JPS6045957A - Production of master for producing information storing medium - Google Patents
Production of master for producing information storing mediumInfo
- Publication number
- JPS6045957A JPS6045957A JP15430583A JP15430583A JPS6045957A JP S6045957 A JPS6045957 A JP S6045957A JP 15430583 A JP15430583 A JP 15430583A JP 15430583 A JP15430583 A JP 15430583A JP S6045957 A JPS6045957 A JP S6045957A
- Authority
- JP
- Japan
- Prior art keywords
- information signal
- layer
- photoresist
- laser beam
- master
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/2407—Tracks or pits; Shape, structure or physical properties thereof
- G11B7/24085—Pits
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Manufacturing Optical Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】
本発明はたとえば光ディスク等の情報記憶媒体の製造に
用いられる情報記憶媒体製造用原盤の製造方法に関する
。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for manufacturing a master disc for manufacturing information storage media, which is used for manufacturing information storage media such as optical discs.
たとえば光ディスク等の情報記憶媒体の製造に用いられ
る情報記憶媒体ツl造用原盤は、従来、第1図に示すよ
うに、基板1上にレーザ“一光に対する感度が具なる第
1と第2のフォトレジスト層2.3を積層して々る原盤
素月4に、強度が一定の第1のレーザービーム(レーザ
ー光)6と強度が情報信号にもとづいて変化する第2の
レーザービーム(レーザー光)6とを同時に照射したの
ち現像処理を施すことによシ、第2図に示すように、情
報信号用ビット7および情報信号再生用グループ8を形
成する方法で製造していた。For example, as shown in FIG. 1, an information storage medium manufacturing master disk used for manufacturing information storage media such as optical disks has conventionally had a substrate 1 with a first and a second laser beam sensitive to one beam. A first laser beam (laser beam) 6 whose intensity is constant and a second laser beam (laser beam) whose intensity varies based on an information signal are applied to a master disk 4 on which a photoresist layer 2.3 is laminated. The information signal bit 7 and the information signal reproducing group 8 are formed by simultaneously irradiating with light 6 and then developing the information signal bit 7 and the information signal reproduction group 8, as shown in FIG.
しかしながら、この方法でり、第1.!=262のフォ
トレジストN2 e 3の感度の違いを利用1〜ている
ため、第1と第2のレーザービーム5。However, with this method, the first. ! =262 photoresist N2 e 3 takes advantage of the difference in sensitivity of the first and second laser beams 5.
60強度の選択が難く、1〜かも、第1と第2のフォト
レジスト層2,3を密着して使用」、でいるため、その
密着部分で第1と第2のフォトレジスト層2.3の混合
が起り、第3図に示す工うにだれが生じるので、情報信
号用ピット7お工び情報信号再生用グループ8を所定の
大きさおよび高さに正確に形成することができない。It is difficult to select the strength of 1 to 60, and since the first and second photoresist layers 2 and 3 are used in close contact with each other, the first and second photoresist layers 2 and 3 are As a result, the information signal pits 7 and the information signal reproducing groups 8 cannot be formed accurately to a predetermined size and height, as shown in FIG. 3.
本発明は上記事情にもとづいてなされたもので、その目
的とするところは、情報信号用ビットおよび情報信号用
グループを所定の大きさおよび高さに正確に形成するこ
とができるとともに第1と第2の17−4N−光の強度
が制御し易い情報記憶媒体製造用原盤の製造方法を提供
することKある。The present invention has been made based on the above circumstances, and an object thereof is to be able to accurately form information signal bits and information signal groups to predetermined sizes and heights, and to No. 2, it is an object of the present invention to provide a method for manufacturing a master disc for manufacturing an information storage medium, in which the intensity of 17-4N light can be easily controlled.
本発明は、上記目的を達成するために、基板上に17−
ザー光に対する感度が異なる複数種のフォトレジスト層
を積層するとともにこれらフォトレジスト層のうち少な
くとも2種のフォトレジスト層間にフォトレジスト分離
層を介在してなる原盤素材に、強度が一定の第1のレー
ザー光と強LWが情報信号にもとづいて変化する第2の
17−ザー光とを照射することにより情報信号用ピット
および情報信号再生用グループを形成することを特徴と
するものである。In order to achieve the above object, the present invention provides 17-
A first layer having a constant strength is added to the master material, which is formed by stacking a plurality of types of photoresist layers having different sensitivities to laser light, and interposing a photoresist separation layer between at least two of these photoresist layers. This method is characterized in that information signal pits and information signal reproducing groups are formed by irradiating a laser beam and a second 17-laser beam whose intensity LW changes based on the information signal.
以下、本発明の一実施例を第4図〜fi”: 5 Mを
参照しながら説明する。第4トI中77 itニガラス
等の基板であり、この基板ll上に、I/ −41’
−光に対して低感度のfX Jのフォト1ノダスト層1
2、たとえば8102等のフ、1−1−1./ダスト公
印層131およびレーザー光に対しで高感IJfのji
’、 2のフォトレジスト層14をこのII!It l
/7ニスビ゛ンコートにより積層して、原盤素材15全
形成する。An embodiment of the present invention will be described below with reference to FIGS.
- Photo 1 dust layer 1 of fX J with low sensitivity to light
2, for example, 8102, 1-1-1. /Dust stamp layer 131 and IJf ji highly sensitive to laser light
', 2 photoresist layer 14 of this II! It l
All 15 master materials are formed by laminating them with a /7 varnish vinyl coat.
ついで、この原盤素17 s l?−110径が1仁と
オーは0.8〜1.5 fitnで低強度の2’(’I
、’ 1017−−リ“−ビーム(レーリ′−光)16
と、直径が女と乏げ03〜0.511mで高強度の第2
のレーザ・−ビート(レーザー光)17を同光軸で同時
に照射する。このとき・第1のレーザービーム16 k
J: −”Mヴ11度とし、第2の17−ザービーム1
7は4t’を石+ ai七にもとづいて強度を変化さゼ
/・、f−とオーt:t 4+町f+4 (71号に対
応してオン・メツさせる。Next, this master disc 17s l? -110 diameter is 1 piece and O is 0.8 to 1.5 fitn and has low strength 2'('I
,'1017--Rei'-beam(Lei'-light) 16
The second one, which has a diameter of 0.3 to 0.511 m and a high strength
Laser beats (laser light) 17 are simultaneously irradiated on the same optical axis. At this time, the first laser beam 16k
J: -” Mv 11 degrees, second 17-za beam 1
7 changes the intensity based on 4t' stone + ai 7 ze/・, f- and auto: t 4 + town f + 4 (corresponding to No. 71, make it on mettsu.
ついで、第2のフォトレジスト層14に現像処理を施す
。これにより、第5図に示すように第2のフォトレジス
ト層14の第1のレーザービーム16が照射さり、た部
分が切欠されて情報信号内生用グループ18が形成され
る。Next, the second photoresist layer 14 is subjected to a development process. As a result, as shown in FIG. 5, the portion of the second photoresist layer 14 irradiated with the first laser beam 16 is cut out to form a group 18 for generating an information signal.
ついで、この第2のフォトレジスト層14をマスクして
フォトレジスト分離R413をNI(4F(フッ化アン
モニウム)等でエツチングする。Next, the second photoresist layer 14 is masked and the photoresist separation R413 is etched using NI (4F (ammonium fluoride)) or the like.
ついで、第1のフォトレジスト層12に現像処理を施す
。これにより、情報信号用ビット19が形成される。す
なわち、フォトレジスト分離層J3で低強度の第1のレ
ーザービーム16が吸収され、しかも第1のフォトレジ
スト層12が低強度であるため%第6図に示すように、
第1のフォトレジスト層12の第2のレーザービーム1
7が照射された部分のみが切欠されて情報信号用1ツト
19が形成される・以上より、情報記憶媒体製造用原盤
2oが形成される。Next, the first photoresist layer 12 is subjected to a development process. As a result, information signal bits 19 are formed. That is, since the low-intensity first laser beam 16 is absorbed by the photoresist separation layer J3 and the first photoresist layer 12 has a low intensity, as shown in FIG.
Second laser beam 1 on first photoresist layer 12
Only the irradiated portion 7 is cut out to form the information signal dot 19.Thus, the master disk 2o for manufacturing the information storage medium is formed.
以上の製造方法によれば、第1と第2のフォトレジスト
層12.14間にフォトレジスト分離層13を設てなる
原盤素材7.517. ffl; Jと第2の17−ザ
ービーム16.17を照射して情報信号用ビット19と
情報信号再生用グループ18を形成するため、第1とj
p、 2のフォトレジスト層12.14の混合がなく、
だ引、が牛j〕ないので、情報信号用ピット19および
1r目P信l再生用グループ18を所定の大きさおよび
高さに正確に形成することができ、しかも、pfl、’
1と第2のレーザービーム16 + 17の強度が制
御1111し易い。According to the above manufacturing method, the master material 7.517. ffl; In order to form information signal bits 19 and information signal reproduction groups 18 by irradiating the J and second 17 laser beams 16.17, the first and J
No intermixing of photoresist layer 12.14 of p, 2;
Since there are no gaps, the information signal pit 19 and the 1st P signal reproduction group 18 can be formed accurately to a predetermined size and height.
The intensities of the first and second laser beams 16+17 are easy to control 1111.
以上説明したように本発明VCXれtt−X、基析土に
レーザー光に対する感度がE々る複Et Jiliのフ
ォトレジスト層を積層するとともにこれらフ(トレジス
ト層のうち少なくとも2種のフォトレジスト層間にフォ
ト1/ダスト分離層を介在1〜1なる原盤素材に、強度
が一定の第1の1/−リ’−光と強度が情報信号にもと
づいて変化する第2のレーザー光を照射することlによ
り情報情号用ビットおよび情報信号再生用グループを形
成するようにしたかCつ、情報信号用ビットおよび情報
14且再生用グループを所定の大きさおよび高さにIF
、確に形成することができるとともに第1と[+2のレ
ーザー光の強度が制御し易い#優れた効果を奏する。As explained above, in the VCX-X of the present invention, photoresist layers of multiple types having high sensitivity to laser light are laminated on the matrix soil, and at least two types of photoresist layers among these layers are laminated. irradiating the master material 1 to 1 with a photo 1/dust separation layer interposed therebetween with a first 1/-re'-light whose intensity is constant and a second laser beam whose intensity changes based on an information signal; The bits for information signals and the groups for reproducing information signals are formed by IF to a predetermined size and height.
, it can be formed reliably and the intensity of the first and +2 laser beams can be easily controlled, resulting in an excellent effect.
第1図〜第3図は従来例を示すもので%第1図は原盤素
材に第1と第2のレーザービームを照射している状態を
示す断面図、第2図は原盤の斜視図、第3図は原盤の断
面図、第4図〜第6図は本発明の一実施例を示すもので
、第4図は原盤累月に第1と第2のレーザービームを照
射している状態を示す断面図、r毛5図は第2のフォト
レノスト層の現像状態を示す断面図、第6図は第1のフ
ォトレジスト層の現像状態を示す断面Mである。
1)・・・基板、12・・・第1のフォトレジスト層、
1.7・・・フォトレジスト分離層、14・・・第2の
フォトレノスト層、15・・・原盤素材、16・・・第
1のレーザービーム(レーザーうC)、17・・・11
λ2の1/−ザービーム(レーい一光)、18・・・1
青肩(信号再生用グループ、19・・・4]1・や13
信号IRビ、71゜20・・・情報記憶媒体!II!!
造用lid盤、出願人代理人 弁理士 鈴 江 武 汁
第1図
第3図Figures 1 to 3 show conventional examples; Figure 1 is a cross-sectional view showing the master disc material being irradiated with the first and second laser beams; Figure 2 is a perspective view of the master disc; Fig. 3 is a cross-sectional view of the master disc, and Figs. 4 to 6 show an embodiment of the present invention, and Fig. 4 shows a state in which the master disc is irradiated with the first and second laser beams. FIG. 5 is a cross-sectional view showing the developed state of the second photoresist layer, and FIG. 6 is a cross-sectional view M showing the developed state of the first photoresist layer. 1)...Substrate, 12...First photoresist layer,
1.7... Photoresist separation layer, 14... Second photorenost layer, 15... Master material, 16... First laser beam (laser uC), 17... 11
1/- laser beam of λ2, 18...1
Blue shoulder (signal reproduction group, 19...4) 1, 13
Signal IR Bi, 71°20... Information storage medium! II! !
Lid board for production, Applicant's representative Patent attorney Takeshi Suzue Figure 1 Figure 3
Claims (1)
トレジスト層を積層するとともにこれらフォトレジスト
層のうち少なくとも2種のフォトレジスト層間にフォト
レジスト分離層を介在してなる原盤素材に、強度が一定
の第1のレーザー光と強度が情報信号にもとづいて変化
する第2のレーザー光を照射することによシ情報信号用
ビ、トおよび情報信号再生用グループを形成することを
特徴とする情報記憶媒体製造用原盤の製造方法。Multiple types of photoresist layers with different sensitivities to laser light are laminated on a substrate, and a photoresist separation layer is interposed between at least two of these photoresist layers to create a master material with a constant strength. An information storage medium characterized in that an information signal bit and an information signal reproduction group are formed by irradiating a first laser beam and a second laser beam whose intensity changes based on the information signal. A method of manufacturing master discs for production.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15430583A JPS6045957A (en) | 1983-08-24 | 1983-08-24 | Production of master for producing information storing medium |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15430583A JPS6045957A (en) | 1983-08-24 | 1983-08-24 | Production of master for producing information storing medium |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6045957A true JPS6045957A (en) | 1985-03-12 |
Family
ID=15581212
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15430583A Pending JPS6045957A (en) | 1983-08-24 | 1983-08-24 | Production of master for producing information storing medium |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6045957A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60170045A (en) * | 1984-02-13 | 1985-09-03 | Pioneer Electronic Corp | Production of optical disk with address and guide groove |
JPS6328491A (en) * | 1986-07-22 | 1988-02-06 | Takuma Co Ltd | Treatment of waste liquid of stack gas scrubbing |
JPS6356830A (en) * | 1986-08-27 | 1988-03-11 | Pioneer Electronic Corp | Production of optical disk with guide groove |
EP0905684A2 (en) * | 1997-09-30 | 1999-03-31 | Samsung Electronics Co., Ltd. | Master disk for optical disk and method for manufacturing the same |
-
1983
- 1983-08-24 JP JP15430583A patent/JPS6045957A/en active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60170045A (en) * | 1984-02-13 | 1985-09-03 | Pioneer Electronic Corp | Production of optical disk with address and guide groove |
JPS6328491A (en) * | 1986-07-22 | 1988-02-06 | Takuma Co Ltd | Treatment of waste liquid of stack gas scrubbing |
JPS6356830A (en) * | 1986-08-27 | 1988-03-11 | Pioneer Electronic Corp | Production of optical disk with guide groove |
EP0905684A2 (en) * | 1997-09-30 | 1999-03-31 | Samsung Electronics Co., Ltd. | Master disk for optical disk and method for manufacturing the same |
EP0905684A3 (en) * | 1997-09-30 | 2000-08-16 | Samsung Electronics Co., Ltd. | Master disk for optical disk and method for manufacturing the same |
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