JPS6045957A - Production of master for producing information storing medium - Google Patents
Production of master for producing information storing mediumInfo
- Publication number
- JPS6045957A JPS6045957A JP15430583A JP15430583A JPS6045957A JP S6045957 A JPS6045957 A JP S6045957A JP 15430583 A JP15430583 A JP 15430583A JP 15430583 A JP15430583 A JP 15430583A JP S6045957 A JPS6045957 A JP S6045957A
- Authority
- JP
- Japan
- Prior art keywords
- information signal
- layer
- photoresist
- laser beam
- master
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/2407—Tracks or pits; Shape, structure or physical properties thereof
- G11B7/24085—Pits
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Manufacturing Optical Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】
本発明はたとえば光ディスク等の情報記憶媒体の製造に
用いられる情報記憶媒体製造用原盤の製造方法に関する
。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for manufacturing a master disc for manufacturing information storage media, which is used for manufacturing information storage media such as optical discs.
たとえば光ディスク等の情報記憶媒体の製造に用いられ
る情報記憶媒体ツｌ造用原盤は、従来、第１図に示すよ
うに、基板１上にレーザ“一光に対する感度が具なる第
１と第２のフォトレジスト層２．３を積層して々る原盤
素月４に、強度が一定の第１のレーザービーム（レーザ
ー光）６と強度が情報信号にもとづいて変化する第２の
レーザービーム（レーザー光）６とを同時に照射したの
ち現像処理を施すことによシ、第２図に示すように、情
報信号用ビット７および情報信号再生用グループ８を形
成する方法で製造していた。For example, as shown in FIG. 1, an information storage medium manufacturing master disk used for manufacturing information storage media such as optical disks has conventionally had a substrate 1 with a first and a second laser beam sensitive to one beam. A first laser beam (laser beam) 6 whose intensity is constant and a second laser beam (laser beam) whose intensity varies based on an information signal are applied to a master disk 4 on which a photoresist layer 2.3 is laminated. The information signal bit 7 and the information signal reproducing group 8 are formed by simultaneously irradiating with light 6 and then developing the information signal bit 7 and the information signal reproduction group 8, as shown in FIG.
しかしながら、この方法でり、第１．！＝２６２のフォ
トレジストＮ２ ｅ ３の感度の違いを利用１〜ている
ため、第１と第２のレーザービーム５。However, with this method, the first. ! =262 photoresist N2 e 3 takes advantage of the difference in sensitivity of the first and second laser beams 5.
６０強度の選択が難く、１〜かも、第１と第２のフォト
レジスト層２，３を密着して使用」、でいるため、その
密着部分で第１と第２のフォトレジスト層２．３の混合
が起り、第３図に示す工うにだれが生じるので、情報信
号用ピット７お工び情報信号再生用グループ８を所定の
大きさおよび高さに正確に形成することができない。It is difficult to select the strength of 1 to 60, and since the first and second photoresist layers 2 and 3 are used in close contact with each other, the first and second photoresist layers 2 and 3 are As a result, the information signal pits 7 and the information signal reproducing groups 8 cannot be formed accurately to a predetermined size and height, as shown in FIG. 3.
本発明は上記事情にもとづいてなされたもので、その目
的とするところは、情報信号用ビットおよび情報信号用
グループを所定の大きさおよび高さに正確に形成するこ
とができるとともに第１と第２の１７−４Ｎ−光の強度
が制御し易い情報記憶媒体製造用原盤の製造方法を提供
することＫある。The present invention has been made based on the above circumstances, and an object thereof is to be able to accurately form information signal bits and information signal groups to predetermined sizes and heights, and to No. 2, it is an object of the present invention to provide a method for manufacturing a master disc for manufacturing an information storage medium, in which the intensity of 17-4N light can be easily controlled.
本発明は、上記目的を達成するために、基板上に１７−
ザー光に対する感度が異なる複数種のフォトレジスト層
を積層するとともにこれらフォトレジスト層のうち少な
くとも２種のフォトレジスト層間にフォトレジスト分離
層を介在してなる原盤素材に、強度が一定の第１のレー
ザー光と強ＬＷが情報信号にもとづいて変化する第２の
１７−ザー光とを照射することにより情報信号用ピット
および情報信号再生用グループを形成することを特徴と
するものである。In order to achieve the above object, the present invention provides 17-
A first layer having a constant strength is added to the master material, which is formed by stacking a plurality of types of photoresist layers having different sensitivities to laser light, and interposing a photoresist separation layer between at least two of these photoresist layers. This method is characterized in that information signal pits and information signal reproducing groups are formed by irradiating a laser beam and a second 17-laser beam whose intensity LW changes based on the information signal.
以下、本発明の一実施例を第４図〜ｆｉ”： ５ Ｍを
参照しながら説明する。第４トＩ中７７ ｉｔニガラス
等の基板であり、この基板ｌｌ上に、Ｉ／ −４１’
−光に対して低感度のｆＸ Ｊのフォト１ノダスト層１
２、たとえば８１０２等のフ、１−１−１．／ダスト公
印層１３１およびレーザー光に対しで高感ＩＪｆのｊｉ
’、 ２のフォトレジスト層１４をこのＩＩ！Ｉｔ ｌ
／７ニスビ゛ンコートにより積層して、原盤素材１５全
形成する。An embodiment of the present invention will be described below with reference to FIGS.
- Photo 1 dust layer 1 of fX J with low sensitivity to light
2, for example, 8102, 1-1-1. /Dust stamp layer 131 and IJf ji highly sensitive to laser light
', 2 photoresist layer 14 of this II! It l
All 15 master materials are formed by laminating them with a /7 varnish vinyl coat.
ついで、この原盤素１７ ｓ ｌ？−１１０径が１仁と
オーは０．８〜１．５ ｆｉｔｎで低強度の２’（’Ｉ
、’ １０１７−−リ“−ビーム（レーリ′−光）１６
と、直径が女と乏げ０３〜０．５１１ｍで高強度の第２
のレーザ・−ビート（レーザー光）１７を同光軸で同時
に照射する。このとき・第１のレーザービーム１６ ｋ
Ｊ： −”Ｍヴ１１度とし、第２の１７−ザービーム１
７は４ｔ’を石＋ ａｉ七にもとづいて強度を変化さゼ
／・、ｆ−とオーｔ：ｔ ４＋町ｆ＋４ （７１号に対
応してオン・メツさせる。Next, this master disc 17s l? -110 diameter is 1 piece and O is 0.8 to 1.5 fitn and has low strength 2'('I
,'1017--Rei'-beam(Lei'-light) 16
The second one, which has a diameter of 0.3 to 0.511 m and a high strength
Laser beats (laser light) 17 are simultaneously irradiated on the same optical axis. At this time, the first laser beam 16k
J: -” Mv 11 degrees, second 17-za beam 1
7 changes the intensity based on 4t' stone + ai 7 ze/・, f- and auto: t 4 + town f + 4 (corresponding to No. 71, make it on mettsu.
ついで、第２のフォトレジスト層１４に現像処理を施す
。これにより、第５図に示すように第２のフォトレジス
ト層１４の第１のレーザービーム１６が照射さり、た部
分が切欠されて情報信号内生用グループ１８が形成され
る。Next, the second photoresist layer 14 is subjected to a development process. As a result, as shown in FIG. 5, the portion of the second photoresist layer 14 irradiated with the first laser beam 16 is cut out to form a group 18 for generating an information signal.
ついで、この第２のフォトレジスト層１４をマスクして
フォトレジスト分離Ｒ４１３をＮＩ（４Ｆ（フッ化アン
モニウム）等でエツチングする。Next, the second photoresist layer 14 is masked and the photoresist separation R413 is etched using NI (4F (ammonium fluoride)) or the like.
ついで、第１のフォトレジスト層１２に現像処理を施す
。これにより、情報信号用ビット１９が形成される。す
なわち、フォトレジスト分離層Ｊ３で低強度の第１のレ
ーザービーム１６が吸収され、しかも第１のフォトレジ
スト層１２が低強度であるため％第６図に示すように、
第１のフォトレジスト層１２の第２のレーザービーム１
７が照射された部分のみが切欠されて情報信号用１ツト
１９が形成される・以上より、情報記憶媒体製造用原盤
２ｏが形成される。Next, the first photoresist layer 12 is subjected to a development process. As a result, information signal bits 19 are formed. That is, since the low-intensity first laser beam 16 is absorbed by the photoresist separation layer J3 and the first photoresist layer 12 has a low intensity, as shown in FIG.
Second laser beam 1 on first photoresist layer 12
Only the irradiated portion 7 is cut out to form the information signal dot 19.Thus, the master disk 2o for manufacturing the information storage medium is formed.
以上の製造方法によれば、第１と第２のフォトレジスト
層１２．１４間にフォトレジスト分離層１３を設てなる
原盤素材７．５１７． ｆｆｌ； Ｊと第２の１７−ザ
ービーム１６．１７を照射して情報信号用ビット１９と
情報信号再生用グループ１８を形成するため、第１とｊ
ｐ、 ２のフォトレジスト層１２．１４の混合がなく、
だ引、が牛ｊ〕ないので、情報信号用ピット１９および
１ｒ目Ｐ信ｌ再生用グループ１８を所定の大きさおよび
高さに正確に形成することができ、しかも、ｐｆｌ、’
１と第２のレーザービーム１６ ＋ １７の強度が制
御１１１１し易い。According to the above manufacturing method, the master material 7.517. ffl; In order to form information signal bits 19 and information signal reproduction groups 18 by irradiating the J and second 17 laser beams 16.17, the first and J
No intermixing of photoresist layer 12.14 of p, 2;
Since there are no gaps, the information signal pit 19 and the 1st P signal reproduction group 18 can be formed accurately to a predetermined size and height.
The intensities of the first and second laser beams 16+17 are easy to control 1111.
以上説明したように本発明ＶＣＸれｔｔ−Ｘ、基析土に
レーザー光に対する感度がＥ々る複Ｅｔ Ｊｉｌｉのフ
ォトレジスト層を積層するとともにこれらフ（トレジス
ト層のうち少なくとも２種のフォトレジスト層間にフォ
ト１／ダスト分離層を介在１〜１なる原盤素材に、強度
が一定の第１の１／−リ’−光と強度が情報信号にもと
づいて変化する第２のレーザー光を照射することｌによ
り情報情号用ビットおよび情報信号再生用グループを形
成するようにしたかＣつ、情報信号用ビットおよび情報
１４且再生用グループを所定の大きさおよび高さにＩＦ
、確に形成することができるとともに第１と［＋２のレ
ーザー光の強度が制御し易い＃優れた効果を奏する。As explained above, in the VCX-X of the present invention, photoresist layers of multiple types having high sensitivity to laser light are laminated on the matrix soil, and at least two types of photoresist layers among these layers are laminated. irradiating the master material 1 to 1 with a photo 1/dust separation layer interposed therebetween with a first 1/-re'-light whose intensity is constant and a second laser beam whose intensity changes based on an information signal; The bits for information signals and the groups for reproducing information signals are formed by IF to a predetermined size and height.
, it can be formed reliably and the intensity of the first and +2 laser beams can be easily controlled, resulting in an excellent effect.
第１図〜第３図は従来例を示すもので％第１図は原盤素
材に第１と第２のレーザービームを照射している状態を
示す断面図、第２図は原盤の斜視図、第３図は原盤の断
面図、第４図〜第６図は本発明の一実施例を示すもので
、第４図は原盤累月に第１と第２のレーザービームを照
射している状態を示す断面図、ｒ毛５図は第２のフォト
レノスト層の現像状態を示す断面図、第６図は第１のフ
ォトレジスト層の現像状態を示す断面Ｍである。
１）・・・基板、１２・・・第１のフォトレジスト層、
１．７・・・フォトレジスト分離層、１４・・・第２の
フォトレノスト層、１５・・・原盤素材、１６・・・第
１のレーザービーム（レーザーうＣ）、１７・・・１１
λ２の１／−ザービーム（レーい一光）、１８・・・１
青肩（信号再生用グループ、１９・・・４］１・や１３
信号ＩＲビ、７１゜２０・・・情報記憶媒体！ＩＩ！！
造用ｌｉｄ盤、出願人代理人 弁理士 鈴 江 武 汁
第１図
第３図Figures 1 to 3 show conventional examples; Figure 1 is a cross-sectional view showing the master disc material being irradiated with the first and second laser beams; Figure 2 is a perspective view of the master disc; Fig. 3 is a cross-sectional view of the master disc, and Figs. 4 to 6 show an embodiment of the present invention, and Fig. 4 shows a state in which the master disc is irradiated with the first and second laser beams. FIG. 5 is a cross-sectional view showing the developed state of the second photoresist layer, and FIG. 6 is a cross-sectional view M showing the developed state of the first photoresist layer. 1)...Substrate, 12...First photoresist layer,
1.7... Photoresist separation layer, 14... Second photorenost layer, 15... Master material, 16... First laser beam (laser uC), 17... 11
1/- laser beam of λ2, 18...1
Blue shoulder (signal reproduction group, 19...4) 1, 13
Signal IR Bi, 71°20... Information storage medium! II! !
Lid board for production, Applicant's representative Patent attorney Takeshi Suzue Figure 1 Figure 3
Claims (1)
トレジスト層を積層するとともにこれらフォトレジスト
層のうち少なくとも２種のフォトレジスト層間にフォト
レジスト分離層を介在してなる原盤素材に、強度が一定
の第１のレーザー光と強度が情報信号にもとづいて変化
する第２のレーザー光を照射することによシ情報信号用
ビ、トおよび情報信号再生用グループを形成することを
特徴とする情報記憶媒体製造用原盤の製造方法。Multiple types of photoresist layers with different sensitivities to laser light are laminated on a substrate, and a photoresist separation layer is interposed between at least two of these photoresist layers to create a master material with a constant strength. An information storage medium characterized in that an information signal bit and an information signal reproduction group are formed by irradiating a first laser beam and a second laser beam whose intensity changes based on the information signal. A method of manufacturing master discs for production.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15430583A JPS6045957A (en) | 1983-08-24 | 1983-08-24 | Production of master for producing information storing medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15430583A JPS6045957A (en) | 1983-08-24 | 1983-08-24 | Production of master for producing information storing medium |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6045957A true JPS6045957A (en) | 1985-03-12 |
Family
ID=15581212
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15430583A Pending JPS6045957A (en) | 1983-08-24 | 1983-08-24 | Production of master for producing information storing medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6045957A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60170045A (en) * | 1984-02-13 | 1985-09-03 | Pioneer Electronic Corp | Production of optical disk with address and guide groove |
| JPS6328491A (en) * | 1986-07-22 | 1988-02-06 | Takuma Co Ltd | Treatment of waste liquid of stack gas scrubbing |
| JPS6356830A (en) * | 1986-08-27 | 1988-03-11 | Pioneer Electronic Corp | Production of optical disk with guide groove |
| EP0905684A2 (en) * | 1997-09-30 | 1999-03-31 | Samsung Electronics Co., Ltd. | Master disk for optical disk and method for manufacturing the same |
-
1983
- 1983-08-24 JP JP15430583A patent/JPS6045957A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60170045A (en) * | 1984-02-13 | 1985-09-03 | Pioneer Electronic Corp | Production of optical disk with address and guide groove |
| JPS6328491A (en) * | 1986-07-22 | 1988-02-06 | Takuma Co Ltd | Treatment of waste liquid of stack gas scrubbing |
| JPS6356830A (en) * | 1986-08-27 | 1988-03-11 | Pioneer Electronic Corp | Production of optical disk with guide groove |
| EP0905684A2 (en) * | 1997-09-30 | 1999-03-31 | Samsung Electronics Co., Ltd. | Master disk for optical disk and method for manufacturing the same |
| EP0905684A3 (en) * | 1997-09-30 | 2000-08-16 | Samsung Electronics Co., Ltd. | Master disk for optical disk and method for manufacturing the same |
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