおいて個々の
電磁弁の駆動信号と動作確認検出信号等を一括して送給
し、あるいは受容するように構成した流体制御装置に関
する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a fluid control device, and more specifically, the present invention relates to a fluid control device, and more specifically, in a solenoid valve manifold in which a plurality of solenoid valves are arranged in series, drive signals and operation confirmation detection signals of individual solenoid valves are collectively transmitted. The present invention relates to fluid control devices configured to deliver or receive fluids.
流体制御系において、装置や機械に多数の電磁弁を使用
する時、配管作業の簡易化と取付はスペースの狭小化を
図るために電磁弁を連設してマニホールドにより一括し
たマニホールド式電磁弁が用いられている。この場合、
従来においては、個々の電磁弁の駆動制御用信号と電磁
弁の動作確認信号とば別異の信号線により送信・受信さ
れており、また電磁弁の駆動用電力線および電磁弁の動
作確認を行うだめのリミソトスイッチの駆動用電力線も
夫々別の系を構成していた。In fluid control systems, when a large number of solenoid valves are used in equipment or machinery, manifold-type solenoid valves are used in which solenoid valves are connected in series and integrated into a manifold to simplify piping work and reduce installation space. It is used. in this case,
Conventionally, the drive control signal for each solenoid valve and the solenoid valve operation confirmation signal were transmitted and received using different signal lines, and the solenoid valve drive power line and the solenoid valve operation confirmation signal were sent and received using different signal lines. The power lines used to drive the failed Rimisoto switches also constituted separate systems.
従って、電力線並びに信号線の数は、連設される電磁弁
の数により増加し、このため多くの電線を設ける費用が
崇み、また、電線の束が形成されるために広いスペース
が要求される欠点があった。しかもマニホールドはシリ
ンダの近くに配置されるが、この場合は、機械的振動、
高温、電気的障害等を惹起しやすく環境的に好適とは言
えない。従って、斯る場所に多くの電線を配置すること
は、種々の故障の原因となる可能性が極めて高くなる虞
れがあった。Therefore, the number of power lines and signal lines increases due to the number of solenoid valves that are installed in series, which increases the cost of installing many electric wires, and also requires a large space to form bundles of electric wires. There were some drawbacks. Moreover, the manifold is placed close to the cylinder, which can cause mechanical vibrations,
It is not environmentally friendly as it tends to cause high temperatures and electrical problems. Therefore, arranging a large number of electric wires in such a location has an extremely high possibility of causing various failures.
さらに、産業用ロボットのように制御部とロボットの可
動側に配置されたマニホールド間を電線の束で接続する
と電線の重さによってロボットの動作範囲を限定するこ
とになるし、ロボットの動きにつれて電線も移動するた
めに電線自体が断線する等の難点が指摘されていた。Furthermore, if a bundle of electric wires is used to connect the control unit and the manifold placed on the movable side of the robot, as in industrial robots, the robot's operating range will be limited by the weight of the electric wires, and as the robot moves, the electric wires Difficulties were pointed out, such as the electric wires themselves breaking as they were moved.
そこで、本発明者等は、鋭意考究を重ねた結果、電磁弁
マニホールドの内部に、またはこのマニホールドに近接
して各電磁弁の動作を一括して制御する制御回路を付設
し、この制御回路と制御指令装置とを光ファイバーある
いは同軸ケーブルで接続し、前記制御指令装置からは個
々の電磁弁の駆動信号をシリアル信号で送給し、前記制
御回路でパラレル信号に変換して個々の電磁弁の付勢を
図ると共にリミットスイッチからの個々の電磁弁の駆動
確認は、前記制御回路でシリアル信号に変換して制御指
令装置に送給するように構成すれば、配線本数の少ない
電磁弁制御系が得られ前記の問題点が一掃されることが
判った。Therefore, as a result of extensive research, the present inventors installed a control circuit inside the solenoid valve manifold or in close proximity to this manifold to collectively control the operation of each solenoid valve, and this control circuit and The control command device is connected with an optical fiber or coaxial cable, and the control command device sends drive signals for individual solenoid valves as serial signals, which are converted into parallel signals by the control circuit and sent to each solenoid valve. In addition to checking the drive of each solenoid valve from the limit switch, if the control circuit converts the signal into a serial signal and sends it to the control command device, a solenoid valve control system with fewer wires can be obtained. It was found that the above-mentioned problems could be eliminated.
従って、本発明の目的は、小型化に通し、保守管理が容
易な、しかも製造コストが低廉で故障の少ない流体制御
装置を提供することにある。Therefore, an object of the present invention is to provide a fluid control device that is downsized, easy to maintain, inexpensive to manufacture, and less likely to fail.
前記の目的を達成するために、本発明は、複数個の流体
圧シリンダの付勢・減勢を図る複数個の電磁弁を連設し
た電磁弁マニホールドと、前記電磁弁を夫々付勢・減勢
する制御信号を分配し且つ前記シリンダの動作を確認す
る動作検出信号を得る制御回路と、前記電磁弁を夫々付
勢・減勢する制御信号を前記制御回路に送り且つ前記制
御回路から送給されるシリンダ動作確認検出信号を受容
する制御指令装置と、前記制御回路と制御指令装置を接
続する回路とからなることを特徴とする。To achieve the above object, the present invention provides a solenoid valve manifold in which a plurality of solenoid valves for energizing and deenergizing a plurality of fluid pressure cylinders are arranged in series, and a solenoid valve manifold for energizing and deenergizing the solenoid valves respectively. a control circuit that distributes a control signal to energize the cylinder and obtains an operation detection signal for confirming the operation of the cylinder; and a control circuit that sends a control signal that energizes and deenergizes the solenoid valve, respectively, to and from the control circuit. The present invention is characterized in that it comprises a control command device that receives a cylinder operation confirmation detection signal, and a circuit that connects the control circuit and the control command device.
次に、本発明に係る流体制御装置について好適な実施例
を挙げ、添付の図面を参照しながら以下詳細に説明する
。Next, preferred embodiments of the fluid control device according to the present invention will be described in detail with reference to the accompanying drawings.
第1図において参照符号10は、流体駆動用モヂュール
を示し、このモヂュール10は、複数個の電磁弁12a
乃至12eを連設した電磁弁マニホールド14と、前記
電磁弁12a乃至12eに対応する数のシリンダ16a
乃至16eとを含む。電磁弁12aとシリンダ16aと
は、一対の流体導入系18aと流体導出系20aとで接
続され、以下電磁弁12b乃至12eおよびシリンダ1
6b乃至16eも同様に流体導入系18b乃至18eと
流体導出系20b乃至20eとで夫々接続される。前記
シリンダ16a乃至16eには、その両端部にシリンダ
の動作検出用のリミットスイッチ22aと24aとが固
設され、シリンダ16b乃至16eについても同様にリ
ミットスイッチ22b乃至22eとリミットスイッチ2
4b乃至24eが固設されている。前記夫々のリミット
スイッチから導出されたシリンダの動作検出信号を送給
する信号線26a乃至26e並びに28a乃至28eは
、電磁弁マニホールド14に内設された制御回路30に
接続している。In FIG. 1, reference numeral 10 indicates a fluid drive module, and this module 10 includes a plurality of electromagnetic valves 12a.
A solenoid valve manifold 14 having serially arranged solenoid valves 12e to 12e, and a number of cylinders 16a corresponding to the solenoid valves 12a to 12e.
16e to 16e. The solenoid valve 12a and the cylinder 16a are connected by a pair of fluid introduction systems 18a and fluid outlet systems 20a, and the solenoid valves 12b to 12e and the cylinder 1
6b to 16e are similarly connected to fluid introduction systems 18b to 18e and fluid outlet systems 20b to 20e, respectively. The cylinders 16a to 16e are fixedly provided with limit switches 22a and 24a at both ends for detecting cylinder operation, and the cylinders 16b to 16e are similarly provided with limit switches 22b to 22e and a limit switch 2.
4b to 24e are fixedly installed. Signal lines 26a to 26e and 28a to 28e, which send cylinder operation detection signals derived from the respective limit switches, are connected to a control circuit 30 provided inside the electromagnetic valve manifold 14.
一方、前記電磁弁マニホールド140制御回路30から
は、二本の光フアイバーケーブル32および34を導出
してこれらを制御指令装置36に接続する。なお、第1
図において、参照符号38は、モヂュール10内のマニ
ホールド14に所要の1、例えば、空気を供給するため
の空気供給系であり、また参照符号40は、外部電源4
2とマニホールド14とを接続して電磁弁12a乃至1
2eの付勢並びにリミットスイッチ22a乃至22e
、24a乃至22eの付勢を行う電力を供給するための
電力線である。On the other hand, two optical fiber cables 32 and 34 are led out from the solenoid valve manifold 140 control circuit 30 and connected to a control command device 36. In addition, the first
In the figure, reference numeral 38 is an air supply system for supplying necessary air, e.g.
2 and the manifold 14 to connect the solenoid valves 12a to 1.
2e energization and limit switches 22a to 22e
, 24a to 22e.
第2図に、前記制御回路30と制御指令装置36の回路
図を示す。この場合、制御指令装置36は、出力側にお
いて各電磁弁の駆動信号を入力する入力回路50と前記
入力回路50によって導入されるパラレルな駆動信号を
シリアルな信号に変更する並列/直列信号変換器52と
前記変換器52の出力側に接続されて電気信号を光信号
に変換するE10変換器54とを具備し、前記E10変
換器54の出力側は、光フアイバーケーブル32に接続
する。制御指令装置36の入力側には1、前記光フアイ
バーケーブル34に接続して制御回路30から送給され
てくるリミントスイッチの動作確認のための光信号を電
気信号に変換するE10変換器56を設け、この変換器
56の出力側を直列信号/並列信号変換器58に接続す
る。変換器58の出力側は、ディスプレイ装置等を含む
表示装置60に接続してもよいが、一方、そのパラレル
な信号をCPU62に導入してメモリ64に記憶させ、
必要に応じて表示装置60でそれを確認することも可能
である。FIG. 2 shows a circuit diagram of the control circuit 30 and the control command device 36. In this case, the control command device 36 includes an input circuit 50 that inputs drive signals for each electromagnetic valve on the output side, and a parallel/serial signal converter that changes the parallel drive signals introduced by the input circuit 50 into serial signals. 52 and an E10 converter 54 connected to the output side of the converter 52 to convert an electrical signal into an optical signal, and the output side of the E10 converter 54 is connected to the optical fiber cable 32. On the input side of the control command device 36 is an E10 converter 56 that is connected to the optical fiber cable 34 and converts an optical signal sent from the control circuit 30 for checking the operation of the rim switch into an electrical signal. , and the output side of this converter 56 is connected to a serial signal/parallel signal converter 58 . The output side of the converter 58 may be connected to a display device 60 including a display device or the like, while the parallel signal is introduced into a CPU 62 and stored in a memory 64.
It is also possible to confirm this on the display device 60 if necessary.
次に、制御回路30は、前記光フアイバーケーブル32
に接続する光信号を電気信号に変換する0/E変換器7
0とこの変換器70の出力側に接続してそのシリアルな
電気信号をパラレルな電気信号に変える直列信号/並列
信号変換器72を含み、さらに各リミソトスイ・フチ2
2a乃至22eおよびリミソトスイッチ24a乃至24
eからのりミツトスイッチのパラレルな動作確認信号を
シリアルな電気信号に変える並列信号/直列信号変換器
74とこの変換器74に接続して電気信号を光信号に変
換しこれを光フアイバーケーブル34に送る電気信号/
光信号変換器76を具備する。Next, the control circuit 30 controls the optical fiber cable 32
0/E converter 7 that converts the optical signal connected to the electrical signal into an electrical signal.
0 and the output side of this converter 70 to convert the serial electrical signal into a parallel electrical signal, and further includes a serial signal/parallel signal converter 72 connected to the output side of the converter 70 and converting the serial electrical signal into a parallel electrical signal,
2a to 22e and limit switches 24a to 24
A parallel signal/serial signal converter 74 converts the parallel operation confirmation signal of the Mitswitch into a serial electrical signal from e and connects to this converter 74 to convert the electrical signal into an optical signal, which is connected to the optical fiber cable 34. Electrical signal sent/
An optical signal converter 76 is provided.
本発明は、基本的には以上のように構成されるものであ
り、次にその作用並びに効果について説明する。The present invention is basically constructed as described above, and its operation and effects will be explained next.
メモリ64に記憶されている各電磁弁駆動用の信号がc
pU62を介して入力回路50に導入されると、これら
の並列的な信号は、変換器52を介してシリアル信号に
変換され、次いでIE10変換器54で光信号に変換さ
れた後、光ファイノ\−ケーブル32により制御回路3
0に送られる。制御回路30内でこの信号は0/E変換
器70によりシリアルな電気信号に変換され、直列信号
/並列信号変換器72によりパラレルな電気信号に変わ
る。これらの信号は、各電磁弁12a乃至12eに図示
しないバス線を介して送給され、各電磁弁ではこの制御
信号に基づき電力線40から送給される駆動電力によっ
て所定の電磁弁を駆動することになる。The signal for driving each electromagnetic valve stored in the memory 64 is
When introduced into the input circuit 50 via the pU 62, these parallel signals are converted into serial signals via the converter 52, then converted into optical signals by the IE10 converter 54, and then the optical fiber - control circuit 3 by cable 32;
Sent to 0. Within the control circuit 30, this signal is converted into a serial electrical signal by an O/E converter 70, and converted into a parallel electrical signal by a serial signal/parallel signal converter 72. These signals are sent to each electromagnetic valve 12a to 12e via a bus line (not shown), and each electromagnetic valve drives a predetermined electromagnetic valve with driving power sent from the power line 40 based on this control signal. become.
一方、前記電磁弁12a乃至12eによるシリンダ16
a乃至16eの夫々の動作は、リミットスイッチ22a
乃至22eおよび24a乃至24eにより検出される。On the other hand, the cylinder 16 by the solenoid valves 12a to 12e
Each operation of a to 16e is performed by a limit switch 22a.
Detected by 22e to 24e and 24a to 24e.
そこでこれらの信号は、並列信号/直列信号変換器74
に導入されシリアル信号に変換される。これらの信号は
、次いで、E10変換器76でシリアルな光信号に変換
されて光フアイバーケーブル34を介して光信号/電気
信号変換器56に導入される。そして、その出力信号は
、直列信号/並列信号変換器5Bでパラレルな電気信号
に変えられ表示装置60でその動作が確認されることに
なる。These signals are then processed by a parallel signal/serial signal converter 74.
and converted into a serial signal. These signals are then converted into serial optical signals by E10 converter 76 and introduced into optical/electrical signal converter 56 via fiber optic cable 34 . Then, the output signal is converted into a parallel electrical signal by the serial signal/parallel signal converter 5B, and its operation is confirmed on the display device 60.
゛ また、この場合、前記シリンダ16a乃至16eの
動作は、CPtJ62にも導入され、メモリ64に記憶
された正常状態におけるシリンダの動作信号と比較し、
これを表示装置60に表すこともできる。゛ In this case, the operations of the cylinders 16a to 16e are also introduced into the CPtJ 62 and compared with the operation signals of the cylinders in the normal state stored in the memory 64,
This can also be displayed on the display device 60.
本発明によれば、以上のように電磁弁、シリンダおよび
流体供給系を備える流体制御装置において、前記電磁弁
のオン・オフ制御信号並びに前記シリンダの駆動確認信
号をパラレル信号として供給し、この結果、夫にの電磁
弁およびシリンダに必要とされた配線本数を減少させる
ことができ、これによって機器の配線の設計が非常に簡
便化した。さらにノイズに対してもその影響を蒙ること
なく動作を安定させることができ、しかも保守管理がし
易い等の種々のすJ果を奏する。According to the present invention, in a fluid control device including a solenoid valve, a cylinder, and a fluid supply system as described above, an on/off control signal for the solenoid valve and a drive confirmation signal for the cylinder are supplied as parallel signals, and as a result, The number of wires required for the solenoid valves and cylinders can be reduced, which greatly simplifies the design of equipment wiring. Furthermore, it has various advantages such as stable operation without being affected by noise and easy maintenance.
以上、本発明について好適な実施例を挙げて説明したが
、本発明は、この実施例に限定されるものではなく、例
えば、光ファイアs−ケーブルに代えて同軸ケーブル、
ハスケーブル、ツイストケーブル等も使用することもで
きる等本発明の精神を逸脱しない範囲において種々の改
変が可能であることは勿論である。Although the present invention has been described above with reference to preferred embodiments, the present invention is not limited to this embodiment. For example, a coaxial cable may be used instead of an optical fiber S-cable.
It goes without saying that various modifications can be made without departing from the spirit of the present invention, such as the use of helical cables, twisted cables, etc.
第1図は、本発明に係る流体制御装置のブロック回路図
、第2図は、前記流体制御装置に組み込まれる制御回路
と制御指令装置のブロック回路図である。
10・・モヂュール 12・・電磁弁
14・・電磁弁マニホールド
16・・シリンダ 18・・流体導入系20・・流体導
出系
22.24・・リミソトスイソヂ
26.2B・・信号線 30・・制御回路32.34・
・光フアイバーケーブル
36・・制御指令装置 38・・空気供給系40・・電
力線 42・・外部電源
50・・入力回路
52・・並列信号/直列信号変換供給
54・・ E10変換器 56・・ 0/E変換器5B
・・直列信号/並列信号変換器
60・・表示装置 62・・CPU
64・・メモリ 70・・ (1/E変換器72・・直
列信号/並列信号変換器
74・・並列信号/直列信号変換器
76・・電気信号/光信号変換器
特許出願人 焼結金属工業株式会社FIG. 1 is a block circuit diagram of a fluid control device according to the present invention, and FIG. 2 is a block circuit diagram of a control circuit and a control command device incorporated in the fluid control device. 10...Module 12...Solenoid valve 14...Solenoid valve manifold 16...Cylinder 18...Fluid introduction system 20...Fluid outlet system 22.24...Limitos Isoji 26.2B...Signal line 30...Control circuit 32 .34・
- Optical fiber cable 36... Control command device 38... Air supply system 40... Power line 42... External power supply 50... Input circuit 52... Parallel signal/serial signal conversion supply 54... E10 converter 56... 0 /E converter 5B
...Serial signal/parallel signal converter 60...Display device 62...CPU 64...Memory 70... (1/E converter 72...Serial signal/parallel signal converter 74...Parallel signal/serial signal conversion Device 76... Electrical signal/optical signal converter patent applicant Sintered Metal Industry Co., Ltd.
Claims (3)
数個の電磁弁を連設した電磁弁マニホールドと前記電磁
弁を夫々付勢・減勢する制御信号を分配し且つ前記シリ
ンダの動作を確認する動作検出信号を得る制御回路と、
前記電磁弁を夫々付勢・減勢する制御信号を前記制御回
路に送り且つ前記制御回路から送給されるシリンダ動作
確認検出信号を受容する制御指令装置と、前記制御回路
と制御指令装置を接続する回路とからなることを特徴と
する流体制御装置。(1) A solenoid valve manifold in which a plurality of solenoid valves for energizing and deenergizing a plurality of fluid pressure cylinders are arranged in series, and a control signal for energizing and deenergizing the solenoid valves respectively is distributed and a control circuit that obtains an operation detection signal for confirming operation;
A control command device that sends control signals for energizing and deenergizing the solenoid valves to the control circuit and receiving a cylinder operation confirmation detection signal sent from the control circuit, and connecting the control circuit and the control command device. A fluid control device comprising a circuit.
御回路と制御指令装置を接続する回路は、光フアイバー
ケーブルからなる流体制御装置。(2) The fluid control device according to claim 1, wherein the circuit connecting the control circuit and the control command device is an optical fiber cable.
制御回路と制御指令装置を接続する回路は、同軸ケーブ
ル、バスケーブル、ツイストケーブルのいずれかを含む
ことからなる流体制御装置。(3) Particularly, in the device according to claim 1 of fF,
A fluid control device in which a circuit connecting a control circuit and a control command device includes a coaxial cable, a bus cable, or a twisted cable.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16363583A JPS6057073A (en) | 1983-09-06 | 1983-09-06 | Fluid control system |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16363583A JPS6057073A (en) | 1983-09-06 | 1983-09-06 | Fluid control system |
Related Child Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4027365A Division JP2688031B2 (en) | 1992-01-18 | 1992-01-18 | Solenoid valve manifold with communication means |
JP4027366A Division JP2690001B2 (en) | 1992-01-18 | 1992-01-18 | Collective control device for actuator module |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6057073A true JPS6057073A (en) | 1985-04-02 |
JPH0313466B2 JPH0313466B2 (en) | 1991-02-22 |
Family
ID=15777677
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16363583A Granted JPS6057073A (en) | 1983-09-06 | 1983-09-06 | Fluid control system |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6057073A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02176290A (en) * | 1988-12-28 | 1990-07-09 | Koganei Ltd | Manifold device |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4919290A (en) * | 1972-06-14 | 1974-02-20 | ||
JPS5639311A (en) * | 1979-09-03 | 1981-04-15 | Daikin Ind Ltd | Two stage type electromagnetic proportional throttle change-over valve with reducing pilot valve having control circuit |
JPS5761879A (en) * | 1980-10-01 | 1982-04-14 | Hikari Gokin Seisakusho:Kk | Remote controller for valve's opening/closing motion |
JPS57184781A (en) * | 1981-04-24 | 1982-11-13 | Telemecanique Electrique | Pneumatic pressure control signal distributing system using electrical means |
-
1983
- 1983-09-06 JP JP16363583A patent/JPS6057073A/en active Granted
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4919290A (en) * | 1972-06-14 | 1974-02-20 | ||
JPS5639311A (en) * | 1979-09-03 | 1981-04-15 | Daikin Ind Ltd | Two stage type electromagnetic proportional throttle change-over valve with reducing pilot valve having control circuit |
JPS5761879A (en) * | 1980-10-01 | 1982-04-14 | Hikari Gokin Seisakusho:Kk | Remote controller for valve's opening/closing motion |
JPS57184781A (en) * | 1981-04-24 | 1982-11-13 | Telemecanique Electrique | Pneumatic pressure control signal distributing system using electrical means |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02176290A (en) * | 1988-12-28 | 1990-07-09 | Koganei Ltd | Manifold device |
Also Published As
Publication number | Publication date |
---|---|
JPH0313466B2 (en) | 1991-02-22 |
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