JPS6047227A - Magnetic recording medium - Google Patents
Magnetic recording mediumInfo
- Publication number
- JPS6047227A JPS6047227A JP58154517A JP15451783A JPS6047227A JP S6047227 A JPS6047227 A JP S6047227A JP 58154517 A JP58154517 A JP 58154517A JP 15451783 A JP15451783 A JP 15451783A JP S6047227 A JPS6047227 A JP S6047227A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- vapor deposition
- base material
- coercive force
- thin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005291 magnetic effect Effects 0.000 title claims abstract description 33
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims abstract description 25
- 239000010409 thin film Substances 0.000 claims abstract description 19
- 229910052742 iron Inorganic materials 0.000 claims abstract description 6
- 229910000640 Fe alloy Inorganic materials 0.000 claims abstract 2
- 238000001704 evaporation Methods 0.000 claims description 10
- 239000000758 substrate Substances 0.000 claims description 3
- 239000000696 magnetic material Substances 0.000 abstract description 12
- 239000010408 film Substances 0.000 abstract description 11
- 239000000463 material Substances 0.000 abstract description 10
- 238000007740 vapor deposition Methods 0.000 abstract description 9
- 238000000034 method Methods 0.000 abstract description 5
- 238000000151 deposition Methods 0.000 abstract description 4
- 229910045601 alloy Inorganic materials 0.000 abstract description 3
- 239000000956 alloy Substances 0.000 abstract description 3
- 238000001816 cooling Methods 0.000 abstract description 3
- 230000005294 ferromagnetic effect Effects 0.000 abstract description 3
- 229910017061 Fe Co Inorganic materials 0.000 abstract description 2
- 229910002549 Fe–Cu Inorganic materials 0.000 abstract description 2
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 abstract description 2
- 229910052703 rhodium Inorganic materials 0.000 abstract description 2
- 229910017060 Fe Cr Inorganic materials 0.000 abstract 1
- 229910002544 Fe-Cr Inorganic materials 0.000 abstract 1
- 229910017082 Fe-Si Inorganic materials 0.000 abstract 1
- 229910017133 Fe—Si Inorganic materials 0.000 abstract 1
- 229910017709 Ni Co Inorganic materials 0.000 abstract 1
- 229910003267 Ni-Co Inorganic materials 0.000 abstract 1
- 229910003262 Ni‐Co Inorganic materials 0.000 abstract 1
- 229910052772 Samarium Inorganic materials 0.000 abstract 1
- 230000015572 biosynthetic process Effects 0.000 abstract 1
- UPHIPHFJVNKLMR-UHFFFAOYSA-N chromium iron Chemical compound [Cr].[Fe] UPHIPHFJVNKLMR-UHFFFAOYSA-N 0.000 abstract 1
- 238000010030 laminating Methods 0.000 abstract 1
- 230000003068 static effect Effects 0.000 abstract 1
- 230000007423 decrease Effects 0.000 description 5
- 230000008020 evaporation Effects 0.000 description 5
- 229910002548 FeFe Inorganic materials 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- -1 polyethylene phthalate Polymers 0.000 description 2
- 239000004698 Polyethylene Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000013081 microcrystal Substances 0.000 description 1
- 239000002985 plastic film Substances 0.000 description 1
- 229920006255 plastic film Polymers 0.000 description 1
- 229920006122 polyamide resin Polymers 0.000 description 1
- 229920005668 polycarbonate resin Polymers 0.000 description 1
- 239000004431 polycarbonate resin Substances 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000009719 polyimide resin Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/64—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent
- G11B5/66—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent the record carriers consisting of several layers
- G11B5/672—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent the record carriers consisting of several layers having different compositions in a plurality of magnetic layers, e.g. layer compositions having differing elemental components or differing proportions of elements
Landscapes
- Magnetic Record Carriers (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】
（技術分野）
本発明は鉄系の磁性材料を用いつつも保磁力が高い改良
された薄膜型の磁気記録媒体に関するものである。DETAILED DESCRIPTION OF THE INVENTION (Technical Field) The present invention relates to an improved thin-film magnetic recording medium that uses iron-based magnetic materials but has a high coercive force.
（従来技術）
近年、高密度磁気記録の要求の高まりに対応して真空蒸
着、ヌパンクリング、イオンブレーティング等の方法に
より非磁性基月上に強磁性金属からなる薄膜を形成した
薄膜型の磁気記録媒体が開発されており、中でもＣｏ系
磁性材料を斜方蒸着法により形成した薄膜を有する磁気
記録媒体は磁気特性がすぐれており、例えばマイクロカ
セットテープに利用されているなど、高密度記録化の一
翼乞担っている。(Prior art) In recent years, in response to the increasing demand for high-density magnetic recording, thin-film type thin films have been developed in which a thin film of ferromagnetic metal is formed on a non-magnetic substrate using methods such as vacuum evaporation, nupuncling, and ion blating. Magnetic recording media have been developed, and among them, magnetic recording media with thin films formed by oblique evaporation of Co-based magnetic materials have excellent magnetic properties, and are used for high-density recording, such as being used in microcassette tapes. We are playing a part in the transformation.
しかしながらＣＯ系磁性材料乞使用するときはＣｏ系金
属の祠料費が高い上に斜方蒸着法の蒸着効率が低いこと
により、磁気記録媒体の価格が高くなり過ぎるため、他
の磁性材料への変換が望まれている。However, when using CO-based magnetic materials, the cost of abrasive metals is high and the deposition efficiency of the oblique evaporation method is low, making the price of the magnetic recording medium too high. Conversion is desired.
一方、Ｆｅ系磁性材料を使用して磁気記録媒体乞製造す
ると、価格的には大巾な低下が図れる可能性はあるが、
高い保磁力が得られず、又、Ｆｅ系磁性材料はｎ４に食
性が不十分であるため、従来、種々の試みがなされてい
るにも拘らず未だ実用化には到っていない。On the other hand, if magnetic recording media are manufactured using Fe-based magnetic materials, the price may be significantly reduced;
Since a high coercive force cannot be obtained and Fe-based magnetic materials have insufficient edibility for n4, they have not yet been put to practical use despite various attempts.
÷溌→トの→日弁→一
本発明者はＦｅ系磁性材料を使用する際の欠点乞克服す
るため便覧の結果、次の■〜■の各点を見い出した。即
ち、
■ＦｅＦｅ系磁性材相乞使用形成した薄膜の保磁力は膜
厚１０ＯＯＡ付近乞境とし、ｉｏｏ。÷溌→トの→日ben→1 The inventor of the present invention has discovered the following points (1) to (2) as a result of a handbook in order to overcome the drawbacks when using Fe-based magnetic materials. That is, (1) The coercive force of the thin film formed using the FeFe-based magnetic material is approximately 10OOA, and the coercive force is approximately 10OOA.
Ａ以下では比較的高い値を示すが、１００θＡを越える
と急に低下すること、
■ＦｅＦｅ系磁性材料用して形成した薄膜を複数圧分割
して積層した場合、多層膜の厚みが１ｏｏｏＸ以上とな
っても保磁力は低下しないこと。Below A, it shows a relatively high value, but when it exceeds 100θA, it suddenly decreases. ■When a thin film made of FeFe-based magnetic material is layered by dividing it into multiple layers, the thickness of the multilayer film is 1oooX or more. The coercive force should not decrease even if
（発明の構成）
本発明は上記の見い出された事実に基づいてなされたも
ので′あって、本発明の磁気記録媒体は、非磁性基村上
に斜方蒸着法により形成された鉄もしくは鉄の合金の薄
膜層が複数積層されていることを％徴とするものである
。(Structure of the Invention) The present invention has been made based on the above-mentioned findings, and the magnetic recording medium of the present invention comprises iron or iron formed on a non-magnetic substrate by an oblique evaporation method. It is characterized by the fact that a plurality of thin film layers of the alloy are laminated.
以下、図面を用いながら本発明について詳細に説明する
。Hereinafter, the present invention will be explained in detail using the drawings.
第１図は本発明の磁気記録媒体の一実施例を示す断面図
であって、非磁性基材１０）表面に磁性薄膜層コ、３、
およびダの３つの磁性薄膜層が順に積層された構造乞と
っている。FIG. 1 is a sectional view showing an embodiment of the magnetic recording medium of the present invention, in which magnetic thin film layers, 3,
It has a structure in which three magnetic thin film layers, 1 and 2, are laminated in order.
上記における各層の拐料乞説明すると、まず、非磁性基
材ｌとしてはポリエチＶンテンフタレート樹脂、ポリイ
ミド樹脂、ポリアミド樹脂、ポリカーボネート樹脂等の
プラスチックフィルムが使用できる。Regarding the details of each layer in the above, first, as the non-magnetic base material 1, a plastic film such as polyethylene phthalate resin, polyimide resin, polyamide resin, polycarbonate resin, etc. can be used.
磁性薄膜層λ、Ｊ、’ｌはＦｅ系磁性材料を蒸着源とし
た斜方蒸着法により形成されている。Ｆｅ系磁性材料と
してはＦｅ単独の他、Ｆｅ−Ｎｉ、Ｆｅ−Ｃｏ、 Ｆｅ
−Ｎｉ−ＣｏＳＦｅ−Ｒｈ、 Ｆｅ−Ｃｕ、 Ｆｅ−
８ｉｎ１Ｆｅ−Ｃｒ、 Ｆｅ−８ｉ等のＦｅを主棒とし
た強磁性合金が使用できる。The magnetic thin film layers λ, J, and 'l are formed by an oblique evaporation method using an Fe-based magnetic material as a evaporation source. In addition to Fe alone, Fe-based magnetic materials include Fe-Ni, Fe-Co, Fe
-Ni-CoSFe-Rh, Fe-Cu, Fe-
Ferromagnetic alloys with Fe as the main rod, such as 8in1Fe-Cr and Fe-8i, can be used.
磁性薄膜１ｍン形成するには例えば第一図に示すごと（
巻き出しリールＳから繰り出された非磁性基材／を冷却
ドラム乙に接触させて移動さぜつつ、トラム乙の下方に
配置された蒸着源７乞用′いて暴利７の表面に蒸着する
方法などの胴方蒸着によって行なう。蒸着源の基材はリ
ールｇに巻き取られろ。なお、ここで遮蔽板ワの位置ケ
水平゛に移動さぜろことにより、基材／に対する最小入
射角θを調節することができる。To form a 1-meter magnetic thin film, for example, as shown in Figure 1 (
A method of vapor depositing the non-magnetic base material unwound from the unwinding reel S onto the surface of the profiteer 7 using a vapor deposition source 7 placed below the tram while moving it in contact with the cooling drum B. This is done by lateral vapor deposition. The base material of the vapor deposition source is wound onto reel g. Incidentally, by moving the position of the shielding plate horizontally, the minimum incident angle θ with respect to the base material can be adjusted.
磁性薄膜層ス、３、およびｔのおのおのの厚みは／ ０
００ ｋＤ）、下とすることが望ましく、この理由は第
３図のグラフに示すごと（、厚みが１０００Ａを越える
と保磁力が急激に低下する上、角形比も低下するからで
ある。保磁力および角形比の望ましい値は、どのような
システムにおいて使用されるかにより異なるので一層に
は言えないが、マイクロカセットテープとして使用する
場合には市販のマイクロカセットレコーダの設定バイア
ス電流から判断すると、保磁力の値としてはグθ０〜７
θ００ｅ程度であり、角形比の値としては０．７！；以
上であることが望ましい。なお、（直性薄膜層の厚みの
下限としては斜方蒸着の微結晶が十分成長し斜方蒸着の
効とするのがよい。The thickness of each of the magnetic thin film layers S, 3, and t is /0
00 kD), and the reason for this is as shown in the graph of Fig. 3 (If the thickness exceeds 1000 A, the coercive force decreases rapidly and the squareness ratio also decreases. The desirable values for the squareness and squareness ratios vary depending on what kind of system it is used in, so it is difficult to say, but when using it as a microcassette tape, judging from the bias current setting of a commercially available microcassette recorder, the The value of magnetic force is θ0~7
It is about θ00e, and the squareness ratio is 0.7! ; or more is desirable. Note that (as a lower limit of the thickness of the straight thin film layer, it is preferable that the microcrystals of the oblique evaporation grow sufficiently to take advantage of the effect of the oblique evaporation.
不究明において、トータルの厚みは同じでも複数に分け
て積〕輛（−だ磁性薄膜層が単一層の同厚みの磁性薄膜
ｊ曽に（らべて保磁力が向上するのは、単一層で厚み馨
１０００Ａ以上にするとそれ以下では柱状に独立して成
長していた隣接した結晶どうしが互いに融合してしまい
、斜方蒸着効果が失なわれるためと考えられ、従って斜
方蒸着効果が失なわれたい／θｏｏＸ以下の厚みで数層
ン中断して結晶の成長を停め、再度その上に蒸着を行な
うことによりトータル厚みが７０００に以上に７エって
も保磁力の低下が回避されるものであり、このような操
作７繰り返すことにより一層の保磁力の向上が図れる。It is unclear that if the total thickness is the same, but the magnetic thin film layer is divided into multiple layers and stacked, the coercive force will be improved compared to a single magnetic thin film layer of the same thickness. This is thought to be because if the thickness is 1000A or more, if the thickness is less than that, adjacent crystals that had grown independently in a columnar shape will fuse with each other, and the oblique evaporation effect will be lost. By interrupting several layers at a thickness below θooX to stop crystal growth, and then depositing again on top of that, a decrease in coercive force can be avoided even if the total thickness is 7000 or more. By repeating these operations 7, the coercive force can be further improved.
実施例
非磁性基材としては厚み乙μｍのポリエチレンテレフタ
ンートフィルムを用い、その表面に第２図に示した斜方
蒸着により最小入射角Ａ Ｏｏにて厚み７００ ｋＯ）
Ｆｅ蒸着膜を形成し、以上の工程７更にユ回繰り返すこ
とにより、Ｆｅ蒸着膜を合計３層積層し、合計膜厚を、
２．１００Ｘとした。EXAMPLE A polyethylene terephthanate film with a thickness of 0 μm was used as the non-magnetic base material, and a thickness of 700 kO was applied to the surface of the film by oblique vapor deposition as shown in FIG. 2 at the minimum incident angle A.
By forming a Fe vapor deposited film and repeating the above step 7 more times, a total of three layers of Fe vapor deposited films are laminated, and the total film thickness is
2. It was set to 100X.
比較例
実施例／で用いたのと同じ基利乞用い、実施例／で行な
ったのとｌｏ］様な方法によりＦｅ蒸着膜’Ｖ 、＋、
／ ００ Ａの厚みになるよう形成した。Comparative Example Using the same basic method as that used in Example/, an Fe vapor deposited film 'V, +,
/ 00 A thick.
以上の実施例及び比較例で得られた磁気記録以上の本発
明によれば安価７．（Ｆｅ４使用しつつも保磁力及び角
形比の静磁気特性がすぐれている。According to the present invention, the cost is lower than the magnetic recording obtained in the above Examples and Comparative Examples.7. (Although it uses Fe4, it has excellent magnetostatic properties such as coercive force and squareness ratio.
第１図は本発明の磁気記録媒体の実施例の断面図、第２
図は斜方蒸着法の説明図、第３図は蒸着膜厚と静磁気特
性の関係７示すグラフである。
／・・・・・・・・・・・非磁性基材
コ、３、り・・・・・・磁性薄膜層
左 ・・φ・・・・・・・・巻き出しリール４・・・・
・・・・・・・冷却ドラム
７・・・・・・・・・・・蒸 着 源
ｇ ＠−１１１ＩＩ１１１・・ リ − ル？・・・・
・・・・・・・遮蔽板
０・・・・・・・・・・・最小入射角
特許出願人 大日本印刷株式会社
１：Ｉ開開６０− ４７２２７（３）
才 １ 図
オ ２ 図FIG. 1 is a sectional view of an embodiment of the magnetic recording medium of the present invention, and FIG.
The figure is an explanatory diagram of the oblique evaporation method, and FIG. 3 is a graph showing the relationship 7 between the evaporated film thickness and the magnetostatic characteristics. ／・・・・・・・・・・・・Nonmagnetic base material 3, Ri・・・Magnetic thin film layer left ・φ・・・・・・Unwinding reel 4・・・・
......Cooling drum 7...Vapor deposition source g @-111II111... Reel?・・・・・・
・・・・・・・Shielding plate 0・・・・・・・・・・Minimum angle of incidence Patent applicant Dai Nippon Printing Co., Ltd. 1: I Kaikai 60-47227 (3) Age 1 Figure O 2 Figure
Claims (1)
は鉄の合金の薄膜層が複数積層されていることを特徴と
する磁気記録媒体。A magnetic recording medium characterized in that a plurality of thin film layers of iron or an iron alloy formed by an oblique evaporation method are laminated on a non-magnetic substrate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58154517A JPS6047227A (en) | 1983-08-24 | 1983-08-24 | Magnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58154517A JPS6047227A (en) | 1983-08-24 | 1983-08-24 | Magnetic recording medium |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6047227A true JPS6047227A (en) | 1985-03-14 |
| JPH0520807B2 JPH0520807B2 (en) | 1993-03-22 |
Family
ID=15585975
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58154517A Granted JPS6047227A (en) | 1983-08-24 | 1983-08-24 | Magnetic recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6047227A (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57143730A (en) * | 1981-03-02 | 1982-09-06 | Fuji Photo Film Co Ltd | Magnetic recording medium |
-
1983
- 1983-08-24 JP JP58154517A patent/JPS6047227A/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57143730A (en) * | 1981-03-02 | 1982-09-06 | Fuji Photo Film Co Ltd | Magnetic recording medium |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0520807B2 (en) | 1993-03-22 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2539349B2 (en) | Perpendicular magnetic recording media | |
| JPH0328735B2 (en) | ||
| JPH07105027B2 (en) | Perpendicular magnetic recording medium | |
| JPS6047227A (en) | Magnetic recording medium | |
| JP2579184B2 (en) | Magnetic recording media | |
| JPS6199932A (en) | Production of vertical magnetic recording medium | |
| JP3045797B2 (en) | Perpendicular magnetic recording media | |
| JPH01143312A (en) | Amorphous soft magnetic laminated film | |
| JPH0576703B2 (en) | ||
| JP3520751B2 (en) | Perpendicular magnetic recording medium, method of manufacturing the same, and storage device using the same | |
| JPH06139541A (en) | Magnetic recording medium | |
| JPS60113318A (en) | Magnetic recording medium | |
| JPH0475571B2 (en) | ||
| JPS61222023A (en) | Vertical magnetic recording medium | |
| JPS60231911A (en) | Magnetic recording medium | |
| JPH0315245B2 (en) | ||
| JPS61224131A (en) | Vertical magnetic recording medium | |
| JPS58171717A (en) | Magnetic recording medium | |
| JPH0550054B2 (en) | ||
| JPH01283319A (en) | Production of magnetic material for magnetic head | |
| JPH0532808B2 (en) | ||
| JPS61224105A (en) | Vertical magnetic recording and reproducing system | |
| JP2003006831A (en) | Magnetic recording medium | |
| JPH01303623A (en) | Magnetic recording medium | |
| JPS61122919A (en) | Vertical magnetic recording medium |