JPS604965B2 - Bonding point indicating device - Google Patents
Bonding point indicating deviceInfo
- Publication number
- JPS604965B2 JPS604965B2 JP10133077A JP10133077A JPS604965B2 JP S604965 B2 JPS604965 B2 JP S604965B2 JP 10133077 A JP10133077 A JP 10133077A JP 10133077 A JP10133077 A JP 10133077A JP S604965 B2 JPS604965 B2 JP S604965B2
- Authority
- JP
- Japan
- Prior art keywords
- glass plate
- base
- bonding point
- fixed
- solenoid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
- H01L2224/851—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector the connector being supplied to the parts to be connected in the bonding apparatus
Landscapes
- Mounting And Adjusting Of Optical Elements (AREA)
- Microscoopes, Condenser (AREA)
- Wire Bonding (AREA)
Description
【発明の詳細な説明】
この発明は半導体装置の細緑接続作業において作業の効
率化をはかるため細線接続用のキャピラリの降下する点
をスポットライトを照射して指示する装置に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a device that uses a spotlight to direct the descending point of a thin wire connection capillary in order to improve the efficiency of thin wire connection work for semiconductor devices.
一般に第1ボンディング点と第2ボンディング点は同一
レベルにはなく、最大数ミリメートルのレベル差を有し
ている。Generally, the first bonding point and the second bonding point are not on the same level, but have a level difference of several millimeters at most.
又スポットライトは被照射物に対して垂直方向から照射
することはキャピラリ等の存在により不可能であり従っ
てある煩斜角をもって照射することになる。この時ボン
ディング点にレベル差がある場合1方のボンディング点
のキャピラリ降下位置にスポットを合せた場合他方に於
いては第1図に示すようにスポットライト1の照射角を
8とし、段差をhとすると、スポットライト1で示され
る点と、実際にキャピラリ2が降下する第2ボンディン
グ点は6=ねn8×hだけ水平方向にずれることになる
。従来この欠点をさげるため2個のスポットライトを用
いて第1ボンディング点第2ボンディング点それぞれを
照射する方法がとられているが、この方法では価格的に
無駄があり又スポットライト2基分の取付けスペースが
必要となり加えてスポットが2個あることにより作業能
率が害される。Furthermore, it is impossible for a spotlight to irradiate an object to be irradiated from a perpendicular direction due to the presence of a capillary or the like, and therefore the object must be irradiated at a certain oblique angle. At this time, if there is a level difference between the bonding points, and if the spot is aligned with the capillary descent position of one bonding point, then at the other bonding point, as shown in Figure 1, the illumination angle of spotlight 1 is set to 8, and the step is h. Then, the point indicated by the spotlight 1 and the second bonding point where the capillary 2 actually descends are shifted in the horizontal direction by 6=n8×h. Conventionally, in order to alleviate this drawback, a method has been used that uses two spotlights to illuminate the first bonding point and the second bonding point, respectively, but this method is wasteful in terms of cost and requires the same amount of time as two spotlights. In addition to the need for installation space, the presence of two spots impairs work efficiency.
本発明においてその特徴とするところはスポットライト
の光軸上にガラス板をおき、ガラス板を光軸に対して煩
射させることによりスポットライトよりでた光線が傾斜
したガラス板を通過する時光の屈折により微少量だけ変
位することに着目し、第1ボンディング点と第2ボンデ
ィング点を指示する場合それぞれ別個にガラス板の優斜
角を決めて、細線接続作業中に各々へ繰返し切換えるこ
とによりボンディング点のレベル差による作業能率の低
下を防ぎ、従来の方法の欠点を解決することが出来る。
本発明を第2図に示す実施例によって具体的に説明する
と1はスポットライト、2は略図で表示せる紬線接続用
のキヤピラリであってその垂直下方に被照射物6である
半導体は保持せられる。The feature of the present invention is that a glass plate is placed on the optical axis of the spotlight, and the glass plate is directed toward the optical axis, so that when the light rays emitted from the spotlight pass through the inclined glass plate, the light is Focusing on the small amount of displacement due to refraction, when specifying the first and second bonding points, the dominant angle of the glass plate is determined separately, and bonding is performed by repeatedly switching to each during the fine wire connection work. It is possible to prevent a decrease in work efficiency due to level differences between points and solve the drawbacks of conventional methods.
The present invention will be specifically explained with reference to an embodiment shown in FIG. 2. Reference numeral 1 indicates a spotlight, 2 a capillary for connecting a string shown schematically, and a semiconductor, which is an object 6 to be irradiated, is held vertically below the capillary. It will be done.
スポットラィトーはランプ1′の先にパターン3及びレ
ンズ4を備えて直線状の光線を発生する。この光軸は被
照射物6上でキャピラリ2の先端部と合致する。この光
軸の途中には後に詳細な説明をする回転機構7を有する
ガラス板6が置かれる。ガラス板5はスポットライト1
と同じく図示しないが顕微鏡装置に固定せられたビン1
1に枢着せられたベース12の一端に固定され、他端に
は後斜角の調整ねじ8及び8′が顕微鏡装置に固定せら
れためねじ13,13′にねじ込まれてその先端部はベ
ース12を間隔をとって挟持する形となっている。ベー
ス12にはばね14の一端が係合いまね14の他端は固
定点に係止せられベース12に絶えず引張り力を与えて
いる。ベース12の中央部には長孔があげられ、固定さ
れたソレノイド15の可動片16の一端に固定せるピン
17が糟入している。ソレノィド15を附勢すると可動
片16はソレノィド15中に引込まれ、ピン17により
ベース12はぱね14に抗してピン11を中心に回り、
ベース12の端部は調整ねじ8′の端部に当接し、それ
に従ってガラス板5は第2図の位置となる。ソレノィド
15が消勢されるとばね14の引張力によりベース12
はピン11を中心に回りその端部は調整ねじ8に当俵し
ガラス板5は傾斜する。ガラス板5の煩斜角は調整ねじ
8,8′を回すことにより得られる。スポットライト1
のパターン3よりでた光線はしンズ4ガラス板5を通っ
て被照射物6に照射される。The spotlight includes a pattern 3 and a lens 4 at the tip of a lamp 1' to generate a linear beam of light. This optical axis coincides with the tip of the capillary 2 on the object 6 to be irradiated. A glass plate 6 having a rotating mechanism 7, which will be explained in detail later, is placed in the middle of this optical axis. Glass plate 5 is spotlight 1
Although not shown in the figure, the bottle 1 is fixed to the microscope device.
The base 12 is fixed to one end of the base 12, which is pivotally mounted to the base 12, and the rear beveled adjustment screws 8 and 8' are fixed to the microscope device at the other end and are screwed into internal screws 13 and 13'. 12 are held at intervals. One end of a spring 14 is engaged with the base 12, and the other end of the spring 14 is locked to a fixed point to constantly apply a tensile force to the base 12. A long hole is formed in the center of the base 12, and a pin 17 is inserted therein to be fixed to one end of the movable piece 16 of the fixed solenoid 15. When the solenoid 15 is energized, the movable piece 16 is drawn into the solenoid 15, and the pin 17 causes the base 12 to rotate around the pin 11 against the spring 14.
The end of the base 12 abuts the end of the adjusting screw 8', and accordingly the glass plate 5 is in the position shown in FIG. When the solenoid 15 is deenergized, the tension of the spring 14 causes the base 12 to
rotates around the pin 11, and its end touches the adjusting screw 8, so that the glass plate 5 is inclined. The oblique angle of the glass plate 5 is obtained by turning the adjusting screws 8, 8'. spotlight 1
The light rays emitted from the pattern 3 pass through the lens 4 glass plate 5 and are irradiated onto the object 6 to be irradiated.
この時第1ボンディング点と第2ボンディング点のうち
のレベルの高い方を照射して指示する場合にスポットラ
イト1の光線がガラス板5上に垂直に入射するようガラ
ス板をセットし、次にレベルの低い方を照射して指示す
る場合にガラス板5の回転機構7によりある鏡斜角を与
え、スポットライトの光線がガラス板5に角度iをもっ
て入射するようにする。この時傾斜角は入射角iに等し
い。又傾斜角は傾斜角調節ネジ8‘こよって調節するこ
とが出来る。以上の説明にあるように第1ボンディング
点と第2ボンディング点とのレベル差によるスポットの
位置ずれを補正することが判明した。At this time, when irradiating and instructing the higher level of the first bonding point and the second bonding point, the glass plate is set so that the beam of the spotlight 1 is perpendicularly incident on the glass plate 5, and then When irradiating and instructing the lower level, a certain mirror oblique angle is given by the rotation mechanism 7 of the glass plate 5 so that the beam of the spotlight is incident on the glass plate 5 at an angle i. At this time, the angle of inclination is equal to the angle of incidence i. Further, the inclination angle can be adjusted by the inclination angle adjustment screw 8'. As described above, it has been found that the positional deviation of the spot due to the level difference between the first bonding point and the second bonding point can be corrected.
第3図に示す実施例は前記実施例におけるスポットライ
ト1に代え顕微鏡の鞍眼レンズ18をおき、第3図の光
軸KIにハーフミラー9を額斜して設け、その交点に於
いてハーフミラー9の表面に法線を立てその法線を挟ん
でその法線と光軸KIとの間の角と等しい角を該法線と
の間に張るその法線に関し対称な光軸K2上に前記回転
機構7を有するガラス板5を設け、更に光鞠K2の延長
上にランプ10を有するパターン3′を設けたものであ
ってスポットライトを被照射物に直接照射することなく
ハーフミラー9を通してパターン3′を被照射物と重ね
て見る方法である。In the embodiment shown in FIG. 3, a saddle eye lens 18 of a microscope is placed in place of the spotlight 1 in the previous embodiment, and a half mirror 9 is provided obliquely on the optical axis KI in FIG. A normal line is set on the surface of the mirror 9, and an angle equal to the angle between the normal line and the optical axis KI is drawn between the normal line and the optical axis K2, which is symmetrical with respect to the normal line. A glass plate 5 having the rotation mechanism 7 is provided, and a pattern 3' having a lamp 10 is further provided on an extension of the light ball K2, and the spotlight is not directly irradiated onto the object but is irradiated through the half mirror 9. This is a method of viewing the pattern 3' superimposed on the object to be irradiated.
じ〆上を光学的に説明すると第4一1図、第4−2図に
示すように「パターンAから出た光はガラス板Gに垂直
に入射した場合、被照射物上の点Bにいたる。To explain the above optically, as shown in Figures 4-1 and 4-2, ``When the light emitted from pattern A enters the glass plate G perpendicularly, it hits point B on the irradiated object. Ital.
しかし入射角iでガラス板Gに入った光は屈折角rで屈
折した後入射光線に平行でかつ△yの変位をもって点B
′にいたる。入射角i、屈折角r、変位△yの関係を求
めると、ガラス板の屈折率をnとすると
Sin l
nこ前庁7………m
又ガラス板の厚さをtとすると
t
△y=交す?in(i−r)………■
ここで△yとは第1図6で示されるh・tanoを補正
するものであるから△y=h・ねnひ又はtとnは適当
なガラス板を選ぶことによって決まる。However, after the light that enters the glass plate G at the incident angle i is refracted at the refraction angle r, it is parallel to the incident ray and has a displacement of △y at the point B.
'. To find the relationship between the angle of incidence i, the angle of refraction r, and the displacement △y, if the refractive index of the glass plate is n, then Sin l n. Also, if the thickness of the glass plate is t, t △y = Intersect? in(ir-r)……■ Here, △y is for correcting h・tano shown in Fig. 16, so △y=h・n, or t and n are appropriate glass plates. Determined by choosing.
従って‘1}■式を計算すると入射角i、即ち煩斜角が
求まる。このようにして必要な変位△yに対して、適当
なガラス板のt、nを選んで煩射角を調節すれば汎用性
をもたせることが出釆る。Therefore, by calculating the equation '1}■, the incident angle i, that is, the oblique angle can be found. In this way, by selecting appropriate t and n of the glass plate and adjusting the irradiation angle for the required displacement Δy, versatility can be achieved.
又本発明において光線が2点を照射する場合、いずれか
1点についてはガラス面に対して垂直に入射するとした
が、これは垂直でなくてもよく、2点に対する光線の入
射角に差をつけるだけでよい。In addition, in the present invention, when a light beam illuminates two points, one of the points is assumed to be incident perpendicularly to the glass surface, but this does not have to be perpendicular, and the difference in the angle of incidence of the light beam with respect to the two points can be changed. Just put it on.
又光を屈折させる煤質をガラス板としたが、他の透明な
媒質であってもよい。Further, although the soot material that refracts light is a glass plate, other transparent media may be used.
第1図は従来の装置の図、第2図及び第3図はこの発明
に係る実施例の図、第4−1図、第4−2図はこの発明
の光学的作用の説明図である。
1……スポットライト、1′……ランプ、3,3′……
パターン、4……レンズ、5……ガラス板、7・・・・
・・回転機構、8,8′・…・・調整ねじ、9……ハー
フミラー、10……ランプ、11……ピン、12……ベ
ース、14……ばね、15……ソレノィド、16・・・
・・・可動片、17・・・・・・ピン、18・…・・接
眼レンズ。
第1図
第2図
第3図
第4図FIG. 1 is a diagram of a conventional device, FIGS. 2 and 3 are diagrams of an embodiment according to the present invention, and FIGS. 4-1 and 4-2 are explanatory diagrams of the optical action of the present invention. . 1...Spotlight, 1'...Lamp, 3,3'...
Pattern, 4...Lens, 5...Glass plate, 7...
...Rotation mechanism, 8, 8'...Adjustment screw, 9...Half mirror, 10...Lamp, 11...Pin, 12...Base, 14...Spring, 15...Solenoid, 16...・
...Movable piece, 17...Pin, 18...Eyepiece. Figure 1 Figure 2 Figure 3 Figure 4
Claims (1)
の中央部に設けた長孔にボンデイング点に従って制御さ
れるソレノイド15の可動片16端に固定したピン17
を係合し、ベース12の一端にガラス板5を固定し、ベ
ース12の他端をばね14により一方向に付勢してなる
ガラス5の回転機構7を設け、ボンデイング点のレベル
差によるスポツト位置ずれを補正するようにガラス板5
を、被照射物の面に対して斜め方向より照射するスポツ
トライトの光軸上に配置したることを特徴とするボンデ
イング点指示装置。 2 固定のピン11にベース12を枢支し、ベース12
の中央部に設けた長孔にボンデイング点に従って制御さ
れるソレノイド15の可動片16端に固定したピン17
を係合し、ベース12の一端にガラス板5を固定し、ベ
ース12の他端をばね14により一方向に付勢してなる
ガラス5の回転機構7を設け、ボンデイング点のレベル
差によるスポツト位置ずれを補正するようにガラス板5
を、ハーフミラー9を介して被照射物の面に対して斜め
方向より照射するランプ10の該ランプ10とハーフミ
ラー9との間の光軸上に配置し、かつ、ハーフミラー9
と被照射物との間の光軸の延長線上に接眼レンズ18を
配置したることを特徴とするボンデイング点指示装置。[Claims] 1. A base 12 is pivotally supported on a fixed pin 11, and the base 12 is
A pin 17 is fixed to the end of the movable piece 16 of the solenoid 15, which is controlled according to the bonding point in a long hole provided in the center of the solenoid 15.
A rotating mechanism 7 for the glass plate 5 is provided in which the glass plate 5 is fixed to one end of the base 12 and the other end of the base 12 is biased in one direction by a spring 14. Glass plate 5 to correct positional deviation.
A bonding point indicating device characterized in that the bonding point indicating device is arranged on the optical axis of a spotlight that irradiates the surface of an object to be irradiated from an oblique direction. 2 Pivot the base 12 to the fixed pin 11, and
A pin 17 is fixed to the end of the movable piece 16 of the solenoid 15, which is controlled according to the bonding point in a long hole provided in the center of the solenoid 15.
A rotating mechanism 7 for the glass plate 5 is provided in which the glass plate 5 is fixed to one end of the base 12 and the other end of the base 12 is biased in one direction by a spring 14. Glass plate 5 to correct positional deviation.
is arranged on the optical axis between the lamp 10 and the half mirror 9 of the lamp 10 which irradiates the surface of the object to be irradiated obliquely through the half mirror 9, and the half mirror 9
A bonding point indicating device characterized in that an eyepiece lens 18 is disposed on an extension of the optical axis between the object and the object to be irradiated.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10133077A JPS604965B2 (en) | 1977-08-24 | 1977-08-24 | Bonding point indicating device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10133077A JPS604965B2 (en) | 1977-08-24 | 1977-08-24 | Bonding point indicating device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5434848A JPS5434848A (en) | 1979-03-14 |
JPS604965B2 true JPS604965B2 (en) | 1985-02-07 |
Family
ID=14297810
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10133077A Expired JPS604965B2 (en) | 1977-08-24 | 1977-08-24 | Bonding point indicating device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS604965B2 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5920669A (en) * | 1982-07-26 | 1984-02-02 | Shinko Kikai Seisakusho:Kk | Positioning of rubber plate to be bonded to plate roller |
-
1977
- 1977-08-24 JP JP10133077A patent/JPS604965B2/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS5434848A (en) | 1979-03-14 |
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