JPS60231428A - Method for removing starting quartz tube of preform rod - Google Patents

Method for removing starting quartz tube of preform rod

Info

Publication number
JPS60231428A
JPS60231428A JP8586784A JP8586784A JPS60231428A JP S60231428 A JPS60231428 A JP S60231428A JP 8586784 A JP8586784 A JP 8586784A JP 8586784 A JP8586784 A JP 8586784A JP S60231428 A JPS60231428 A JP S60231428A
Authority
JP
Japan
Prior art keywords
quartz tube
starting quartz
rod
starting
preform rod
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8586784A
Other languages
Japanese (ja)
Inventor
Isataka Gotou
後藤 勇隆
Toshio Iwamoto
岩本 俊夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SWCC Corp
Original Assignee
Showa Electric Wire and Cable Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Showa Electric Wire and Cable Co filed Critical Showa Electric Wire and Cable Co
Priority to JP8586784A priority Critical patent/JPS60231428A/en
Publication of JPS60231428A publication Critical patent/JPS60231428A/en
Pending legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01Manufacture of glass fibres or filaments
    • C03B37/012Manufacture of preforms for drawing fibres or filaments
    • C03B37/014Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01446Thermal after-treatment of preforms, e.g. dehydrating, consolidating, sintering
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00Type of glass produced
    • C03B2201/06Doped silica-based glasses
    • C03B2201/08Doped silica-based glasses doped with boron or fluorine or other refractive index decreasing dopant
    • C03B2201/12Doped silica-based glasses doped with boron or fluorine or other refractive index decreasing dopant doped with fluorine

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • General Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Thermal Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Surface Treatment Of Glass (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)

Abstract

PURPOSE:To remove the quartz tube in a short time by placing a preform rod including a starting quartz tube in an SF6 atmosphere and vaporizing the quartz tube by heating. CONSTITUTION:A core rod 3 is inserted into a starting quartz tube 1 provided with a clad layer 2 at the inner peripheral wall surface. The tube 1 and the clad layer 2 are softened and united to a body by heating the outer periphery of the quartz tube 1 to obtain a preform rod. 4. The rod 4 is placed in an SF6 atmosphere and heated to allow the quatz tube 1 to react with SF6. And the quartz tube 1 is vaporized into SiF6 which is discharged from an outlet 5B. According to said process, the starting quartz tube 1 is removed in a short time and further without generating any cracks.

Description

【発明の詳細な説明】 (発明の技術分野) 本発明は、出発石英管を用いるロッドインチューブ法に
て作成したプリフォームロッドの前記出発石英管を除去
をする方法に関する。
DETAILED DESCRIPTION OF THE INVENTION (Technical Field of the Invention) The present invention relates to a method for removing a starting quartz tube from a preform rod produced by a rod-in-tube method using a starting quartz tube.

(発明の技術的背景) 従来、出発石英管の内壁周面にCVD法によりクラッド
層を設けると共に該出発石英管内にコア棒を挿入し、こ
れらを加熱軟化させつつコラプスしてブリフォームロ・
ンドを作成する、ロッドインチューブ法(以下、RT法
という)が知られてl/)る。
(Technical Background of the Invention) Conventionally, a cladding layer is provided on the inner wall circumferential surface of a starting quartz tube by the CVD method, a core rod is inserted into the starting quartz tube, and the core rod is heated and softened while collapsing to form a preform rotor.
The rod-in-tube method (hereinafter referred to as the RT method) is known for creating a bond.

ところで、バンドルファイ/へやイメージカ゛イド′を
構成する素線ファイバにおいては、ノ々ラメータの1つ
である明るさの確保が必要であること力)ら、開口数(
NA)及びコア占有率が大きl/Xことが要望される。
By the way, in the bare fiber that constitutes the bundle fiber/hair image guide, it is necessary to ensure brightness, which is one of the parameters, and the numerical aperture (
NA) and core occupancy are desired to be large l/X.

従って、上述したRT法により得たプリフォームロッド
を/ヘンドルコアイノく等の素線ファイバとして用いる
ためには、出発石英管に形成すべきクラ・ンド層にポロ
ン(B)の如き低屈折率ドーパントを多量に添加して屈
折率を低下させ、これにより得られる素線ファイバの開
口数を大きくすればよい、また、コア占有率を大きくす
るためには出発石英管を除去し、素線ファイバをコアと
クラッドとのみから形成すればよい。
Therefore, in order to use the preform rod obtained by the above-mentioned RT method as a bare fiber such as a quartz tube, it is necessary to add a low refractive index dopant such as poron (B) to the crand layer to be formed in the starting quartz tube. It is sufficient to add a large amount to lower the refractive index and thereby increase the numerical aperture of the resulting bare fiber.Also, in order to increase the core occupation rate, the starting quartz tube is removed and the bare fiber is It may be formed from only the cladding and the cladding.

(背景技術の問題点) そこで、最近では、RT法により得たプリフォームロッ
ドをフッ酸水溶液に浸漬し、出発石英管を除去すること
が行われているが、この方法では出発石英管を均一的に
除去することが困難な上に多大な時間を要してしまう欠
点がある0例えば、直径10 +mm、長さ500腸■
のプリフォームロッドを出発石英管を除去して直径7鳳
鳳に成形するには約7日間の浸漬が必要である。
(Problems in the background art) Therefore, recently, the preform rod obtained by the RT method is immersed in a hydrofluoric acid aqueous solution to remove the starting quartz tube. For example, if the intestine has a diameter of 10 mm and a length of 50 mm, it is difficult to remove it and takes a lot of time.
Approximately 7 days of soaking is required to remove the starting quartz tube and form the preform rod into a 7-diameter preform rod.

また、上記プリフォームロッドの周面を旋盤にて研磨す
ることにより出発石英管を除去することが行われている
が、この方法でもやはり多大な時間を要し、例えば、直
径10w厘、長さ500■論のプリフォームロッドの出
発石英管を直径が7Hになるまで研磨するのに約48時
間かかる。そして、この方法においては、クラッド層に
多量の低屈折率ドーパントを添加した場合クラッド層の
熱膨張率がコア部のそれよりも大きくなり、ロッド内に
内部応力が発生するので、研磨時にクラッド層にクラッ
クが生じてしまう他の欠点が免れず、従って、この方法
は低屈折率ドーパントの添加量の少ない、即ち、開口数
の小さい素線ファイバしか得られないプリフォームロッ
ドに適用することができるだけである。
In addition, the starting quartz tube is removed by polishing the circumferential surface of the preform rod with a lathe, but this method still requires a large amount of time. It takes approximately 48 hours to polish the starting quartz tube of the 500mm preform rod to a diameter of 7H. In this method, when a large amount of low refractive index dopant is added to the cladding layer, the coefficient of thermal expansion of the cladding layer becomes larger than that of the core part, and internal stress is generated in the rod. This method is only applicable to preform rods with a small amount of low refractive index dopant, that is, only bare fibers with small numerical apertures can be obtained. It is.

更に、上記プリフォームロッドを酸水素バーナーにより
高温に加熱し、出発石英管(S i O□)を分解して
気相状態で除去することが行われている。しかし、かか
る方法においては、再現性が良く、しかも加熱すること
からクラッド層にクラックが生じる虞れがない等の長所
を有しているが、やはり出発石英管の除去に時間を要し
、例えば、直径10mm、長さ500腸■のプリフォー
ムロッドを直径7■に成形するのに、72〜96時間の
時間を必要とする。そして、酸水素ガスを多量に用いる
ため、非常に不経済でもある。
Furthermore, the preform rod is heated to a high temperature with an oxyhydrogen burner to decompose the starting quartz tube (S i O□) and remove it in a gaseous state. However, although this method has advantages such as good reproducibility and no risk of cracks occurring in the cladding layer due to heating, it still takes time to remove the starting quartz tube, and e.g. It takes 72 to 96 hours to mold a preform rod with a diameter of 10 mm and a length of 500 mm to a diameter of 7 mm. Furthermore, since a large amount of oxyhydrogen gas is used, it is very uneconomical.

(発明の目的) 本発明の目的は、短時間で、しかもクラックを生じさせ
ることなく経済的に出発石英管を除去することができる
方法を提供することにある。
(Objective of the Invention) An object of the present invention is to provide a method that can economically remove a starting quartz tube in a short time and without causing cracks.

(発明の概要) 本発明は、出発石英管を含むプリフォームロッドを六フ
ッ化イオウ雰囲気中に配設して加熱することにより出発
石英管と六フッ化イ才つを反応させて出発石英管を気相
状態で除去することを特徴とする。
(Summary of the Invention) The present invention provides a method for producing a starting quartz tube by placing a preform rod containing a starting quartz tube in an atmosphere of sulfur hexafluoride and heating it to cause a reaction between the starting quartz tube and the sulfur hexafluoride. It is characterized by removing in a gaseous state.

(発明の実施例) 以下、本発明の実施例を図面を参照して詳細に説明する
(Embodiments of the Invention) Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

先ず、第1図に示すように、外径25ml11、肉厚1
)の出発石英管lを用意し、この出発石英管1をガラス
旋盤に取付け、1分間に数十回転の速度で回転させ、同
時にこの出発石英管1にSi0文4ガス及びBF3ガス
、その他の低屈折率ドーノくントを含むガスを導入する
と共に反応用酸素ガスを導入し、出発石英管1の軸方向
に沿って酸水素バーナを移動させ、管lの外周を局部的
に連続して加熱した。この加熱によりドーノ々ントを含
む力′ス及び5iCuaガスと酸素ガスが反応し、Si
O□、B2O3F等から成る酸化物のスートカδ出発石
英′f1の内壁周面に堆積し、かつこの堆積したスート
は移行してきた酸水素ノく−すにて約1200〜160
0℃の高温度で加熱溶融されてガラフ化した。そして、
上述の動作を繰り返すことにより、第1図に示すように
、出発石英管lの内壁周面に肉厚が1.5〜2IIlf
flのクラッド層2が形成された。
First, as shown in Fig. 1, an outer diameter of 25 ml11 and a wall thickness of 1
) is prepared, this starting quartz tube 1 is attached to a glass lathe, and rotated at a speed of several tens of revolutions per minute, and at the same time, this starting quartz tube 1 is injected with Si04 gas, BF3 gas, and other A gas containing a low refractive index compound is introduced and oxygen gas for reaction is introduced, and an oxyhydrogen burner is moved along the axial direction of the starting quartz tube 1 to locally and continuously heat the outer periphery of the tube 1. did. Due to this heating, the force gas containing the donotant and the 5iCua gas react with the oxygen gas, and the Si
A soot of oxides consisting of O□, B2O3F, etc. δ is deposited on the inner wall surface of the starting quartz 'f1, and this deposited soot has a concentration of about 1200 to 160
It was heated and melted at a high temperature of 0°C to form a galaf. and,
By repeating the above-mentioned operation, as shown in FIG.
A cladding layer 2 of fl was formed.

次に、この出発石英管l内に直径10〜15mmの石英
コア棒3を挿入し、該石英管1の外周を酸水素へ−すに
より更に高温で加熱してコラプスすることにより出発石
英管1(クラ・ンド層2)と石英コア棒3との間隙を漬
し、ブリフォームロ・ンド4(第2図参照)を作成した
。この得られたプリフォームロッド4は15〜20mm
の直径を有し、300ffimの長さに形成された。
Next, a quartz core rod 3 with a diameter of 10 to 15 mm is inserted into the starting quartz tube 1, and the outer periphery of the quartz tube 1 is heated at a higher temperature with oxyhydrogen heat to collapse the starting quartz tube 1. The gap between the crystal layer 2 and the quartz core rod 3 was soaked to create a pre-formed layer 4 (see Figure 2). This obtained preform rod 4 has a diameter of 15 to 20 mm.
It was formed to have a diameter of 300ffim and a length of 300ffim.

このようにして作成したプリフォームロッド4を、出発
石英管lを除去すべく、第2図に示すように、加熱炉5
内に配置し、その上端を支持棒6の下端に同軸的に取付
けた。そして、この支持棒6を回転しつつ下動させ、カ
ーボンヒータ7にてプリフォームロッド4(出発石英管
l)の周面を1400’C〜1500℃に加熱しつつ加
熱炉5内にその下部の導入口5AからSFsと反応用酸
素ガス02をキャリアガスであるアルゴンガス(Ar)
を介して導入した。本実施例では、支持棒6を2mm/
minの速度で下動させ、又SFsは1交/min 、
 A rは101 /min 、 02は200 cc
/minの流量でそれぞれ導入した。
In order to remove the starting quartz tube l, the preform rod 4 produced in this way was placed in a heating furnace 5, as shown in FIG.
and its upper end was coaxially attached to the lower end of the support rod 6. Then, the support rod 6 is rotated and moved downward, and the lower part of the preform rod 4 (starting quartz tube l) is heated in the heating furnace 5 while the peripheral surface of the preform rod 4 (starting quartz tube l) is heated to 1400'C to 1500C with the carbon heater 7. SFs and reaction oxygen gas 02 are introduced into the inlet 5A of the carrier gas argon gas (Ar).
introduced via. In this embodiment, the support rod 6 is 2 mm/
Move down at a speed of min, and SFs is 1 cycle/min.
Ar is 101/min, 02 is 200 cc
Each was introduced at a flow rate of /min.

このように、SFa雰囲気中でプリフォームロッドを下
動させつつ加熱すると、最外層の出発石英管lがSFs
と反応し、3時間経過後には出発石英管lが除去され、
クラッド層?と石英コア棒3のみから成る直径13〜1
8mm、長さ300mmのプリフォームロフトが得られ
た。即ち、出発石英管1(SiO2)とSFaとは次の
ように反応し、 3SiO□+23Fs→ 3SiF4 ↑+2S03 ↑ ・ φ ・ ・(1)
SiF2とSOxが気相状態で加熱炉5の排気口5Bか
ら排気され、これにより、出発石英管lが除去された。
In this way, when the preform rod is heated while being moved downward in the SFa atmosphere, the starting quartz tube l in the outermost layer becomes SFs.
After 3 hours, the starting quartz tube was removed,
Clad layer? and quartz core rod 3 with a diameter of 13 to 1.
A preform loft of 8 mm and a length of 300 mm was obtained. That is, the starting quartz tube 1 (SiO2) and SFa react as follows, 3SiO□+23Fs→ 3SiF4 ↑+2S03 ↑ ・φ ・ ・(1)
SiF2 and SOx were exhausted in a gaseous state from the exhaust port 5B of the heating furnace 5, thereby removing the starting quartz tube 1.

また、プリフォームロッド4周面を加熱しつつ出発石英
管lを除去すると、クラッド層2がその熱により軟化す
るので、クラッド層2にクラックが生じることもなかっ
た。
Further, when the starting quartz tube 1 was removed while heating the circumferential surface of the preform rod 4, the cladding layer 2 was softened by the heat, so no cracks were generated in the cladding layer 2.

この得られたプリフォームロッドを紡糸して外径10μ
mの素線ファイバを作成したところ、第3図に示すよう
に、コア径が7μm、クラッド厚が1.51tmの素線
ファイバが得られ、そのコア占有率は49%であった。
This obtained preform rod was spun into a yarn with an outer diameter of 10 μm.
As shown in FIG. 3, a bare fiber having a core diameter of 7 μm and a cladding thickness of 1.51 tm was obtained, and the core occupation rate was 49%.

比較のために、出発石英管lを除去せずにそのままプリ
フォームロッドを紡糸して外径12gmの素線ファイバ
を作成したところ、第4図に示すように、コア径が7B
m、クラッド厚が1.5用m、出発石英管厚がIgmの
素線ファイバが得られ、そのコア占有率は34%であっ
た。
For comparison, a raw fiber with an outer diameter of 12 gm was created by spinning the preform rod without removing the starting quartz tube l, and as shown in Figure 4, the core diameter was 7B.
A bare fiber was obtained with a cladding thickness of 1.5 m, a starting quartz tube thickness of Igm, and a core occupation rate of 34%.

尚、上記実施例において、SFsに変えてCF4及びC
2F eガスをそれぞれ同流量で加熱炉5内に導入し、
これらガスを次式に示すように出発石英管lと反応させ
た。
In the above embodiment, CF4 and C were used instead of SFs.
Introducing 2Fe gas into the heating furnace 5 at the same flow rate,
These gases were reacted with the starting quartz tube l as shown in the following equation.

5i02+CF4→ S i F4↑+CO2↑・・・・(2)3S i02
 +2C2Fs +02→3SiF4↑+4CO2↑・
・・−(3)しかし、これらガスの反応は遅く、又出発
石英管1を完全に除去するまで反応することもなかった
5i02+CF4→S i F4↑+CO2↑・・・(2)3S i02
+2C2Fs +02→3SiF4↑+4CO2↑・
(3) However, the reaction of these gases was slow and did not occur until the starting quartz tube 1 was completely removed.

(発明の効果) 本発明によれば、出発石英管を含むプリフォームロッド
を六フッ化イオウ雰囲気中に配設すると共に加熱するこ
とで、クラッド層にクラックを生じさせることなく出発
石英管を六フッ化イオウと反応させて短時間で除去する
こ・とができる、従って、コア占有率が大きく、かつ低
屈折率ドーパントを多量に含む開口数の大きい素線ファ
イバを容易に作成することができるので、明るさの優れ
たイメージガイドやバンドルファイバを提供することが
できる。
(Effects of the Invention) According to the present invention, by placing the preform rod containing the starting quartz tube in a sulfur hexafluoride atmosphere and heating it, the starting quartz tube can be heated without causing any cracks in the cladding layer. It can be removed in a short time by reacting with sulfur fluoride. Therefore, it is possible to easily create a bare fiber with a large core occupancy and a large numerical aperture containing a large amount of low refractive index dopant. So it can provide a better image guide or bundle fiber with brightness.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図はプリフォームロッドの作成工程を示す断面図、
第2図は本発明方法を説明するための概略図、第3図は
本発明方法により出発石英管を除去したプリフォームロ
ッドから作成した素線ファイバの断面図、第4図は出発
石英管を含むプリフォームロッドから作成した素線ファ
イバの断面図である。 1−−−−−−−−一出発石英管、 2−−−−−−−−−クラッド層、 3−−−−−−−m−石英コア棒、 4−−−−−−−−一プリフォームロッド、5−−−−
−−−−一加熱炉、 6−−−−−−−−−支持棒、 7−−−−−−−−−カーボンヒータ。 第1図 第2Fl!J 第3図 第4図
Figure 1 is a sectional view showing the process of making a preform rod;
Fig. 2 is a schematic diagram for explaining the method of the present invention, Fig. 3 is a cross-sectional view of a bare fiber made from a preform rod from which the starting quartz tube has been removed by the method of the present invention, and Fig. 4 shows the starting quartz tube. FIG. 3 is a cross-sectional view of a bare fiber made from a preform rod containing the preform rod. 1----------One starting quartz tube, 2----------Clad layer, 3----------M-Quartz core rod, 4--------------------- 1 preform rod, 5
----1 heating furnace, 6--------support rod, 7--carbon heater. Figure 1 2Fl! J Figure 3 Figure 4

Claims (1)

【特許請求の範囲】 1、内壁周面にクラッド層が設けられている出発石英管
内にコア棒を挿入し、前記出発石英管の外周を加熱して
前記出発石英管及びクラッド層を軟化させながら前記コ
ア棒と一体化して得たプリフォームロッドにおいて、前
記プリフォームロッドを六フッ化イオウ雰囲気中に配設
し、加熱することにより前記出発石英管と前記六フッ化
イオウとを反応させ、前記出発石英管を除去することを
特徴とするプリフォームロッドの出発石英管除去方法。 2、前記六フッ化イオウを前記出発石英管の周面にキャ
リアガスを介して流しつつ前記プリフォームロッドを回
転させ、かつ軸方向に移動させることを特徴とする特許
請求の範囲第1項に記載のプリフォームロッドの出発石
英管除去方法。
[Claims] 1. A core rod is inserted into a starting quartz tube having a cladding layer provided on the inner wall circumference, and while the outer periphery of the starting quartz tube is heated to soften the starting quartz tube and the cladding layer. In the preform rod obtained by integrating the core rod, the preform rod is placed in a sulfur hexafluoride atmosphere and heated to cause the starting quartz tube to react with the sulfur hexafluoride. A method for removing a starting quartz tube from a preform rod, the method comprising removing the starting quartz tube. 2. The preform rod is rotated and moved in the axial direction while flowing the sulfur hexafluoride onto the circumferential surface of the starting quartz tube via a carrier gas. The starting quartz tube removal method for the preform rod described.
JP8586784A 1984-04-27 1984-04-27 Method for removing starting quartz tube of preform rod Pending JPS60231428A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8586784A JPS60231428A (en) 1984-04-27 1984-04-27 Method for removing starting quartz tube of preform rod

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8586784A JPS60231428A (en) 1984-04-27 1984-04-27 Method for removing starting quartz tube of preform rod

Publications (1)

Publication Number Publication Date
JPS60231428A true JPS60231428A (en) 1985-11-18

Family

ID=13870842

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8586784A Pending JPS60231428A (en) 1984-04-27 1984-04-27 Method for removing starting quartz tube of preform rod

Country Status (1)

Country Link
JP (1) JPS60231428A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104045233A (en) * 2013-03-15 2014-09-17 Ofs菲特尔有限责任公司 Large Core Multimode Optical Fibers

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104045233A (en) * 2013-03-15 2014-09-17 Ofs菲特尔有限责任公司 Large Core Multimode Optical Fibers
JP2014181175A (en) * 2013-03-15 2014-09-29 Ofs Fitel Llc Large diameter core multimode optical fiber

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