JPS6039248U - Suction chuck for plate-shaped objects - Google Patents

Suction chuck for plate-shaped objects

Info

Publication number
JPS6039248U
JPS6039248U JP13105283U JP13105283U JPS6039248U JP S6039248 U JPS6039248 U JP S6039248U JP 13105283 U JP13105283 U JP 13105283U JP 13105283 U JP13105283 U JP 13105283U JP S6039248 U JPS6039248 U JP S6039248U
Authority
JP
Japan
Prior art keywords
plate
suction chuck
shaped objects
chuck
suction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13105283U
Other languages
Japanese (ja)
Inventor
稔 田中
仁志 窪田
進 相内
Original Assignee
株式会社日立製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社日立製作所 filed Critical 株式会社日立製作所
Priority to JP13105283U priority Critical patent/JPS6039248U/en
Publication of JPS6039248U publication Critical patent/JPS6039248U/en
Pending legal-status Critical Current

Links

Landscapes

  • Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は従来の例を説明するための断面図、第２図は本
考案の一実施例を説明するための主要部分の断面図であ
る。 １・・・板状物、２・・・圧力源、３・・・バルブ、４
・・・孝ヤツク本体、５・・・真空吸着用孔、６・・・
チャック面、７・・・ごみ、８・・・真空ポンプ、９・
・・配管、１０・・・鋼球、１１・・・弾性体、１２・
・・ねじ、１３・・・ホルダ。FIG. 1 is a sectional view for explaining a conventional example, and FIG. 2 is a sectional view of main parts for explaining an embodiment of the present invention. 1... Plate-shaped object, 2... Pressure source, 3... Valve, 4
...Takashi Yatsuk body, 5...Vacuum suction hole, 6...
Chuck surface, 7...dust, 8...vacuum pump, 9.
... Piping, 10... Steel ball, 11... Elastic body, 12.
...Screw, 13...Holder.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 弾性体によって支持された小片をチャック面より微小量
突出して取付けたことを特徴とする板状物の吸着チャッ
ク。A suction chuck for a plate-shaped object, characterized in that a small piece supported by an elastic body is attached to protrude by a minute amount from the chuck surface.
JP13105283U 1983-08-26 1983-08-26 Suction chuck for plate-shaped objects Pending JPS6039248U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13105283U JPS6039248U (en) 1983-08-26 1983-08-26 Suction chuck for plate-shaped objects

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13105283U JPS6039248U (en) 1983-08-26 1983-08-26 Suction chuck for plate-shaped objects

Publications (1)

Publication Number Publication Date
JPS6039248U true JPS6039248U (en) 1985-03-19

Family

ID=30296412

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13105283U Pending JPS6039248U (en) 1983-08-26 1983-08-26 Suction chuck for plate-shaped objects

Country Status (1)

Country Link
JP (1) JPS6039248U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018006362A (en) * 2016-06-27 2018-01-11 日亜化学工業株式会社 Semiconductor device manufacturing method

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4918468B1 (en) * 1970-05-18 1974-05-10

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4918468B1 (en) * 1970-05-18 1974-05-10

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018006362A (en) * 2016-06-27 2018-01-11 日亜化学工業株式会社 Semiconductor device manufacturing method
US10263167B2 (en) 2016-06-27 2019-04-16 Nichia Corporation Method of manufacturing semiconductor device

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