JPS6022726B2 - displacement detector - Google Patents

displacement detector

Info

Publication number
JPS6022726B2
JPS6022726B2 JP7116378A JP7116378A JPS6022726B2 JP S6022726 B2 JPS6022726 B2 JP S6022726B2 JP 7116378 A JP7116378 A JP 7116378A JP 7116378 A JP7116378 A JP 7116378A JP S6022726 B2 JPS6022726 B2 JP S6022726B2
Authority
JP
Japan
Prior art keywords
magnetic
magnetoresistive element
magnet
frame
displacement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP7116378A
Other languages
Japanese (ja)
Other versions
JPS54162555A (en
Inventor
佳男 大谷
隆一 小森
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bosch Corp
Original Assignee
Diesel Kiki Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Diesel Kiki Co Ltd filed Critical Diesel Kiki Co Ltd
Priority to JP7116378A priority Critical patent/JPS6022726B2/en
Priority to DE19792923644 priority patent/DE2923644C2/en
Publication of JPS54162555A publication Critical patent/JPS54162555A/en
Publication of JPS6022726B2 publication Critical patent/JPS6022726B2/en
Expired legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/142Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices
    • G01D5/145Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices influenced by the relative movement between the Hall device and magnetic fields

Description

【発明の詳細な説明】 本発明は、物体のなどの変位を検出する変位検出器に関
する。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a displacement detector for detecting displacement of an object.

従来、変位を検出する手段としては、直線変位の検出に
あっては、被変位測定物の端部に磁性体を固着し、該磁
性体が遊費する環状の差動トランスなどで前記磁性体の
直線運動により交流電圧を発生させるなどのものがある
Conventionally, as a means for detecting displacement, when detecting linear displacement, a magnetic material is fixed to the end of the object to be displaced, and a ring-shaped differential transformer or the like in which the magnetic material is used is used to transform the magnetic material. There is a method that generates an alternating current voltage by the linear motion of the motor.

しかし、かかる従来の検出手段では、コイルを使用する
ので、温度変化に対する補償のための特段の注意が必要
となり、さらに、検出器がコイルから構成されているの
で必然的に作動時定数を有し、作動遅れを持つ傾向にな
るなどの欠点を有してし、た。
However, since such conventional detection means use a coil, special care must be taken to compensate for temperature changes, and furthermore, since the detector consists of a coil, it necessarily has an operating time constant. However, it has disadvantages such as a tendency to have a delay in operation.

本発明は、上記従来の欠点に鑑み、磁石の変位により、
磁気抵抗素子を包含する磁気回路と、磁気抵抗素子を包
含しない磁気回路とが、選択的に形成されることを特徴
とする、温度補償の必要がなく、かつ小型軽量の変位検
出器を提供するものである。
In view of the above-mentioned conventional drawbacks, the present invention provides, by displacement of a magnet,
To provide a small and lightweight displacement detector that does not require temperature compensation and is characterized in that a magnetic circuit including a magnetoresistive element and a magnetic circuit not including a magnetoresistive element are selectively formed. It is something.

以下、本発明を図面により詳細に説明する。Hereinafter, the present invention will be explained in detail with reference to the drawings.

第1図には本発明の第1の構成が示され、枠体1は鉄心
となる2個のコ字状の磁性体laおよびlbと、該2個
の磁性体la,lbの開放端の対向部に挟持された非磁
性体2とから成っていて、該非磁性体2はベークライト
などの樹脂材料から成り磁性体laおよびlbとは接着
剤で固着してもよいが、枠体1の補強を兼ねて、磁性体
laとlbを銀ロー付とすれば、この銀ローが非磁性体
2となる。上記の枠体1内には該枠体1内を矢印の方向
に摺動可能な磁石3が収納されている。該磁石3はそれ
ぞれの非磁性体2,2に対向する面、すなわち磁石3自
身が枠体1内で沼動する面5および6に磁極N,Sが発
生するように着磁されている。さらに該磁石3には、図
示しない被変位測定物と係合するロッド7が係止してい
る。該ロッド7は図面では磁性体lbを貫通するごとく
構成されているが、磁石3に対し図面の表裏方向に係止
させると、磁性体lbに貫通孔を設ける必要がない。一
方、磁性体laには、そのほゞ中央部に磁気抵抗素子8
の一方の磁気抵抗8aが、また前記磁気抵抗8aの近傍
で、磁性体laの枠体1の外側に他方の磁気抵抗8bが
園設されている。
FIG. 1 shows a first configuration of the present invention, in which a frame 1 includes two U-shaped magnetic bodies la and lb that serve as iron cores, and open ends of the two magnetic bodies la and lb. The non-magnetic body 2 is made of a resin material such as Bakelite, and may be fixed to the magnetic bodies la and lb with an adhesive, but the frame body 1 is reinforced. If the magnetic bodies la and lb are soldered with silver, this silver solder becomes the non-magnetic body 2. A magnet 3 is housed within the frame 1 and is slidable within the frame 1 in the direction of the arrow. The magnet 3 is magnetized so that magnetic poles N and S are generated on the surfaces 5 and 6 where the magnet 3 itself moves within the frame 1, ie, on the surfaces 5 and 6 facing the respective non-magnetic materials 2, 2. Furthermore, a rod 7 that engages with a displacement measurement object (not shown) is locked to the magnet 3. Although the rod 7 is configured to pass through the magnetic body lb in the drawing, if it is locked to the magnet 3 in the front and back directions of the drawing, there is no need to provide a through hole in the magnetic body lb. On the other hand, the magnetic body la has a magnetoresistive element 8 almost at its center.
One of the magnetic resistances 8a is provided, and the other magnetic resistance 8b is provided outside the frame 1 of the magnetic body la in the vicinity of the magnetic resistance 8a.

この磁気抵抗素子8は「磁界を加えることによってその
抵抗値が変化する磁気抵抗効果を利用した半導体素子で
、印加される磁界の磁束密度Bが大きくなる程その抵抗
値Rは大きくなる。
This magnetoresistive element 8 is a semiconductor element that utilizes the magnetoresistive effect in which the resistance value changes by applying a magnetic field, and the resistance value R increases as the magnetic flux density B of the applied magnetic field increases.

このように、それぞれの磁気抵抗8a,8bは磁気回路
が形成された時に、一方の磁気抵抗88は磁気回路内、
他方の磁気抵抗8bは磁気回路外に置かれるのであるが
、該磁気抵抗8a,Sbは直列に接続され、その端子A
,B,Cは第2図のように接続される。
In this way, when the magnetic circuit is formed, one of the magnetic resistors 8a and 8b is connected to the magnetic resistor 88 in the magnetic circuit.
The other magnetic resistor 8b is placed outside the magnetic circuit, but the magnetic resistors 8a and Sb are connected in series, and their terminal A
, B, and C are connected as shown in FIG.

第2図は、磁石3の変位による磁気抵抗素子8の抵抗変
化を電圧に変換するブリッジ回路で、差動増幅器9の正
入力端子には、前記磁気抵抗素子8の端子Bが入力され
、該磁気抵抗素子8の端子Aは正導線に、端子Cは負導
線に接続されている。
FIG. 2 shows a bridge circuit that converts the change in resistance of the magnetoresistive element 8 caused by the displacement of the magnet 3 into a voltage. Terminal B of the magnetoresistive element 8 is input to the positive input terminal of the differential amplifier 9, and the Terminal A of the magnetoresistive element 8 is connected to a positive conducting wire, and terminal C is connected to a negative conducting wire.

さらに差動増幅器9の負入力端子には同一の抵抗値を有
する抵抗10,11が接続され、該抵抗10,11はそ
れぞれ正導線、負導線に接続されている。以上のような
構成の作動について説明すると「磁石3が第1図のよう
に、枠体1内で磁性体lb側に位置している状態では、
磁石3による磁気回路は破線のごとく磁性体lb内にの
み形成され、非磁性体2のために磁性体la内には磁気
回路は殆んど形成されない。
Furthermore, resistors 10 and 11 having the same resistance value are connected to the negative input terminal of the differential amplifier 9, and the resistors 10 and 11 are connected to a positive conductor and a negative conductor, respectively. To explain the operation of the above configuration, ``When the magnet 3 is located on the magnetic body lb side within the frame 1 as shown in FIG.
A magnetic circuit by the magnet 3 is formed only in the magnetic body lb as shown by the broken line, and because of the non-magnetic body 2, almost no magnetic circuit is formed in the magnetic body la.

このときの第2図におけるブリッジ回路の出力Voは、
磁気抵抗8a,8bが殆んど同一の抵抗値を有している
ので、差動増幅器9の正、負両入力がほゞ同一電圧とな
るため殆んと零である。しかし、図示しない被変位測定
物の変位によりロッド7を介して磁石3が徐々に図面の
左方向へ変位し、最終的に第3図に示すごとく磁性体l
a側に位置すると、磁石3による磁気回路は磁性体la
側に形成される。
At this time, the output Vo of the bridge circuit in FIG. 2 is:
Since the magnetic resistors 8a and 8b have almost the same resistance value, both the positive and negative inputs of the differential amplifier 9 have approximately the same voltage, which is almost zero. However, due to the displacement of the object to be displaced (not shown), the magnet 3 is gradually displaced to the left in the drawing via the rod 7, and finally, as shown in FIG.
When located on the a side, the magnetic circuit formed by the magnet 3 is connected to the magnetic body la
Formed on the side.

すると磁気抵抗8aに印加される磁束密度が最大となる
ので、該磁気抵抗8aの抵抗値も最大となる。したがっ
て、第2図における端子B,C間の電圧降下量は小とな
り、差動増幅器9の正入力端子電圧は負入力端子電圧よ
りも大となり、その出力Voもまた大となる。
Then, since the magnetic flux density applied to the magnetic resistance 8a becomes maximum, the resistance value of the magnetic resistance 8a also becomes maximum. Therefore, the amount of voltage drop between terminals B and C in FIG. 2 becomes small, the positive input terminal voltage of differential amplifier 9 becomes larger than the negative input terminal voltage, and its output Vo also becomes larger.

もちろん磁石3が非磁性体2,2間を横断して磁性体亀
b側から磁性体la側に変位するに従って前記差動増幅
器9の出力Voは徐々に大となるが、この磁石3の変位
ストロークSに対する出力Voの関係は第4図に示すご
とく、磁石3の左端が第3図のS,の位置からS2の位
置に変化するまでは直線的に変化し、それ以降は変化し
ない。この磁石3の変位ストロークSに対する出力電圧
Voの変化量は「 本発明者等の実験によれば、前記ブ
リッジ回路を第2図の差動増幅器9を使用したものによ
らず、第5図のごとく磁気抵抗素子8と抵抗10蔓 1
1のみの直接的なブリッジ回路を使用した場合であって
も、磁石3が、摺動面の直径1仇舷、高さ1仇吻の円柱
で、電源電圧10Vのときに、有効ストローク(すなわ
ちS,〜S2)が7雌、出力電圧(すなわち第4図のV
o,〜Vo2)が1〜5Vが得られた。つまり、本発明
の第一の構成にあっては、以上のように磁石3の小さな
変位量で、比較的大きな出力を得られるのであるが、着
磁力同一、肴磁面の断面積小、N,S極間の距離大とす
れば、磁石の有するエネルギーは同一なので、より小さ
な変位層で同一の出力電圧を得ることができるほか、磁
石の変位量を同一として出力電圧を大とすることも、変
位量を大として同一の出力電圧を得ることも可能である
Of course, as the magnet 3 crosses between the non-magnetic materials 2 and 2 and is displaced from the magnetic material tome b side to the magnetic material la side, the output Vo of the differential amplifier 9 gradually increases. As shown in FIG. 4, the relationship between the output Vo and the stroke S changes linearly until the left end of the magnet 3 changes from the position S in FIG. 3 to the position S2, and does not change thereafter. The amount of change in the output voltage Vo with respect to the displacement stroke S of the magnet 3 is ``According to experiments by the present inventors, regardless of whether the bridge circuit uses the differential amplifier 9 shown in FIG. Magnetoresistive element 8 and resistor 10 strands 1
Even if a direct bridge circuit with only 1 is used, the effective stroke (i.e. S, ~S2) is 7 female, output voltage (i.e. V in Fig. 4)
o, ~Vo2) of 1 to 5V was obtained. In other words, in the first configuration of the present invention, a relatively large output can be obtained with a small displacement amount of the magnet 3 as described above, but the magnetizing force is the same, the cross-sectional area of the magnetic surface is small, and the N , If the distance between the S and S poles is large, the energy possessed by the magnet is the same, so it is possible to obtain the same output voltage with a smaller displacement layer, and it is also possible to increase the output voltage with the same amount of displacement of the magnet. , it is also possible to obtain the same output voltage by increasing the amount of displacement.

なお、発明者等の実験では円柱状の磁石を使用したこと
は前述のとおりであるが、磁石の形状を方形などとして
も同様の特性が得られることは明らかである。
As mentioned above, the inventors used a cylindrical magnet in their experiments, but it is clear that the same characteristics can be obtained even if the magnet has a rectangular shape or the like.

さらに前記の説明では、磁気抵抗素子8を、磁気抵抗8
aと8bとが分割されたもので説明したが、1個の基板
に2個の磁気抵抗8a,8bが配された磁気抵抗素子8
を用いて、その一方の磁気抵抗8aのみを磁性体laに
埋設するようにしてもよい。
Furthermore, in the above description, the magnetoresistive element 8 is referred to as the magnetoresistive element 8.
The magnetoresistive element 8 has been described with two magnetoresistive elements 8a and 8b arranged on one substrate.
Alternatively, only one of the magnetic resistances 8a may be buried in the magnetic body la.

なお、磁性体枠laに対する磁気抵抗8aの固穀は、磁
気抵抗8aの厚みに相当する空隙を磁性体枠laに設け
、この空隙に磁気抵抗8aを挿着するのであるが、磁気
抵抗8aの断面積と磁性体枠laの断面積を比較して、
磁性体枠laが大の場合そのままでもよいが、該磁性体
枠laを成形して磁気抵抗8aの断面積と同一にすれば
漏洩磁束もなく、全ての磁束が有効に磁気抵抗8aに印
加される。
Incidentally, the solid grain of the magnetic resistance 8a to the magnetic frame la is obtained by providing a gap in the magnetic frame la corresponding to the thickness of the magnetic resistance 8a, and inserting the magnetic resistance 8a into this gap. Comparing the cross-sectional area and the cross-sectional area of the magnetic frame la,
If the magnetic frame la is large, it may be left as is, but if the magnetic frame la is molded to have the same cross-sectional area as the magnetic resistance 8a, there will be no magnetic flux leakage and all the magnetic flux will be effectively applied to the magnetic resistance 8a. Ru.

本発明は上述のように、磁石の変位により、磁気抵抗素
子を包含する磁気回路と、磁気抵抗素子を包含しない磁
気回路とが、選択的に形成されるようにしたので、従来
のコイル使用の変位検出器と異り、小型、軽量にするこ
とが可能であり、発電素子でなく、磁気抵抗素子の磁束
の変化による抵抗変化を利用し、さらに2個の磁気抵抗
を近接させて、かつその一方を磁気回路内に、他方を磁
気回路外に設置したので、温度変化に対する補償が不要
となり、加えて磁石の形成を変化させることにより変位
範囲を任意に選択できる等の極めて優れた効果を有する
As described above, the present invention selectively forms a magnetic circuit that includes a magnetoresistive element and a magnetic circuit that does not include a magnetoresistive element by displacing the magnet. Unlike a displacement detector, it can be made smaller and lighter, and it utilizes resistance changes due to changes in magnetic flux of a magnetoresistive element rather than a power generating element, and furthermore, it can be made by placing two magnetoresistive elements close together and Because one side is installed inside the magnetic circuit and the other outside the magnetic circuit, compensation for temperature changes is not required, and in addition, by changing the formation of the magnet, the displacement range can be arbitrarily selected, which has extremely excellent effects. .

【図面の簡単な説明】[Brief explanation of the drawing]

第1図、第3図は本発明の第1の構成を示す概略断面図
、第2図、第5図は磁気抵抗素子の抵抗変化を電圧変化
に変換するブリッジ回路図、第4図は第1図における構
成の変位−出力電圧特性図。 1:磁性体枠、la,lb:磁性体、2:非磁性体、3
:磁石、8:磁気抵抗素子、8a,8b:磁気抵抗。 が】図 才2図 が3図 ガム図 オ5図
1 and 3 are schematic sectional views showing the first configuration of the present invention, FIGS. 2 and 5 are bridge circuit diagrams that convert resistance changes of a magnetoresistive element into voltage changes, and FIG. FIG. 1 is a displacement-output voltage characteristic diagram of the configuration shown in FIG. 1: Magnetic frame, la, lb: Magnetic material, 2: Non-magnetic material, 3
: Magnet, 8: Magnetoresistive element, 8a, 8b: Magnetoresistive. ] Figure 2, Figure 3, Figure Gum, Figure O, Figure 5.

Claims (1)

【特許請求の範囲】 1 コ字状の磁性体2個をそれぞれの開放端を向い合わ
せ、非磁性体を介在させて当着して枠体となし、前記枠
体内に、前記非磁性体に対向するごとく着磁した磁石を
前記非磁性体の間を横断可能で、かつ摺動自在に内装し
、前記磁性体の一方に磁気抵抗素子を配設し、磁石の変
位により、磁気抵抗素子を包含する磁気回路と、磁気抵
抗素子を包含しない磁気回路とが、選択的に形成される
ことを特徴とする変位検出器。 2 磁気抵抗素子を2個使用して、一方を前記磁性体の
枠体内に、他方を磁性体の枠体外に配設してなる特許請
求の範囲第1項記載の変位検出器。
[Claims] 1. Two U-shaped magnetic bodies are placed with their open ends facing each other and brought into contact with each other with a non-magnetic body interposed between them to form a frame, and within the frame, the non-magnetic body is Magnets magnetized so as to face each other are installed so that they can cross between the non-magnetic materials and can freely slide, and a magnetoresistive element is disposed on one side of the magnetic material, and the magnetoresistive element is activated by displacement of the magnet. A displacement detector characterized in that a magnetic circuit that includes a magnetoresistive element and a magnetic circuit that does not include a magnetoresistive element are selectively formed. 2. The displacement detector according to claim 1, wherein two magnetoresistive elements are used, one of which is disposed inside the magnetic frame and the other outside of the magnetic frame.
JP7116378A 1978-06-13 1978-06-13 displacement detector Expired JPS6022726B2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP7116378A JPS6022726B2 (en) 1978-06-13 1978-06-13 displacement detector
DE19792923644 DE2923644C2 (en) 1978-06-13 1979-06-11 Transmitter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7116378A JPS6022726B2 (en) 1978-06-13 1978-06-13 displacement detector

Publications (2)

Publication Number Publication Date
JPS54162555A JPS54162555A (en) 1979-12-24
JPS6022726B2 true JPS6022726B2 (en) 1985-06-04

Family

ID=13452686

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7116378A Expired JPS6022726B2 (en) 1978-06-13 1978-06-13 displacement detector

Country Status (2)

Country Link
JP (1) JPS6022726B2 (en)
DE (1) DE2923644C2 (en)

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DE102006040667B3 (en) * 2006-08-30 2008-01-10 Siemens Ag Waste gate actuator, for an exhaust turbocharger, has a sensor to register the rotary speed of a turbocharger component through variations in a magnetic field
JP2011505574A (en) 2007-12-03 2011-02-24 シーティーエス・コーポレーション Linear position sensor
US8400142B2 (en) 2008-11-26 2013-03-19 Cts Corporation Linear position sensor with anti-rotation device
CN102753942B (en) 2009-12-09 2016-01-20 Cts公司 Actuator and sensor module
US9435630B2 (en) 2010-12-08 2016-09-06 Cts Corporation Actuator and linear position sensor assembly

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* Cited by examiner, † Cited by third party
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DE1244449B (en) * 1966-01-24 1967-07-13 Siemens Ag Rotating, pot magnet-like arrangement for controlling magnetic field-dependent switching elements
DE1665618B2 (en) * 1966-04-27 1973-07-12 RESISTANCE ARRANGEMENT WORKING WITHOUT MOVING CONTACTS
DE1665667C3 (en) * 1966-06-30 1973-10-31 Siemens Ag, 1000 Berlin U. 8000 Muenchen Adjustable resistance arrangement without moving contacts

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Publication number Publication date
DE2923644C2 (en) 1981-12-24
DE2923644A1 (en) 1979-12-20
JPS54162555A (en) 1979-12-24

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