JPS6046664B2 - Interelectrode short circuit inspection method - Google Patents
Interelectrode short circuit inspection methodInfo
- Publication number
- JPS6046664B2 JPS6046664B2 JP53065920A JP6592078A JPS6046664B2 JP S6046664 B2 JPS6046664 B2 JP S6046664B2 JP 53065920 A JP53065920 A JP 53065920A JP 6592078 A JP6592078 A JP 6592078A JP S6046664 B2 JPS6046664 B2 JP S6046664B2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- electrodes
- short
- short circuit
- inspection method
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Testing Electric Properties And Detecting Electric Faults (AREA)
- Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
- Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
Description
【発明の詳細な説明】
本発明は、電極間の短絡検査法の改善、とくに対向電
極間のガス放電を利用した表示パネル等における基板上
に配列した微細電極相互間の短絡検査法の改善に関する
ものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an improvement in a short-circuit inspection method between electrodes, and particularly to an improvement in a short-circuit inspection method between fine electrodes arranged on a substrate in a display panel, etc., which utilizes gas discharge between opposing electrodes. It is something.
従来このような微細な電極構成からなる表示パネルの
隣接電極間の短絡検査法としては、一般に顕微鏡を用い
た目視検査が行われているが、該顕微鏡下での長時間連
続作業では能率が低下し、かつ短絡箇所を見落とす懸念
もあり不確実な検査法であつた。Conventionally, visual inspection using a microscope has been generally used as a method for inspecting short circuits between adjacent electrodes of display panels with such a fine electrode configuration, but efficiency decreases when working continuously under the microscope for long periods of time. However, it was an uncertain inspection method because there was a concern that short circuits might be overlooked.
他方隣接電極間の短絡を電気的導通によつて検査する方
法もあるが、これを補修するためには後の作業のために
短絡箇所をマークしなければならない等の問題があつた
。 本発明は、前記のようあ問題点に鑑みなされたもの
で、あらかじめ電極の上面に電極パターンニング用のホ
トレジスタを残した状態で、検査すべき隣接電極間に電
圧を印加し、短絡箇所を通して 流れる電流による前記
被膜の変色状態から短絡不良箇所を容易に識別できるよ
うにした新規な電極間短絡検査法を提案するものである
。On the other hand, there is a method of inspecting short circuits between adjacent electrodes by electrical continuity, but this method has problems such as the need to mark short circuit locations for later work in order to repair them. The present invention was developed in view of the above-mentioned problems, and a photoresist for electrode patterning is left on the top surface of the electrode in advance, and a voltage is applied between adjacent electrodes to be inspected to cause a voltage to flow through the short-circuit location. The present invention proposes a novel method for inspecting short circuits between electrodes, which makes it possible to easily identify short circuit defects from the state of discoloration of the coating caused by current.
以下図面を用いて本発明に係る電極間短絡検査法の実
施例に詳細に説明する。 第１図は、本発明に係る電極
間短絡検査法の１実施例を説明するための概細図で、ａ
は平面図、をは側断面図である。DESCRIPTION OF THE PREFERRED EMBODIMENTS Examples of the inter-electrode short circuit inspection method according to the present invention will be described in detail below with reference to the drawings. FIG. 1 is a detailed diagram for explaining one embodiment of the inter-electrode short circuit inspection method according to the present invention.
is a plan view, and is a side sectional view.
絶縁物たとればガラス等からなる基板１の上に印刷法あ
るいは写真蝕刻法によつて電極２〜５が規則的に形成さ
れている状態において、いま電極３と４の間に電極短絡
部６が介在しているものとする。本発明に従うと、まず
全電極２〜５および電極短絡部６を含む全面に電極パタ
ーンニング工程で用いたホトレジスト７をそのまま残し
た状態とする。このように電極２〜５および場合によつ
て電極短絡部６の上面にホトレジスト７の被膜が存在し
ている状態において、あらかじめ所要の電荷が充電され
ているコンデンサ８、スイッチ９、電流計１０および検
出用端子・１１より構成されている試験器の前記検出用
端子 １１を隣接した３、４にそれぞれ接触させてスイ
ッチ９を閉じる、コンデンサ８に蓄積されていた電荷が
電極４、電極短絡部６および電極３を通して放電し瞬時
に大電流ｉか流れる。他方、短絡し、ていないたとえは
電極２、３に検出用端子１１を接触させてスイッチ９を
閉じても閉回路を形成せず電流は流れない。ここで、前
記電極短絡部６が細く電極３，４にくらべて抵抗が非常
に高い場合は、該電極短絡部６がコンデンサ８からの瞬
時の大きな電流１によつて焼き切れるので、短絡の榛査
と同時に修正を行うことができる。In a state where electrodes 2 to 5 are regularly formed by printing or photolithography on a substrate 1 made of an insulating material such as glass, an electrode shorting portion 6 is now formed between the electrodes 3 and 4. It is assumed that there is an intervention. According to the present invention, first, the photoresist 7 used in the electrode patterning step is left as it is on the entire surface including all the electrodes 2 to 5 and the electrode short-circuit portion 6. In this manner, with the photoresist 7 film present on the upper surfaces of the electrodes 2 to 5 and in some cases the electrode short-circuit portion 6, the capacitor 8, switch 9, ammeter 10, and The detection terminal 11 of the tester, which is composed of a detection terminal 11, is brought into contact with the adjacent terminals 3 and 4, respectively, and the switch 9 is closed. A large current i is discharged through the electrode 3 and instantaneously flows. On the other hand, even if the detection terminal 11 is brought into contact with the electrodes 2 and 3 and the switch 9 is closed, a closed circuit will not be formed and no current will flow. Here, if the electrode short-circuit part 6 is thin and has a very high resistance compared to the electrodes 3 and 4, the electrode short-circuit part 6 will be burned out by the instantaneous large current 1 from the capacitor 8, so that the short circuit may occur. Corrections can be made at the same time as the inspection.
またこれと反対に電極短絡部６の幅が広く抵抗が他の電
極部２〜５にくらべて同時または低い場合には上記のよ
うな焼き切りによる同時修正はできないが電流１による
ジュール熱によつて電流１の流れた部分の上面に存在す
るホトレジスト膜７が変色するので短絡の不良箇所を容
易に識別することが可能となり、以後の修正がきわめて
容易となる。第２図は、本発明をセルフシフト型ガス放
電パネル用電極基板の検査に適用した場合の実施例を示
す平面図で、前図と同等の部分については同符号を用い
ている。On the other hand, if the width of the electrode short circuit part 6 is wide and the resistance is simultaneous or low compared to the other electrode parts 2 to 5, simultaneous correction by burning out as described above is not possible, but the current 1 causes Joule heat. Since the photoresist film 7 existing on the upper surface of the portion where the current 1 has flowed changes color, it becomes possible to easily identify the defective location of the short circuit, and subsequent correction becomes extremely easy. FIG. 2 is a plan view showing an embodiment in which the present invention is applied to the inspection of an electrode substrate for a self-shifting gas discharge panel, and the same reference numerals are used for the same parts as in the previous figure.
この場合、図示しない基板上に配列された多数の電極２
１−２５，３１−３５は交互に２本の電極母線２０，３
０に接続され、前記電極母線２０，３０はそれぞれ母線
端子１２，１３より取り出されている。またこれら電極
なら−びに母線の上面には加熱によつて変色するホトレ
ジスト被膜が前述のように残されている。いま電極２３
と隣接の電極３２の間に電極短絡部６がある場合、検出
用端子１１を前記母線端子１２，１３に接触させ、スイ
ッチ９を閉じるとコンデンサニ８に充電されている電荷
が放電し、電流１が矢印の方向に流れ、該電流の流れた
電極母線２０，３０と電極２３，３２および電極短絡部
６上のホトレジスト被膜が変色するので、短絡箇所を容
易に識別することができる。この実施例では複数の電極
が２本の電極母線２０，３０に接続されているので、全
電極間の短絡検査が一度にできる利点がある。以上説明
したように本発明に係る電極間短絡検査法を適用すると
、短絡不良箇所の識別が容易となる他、検査能率の向上
が期待でき、かつ短絡不良箇所の見落し等が皆無となる
ので良品率の大巾な向上が期待できる。In this case, a large number of electrodes 2 are arranged on a substrate (not shown).
1-25, 31-35 are two electrode busbars 20, 3 alternately
0, and the electrode busbars 20 and 30 are taken out from the busbar terminals 12 and 13, respectively. Further, as described above, a photoresist film that changes color when heated is left on the upper surfaces of these electrodes and the bus bar. Now electrode 23
If there is an electrode short circuit 6 between the electrode 32 and the adjacent electrode 32, when the detection terminal 11 is brought into contact with the bus terminals 12 and 13 and the switch 9 is closed, the charge stored in the capacitor 8 is discharged, and the current 1 flows in the direction of the arrow, and the photoresist coatings on the electrode busbars 20, 30, electrodes 23, 32, and electrode short-circuit portion 6 through which the current flows change color, so that the short-circuit location can be easily identified. In this embodiment, since a plurality of electrodes are connected to the two electrode busbars 20 and 30, there is an advantage that short circuits between all electrodes can be tested at once. As explained above, when the inter-electrode short circuit inspection method according to the present invention is applied, it becomes easy to identify the short-circuit defective points, improvement in inspection efficiency can be expected, and no short-circuit defective points will be overlooked. A significant improvement in the rate of non-defective products can be expected.
従つて微細な電極構成を有するガス放電表示パネル等の
電極検査に適用して極めて有利である。Therefore, it is extremely advantageous when applied to electrode inspection of gas discharge display panels and the like having a fine electrode structure.
第１図は、本発明による電極間短絡検査法の１実施例を
説明するための概略図で、ａは平面図、ｂは側断面図、
第２図は２本の母線に接続された電極間短絡検査法の実
施例を説明するための概略図である。
１：基板、２〜５，２１〜２５，３１〜３５：電極、６
：電極短絡部、７：ホトレジスト、８：コンデンサ、９
：スイツチ、１０：電流計、１１：検出用端子、１２，
１３：電極端子、２０，３０：電極母線、ｉ：電流経路
。FIG. 1 is a schematic diagram for explaining one embodiment of the inter-electrode short circuit inspection method according to the present invention, in which a is a plan view, b is a side sectional view,
FIG. 2 is a schematic diagram for explaining an embodiment of a short-circuit inspection method between electrodes connected to two busbars. 1: Substrate, 2-5, 21-25, 31-35: Electrode, 6
: Electrode short-circuit part, 7: Photoresist, 8: Capacitor, 9
: Switch, 10: Ammeter, 11: Detection terminal, 12,
13: electrode terminal, 20, 30: electrode busbar, i: current path.
Claims (1)
多数の電極相互の短絡を検査する方法であつて、前記基
板上に電極パターニング用のホトレジスト膜を残した状
態で、検査すべき基板上の隣接電極間に電圧を印加し、
短絡箇所を通じて流れる電流による前記ホトレジスト膜
の変色状態から短絡電極を識別するようにしたことを特
徴とする電極間短絡検査法。1 A method for inspecting short circuits between a large number of electrodes formed close to each other on a substrate constituting a display panel, in which a photoresist film for electrode patterning is left on the substrate, and the substrate to be inspected is inspected for short circuits. Apply a voltage between adjacent electrodes of
A method for inspecting short circuits between electrodes, characterized in that a short circuit electrode is identified from the state of discoloration of the photoresist film caused by a current flowing through the short circuit location.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP53065920A JPS6046664B2 (en) | 1978-05-31 | 1978-05-31 | Interelectrode short circuit inspection method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP53065920A JPS6046664B2 (en) | 1978-05-31 | 1978-05-31 | Interelectrode short circuit inspection method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS54156681A JPS54156681A (en) | 1979-12-10 |
| JPS6046664B2 true JPS6046664B2 (en) | 1985-10-17 |
Family
ID=13300880
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP53065920A Expired JPS6046664B2 (en) | 1978-05-31 | 1978-05-31 | Interelectrode short circuit inspection method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6046664B2 (en) |
-
1978
- 1978-05-31 JP JP53065920A patent/JPS6046664B2/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS54156681A (en) | 1979-12-10 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4630355A (en) | Electric circuits having repairable circuit lines and method of making the same | |
| KR880010472A (en) | Apparatus and method for spot defect detection in integrated circuits | |
| JPH02203380A (en) | Production of liquid crystal display element | |
| US4705329A (en) | Apparatus for electrical function checking of wiring matrices | |
| US4423356A (en) | Self-shift type gas discharge panel | |
| JPS6046664B2 (en) | Interelectrode short circuit inspection method | |
| JP4138205B2 (en) | Plasma display panel and manufacturing method thereof | |
| JP2505929B2 (en) | Apparatus and method for self-induction repair of short circuit and near short circuit | |
| JPH06317810A (en) | Matrix wiring board | |
| Jolly et al. | Surface electrical breakdown of tin oxide coated glass | |
| JPH1194918A (en) | Electrode inspection apparatus | |
| US4388554A (en) | Electroluminescent display component | |
| JPS61118786A (en) | Processing of electrode for display panel | |
| JP2001110315A (en) | Electrode inspection apparatus, electrode inspection method and substrate for plasma display panel | |
| JPH0259727A (en) | Active matrix substrate | |
| JP2001264788A (en) | Method for connecting wiring electrodes, manufacturing method and defect correcting method for liquid crystal display device substrate, and method for manufacturing liquid crystal display device, and processing device used therefor | |
| RU2253920C1 (en) | Gas panel | |
| JPS5488067A (en) | Production of gas discharge panel | |
| JPH0152690B2 (en) | ||
| JP2507085B2 (en) | Inspection method of active matrix substrate | |
| JPH03245125A (en) | Pretreatment for inspecting disconnection of liquid crystal display element | |
| JP2830304B2 (en) | Reed switch test method | |
| SU1405083A2 (en) | Device for registering equipment working time | |
| JPH10239654A (en) | Method for inspecting liquid crystal display element | |
| JPH03116012A (en) | Detecting method for adjacent short-circuit defective part |