JPS6040210B2 - Manufacturing method of laminated vibrator - Google Patents
Manufacturing method of laminated vibratorInfo
- Publication number
- JPS6040210B2 JPS6040210B2 JP13457979A JP13457979A JPS6040210B2 JP S6040210 B2 JPS6040210 B2 JP S6040210B2 JP 13457979 A JP13457979 A JP 13457979A JP 13457979 A JP13457979 A JP 13457979A JP S6040210 B2 JPS6040210 B2 JP S6040210B2
- Authority
- JP
- Japan
- Prior art keywords
- manufacturing
- ceramic
- powder
- bonded
- fine
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 5
- 239000000919 ceramic Substances 0.000 claims description 12
- 239000000843 powder Substances 0.000 claims description 9
- 238000000034 method Methods 0.000 claims description 8
- 229910000510 noble metal Inorganic materials 0.000 claims description 8
- 230000010287 polarization Effects 0.000 claims description 8
- 239000007772 electrode material Substances 0.000 claims description 7
- 238000010304 firing Methods 0.000 claims description 3
- 238000007639 printing Methods 0.000 claims description 3
- 239000002904 solvent Substances 0.000 claims description 3
- 239000011230 binding agent Substances 0.000 claims description 2
- 229910001111 Fine metal Inorganic materials 0.000 claims 1
- 238000010030 laminating Methods 0.000 claims 1
- 238000003825 pressing Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 239000000853 adhesive Substances 0.000 description 5
- 230000001070 adhesive effect Effects 0.000 description 5
- 239000000463 material Substances 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 230000032798 delamination Effects 0.000 description 2
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 2
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 229920002037 poly(vinyl butyral) polymer Polymers 0.000 description 2
- 229910052573 porcelain Inorganic materials 0.000 description 2
- DKPFZGUDAPQIHT-UHFFFAOYSA-N Butyl acetate Natural products CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000001351 cycling effect Effects 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- FUZZWVXGSFPDMH-UHFFFAOYSA-N hexanoic acid Chemical compound CCCCCC(O)=O FUZZWVXGSFPDMH-UHFFFAOYSA-N 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000011812 mixed powder Substances 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Description
【発明の詳細な説明】
本発明は高温まで使用可能な貼りあわせ型振動子（以下
／ベィモルフという）を安価にかつ高信頼度に製造する
方法に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for manufacturing a bonded type vibrator (hereinafter referred to as Beymorph) that can be used up to high temperatures at low cost and with high reliability.
従釆バィモルフは第１図に示す如く、図中１，１′とし
て示す圧電磁器の両面に導電性電極２，２ａ，２′，２
をを印刷・暁付け後導電性接着剤３にて接着し、電極２
，２′を短絡し、この電極２，２′と該電極２ａ′の延
長にある分極用の取出し電極２ａ″の間にシリコンオイ
ル中で電圧を印加し、分極していた。As shown in FIG. 1, the subordinate bimorph has conductive electrodes 2, 2a, 2', 2 on both sides of the piezoelectric ceramic shown as 1 and 1' in the figure.
After printing and pasting, glue with conductive adhesive 3 and attach electrode 2.
.
しかる後、必要ならばＡの位置にて切断し製品とする。
しかしながら、高温使用（たとえば１５０ｏ○）の場合
、有機系の樹脂を含む導電性接着剤を使用したとき‘こ
は長時間の動作では接着剤が劣化し、信頼性が低下した
。After that, if necessary, cut at position A to obtain a product.
However, in the case of high temperature use (for example, 150°C), when a conductive adhesive containing an organic resin is used, the adhesive deteriorates during long-term operation, resulting in a decrease in reliability.
そのため通常このような用途には、第１図の導電性接着
剤３のかわりに貴金属系のペーストを焼成前のセラミッ
ク成形体に印刷したものを積層加圧し焼成した後、第１
図の外部電極２，２′を印刷焼付けしていた。すなわち
、この時は第１図の内部電極２ａ，２ａ′，３の役割を
貴金属系のペーストが果す。しかしながら、貴金属電極
は高価であり、またグリーンシート法等でつくられたセ
ラミック成形体の表面に印刷され、焼成と同時に燐付け
された電極は、セラミックグリーンシートの材質、組成
によっては焼成後、セラミックと貴金属電極間の界面で
接着不良（通常デラミネーションという）をおこし、歩
留りが低下し、また信頼性も十分ではなかった。本発明
は以上のような欠点を除去するもので、第１図中の接着
剤３として使用する内部電極材として、貴金属系微粉末
とこの時に使用されるセラミックと同材質のセラミック
微粉末にバィンダ、溶剤を加えペースト状にしたものを
グリーンシート法等でつくられたセラミックシート上に
印刷・乾燥後、セラミックと同時焼成する。Therefore, usually for such applications, instead of the conductive adhesive 3 shown in Fig. 1, a noble metal paste is printed on the ceramic molded body before firing, laminated and pressed, fired, and then the first
The external electrodes 2 and 2' shown in the figure were printed and baked. That is, at this time, the noble metal paste plays the role of the internal electrodes 2a, 2a', and 3 shown in FIG. However, noble metal electrodes are expensive, and electrodes printed on the surface of ceramic molded bodies made by the green sheet method etc. and phosphorized at the same time as fired may be Poor adhesion (usually called delamination) occurs at the interface between the metal electrode and the noble metal electrode, resulting in lower yields and insufficient reliability. The present invention is intended to eliminate the above-mentioned drawbacks, and as an internal electrode material used as the adhesive 3 in FIG. The paste is made into a paste by adding a solvent, then printed on a ceramic sheet made by the green sheet method, dried, and fired simultaneously with the ceramic.
これによると内部電極としてセラミックと同材質の微粉
末を含むため、接着性が良く、デラミネーション等の接
着不良はおこらないし、温度サイクル等の試験にても剥
離不良はおこらなかった。また、貴金属系微粉末の含有
率も低くできるため価格的にも安価になる。According to this, since the internal electrode contains fine powder of the same material as the ceramic, it has good adhesion and does not cause adhesion defects such as delamination, and no peeling defects occurred even in tests such as temperature cycling. Furthermore, since the content of noble metal fine powder can be lowered, the price can also be lowered.
ここで、貴金属系微粉末の含有量が低くなると内部電極
材部の比抵抗が上昇するが、この部分は分極時のみに使
用され、使用時には関係がなくなる。また、分極時には
電流がほとんど流れないため、セラミック部分の比抵抗
に比較して１／１０戊室度以下の比抵抗であれば問題が
ないことを確認した。貴金属系微粉末の含有量は上記理
由より最小２０ｗｔ％程度以上で、また上限は接着性の
点から９０のｔ％程度以下が適当である。Here, as the content of the noble metal-based fine powder decreases, the specific resistance of the internal electrode material portion increases, but this portion is used only during polarization and is irrelevant during use. Furthermore, since almost no current flows during polarization, it was confirmed that there would be no problem if the resistivity was less than 1/10 of the resistivity of the ceramic portion. For the above reasons, the content of the noble metal fine powder is preferably at least about 20 wt % or more, and the upper limit is preferably about 90 t % or less from the viewpoint of adhesion.
以下に実施例を示す。Examples are shown below.
セラミックグリーンシートとしてはバインダとしてポリ
ビニルブチラール樹脂を５のｔ％含有するチタン酸ジル
コン酸鉛系磁器の３００仏のものを用い、内部電極材と
しては白金微粉末（粒経１仏以下）５０のｔ％と上記チ
タン酸ジルコン酸鉛系磁器粉砕物（平均粒径１．８仏）
５０のｔ％及びポリビニルブチラール樹脂を前記混合粉
末に対し５のｔ％加え溶剤の酢酸ブチルにて粘度２００
比ｐｓに調整したものを上記セラミックグリーンシート
上に２００メッシュスクリーンにて印刷乾燥後、同じ３
００仏のグリーンシートを６００ｋ９／地にて加圧圧着
後、アルミナサャ中で１２５０℃で１時間焼成した。The ceramic green sheet used was 300 tons of lead zirconate titanate porcelain containing 5 tons of polyvinyl butyral resin as a binder, and the internal electrode material was 50 tons of platinum fine powder (particle size of 1 French or less). % and the above lead zirconate titanate-based porcelain pulverized product (average particle size 1.8 French)
50 t% and polyvinyl butyral resin were added to the above mixed powder at a viscosity of 200% using butyl acetate as a solvent.
The material adjusted to specific ps was printed on the above ceramic green sheet with a 200 mesh screen, dried, and then the same 3
A green sheet of No. 00 was bonded under pressure at 600 k9/ground, and then fired at 1250° C. for 1 hour in an alumina sac.
焼成後の総厚みは４６０仏となった。そして銀ペースト
にて外部電極を印刷嬢付け後、これを所定の形状に切断
後、鎌Ｖ／側の電圧を印加して分極処理した。このよう
にして作製されたバィモルフは−３０００〜十１５００
０の温度サイクルにも十分耐え、電極の剥離等はみられ
なかった。第２図にこのようにして作製されたバィモル
フを示しており、１，１′及び２，２′は第１図と同様
で、４は分極用の内部電極材、４′は分極時に使用する
内部電極材４の延長部分である。The total thickness after firing was 460 Buddhas. After printing and attaching external electrodes using silver paste, this was cut into a predetermined shape, and a voltage on the sickle V/ side was applied to perform polarization treatment. The bimorph produced in this way has an average temperature of -3000 to 11500
It was able to withstand temperature cycles of 0.0 and no peeling of the electrodes was observed. Figure 2 shows the bimorph produced in this way, where 1, 1' and 2, 2' are the same as in Figure 1, 4 is the internal electrode material for polarization, and 4' is the material used for polarization. This is an extension of the internal electrode material 4.
第３図は第２図の応用例を示し、４層のマルチモルフを
示し、１，２及び４は第２図と同様で、５及び６は分極
時に一度に電圧がかかるように電圧の共通となる部分を
短絡させた分極用の電極部分である。Figure 3 shows an application example of Figure 2, showing a four-layer multimorph, where 1, 2 and 4 are the same as in Figure 2, and 5 and 6 are common voltages so that the voltage is applied at once during polarization. This is an electrode part for polarization with the parts short-circuited.
また、Ａは切断位置である。以上のように本発明方法に
よると、高信頼度のバィモルフが容易に作製し得るもの
である。Further, A is the cutting position. As described above, according to the method of the present invention, a highly reliable bimorph can be easily produced.
第１図は従来のバィモルフの断面図、第２図は本発明方
法により作製されたバィモルフの断面図、第３図は第２
図の応用例を示すマルチモルフの断面図である。
４・・・・・・内部電極材。
第１図
第２図
第３図Figure 1 is a cross-sectional view of a conventional bimorph, Figure 2 is a cross-sectional view of a bimorph produced by the method of the present invention, and Figure 3 is a cross-sectional view of a bimorph produced by the method of the present invention.
FIG. 3 is a cross-sectional view of a multimorph showing an example of the application of the figure. 4...Internal electrode material. Figure 1 Figure 2 Figure 3
Claims (1)
時に使用する内部電極材として、貴金属微粉末、基板と
同質のセラミツク微粉末、バインダ及び溶剤よりなるペ
ーストをセラミツクグリーンシートに印刷し、積層加圧
した後焼成することを特徴とする貼り合わせ型振動子の
製造方法。 ２ セラミツク微粉末を貴金属微粉末の重量比が０．８
：０．２〜０．１：０．９となるように構成されたペー
ストを使用することを特徴とする特許請求の範囲第１項
に記載の貼り合わせ型振動子の製造方法。[Claims] 1. In a method for manufacturing a bonded piezoelectric vibrator, a paste consisting of noble metal fine powder, ceramic fine powder of the same quality as the substrate, a binder, and a solvent is applied to a ceramic green sheet as an internal electrode material used during polarization. A method for manufacturing a bonded vibrator, which is characterized by printing, laminating and pressing, and then firing. 2 The weight ratio of fine ceramic powder to fine metal powder is 0.8.
2. The method of manufacturing a bonded vibrator according to claim 1, wherein a paste having a ratio of 0.2 to 0.1:0.9 is used.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13457979A JPS6040210B2 (en) | 1979-10-17 | 1979-10-17 | Manufacturing method of laminated vibrator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13457979A JPS6040210B2 (en) | 1979-10-17 | 1979-10-17 | Manufacturing method of laminated vibrator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5658308A JPS5658308A (en) | 1981-05-21 |
| JPS6040210B2 true JPS6040210B2 (en) | 1985-09-10 |
Family
ID=15131648
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13457979A Expired JPS6040210B2 (en) | 1979-10-17 | 1979-10-17 | Manufacturing method of laminated vibrator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6040210B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60140510U (en) * | 1984-02-27 | 1985-09-18 | オクス工業株式会社 | Two-stage lipstick case |
| JPS60140511U (en) * | 1984-02-27 | 1985-09-18 | オクス工業株式会社 | Two-stage lipstick case |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0427901B1 (en) * | 1989-11-14 | 1996-04-03 | Battelle Memorial Institute | Method of manufacturing a multilayer piezoelectric actuator stack |
| JP3733860B2 (en) | 2000-02-01 | 2006-01-11 | 株式会社村田製作所 | Piezoelectric element and manufacturing method thereof |
| KR100584733B1 (en) * | 2001-05-07 | 2006-05-30 | 주식회사 포스코 | Apparatus for detecting the state of charging and Method thereof |
-
1979
- 1979-10-17 JP JP13457979A patent/JPS6040210B2/en not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60140510U (en) * | 1984-02-27 | 1985-09-18 | オクス工業株式会社 | Two-stage lipstick case |
| JPS60140511U (en) * | 1984-02-27 | 1985-09-18 | オクス工業株式会社 | Two-stage lipstick case |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5658308A (en) | 1981-05-21 |
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